SG10201400406UA - Cathodic arc deposition stinger - Google Patents

Cathodic arc deposition stinger

Info

Publication number
SG10201400406UA
SG10201400406UA SG10201400406UA SG10201400406UA SG10201400406UA SG 10201400406U A SG10201400406U A SG 10201400406UA SG 10201400406U A SG10201400406U A SG 10201400406UA SG 10201400406U A SG10201400406U A SG 10201400406UA SG 10201400406U A SG10201400406U A SG 10201400406UA
Authority
SG
Singapore
Prior art keywords
stinger
cathodic arc
arc deposition
deposition
cathodic
Prior art date
Application number
SG10201400406UA
Inventor
Rabinovich Albert
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of SG10201400406UA publication Critical patent/SG10201400406UA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
SG10201400406UA 2013-03-05 2014-03-05 Cathodic arc deposition stinger SG10201400406UA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201361772892P 2013-03-05 2013-03-05

Publications (1)

Publication Number Publication Date
SG10201400406UA true SG10201400406UA (en) 2014-10-30

Family

ID=51486481

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201707207VA SG10201707207VA (en) 2013-03-05 2014-03-05 Cathodic arc deposition stinger
SG10201400406UA SG10201400406UA (en) 2013-03-05 2014-03-05 Cathodic arc deposition stinger

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10201707207VA SG10201707207VA (en) 2013-03-05 2014-03-05 Cathodic arc deposition stinger

Country Status (2)

Country Link
US (1) US10704136B2 (en)
SG (2) SG10201707207VA (en)

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07122131B2 (en) * 1986-07-10 1995-12-25 日新電機株式会社 Arc type evaporation source
US5126030A (en) 1990-12-10 1992-06-30 Kabushiki Kaisha Kobe Seiko Sho Apparatus and method of cathodic arc deposition
DE69226725T2 (en) 1991-05-29 1999-02-18 Kobe Steel Ltd Coating plant using cathode sputtering and method for controlling the same
US5281321A (en) 1991-08-20 1994-01-25 Leybold Aktiengesellschaft Device for the suppression of arcs
DE4127504A1 (en) 1991-08-20 1993-02-25 Leybold Ag DEVICE FOR SUPPRESSING ARCES
CH689558A5 (en) * 1995-07-11 1999-06-15 Erich Bergmann Vaporization and evaporator unit.
US6027619A (en) 1996-12-19 2000-02-22 Micron Technology, Inc. Fabrication of field emission array with filtered vacuum cathodic arc deposition
US5902462A (en) 1997-03-27 1999-05-11 Krauss; Alan R. Filtered cathodic arc deposition apparatus and method
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
US6929727B2 (en) 1999-04-12 2005-08-16 G & H Technologies, Llc Rectangular cathodic arc source and method of steering an arc spot
CA2305938C (en) 2000-04-10 2007-07-03 Vladimir I. Gorokhovsky Filtered cathodic arc deposition method and apparatus
US7300559B2 (en) 2000-04-10 2007-11-27 G & H Technologies Llc Filtered cathodic arc deposition method and apparatus
US6936145B2 (en) * 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus
CH696828A5 (en) * 2003-11-18 2007-12-14 Oerlikon Trading Ag Igniter.
US7175926B2 (en) 2004-02-12 2007-02-13 Seagate Technology Llc Dual-layer carbon-based protective overcoats for recording media by filtered cathodic ARC deposition
US8241468B2 (en) * 2004-12-13 2012-08-14 United Technologies Corporation Method and apparatus for cathodic arc deposition of materials on a substrate
US8968528B2 (en) * 2008-04-14 2015-03-03 United Technologies Corporation Platinum-modified cathodic arc coating

Also Published As

Publication number Publication date
SG10201707207VA (en) 2017-10-30
US20140251791A1 (en) 2014-09-11
US10704136B2 (en) 2020-07-07

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