SG100773A1 - Exhaust gas treating tower for use in exhaust gas treatment equipment and electric heater for use in the exhaust gas treating tower - Google Patents

Exhaust gas treating tower for use in exhaust gas treatment equipment and electric heater for use in the exhaust gas treating tower

Info

Publication number
SG100773A1
SG100773A1 SG200107548A SG200107548A SG100773A1 SG 100773 A1 SG100773 A1 SG 100773A1 SG 200107548 A SG200107548 A SG 200107548A SG 200107548 A SG200107548 A SG 200107548A SG 100773 A1 SG100773 A1 SG 100773A1
Authority
SG
Singapore
Prior art keywords
exhaust gas
treating tower
gas treating
electric heater
treatment equipment
Prior art date
Application number
SG200107548A
Inventor
Imamura Hiroshi
Original Assignee
Kanken Techno Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000388492A external-priority patent/JP3626092B2/en
Priority claimed from JP2000398686A external-priority patent/JP3569677B2/en
Priority claimed from JP2001026159A external-priority patent/JP3476779B2/en
Application filed by Kanken Techno Co Ltd filed Critical Kanken Techno Co Ltd
Publication of SG100773A1 publication Critical patent/SG100773A1/en

Links

SG200107548A 2000-12-21 2001-12-05 Exhaust gas treating tower for use in exhaust gas treatment equipment and electric heater for use in the exhaust gas treating tower SG100773A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000388492A JP3626092B2 (en) 2000-12-21 2000-12-21 Semiconductor exhaust gas treatment equipment
JP2000398686A JP3569677B2 (en) 2000-10-10 2000-12-27 Exhaust gas treatment tower of semiconductor exhaust gas treatment apparatus and electric heater for the treatment tower
JP2001026159A JP3476779B2 (en) 2001-02-01 2001-02-01 Dust treatment method and structure for semiconductor exhaust gas treatment equipment

Publications (1)

Publication Number Publication Date
SG100773A1 true SG100773A1 (en) 2003-12-26

Family

ID=27345499

Family Applications (2)

Application Number Title Priority Date Filing Date
SG200107548A SG100773A1 (en) 2000-12-21 2001-12-05 Exhaust gas treating tower for use in exhaust gas treatment equipment and electric heater for use in the exhaust gas treating tower
SG200300104A SG125080A1 (en) 2000-12-21 2001-12-05 Electric heater for use in exhaust gas treating tower

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG200300104A SG125080A1 (en) 2000-12-21 2001-12-05 Electric heater for use in exhaust gas treating tower

Country Status (2)

Country Link
CN (1) CN1243599C (en)
SG (2) SG100773A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101341360B1 (en) * 2006-03-07 2013-12-13 도아고세이가부시키가이샤 Method of making HCD gas harmless and apparatus therefor
US20100192773A1 (en) * 2009-02-01 2010-08-05 Applied Materials, Inc. Abatement apparatus with scrubber conduit
TWI398293B (en) * 2010-11-08 2013-06-11 Orient Service Co Ltd Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes
CN105143769B (en) * 2014-02-12 2018-09-11 北京康肯环保设备有限公司 Exhaust-gas treatment burner and the emission-control equipment for having used the burner
CN110314516A (en) * 2019-05-17 2019-10-11 安徽京仪自动化装备技术有限公司 One kind being suitable for manufacture of semiconductor exhaust treatment system
JP6718566B1 (en) * 2019-06-27 2020-07-08 カンケンテクノ株式会社 Exhaust gas abatement unit
CN113041810B (en) * 2020-12-30 2022-08-30 北京京仪自动化装备技术股份有限公司 Exhaust gas treatment system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02253827A (en) * 1989-03-27 1990-10-12 Kubota Ltd Waste ozone decomposition device
JPH0975666A (en) * 1995-09-20 1997-03-25 Toshiba Corp Waste ozone decomposition apparatus
JPH10272439A (en) * 1997-03-31 1998-10-13 Motoda Electron Co Ltd Exhaust structure for industrial waste thermal decomposition furnace

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3527604B2 (en) * 1996-12-21 2004-05-17 日本特殊陶業株式会社 Ceramic heater unit for ozone decomposition

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02253827A (en) * 1989-03-27 1990-10-12 Kubota Ltd Waste ozone decomposition device
JPH0975666A (en) * 1995-09-20 1997-03-25 Toshiba Corp Waste ozone decomposition apparatus
JPH10272439A (en) * 1997-03-31 1998-10-13 Motoda Electron Co Ltd Exhaust structure for industrial waste thermal decomposition furnace

Also Published As

Publication number Publication date
CN1360963A (en) 2002-07-31
CN1243599C (en) 2006-03-01
SG125080A1 (en) 2006-09-29

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