SE375216BSE7211727ASE1172772ASE375216BSE 375216 BSE375216 BSE 375216BSE 7211727 ASE7211727 ASE 7211727ASE 1172772 ASE1172772 ASE 1172772ASE 375216 BSE375216 BSE 375216B
Authority
SE
Sweden
Application number
SE7211727A
Inventor
G Westerberg
Original Assignee
G Westerberg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by G WesterbergfiledCriticalG Westerberg
Priority to SE7211727ApriorityCriticalpatent/SE375216B/xx
Publication of SE375216BpublicationCriticalpatent/SE375216B/xx
G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor