SE0000296D0 - Semiconductor structure and fabrication method - Google Patents

Semiconductor structure and fabrication method

Info

Publication number
SE0000296D0
SE0000296D0 SE0000296A SE0000296A SE0000296D0 SE 0000296 D0 SE0000296 D0 SE 0000296D0 SE 0000296 A SE0000296 A SE 0000296A SE 0000296 A SE0000296 A SE 0000296A SE 0000296 D0 SE0000296 D0 SE 0000296D0
Authority
SE
Sweden
Prior art keywords
semiconductor structure
fabrication method
fabrication
semiconductor
Prior art date
Application number
SE0000296A
Other languages
Swedish (sv)
Inventor
Hans Norstroem
Ted Johansson
Carl Bjoermander
Original Assignee
Ericsson Telefon Ab L M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ericsson Telefon Ab L M filed Critical Ericsson Telefon Ab L M
Priority to SE0000296A priority Critical patent/SE0000296D0/en
Publication of SE0000296D0 publication Critical patent/SE0000296D0/en
Priority to PCT/SE2000/001690 priority patent/WO2001020664A1/en
Priority to CA002385031A priority patent/CA2385031A1/en
Priority to AU75654/00A priority patent/AU7565400A/en
Priority to KR1020027003288A priority patent/KR20020030816A/en
Priority to CNB008158916A priority patent/CN1252809C/en
Priority to JP2001524144A priority patent/JP5172060B2/en
Priority to EP00964830.4A priority patent/EP1212792B1/en
Priority to US09/662,842 priority patent/US6413835B1/en
Priority to US10/119,047 priority patent/US6690080B2/en

Links

SE0000296A 1999-09-17 2000-01-28 Semiconductor structure and fabrication method SE0000296D0 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
SE0000296A SE0000296D0 (en) 2000-01-28 2000-01-28 Semiconductor structure and fabrication method
PCT/SE2000/001690 WO2001020664A1 (en) 1999-09-17 2000-09-04 A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices
CA002385031A CA2385031A1 (en) 1999-09-17 2000-09-04 A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices
AU75654/00A AU7565400A (en) 1999-09-17 2000-09-04 A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices
KR1020027003288A KR20020030816A (en) 1999-09-17 2000-09-04 A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices
CNB008158916A CN1252809C (en) 1999-09-17 2000-09-04 Self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices
JP2001524144A JP5172060B2 (en) 1999-09-17 2000-09-04 Self-aligned method for forming deep trenches in shallow trenches for semiconductor device isolation
EP00964830.4A EP1212792B1 (en) 1999-09-17 2000-09-04 A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices
US09/662,842 US6413835B1 (en) 1999-09-17 2000-09-15 Semiconductor structure and fabrication method of shallow and deep trenches
US10/119,047 US6690080B2 (en) 1999-09-17 2002-04-10 Semiconductor structure for isolation of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0000296A SE0000296D0 (en) 2000-01-28 2000-01-28 Semiconductor structure and fabrication method

Publications (1)

Publication Number Publication Date
SE0000296D0 true SE0000296D0 (en) 2000-01-28

Family

ID=20278283

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0000296A SE0000296D0 (en) 1999-09-17 2000-01-28 Semiconductor structure and fabrication method

Country Status (1)

Country Link
SE (1) SE0000296D0 (en)

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