SE375216B - - Google Patents

Info

Publication number
SE375216B
SE375216B SE7211727A SE1172772A SE375216B SE 375216 B SE375216 B SE 375216B SE 7211727 A SE7211727 A SE 7211727A SE 1172772 A SE1172772 A SE 1172772A SE 375216 B SE375216 B SE 375216B
Authority
SE
Sweden
Application number
SE7211727A
Inventor
G Westerberg
Original Assignee
G Westerberg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by G Westerberg filed Critical G Westerberg
Priority to SE7211727A priority Critical patent/SE375216B/xx
Publication of SE375216B publication Critical patent/SE375216B/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
SE7211727A 1972-09-12 1972-09-12 SE375216B (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SE7211727A SE375216B (sv) 1972-09-12 1972-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE7211727A SE375216B (sv) 1972-09-12 1972-09-12

Publications (1)

Publication Number Publication Date
SE375216B true SE375216B (sv) 1975-04-07

Family

ID=20294506

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7211727A SE375216B (sv) 1972-09-12 1972-09-12

Country Status (1)

Country Link
SE (1) SE375216B (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3148121A1 (de) * 1980-12-11 1982-08-05 Gerhard 18265 Djursholm Westerberg Verfahren und vorrichtung zur kontrolle von mikromasken

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3148121A1 (de) * 1980-12-11 1982-08-05 Gerhard 18265 Djursholm Westerberg Verfahren und vorrichtung zur kontrolle von mikromasken

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