SE0002592D0 - Method of reactive sputtering - Google Patents

Method of reactive sputtering

Info

Publication number
SE0002592D0
SE0002592D0 SE0002592A SE0002592A SE0002592D0 SE 0002592 D0 SE0002592 D0 SE 0002592D0 SE 0002592 A SE0002592 A SE 0002592A SE 0002592 A SE0002592 A SE 0002592A SE 0002592 D0 SE0002592 D0 SE 0002592D0
Authority
SE
Sweden
Prior art keywords
reactive sputtering
sputtering
reactive
Prior art date
Application number
SE0002592A
Other languages
Swedish (sv)
Inventor
Soeren Berg
Tomas Nyberg
Original Assignee
Soeren Berg
Tomas Nyberg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soeren Berg, Tomas Nyberg filed Critical Soeren Berg
Priority to SE0002592A priority Critical patent/SE0002592D0/en
Publication of SE0002592D0 publication Critical patent/SE0002592D0/en

Links

SE0002592A 2000-07-07 2000-07-07 Method of reactive sputtering SE0002592D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SE0002592A SE0002592D0 (en) 2000-07-07 2000-07-07 Method of reactive sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0002592A SE0002592D0 (en) 2000-07-07 2000-07-07 Method of reactive sputtering

Publications (1)

Publication Number Publication Date
SE0002592D0 true SE0002592D0 (en) 2000-07-07

Family

ID=20280432

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0002592A SE0002592D0 (en) 2000-07-07 2000-07-07 Method of reactive sputtering

Country Status (1)

Country Link
SE (1) SE0002592D0 (en)

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