SE344848B - - Google Patents

Info

Publication number
SE344848B
SE344848B SE17796/69A SE1779669A SE344848B SE 344848 B SE344848 B SE 344848B SE 17796/69 A SE17796/69 A SE 17796/69A SE 1779669 A SE1779669 A SE 1779669A SE 344848 B SE344848 B SE 344848B
Authority
SE
Sweden
Application number
SE17796/69A
Inventor
R Woelfle
D Ruecker
U Lauerer
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19681816084 external-priority patent/DE1816084C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE344848B publication Critical patent/SE344848B/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
    • H10P14/46Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials using a liquid
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/14Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase
    • H10P32/1408Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase from or through or into an external applied layer, e.g. photoresist or nitride layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/171Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
SE17796/69A 1968-12-20 1969-12-22 SE344848B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681816084 DE1816084C3 (de) 1968-12-20 Verfahren zum Herstellen eines aus Silicium bestehenden Halbleiterbauelements

Publications (1)

Publication Number Publication Date
SE344848B true SE344848B (de) 1972-05-02

Family

ID=5716947

Family Applications (1)

Application Number Title Priority Date Filing Date
SE17796/69A SE344848B (de) 1968-12-20 1969-12-22

Country Status (7)

Country Link
US (1) US3713913A (de)
AT (1) AT308200B (de)
CH (1) CH509665A (de)
FR (1) FR2026657A1 (de)
GB (1) GB1250584A (de)
NL (1) NL6918857A (de)
SE (1) SE344848B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5062385A (de) * 1973-10-02 1975-05-28
US4233093A (en) * 1979-04-12 1980-11-11 Pel Chow Process for the manufacture of PNP transistors high power

Also Published As

Publication number Publication date
US3713913A (en) 1973-01-30
DE1816084A1 (de) 1970-06-25
FR2026657A1 (de) 1970-09-18
DE1816084B2 (de) 1976-08-12
AT308200B (de) 1973-06-25
GB1250584A (de) 1971-10-20
CH509665A (de) 1971-06-30
NL6918857A (de) 1970-06-23

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