SE7200668L - - Google Patents
Info
- Publication number
- SE7200668L SE7200668L SE7200668A SE7200668A SE7200668L SE 7200668 L SE7200668 L SE 7200668L SE 7200668 A SE7200668 A SE 7200668A SE 7200668 A SE7200668 A SE 7200668A SE 7200668 L SE7200668 L SE 7200668L
- Authority
- SE
- Sweden
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE7200668T |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE7200668L true SE7200668L (en) | 1972-08-21 |
Family
ID=44714126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7200668A SE7200668L (en) |
Country Status (1)
| Country | Link |
|---|---|
| SE (1) | SE7200668L (en) |
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0
- SE SE7200668A patent/SE7200668L/xx unknown