SE375216B - - Google Patents
Info
- Publication number
- SE375216B SE375216B SE7211727A SE1172772A SE375216B SE 375216 B SE375216 B SE 375216B SE 7211727 A SE7211727 A SE 7211727A SE 1172772 A SE1172772 A SE 1172772A SE 375216 B SE375216 B SE 375216B
- Authority
- SE
- Sweden
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE7211727A SE375216B (https=) | 1972-09-12 | 1972-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE7211727A SE375216B (https=) | 1972-09-12 | 1972-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE375216B true SE375216B (https=) | 1975-04-07 |
Family
ID=20294506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7211727A SE375216B (https=) | 1972-09-12 | 1972-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| SE (1) | SE375216B (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3148121A1 (de) * | 1980-12-11 | 1982-08-05 | Gerhard 18265 Djursholm Westerberg | Verfahren und vorrichtung zur kontrolle von mikromasken |
-
1972
- 1972-09-12 SE SE7211727A patent/SE375216B/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3148121A1 (de) * | 1980-12-11 | 1982-08-05 | Gerhard 18265 Djursholm Westerberg | Verfahren und vorrichtung zur kontrolle von mikromasken |