SE513428C2 - Lägesgivare - Google Patents
LägesgivareInfo
- Publication number
- SE513428C2 SE513428C2 SE9900015A SE9900015A SE513428C2 SE 513428 C2 SE513428 C2 SE 513428C2 SE 9900015 A SE9900015 A SE 9900015A SE 9900015 A SE9900015 A SE 9900015A SE 513428 C2 SE513428 C2 SE 513428C2
- Authority
- SE
- Sweden
- Prior art keywords
- sensor body
- magnetoresistive
- sensor
- magnetoresistive material
- sensitivity function
- Prior art date
Links
- 239000000463 material Substances 0.000 claims abstract description 39
- 230000035945 sensitivity Effects 0.000 claims abstract description 15
- 230000005291 magnetic effect Effects 0.000 claims description 8
- 230000005290 antiferromagnetic effect Effects 0.000 claims description 4
- 230000005294 ferromagnetic effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract 1
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000002457 bidirectional effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 102220047090 rs6152 Human genes 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/001—Constructional details of gauge heads
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9900015A SE513428C2 (sv) | 1999-01-07 | 1999-01-07 | Lägesgivare |
EP99960082A EP1147428A1 (en) | 1999-01-07 | 1999-12-09 | Utilization of a magneto-resistive material |
CA002358205A CA2358205A1 (en) | 1999-01-07 | 1999-12-09 | Utilization of a magneto-resistive material |
PCT/SE1999/002303 WO2000040987A1 (en) | 1999-01-07 | 1999-12-09 | Utilization of a magneto-resistive material |
AU17025/00A AU1702500A (en) | 1999-01-07 | 1999-12-09 | Utilization of a magneto-resistive material |
US09/623,704 US6373242B1 (en) | 1999-01-07 | 1999-12-09 | GMR sensor with a varying number of GMR layers |
KR1020017008481A KR20010101366A (ko) | 1999-01-07 | 1999-12-09 | 자기 저항 물질의 이용 |
JP2000592654A JP2002534686A (ja) | 1999-01-07 | 1999-12-09 | 磁気抵抗材料の利用 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9900015A SE513428C2 (sv) | 1999-01-07 | 1999-01-07 | Lägesgivare |
Publications (3)
Publication Number | Publication Date |
---|---|
SE9900015D0 SE9900015D0 (sv) | 1999-01-07 |
SE9900015L SE9900015L (sv) | 2000-07-08 |
SE513428C2 true SE513428C2 (sv) | 2000-09-11 |
Family
ID=20414024
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9900015A SE513428C2 (sv) | 1999-01-07 | 1999-01-07 | Lägesgivare |
Country Status (8)
Country | Link |
---|---|
US (1) | US6373242B1 (ko) |
EP (1) | EP1147428A1 (ko) |
JP (1) | JP2002534686A (ko) |
KR (1) | KR20010101366A (ko) |
AU (1) | AU1702500A (ko) |
CA (1) | CA2358205A1 (ko) |
SE (1) | SE513428C2 (ko) |
WO (1) | WO2000040987A1 (ko) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10213941A1 (de) * | 2002-03-28 | 2003-10-30 | Bosch Gmbh Robert | Sensorelement und Gradiometeranordnung, deren Verwendung zum Messen von Magnetfeldgradienten und Verfahren hierzu |
DE10331580A1 (de) * | 2003-07-11 | 2005-01-27 | Robert Bosch Gmbh | Vorrichtung zur Detektion der Drehzahl und/oder der Position eines rotierenden Bauteils |
DE10342260B4 (de) | 2003-09-11 | 2014-11-20 | Meas Deutschland Gmbh | Magnetoresistiver Sensor in Form einer Halb- oder Vollbrückenschaltung |
US6864681B1 (en) | 2004-02-02 | 2005-03-08 | Trw Automotive U.S. Llc | Sensor assembly |
US7891102B2 (en) * | 2008-08-01 | 2011-02-22 | Honeywell International Inc. | Nanowire magnetic compass and position sensor |
US7926193B2 (en) * | 2008-08-01 | 2011-04-19 | Honeywell International Inc. | Nanowire magnetic sensor |
US9411024B2 (en) | 2012-04-20 | 2016-08-09 | Infineon Technologies Ag | Magnetic field sensor having XMR elements in a full bridge circuit having diagonal elements sharing a same shape anisotropy |
JP5786884B2 (ja) * | 2012-04-23 | 2015-09-30 | 株式会社デンソー | 磁気センサ |
JP7302612B2 (ja) | 2021-01-18 | 2023-07-04 | Tdk株式会社 | 磁気センサ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3335384A (en) * | 1967-08-08 | Rotary resistor arrangement employ- ing a galvanomagnetic semiconduc- tor field plate | ||
