SG101416A1 - Vertical alignment table mechanism - Google Patents

Vertical alignment table mechanism

Info

Publication number
SG101416A1
SG101416A1 SG200001039A SG200001039A SG101416A1 SG 101416 A1 SG101416 A1 SG 101416A1 SG 200001039 A SG200001039 A SG 200001039A SG 200001039 A SG200001039 A SG 200001039A SG 101416 A1 SG101416 A1 SG 101416A1
Authority
SG
Singapore
Prior art keywords
vertical alignment
table mechanism
alignment table
vertical
alignment
Prior art date
Application number
SG200001039A
Inventor
Okamoto Atsushi
Original Assignee
Howa Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10267142A external-priority patent/JP2000098631A/en
Application filed by Howa Machinery Ltd filed Critical Howa Machinery Ltd
Priority to SG200001039A priority Critical patent/SG101416A1/en
Publication of SG101416A1 publication Critical patent/SG101416A1/en

Links

SG200001039A 1998-09-22 2000-02-23 Vertical alignment table mechanism SG101416A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200001039A SG101416A1 (en) 1998-09-22 2000-02-23 Vertical alignment table mechanism

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP10267142A JP2000098631A (en) 1998-09-22 1998-09-22 Vertical alignment table mechanism
US09/510,757 US6342944B1 (en) 1998-09-22 2000-02-22 Vertical alignment table mechanism
SG200001039A SG101416A1 (en) 1998-09-22 2000-02-23 Vertical alignment table mechanism
CNB00106519XA CN1173224C (en) 1998-09-22 2000-02-29 Vertical correcting working table mechanism

Publications (1)

Publication Number Publication Date
SG101416A1 true SG101416A1 (en) 2004-01-30

Family

ID=32600940

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200001039A SG101416A1 (en) 1998-09-22 2000-02-23 Vertical alignment table mechanism

Country Status (1)

Country Link
SG (1) SG101416A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686997A (en) * 1995-10-11 1997-11-11 Nikon Corporation Scanning projection exposure method and projection exposure apparatus
US5937993A (en) * 1997-01-14 1999-08-17 Tamarac Scientific Co., Inc. Apparatus and method for automatically handling and holding panels near and at the exact plane of exposure
WO1999060445A1 (en) * 1998-05-19 1999-11-25 Orc Technologies, Inc. Apparatus and method for exposing substrates

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686997A (en) * 1995-10-11 1997-11-11 Nikon Corporation Scanning projection exposure method and projection exposure apparatus
US5937993A (en) * 1997-01-14 1999-08-17 Tamarac Scientific Co., Inc. Apparatus and method for automatically handling and holding panels near and at the exact plane of exposure
WO1999060445A1 (en) * 1998-05-19 1999-11-25 Orc Technologies, Inc. Apparatus and method for exposing substrates

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