RU99110763A - SILICON OXIDATION METHOD - Google Patents

SILICON OXIDATION METHOD

Info

Publication number
RU99110763A
RU99110763A RU99110763/12A RU99110763A RU99110763A RU 99110763 A RU99110763 A RU 99110763A RU 99110763/12 A RU99110763/12 A RU 99110763/12A RU 99110763 A RU99110763 A RU 99110763A RU 99110763 A RU99110763 A RU 99110763A
Authority
RU
Russia
Prior art keywords
oxidation method
silicon oxidation
silicon
electrolyte solutions
homofunctional
Prior art date
Application number
RU99110763/12A
Other languages
Russian (ru)
Other versions
RU2165481C2 (en
Inventor
Юрий Игоревич Яковлев
Сергей Иванович Романов
Виктор Владимирович Кириенко
Original Assignee
Институт физики полупроводников СО РАН
Юрий Игоревич Яковлев
Сергей Иванович Романов
Filing date
Publication date
Application filed by Институт физики полупроводников СО РАН, Юрий Игоревич Яковлев, Сергей Иванович Романов filed Critical Институт физики полупроводников СО РАН
Priority to RU99110763/12A priority Critical patent/RU2165481C2/en
Priority claimed from RU99110763/12A external-priority patent/RU2165481C2/en
Publication of RU99110763A publication Critical patent/RU99110763A/en
Application granted granted Critical
Publication of RU2165481C2 publication Critical patent/RU2165481C2/en

Links

Claims (1)

Способ окисления кремния, основанный на анодной поляризации кремния в растворах электролитов, отличающийся тем, что в качестве окислителей используют растворы электролитов в легких гомофункциональных кетонах.A method of silicon oxidation based on the anodic polarization of silicon in electrolyte solutions, characterized in that electrolyte solutions in light homofunctional ketones are used as oxidizing agents.
RU99110763/12A 1999-05-25 1999-05-25 Silicon oxidation method RU2165481C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU99110763/12A RU2165481C2 (en) 1999-05-25 1999-05-25 Silicon oxidation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU99110763/12A RU2165481C2 (en) 1999-05-25 1999-05-25 Silicon oxidation method

Publications (2)

Publication Number Publication Date
RU99110763A true RU99110763A (en) 2001-02-27
RU2165481C2 RU2165481C2 (en) 2001-04-20

Family

ID=20220205

Family Applications (1)

Application Number Title Priority Date Filing Date
RU99110763/12A RU2165481C2 (en) 1999-05-25 1999-05-25 Silicon oxidation method

Country Status (1)

Country Link
RU (1) RU2165481C2 (en)

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