SE317139B - - Google Patents

Info

Publication number
SE317139B
SE317139B SE1485166A SE1485166A SE317139B SE 317139 B SE317139 B SE 317139B SE 1485166 A SE1485166 A SE 1485166A SE 1485166 A SE1485166 A SE 1485166A SE 317139 B SE317139 B SE 317139B
Authority
SE
Sweden
Application number
SE1485166A
Inventor
C Banas
C Brown
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of SE317139B publication Critical patent/SE317139B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
SE1485166A 1965-11-03 1966-10-28 SE317139B (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US50623765A 1965-11-03 1965-11-03

Publications (1)

Publication Number Publication Date
SE317139B true SE317139B (enrdf_load_html_response) 1969-11-10

Family

ID=24013764

Family Applications (1)

Application Number Title Priority Date Filing Date
SE1485166A SE317139B (enrdf_load_html_response) 1965-11-03 1966-10-28

Country Status (3)

Country Link
DE (1) DE1564999A1 (enrdf_load_html_response)
GB (1) GB1158986A (enrdf_load_html_response)
SE (1) SE317139B (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4863581A (en) * 1987-02-12 1989-09-05 Kawasaki Steel Corp. Hollow cathode gun and deposition device for ion plating process

Also Published As

Publication number Publication date
GB1158986A (en) 1969-07-23
DE1564999A1 (de) 1970-03-12

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