SE0000296D0 - Semiconductor structure and fabrication method - Google Patents
Semiconductor structure and fabrication methodInfo
- Publication number
- SE0000296D0 SE0000296D0 SE0000296A SE0000296A SE0000296D0 SE 0000296 D0 SE0000296 D0 SE 0000296D0 SE 0000296 A SE0000296 A SE 0000296A SE 0000296 A SE0000296 A SE 0000296A SE 0000296 D0 SE0000296 D0 SE 0000296D0
- Authority
- SE
- Sweden
- Prior art keywords
- semiconductor structure
- fabrication method
- fabrication
- semiconductor
- Prior art date
Links
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0000296A SE0000296D0 (en) | 2000-01-28 | 2000-01-28 | Semiconductor structure and fabrication method |
PCT/SE2000/001690 WO2001020664A1 (en) | 1999-09-17 | 2000-09-04 | A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices |
CA002385031A CA2385031A1 (en) | 1999-09-17 | 2000-09-04 | A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices |
AU75654/00A AU7565400A (en) | 1999-09-17 | 2000-09-04 | A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices |
KR1020027003288A KR20020030816A (en) | 1999-09-17 | 2000-09-04 | A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices |
CNB008158916A CN1252809C (en) | 1999-09-17 | 2000-09-04 | Self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices |
JP2001524144A JP5172060B2 (en) | 1999-09-17 | 2000-09-04 | Self-aligned method for forming deep trenches in shallow trenches for semiconductor device isolation |
EP00964830.4A EP1212792B1 (en) | 1999-09-17 | 2000-09-04 | A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices |
US09/662,842 US6413835B1 (en) | 1999-09-17 | 2000-09-15 | Semiconductor structure and fabrication method of shallow and deep trenches |
US10/119,047 US6690080B2 (en) | 1999-09-17 | 2002-04-10 | Semiconductor structure for isolation of semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0000296A SE0000296D0 (en) | 2000-01-28 | 2000-01-28 | Semiconductor structure and fabrication method |
Publications (1)
Publication Number | Publication Date |
---|---|
SE0000296D0 true SE0000296D0 (en) | 2000-01-28 |
Family
ID=20278283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE0000296A SE0000296D0 (en) | 1999-09-17 | 2000-01-28 | Semiconductor structure and fabrication method |
Country Status (1)
Country | Link |
---|---|
SE (1) | SE0000296D0 (en) |
-
2000
- 2000-01-28 SE SE0000296A patent/SE0000296D0/en unknown
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