SE385521B - Elektronoptisk apparat med en magnetisk avbojningsanordning - Google Patents
Elektronoptisk apparat med en magnetisk avbojningsanordningInfo
- Publication number
- SE385521B SE385521B SE7315761*3A SE7315761A SE385521B SE 385521 B SE385521 B SE 385521B SE 7315761 A SE7315761 A SE 7315761A SE 385521 B SE385521 B SE 385521B
- Authority
- SE
- Sweden
- Prior art keywords
- electronoptical
- magnetic
- default device
- default
- magnetic default
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/70—Arrangements for deflecting ray or beam
- H01J29/72—Arrangements for deflecting ray or beam along one straight line or along two perpendicular straight lines
- H01J29/76—Deflecting by magnetic fields only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/29—Reflection microscopes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6716628A NL6716628A (enExample) | 1967-12-07 | 1967-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE385521B true SE385521B (sv) | 1976-07-05 |
Family
ID=19801926
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7315761*3A SE385521B (sv) | 1967-12-07 | 1968-12-04 | Elektronoptisk apparat med en magnetisk avbojningsanordning |
| SE16606/68A SE365899B (enExample) | 1967-12-07 | 1968-12-04 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE16606/68A SE365899B (enExample) | 1967-12-07 | 1968-12-04 |
Country Status (2)
| Country | Link |
|---|---|
| BR (1) | BR6804576D0 (enExample) |
| SE (2) | SE385521B (enExample) |
-
1968
- 1968-12-04 SE SE7315761*3A patent/SE385521B/xx unknown
- 1968-12-04 SE SE16606/68A patent/SE365899B/xx unknown
- 1968-12-04 BR BR204576/68A patent/BR6804576D0/pt unknown
Also Published As
| Publication number | Publication date |
|---|---|
| BR6804576D0 (pt) | 1973-01-11 |
| SE365899B (enExample) | 1974-04-01 |
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