SE109643C1SE163442ASE163442ASE109643C1SE 109643 C1SE109643 C1SE 109643C1SE 163442 ASE163442 ASE 163442ASE 163442 ASE163442 ASE 163442ASE 109643 C1SE109643 C1SE 109643C1
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SE
Sweden
Application number
SE163442A
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Publication date
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Priority to SE163442ApriorityCriticalpatent/SE109643C1/xx
Publication of SE109643C1publicationCriticalpatent/SE109643C1/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement