RU98103585A - ACCELEROMETER - Google Patents

Claims (3)

1. An accelerometer comprising a housing, two movable elements of a cantilever structure with an opposite arrangement of the free ends of the consoles relative to each other, two inertial force to mechanical magnitude converters, each of which is associated with one of the movable elements, two frequency oscillators, a frequency mixer, characterized in that the movable elements are made in a plate of single-crystal material, for example silicon, together with a fixed frame and an elastic suspension connecting each movable element and not the same frame, the first stator plate and the second stator plate are introduced, the surfaces of each side of each movable element are electrically conductive, a differential capacitive transducer of displacement of both movable elements with one fixed electrode on the first stator plate is made in the area of the projection of both movable elements on this stator plate and with the second a fixed electrode on the second stator plate in the area of projection of both movable elements onto it, a movable differential electrode the capacitive displacement transducer is formed by the electrically conductive surfaces of the movable elements, the fixed frame is located between the first and second stator plates with the formation of a gap between each movable element and each stationary electrode on the first and second stator plates, an elastic suspension of each movable element is made as an inertial force transducer into the movement of the movable element element with stiffness ζ in the direction perpendicular to the planes of the moving elements, defined respectively by

where m is the mass of the movable element;
a _in - the upper limit of the range of measured accelerations;
d is the gap between the movable element and the fixed electrode,
each frequency oscillator is designed as an RC generator or an LC generator, one part of a differential capacitive displacement transducer with one fixed electrode and a movable electrode is included in the circuit of one RC generator or an LC generator as an element determining the frequency of generation, the second part of a differential capacitive displacement transducer with another fixed electrode and the same movable electrode is included in the circuit of the second RC generator or LC generator as the element determining the frequency of generation that one.  2. The accelerometer according to claim 1, characterized in that each movable element is made in a plate of single-crystal material with the location of each of its electrically conductive surfaces at a depth d from the nearest surface of the stationary frame parallel to it, which makes up the gap between the stationary and movable electrodes of the differential capacitive position transducer.  3. The accelerometer according to claim 1, characterized in that the first and second stator plates are made of a single crystal material, for example silicon.