SE7206451L - - Google Patents

Info

Publication number
SE7206451L
SE7206451L SE7206451A SE7206451A SE7206451L SE 7206451 L SE7206451 L SE 7206451L SE 7206451 A SE7206451 A SE 7206451A SE 7206451 A SE7206451 A SE 7206451A SE 7206451 L SE7206451 L SE 7206451L
Authority
SE
Sweden
Application number
SE7206451A
Publication date
Publication of SE7206451L publication Critical patent/SE7206451L/xx

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
SE7206451A SE7206451L (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE7206451T

Publications (1)

Publication Number Publication Date
SE7206451L true SE7206451L (zh) 1972-11-27

Family

ID=43983112

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7206451A SE7206451L (zh)

Country Status (1)

Country Link
SE (1) SE7206451L (zh)

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