SE113186C1SE736042ASE736042ASE113186C1SE 113186 C1SE113186 C1SE 113186C1SE 736042 ASE736042 ASE 736042ASE 736042 ASE736042 ASE 736042ASE 113186 C1SE113186 C1SE 113186C1
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SE
Sweden
Application number
SE736042A
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Publication date
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Publication of SE113186C1publicationCriticalpatent/SE113186C1/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes