SA515360365B1 - Method and apparatus to reduce contamination of particles in a fluidized bed reactor - Google Patents

Abstract

METHOD AND APPARATUS TO REDUCE CONTAMINATION OF PARTICLES IN A FLUIDIZED BED REACTOR ABSTRACT A method and fluidized bed reactor for reducing or eliminating contamination of silicon-coated particles are disclosed. The metal surface of one or more fluidized bed reactor components is at least partially coated with a hard protective layer comprising a material having an ultimate tensile strength of at least 700 MPa at 650 °C. Fig 1

Claims (1)

-11- sificon-coated elements or reducing contamination of silicon-coated particles to reduce method Method 1 fluidized bed in fluidized bed reactor surface with surface contact due to contact particles method included : 207 fluidized fluidized bed reactor component supplied; In a silicon-coated fluidized bed reactor facing the silicon-coated surface has a surface bed reactor component 8 comprising a metal surface 1:0:280 – the surface bed reactor during operation of the fluidized bed reactor contains particles protective layer with protective layer, partially coated, at least partially coated, metal MPa, at least 701, ultimate tensile strength material, protective layer; In which the protective layer (0 > (Ni 9601 > W 7001 > Cr %Yo-Yo) containing cobalt based alloy alloy 0 > s > ...17 0e %Y > Mn %V, 0 > 91 > Si %Y > Fe %Y > Mo 75 or cobalt %Vo-Y.,0 cobalt 58, 5 “Co 7601-17 “Cr %Yo—0 Mo %Y¥ —¢ dla da nickel alloy «© % +.) > Cu M > Si%Y) > Mn 961 > Al %Y > Fe %Y > (Ti 9636 > tnickel Nickel 9681-77, B M > Las > D16 silicon- for making fluidized bed reactor coated particles surface 70955 coated according to item 1; method method - “.protective layer in the protective layer 0 thermal | thermal expansion coefficient metal according to item 1; where the metal method method — has a thermal expansion coefficient protective layer and a protective layer “TCE -1 “coefficient of expansion TCE =) where the difference is between 1025-7 and (TCE —V “thermal coefficient of expansion .70 > Yo is its mother) 1- It has an intermediate coating in which an intermediate coating of oF is placed according to the method method 1086-7 108-71 between 1208-1 “thermal coefficient of expansion . and the protective layer metal between the metal is the lowest medium patterned protective layer according to item 1; where for the protective layer method -#« © d mm. 1 Your ladder varies across the protective layer according to the element ©; where for the protective layer method -7 surface and/or along the surface width width Ye layer Jolie of portion component according to item 1; where the entire method —V part is constructed of material having substantially the same composition as the fluidized bed reactor component .protective layer for the chemical composition fluidized bed reactor according to the element ¢ where the fluidized bed reactor component method =A Vo fluidization gas inlet fluidized bed reactor nozzle dass is component product withdrawal 8660; Product recovery exit tube inlet tube seed inlet sail tube sample nozzle probe assembly liner coutlet tube cnternal heater internal heater cthermocouple thermocouple pressure nozzle pressure nozzle . bubble breaker or blow breaker 0 for the production of polycrystalline silicon fluidized bed reactor unit fluidized bed reactor unit 4- comprising: unit “polycrystalline silicon” and “reactor chamber” specifying a room for the reactor Reactor facing the reactor chamber surface having a surface reactor components one or more of the reactor components Yo which is partially covered on metal including metal surface surface reactor chamber at least ultimate tensile strength It has a maximum tensile strength, the protective layer, the least with a protective layer, which is MPa at 156 #m, and in which the protective layer is 0 mA > (Ni %Y + > W 701 < “Cr %Yo-Yo including cobalt alloy > P 17... > S 71 > Mn 1,0 H< C %Y > Si %Y > Fe %Y > Mo 75 or cobalt carbonate 679-71 and 58 65 «Co 7101-1 »Cr %Yo—-2 Mac %Y.—¢ le including nickel ¢ | based on annic alloy au or 0 % NY > M17 M > Si %Y > Mn 71 > (Al %Y > (Fe %Y > (Ti %Y,0 > ° 'nickel Silicon 96/8 nickel Y, ¢ and 964 oY > Ir % + 1, << silicon- to make fluidized bed reactor fluidized bed reactor operation of the fluidized bed reactor ..coated particles -01 Vo reactor unit The fluidized bed reactor unit of element 8 (where metal has a first thermal coefficient of expansion (1- TCE) Js and the protective layer has a second thermal coefficient of (2- TCE) ) SU expansion which differs from 1085-1B SYS -11 fluidized bed reactor unit Amped) according to item 101 where the reactor component also includes an intermediate coating for it thermal coefficient of expansion ‎«TVE-3« coefficient of expan sion between ) = TCE and 108-7; Where the intermediate layer is located between the metal and the protective layer. (+ mm to 1 mm. -0 The fluidized bed reactor unit Amped) according to element VY where the protective layer has a thickness that varies across width and/or Along .surface The length of the surface Yo ram ym according to item 9; where the fluidized bed reactor unit sang - 04 fluidized bed reactor is largely constructed entirely of material reactor component of a portion reactor component .protective layer For the protective layer chemical Same chemical composition 14-9 According to any of the elements fluidized bed reactor unit fluidized bed reactor unit -1# © ccobalt-based alloy protective cobalt-based alloy layer where it includes the protective layer or any combined combination thereof. “nickel-based alloy granulate polycrystalline to produce granular polycrystalline silicon particles process =) siicon-containing where the process includes the flow of the containing gas On silicon particles 0 seed particle containing a fluidized bed reactor seed particle through the gas fluidized bed reactor to affect the fluidized bed reactor reactor chamber effect pyrolysis of the silicon-containing On thermal decomposition of silicon-containing gas On deposition of polycrystalline silicon and deposition of a layer of polycrystalline silicon gas polycrystalline to form a polycrystalline silicon-encapsulated molecule 60 particle seed molecule VO one or fluidized bed reactor for © 02180 - 511600 » where the fluidized bed reactor includes a particle facing the reactor chamber surface that has a surface reactor components as surface cduring reactor operation reactor chamber reactor chamber with a protective layer at least partially coated (JAY) coated on metal containing metal MPa at least 7009 ultimate tensile strength has 353 tensile protective layer 00 to be protective layer and in it the protective layer (2° (0 > (Ni %Y + > W 701 > “Cr %Yo-Yo including cobalt based alloy > s > ...17 0H 71 > Mn 71.0 > 91 > Si %Y > Fe %Y > Mo 75 or cobalt %Vo-Y.,0 cobalt 58, 5 “Co %\o—Y “Cr %Yo—0 Mo???1-; containing nickel alloy YO «© % + .) > Cu M > Si%Y) > Mn 961 > Al %Y > Fe %Y > (Ti 9636 > tnickel Nickel %AR=YY,€ for and 96.1 > Zr %or,) > COAY Operation of the fluidized bed reactor to make silicon-coated particles .coated particles -11 process according to the element VT where at least 96955 of the surface © is coated with the protective layer 0106600 reducing or eliminating the contact of the silicone coated particle polycrystalline silicon-coated particle with metal and reduces reducing or eliminating metal contamination of the polycrystalline cys ll particle .silicon particle —VA Yo The method according to claim V, where the fluidized bed reactor component is the ofluidization gas inlet tube, a thermocouple, a pressure nozzle, “ pressure nozzle or .sample nozzle COAY . a A Ej : M A, i F atoll 1H : 1 EE TRL : LO oF i 4 8 3 i & BOW 8 3 + ES S iN 1 A H EY : p 3 i ¥ 1 1 3 : Lal { bad H 5 i dof 1 HE EIR § a ِ ِ i 0 PWR i : i 1 J i 4 ¥ i 3 i 0 “© Sf I SU SE A 0 8 Austria > 3 7 nl A ER A L 1 i HA i : Hou LI Yaa Ran ¥ 1 Ask Ba +8 A L 1 Ey i 1 § ER : ¥. bi] Iv i CO Lhe i : 0: 3 5 : 2 0 1 0 5 EH bad N Ssa 0 Name #0 or Hoo dH b 3 3 + ? I 3 Hou iy od 0 LOE a i i #Qoabssstct TRS SR I 8 HA HRS 1 1 § l i HA BE 0 q - % ¥ ey KR d [Kenak [7] [ 3 : ® : M IS H t 3 Et i FEF 4: Hi H 8 i 1 13 I$: 1 1 i 4 qi 4 PR a 4 % I: 3 1 0 i NE AW 1 a a “” soft 1 aa z 1 Ls si Fey Sock a i Rs SO 1 form: any meh for 1 : / 1 0 O 1 i = i. ho d EE 0 a EE 0 0 a 1 a i. i H i. i m v form rumah + s ny © A : d a FF : 0 82m s z d 2 11 z : i |B The validity period of this patent is twenty years from the date of filing the application, provided that the annual financial fee is paid for the patent and that it is not invalid or forfeited for violating any of the provisions of the patent system, layout designs of integrated circuits, plant varieties, and industrial designs, or its executive regulations issued by King Abdulaziz City for Science and Technology; Saudi Patent Office P.O. Box TAT Riyadh 57??11 ¢ Kingdom of Saudi Arabia Email: Patents @kacst.edu.sa