US3691502A (en) * | 1968-04-24 | 1972-09-12 | Kogyo Gijutsuin | Semiconductor type potentiometer device |
DE3788831T2 (de) * | 1986-07-29 | 1994-08-11 | Nippon Denso Co | Kontaktloses Potentiometer. |
JPH04290979A (ja) * | 1991-03-20 | 1992-10-15 | Hitachi Ltd | 磁気センサ、磁気センサを持つ位置検出装置および磁気センサを利用したトルク検出装置、モータ制御装置、あるいはこのトルク検出装置を有する電動パワーステアリング装置 |
DE4319322C2 (de) * | 1993-06-11 | 1998-04-23 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
US5475304A (en) * | 1993-10-01 | 1995-12-12 | The United States Of America As Represented By The Secretary Of The Navy | Magnetoresistive linear displacement sensor, angular displacement sensor, and variable resistor using a moving domain wall |
DE59405865D1 (de) * | 1993-11-17 | 1998-06-04 | Eisschiel Heinz | Positionsmelder für die automation |
DE19536433C2 (de) * | 1995-09-29 | 1999-04-08 | Siemens Ag | Vorrichtung zur berührungslosen Positionserfassung eines Objektes und Verwendung der Vorrichtung |
US6222361B1 (en) * | 1997-12-04 | 2001-04-24 | Sony Precision Technology Inc. | Position detecting device using varying width magneto-resistive effect sensor |
-
1999
- 1999-01-07 SE SE9900015A patent/SE513428C2/sv not_active IP Right Cessation
- 1999-12-09 EP EP99960082A patent/EP1147428A1/en not_active Withdrawn
- 1999-12-09 JP JP2000592654A patent/JP2002534686A/ja active Pending
- 1999-12-09 CA CA002358205A patent/CA2358205A1/en not_active Abandoned
- 1999-12-09 KR KR1020017008481A patent/KR20010101366A/ko not_active Application Discontinuation
- 1999-12-09 WO PCT/SE1999/002303 patent/WO2000040987A1/en not_active Application Discontinuation
- 1999-12-09 AU AU17025/00A patent/AU1702500A/en not_active Abandoned
- 1999-12-09 US US09/623,704 patent/US6373242B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2002534686A (ja) | 2002-10-15 |
CA2358205A1 (en) | 2000-07-13 |
KR20010101366A (ko) | 2001-11-14 |
SE9900015D0 (sv) | 1999-01-07 |
AU1702500A (en) | 2000-07-24 |
WO2000040987A1 (en) | 2000-07-13 |
SE9900015L (sv) | 2000-07-08 |
EP1147428A1 (en) | 2001-10-24 |
US6373242B1 (en) | 2002-04-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110133543B (zh) | 利用辅助传感器信号进行杂散场抵消的磁阻传感器系统 | |
US7619407B2 (en) | Gear tooth sensor with single magnetoresistive bridge | |
US8203332B2 (en) | Gear tooth sensor (GTS) with magnetoresistive bridge | |
EP2330432B1 (en) | Magnetic field sensor | |
EP1232400B1 (en) | Magnetoresistive angle sensor having several sensing elements | |
US9140766B2 (en) | Temperature compensating magneto-resistive sensor for measuring magnetic fields | |
US7810398B2 (en) | Concept for detecting a change of a physical quantity by means of a conductor structure | |
US20040017187A1 (en) | Magnetoresistive linear position sensor | |
JP2005534199A (ja) | Gmrセンサエレメントおよびgmrセンサエレメントの使用 | |
EP1399749B1 (en) | Compensating a sensor for measuring a magnetic field | |
US11313923B2 (en) | Method for measuring a magnetic field using a magnetic field sensor device having a second magnetic field sensor between parts of a first magnetic field sensor | |
CN111426994A (zh) | 使用垂直各向异性的杂散场鲁棒xmr传感器 | |
JP2021516333A (ja) | 磁場角度センサに関する角度誤差を低減するためのシステム及び方法 | |
CN115267623B (zh) | 一种磁阻磁开关传感器 | |
SE513428C2 (sv) | Lägesgivare | |
US5936400A (en) | Magnetoresistive displacement sensor and variable resistor using a moving domain wall | |
US7064649B2 (en) | Magneto-resistive layer arrangement and gradiometer with said layer arrangement | |
GB2356059A (en) | Multilayer magnetoresistive sensor/bridge circuit arrangement | |
JP2005257605A (ja) | 薄膜磁気センサ及び回転センサ | |
JP2000180524A (ja) | 磁界センサ | |
US6831458B2 (en) | Magnetic differential field sensor using hysteresis field in AMR films | |
CN214585084U (zh) | 一种磁传感器及基于磁传感器的无损检测装置 | |
KR100201690B1 (ko) | 스핀밸브형 자기저항센서를 구비한 토크센서 | |
CN118857086A (zh) | 一种全角度探测范围各向异性磁阻角度传感器及制作方法 | |
KR20230089608A (ko) | 3축 자기저항 센서 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |