SG101542A1 - Tunable mems device - Google Patents

Tunable mems device

Info

Publication number
SG101542A1
SG101542A1 SG200203991A SG200203991A SG101542A1 SG 101542 A1 SG101542 A1 SG 101542A1 SG 200203991 A SG200203991 A SG 200203991A SG 200203991 A SG200203991 A SG 200203991A SG 101542 A1 SG101542 A1 SG 101542A1
Authority
SG
Singapore
Prior art keywords
mems device
tunable mems
tunable
mems
Prior art date
Application number
SG200203991A
Inventor
Peng Gao
Okada Kanzo
Yaolong Lou
Original Assignee
Sony Electronics Singapore Pte
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Electronics Singapore Pte filed Critical Sony Electronics Singapore Pte
Priority to SG200203991A priority Critical patent/SG101542A1/en
Publication of SG101542A1 publication Critical patent/SG101542A1/en

Links

SG200203991A 2002-07-01 2002-07-01 Tunable mems device SG101542A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200203991A SG101542A1 (en) 2002-07-01 2002-07-01 Tunable mems device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200203991A SG101542A1 (en) 2002-07-01 2002-07-01 Tunable mems device

Publications (1)

Publication Number Publication Date
SG101542A1 true SG101542A1 (en) 2004-01-30

Family

ID=32590093

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200203991A SG101542A1 (en) 2002-07-01 2002-07-01 Tunable mems device

Country Status (1)

Country Link
SG (1) SG101542A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110488486A (en) * 2015-11-30 2019-11-22 意法半导体股份有限公司 Resonance biaxial MEMS reflector with piezoelectric actuator and the projection MEMS system comprising it

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5729057A (en) * 1995-07-31 1998-03-17 Siemens Aktiengesellschaft Vehicle antitheft device using transponder and having illuminated keyhole
US6379510B1 (en) * 2000-11-16 2002-04-30 Jonathan S. Kane Method of making a low voltage micro-mirror array light beam switch
US6387713B2 (en) * 2000-06-05 2002-05-14 Sony Corporation Method for manufacturing microfabrication apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5729057A (en) * 1995-07-31 1998-03-17 Siemens Aktiengesellschaft Vehicle antitheft device using transponder and having illuminated keyhole
US6387713B2 (en) * 2000-06-05 2002-05-14 Sony Corporation Method for manufacturing microfabrication apparatus
US6379510B1 (en) * 2000-11-16 2002-04-30 Jonathan S. Kane Method of making a low voltage micro-mirror array light beam switch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110488486A (en) * 2015-11-30 2019-11-22 意法半导体股份有限公司 Resonance biaxial MEMS reflector with piezoelectric actuator and the projection MEMS system comprising it

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SG101542A1 (en) Tunable mems device