SE0202584D0 - A method and device for coherence reduction - Google Patents

A method and device for coherence reduction

Info

Publication number
SE0202584D0
SE0202584D0 SE0202584A SE0202584A SE0202584D0 SE 0202584 D0 SE0202584 D0 SE 0202584D0 SE 0202584 A SE0202584 A SE 0202584A SE 0202584 A SE0202584 A SE 0202584A SE 0202584 D0 SE0202584 D0 SE 0202584D0
Authority
SE
Sweden
Prior art keywords
present
laser
discharge volume
pulsed laser
coherence reduction
Prior art date
Application number
SE0202584A
Other languages
Swedish (sv)
Inventor
Torbjoern Sandstroem
Original Assignee
Micronic Laser Systems Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronic Laser Systems Ab filed Critical Micronic Laser Systems Ab
Priority to SE0202584A priority Critical patent/SE0202584D0/en
Publication of SE0202584D0 publication Critical patent/SE0202584D0/en
Priority to AU2003256204A priority patent/AU2003256204A1/en
Priority to EP03791541A priority patent/EP1543594A1/en
Priority to JP2004532518A priority patent/JP2005537658A/en
Priority to PCT/SE2003/001355 priority patent/WO2004021529A1/en
Priority to US11/061,931 priority patent/US20050141583A1/en

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

An aspect of the present invention includes a pulsed laser, comprising a pair of spaced apart mirrors forming a resonant cavity for reflecting a laser radiation, a discharge volume, a housing enclosing at least said discharge volume, wherein said pulsed laser further comprising a diffusing element to equalize a coherence length during a period of time said laser pulses. Other aspects of the present invention are reflected in the detailed description, figures and claims.
SE0202584A 2002-09-02 2002-09-02 A method and device for coherence reduction SE0202584D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE0202584A SE0202584D0 (en) 2002-09-02 2002-09-02 A method and device for coherence reduction
AU2003256204A AU2003256204A1 (en) 2002-09-02 2003-09-02 A pulsed laser and a method, comprising a diffusing element to equalize the divergence of the laser radiation
EP03791541A EP1543594A1 (en) 2002-09-02 2003-09-02 A pulsed laser and a method, comprising a diffusing element to equalize the divergence of the laser radiation
JP2004532518A JP2005537658A (en) 2002-09-02 2003-09-02 Pulsed laser and method with a diffusing element for equalizing the divergence of laser radiation
PCT/SE2003/001355 WO2004021529A1 (en) 2002-09-02 2003-09-02 A pulsed laser and a method, comprising a diffusing element to equalize the divergence of the laser radiation
US11/061,931 US20050141583A1 (en) 2002-09-02 2005-02-22 Method and device for coherence reduction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0202584A SE0202584D0 (en) 2002-09-02 2002-09-02 A method and device for coherence reduction

Publications (1)

Publication Number Publication Date
SE0202584D0 true SE0202584D0 (en) 2002-09-02

Family

ID=20288861

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0202584A SE0202584D0 (en) 2002-09-02 2002-09-02 A method and device for coherence reduction

Country Status (5)

Country Link
EP (1) EP1543594A1 (en)
JP (1) JP2005537658A (en)
AU (1) AU2003256204A1 (en)
SE (1) SE0202584D0 (en)
WO (1) WO2004021529A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008035898A1 (en) 2007-08-06 2009-02-12 Carl Zeiss Meditec Ag Apparatus and method for reducing speckling in the field of laser applications
JP5267029B2 (en) 2007-10-12 2013-08-21 株式会社ニコン Illumination optical apparatus, exposure apparatus, and device manufacturing method
CN101681123B (en) * 2007-10-16 2013-06-12 株式会社尼康 Illumination optical system, exposure apparatus, and device manufacturing method
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
JP5257261B2 (en) 2009-06-18 2013-08-07 ソニー株式会社 Optical information reproducing apparatus and optical information reproducing method
WO2018138819A1 (en) 2017-01-26 2018-08-02 ギガフォトン株式会社 Laser system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4225781A1 (en) * 1992-08-04 1994-02-10 Lambda Physik Gmbh Excimer laser with unstable optical resonator - has concave rear mirror and cylindrical output mirror contg. internal face of concave shape to produce divergence of laser beams in perpendicular directions which approach one another
US5504350A (en) * 1992-08-12 1996-04-02 Spectra-Physics Scanning Systems, Inc. Lens configuration
JP3734560B2 (en) * 1996-03-25 2006-01-11 浜松ホトニクス株式会社 Ultra short pulse laser equipment

Also Published As

Publication number Publication date
EP1543594A1 (en) 2005-06-22
AU2003256204A1 (en) 2004-03-19
WO2004021529A1 (en) 2004-03-11
JP2005537658A (en) 2005-12-08

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