SE346572B - - Google Patents
Info
- Publication number
- SE346572B SE346572B SE00186/67A SE18667A SE346572B SE 346572 B SE346572 B SE 346572B SE 00186/67 A SE00186/67 A SE 00186/67A SE 18667 A SE18667 A SE 18667A SE 346572 B SE346572 B SE 346572B
- Authority
- SE
- Sweden
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6600179A NL6600179A (cs) | 1966-01-07 | 1966-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE346572B true SE346572B (cs) | 1972-07-10 |
Family
ID=19795409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE00186/67A SE346572B (cs) | 1966-01-07 | 1967-01-04 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3499785A (cs) |
| AT (1) | AT273230B (cs) |
| BE (1) | BE692310A (cs) |
| CH (1) | CH484287A (cs) |
| DE (1) | DE1621295C3 (cs) |
| FR (1) | FR1507581A (cs) |
| GB (1) | GB1171842A (cs) |
| NL (1) | NL6600179A (cs) |
| SE (1) | SE346572B (cs) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS518758B2 (cs) * | 1972-03-27 | 1976-03-19 | ||
| DE2916080C2 (de) * | 1979-04-20 | 1984-12-06 | Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev | Verfahren zum Molekular-Aufdampfen von Halbleiterschichten und Vorrichtung zur Durchführung dieses Verfahrens |
| US4390571A (en) * | 1981-06-30 | 1983-06-28 | International Business Machines Corporation | Boatless point source evaporation method |
| DE3543455A1 (de) * | 1985-12-09 | 1987-06-11 | Varta Batterie | Stromableiter fuer eine mit alkalischem elektrolyten in verbindung stehende metalloxidelektrode |
-
1966
- 1966-01-07 NL NL6600179A patent/NL6600179A/xx unknown
-
1967
- 1967-01-04 SE SE00186/67A patent/SE346572B/xx unknown
- 1967-01-04 US US607177A patent/US3499785A/en not_active Expired - Lifetime
- 1967-01-04 CH CH8867A patent/CH484287A/de not_active IP Right Cessation
- 1967-01-04 GB GB555/67A patent/GB1171842A/en not_active Expired
- 1967-01-04 AT AT8267A patent/AT273230B/de active
- 1967-01-05 DE DE1621295A patent/DE1621295C3/de not_active Expired
- 1967-01-06 FR FR90185A patent/FR1507581A/fr not_active Expired
- 1967-01-06 BE BE692310D patent/BE692310A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1171842A (en) | 1969-11-26 |
| DE1621295C3 (de) | 1975-02-06 |
| DE1621295B2 (de) | 1974-06-20 |
| FR1507581A (fr) | 1967-12-29 |
| DE1621295A1 (de) | 1971-05-13 |
| US3499785A (en) | 1970-03-10 |
| NL6600179A (cs) | 1967-07-10 |
| BE692310A (cs) | 1967-07-06 |
| AT273230B (de) | 1969-08-11 |
| CH484287A (de) | 1970-01-15 |