SG101542A1 - Tunable mems device - Google Patents
Tunable mems deviceInfo
- Publication number
- SG101542A1 SG101542A1 SG200203991A SG200203991A SG101542A1 SG 101542 A1 SG101542 A1 SG 101542A1 SG 200203991 A SG200203991 A SG 200203991A SG 200203991 A SG200203991 A SG 200203991A SG 101542 A1 SG101542 A1 SG 101542A1
- Authority
- SG
- Singapore
- Prior art keywords
- mems device
- tunable mems
- tunable
- mems
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200203991A SG101542A1 (en) | 2002-07-01 | 2002-07-01 | Tunable mems device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200203991A SG101542A1 (en) | 2002-07-01 | 2002-07-01 | Tunable mems device |
Publications (1)
Publication Number | Publication Date |
---|---|
SG101542A1 true SG101542A1 (en) | 2004-01-30 |
Family
ID=32590093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200203991A SG101542A1 (en) | 2002-07-01 | 2002-07-01 | Tunable mems device |
Country Status (1)
Country | Link |
---|---|
SG (1) | SG101542A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110488486A (en) * | 2015-11-30 | 2019-11-22 | 意法半导体股份有限公司 | Resonance biaxial MEMS reflector with piezoelectric actuator and the projection MEMS system comprising it |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5729057A (en) * | 1995-07-31 | 1998-03-17 | Siemens Aktiengesellschaft | Vehicle antitheft device using transponder and having illuminated keyhole |
US6379510B1 (en) * | 2000-11-16 | 2002-04-30 | Jonathan S. Kane | Method of making a low voltage micro-mirror array light beam switch |
US6387713B2 (en) * | 2000-06-05 | 2002-05-14 | Sony Corporation | Method for manufacturing microfabrication apparatus |
-
2002
- 2002-07-01 SG SG200203991A patent/SG101542A1/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5729057A (en) * | 1995-07-31 | 1998-03-17 | Siemens Aktiengesellschaft | Vehicle antitheft device using transponder and having illuminated keyhole |
US6387713B2 (en) * | 2000-06-05 | 2002-05-14 | Sony Corporation | Method for manufacturing microfabrication apparatus |
US6379510B1 (en) * | 2000-11-16 | 2002-04-30 | Jonathan S. Kane | Method of making a low voltage micro-mirror array light beam switch |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110488486A (en) * | 2015-11-30 | 2019-11-22 | 意法半导体股份有限公司 | Resonance biaxial MEMS reflector with piezoelectric actuator and the projection MEMS system comprising it |
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