SE385521B - Elektronoptisk apparat med en magnetisk avbojningsanordning - Google Patents

Elektronoptisk apparat med en magnetisk avbojningsanordning

Info

Publication number
SE385521B
SE385521B SE7315761*3A SE7315761A SE385521B SE 385521 B SE385521 B SE 385521B SE 7315761 A SE7315761 A SE 7315761A SE 385521 B SE385521 B SE 385521B
Authority
SE
Sweden
Prior art keywords
electronoptical
magnetic
default device
default
magnetic default
Prior art date
Application number
SE7315761*3A
Other languages
English (en)
Swedish (sv)
Inventor
Poole J B Le
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from NL6716628A external-priority patent/NL6716628A/xx
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE385521B publication Critical patent/SE385521B/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/70Arrangements for deflecting ray or beam
    • H01J29/72Arrangements for deflecting ray or beam along one straight line or along two perpendicular straight lines
    • H01J29/76Deflecting by magnetic fields only
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252Tubes for spot-analysing by electron or ion beams; Microanalysers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/29Reflection microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
SE7315761*3A 1967-12-07 1968-12-04 Elektronoptisk apparat med en magnetisk avbojningsanordning SE385521B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6716628A NL6716628A (enrdf_load_html_response) 1967-12-07 1967-12-07

Publications (1)

Publication Number Publication Date
SE385521B true SE385521B (sv) 1976-07-05

Family

ID=19801926

Family Applications (2)

Application Number Title Priority Date Filing Date
SE7315761*3A SE385521B (sv) 1967-12-07 1968-12-04 Elektronoptisk apparat med en magnetisk avbojningsanordning
SE16606/68A SE365899B (enrdf_load_html_response) 1967-12-07 1968-12-04

Family Applications After (1)

Application Number Title Priority Date Filing Date
SE16606/68A SE365899B (enrdf_load_html_response) 1967-12-07 1968-12-04

Country Status (2)

Country Link
BR (1) BR6804576D0 (enrdf_load_html_response)
SE (2) SE385521B (enrdf_load_html_response)

Also Published As

Publication number Publication date
BR6804576D0 (pt) 1973-01-11
SE365899B (enrdf_load_html_response) 1974-04-01

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