SG100773A1 - Exhaust gas treating tower for use in exhaust gas treatment equipment and electric heater for use in the exhaust gas treating tower - Google Patents
Exhaust gas treating tower for use in exhaust gas treatment equipment and electric heater for use in the exhaust gas treating towerInfo
- Publication number
- SG100773A1 SG100773A1 SG200107548A SG200107548A SG100773A1 SG 100773 A1 SG100773 A1 SG 100773A1 SG 200107548 A SG200107548 A SG 200107548A SG 200107548 A SG200107548 A SG 200107548A SG 100773 A1 SG100773 A1 SG 100773A1
- Authority
- SG
- Singapore
- Prior art keywords
- exhaust gas
- treating tower
- gas treating
- electric heater
- treatment equipment
- Prior art date
Links
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000388492A JP3626092B2 (en) | 2000-12-21 | 2000-12-21 | Semiconductor exhaust gas treatment equipment |
JP2000398686A JP3569677B2 (en) | 2000-10-10 | 2000-12-27 | Exhaust gas treatment tower of semiconductor exhaust gas treatment apparatus and electric heater for the treatment tower |
JP2001026159A JP3476779B2 (en) | 2001-02-01 | 2001-02-01 | Dust treatment method and structure for semiconductor exhaust gas treatment equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
SG100773A1 true SG100773A1 (en) | 2003-12-26 |
Family
ID=27345499
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200107548A SG100773A1 (en) | 2000-12-21 | 2001-12-05 | Exhaust gas treating tower for use in exhaust gas treatment equipment and electric heater for use in the exhaust gas treating tower |
SG200300104A SG125080A1 (en) | 2000-12-21 | 2001-12-05 | Electric heater for use in exhaust gas treating tower |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200300104A SG125080A1 (en) | 2000-12-21 | 2001-12-05 | Electric heater for use in exhaust gas treating tower |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN1243599C (en) |
SG (2) | SG100773A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101341360B1 (en) * | 2006-03-07 | 2013-12-13 | 도아고세이가부시키가이샤 | Method of making HCD gas harmless and apparatus therefor |
US20100192773A1 (en) * | 2009-02-01 | 2010-08-05 | Applied Materials, Inc. | Abatement apparatus with scrubber conduit |
TWI398293B (en) * | 2010-11-08 | 2013-06-11 | Orient Service Co Ltd | Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes |
CN105143769B (en) * | 2014-02-12 | 2018-09-11 | 北京康肯环保设备有限公司 | Exhaust-gas treatment burner and the emission-control equipment for having used the burner |
CN110314516A (en) * | 2019-05-17 | 2019-10-11 | 安徽京仪自动化装备技术有限公司 | One kind being suitable for manufacture of semiconductor exhaust treatment system |
JP6718566B1 (en) * | 2019-06-27 | 2020-07-08 | カンケンテクノ株式会社 | Exhaust gas abatement unit |
CN113041810B (en) * | 2020-12-30 | 2022-08-30 | 北京京仪自动化装备技术股份有限公司 | Exhaust gas treatment system |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02253827A (en) * | 1989-03-27 | 1990-10-12 | Kubota Ltd | Waste ozone decomposition device |
JPH0975666A (en) * | 1995-09-20 | 1997-03-25 | Toshiba Corp | Waste ozone decomposition apparatus |
JPH10272439A (en) * | 1997-03-31 | 1998-10-13 | Motoda Electron Co Ltd | Exhaust structure for industrial waste thermal decomposition furnace |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3527604B2 (en) * | 1996-12-21 | 2004-05-17 | 日本特殊陶業株式会社 | Ceramic heater unit for ozone decomposition |
-
2001
- 2001-12-05 SG SG200107548A patent/SG100773A1/en unknown
- 2001-12-05 SG SG200300104A patent/SG125080A1/en unknown
- 2001-12-21 CN CN 01133863 patent/CN1243599C/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02253827A (en) * | 1989-03-27 | 1990-10-12 | Kubota Ltd | Waste ozone decomposition device |
JPH0975666A (en) * | 1995-09-20 | 1997-03-25 | Toshiba Corp | Waste ozone decomposition apparatus |
JPH10272439A (en) * | 1997-03-31 | 1998-10-13 | Motoda Electron Co Ltd | Exhaust structure for industrial waste thermal decomposition furnace |
Also Published As
Publication number | Publication date |
---|---|
CN1360963A (en) | 2002-07-31 |
CN1243599C (en) | 2006-03-01 |
SG125080A1 (en) | 2006-09-29 |
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