RU93053795A - COOLING SYSTEM OF SUPPORTS IN VACUUM - Google Patents

COOLING SYSTEM OF SUPPORTS IN VACUUM

Info

Publication number
RU93053795A
RU93053795A RU93053795/02A RU93053795A RU93053795A RU 93053795 A RU93053795 A RU 93053795A RU 93053795/02 A RU93053795/02 A RU 93053795/02A RU 93053795 A RU93053795 A RU 93053795A RU 93053795 A RU93053795 A RU 93053795A
Authority
RU
Russia
Prior art keywords
vacuum
cooling system
supports
cooling
substrates
Prior art date
Application number
RU93053795/02A
Other languages
Russian (ru)
Other versions
RU2089662C1 (en
Inventor
А.Г. Вологиров
Е.Н. Ивашов
С.М. Оринчев
В.В. Слепцов
С.В. Степанчиков
Original Assignee
А.Г. Вологиров
Е.Н. Ивашов
С.М. Оринчев
В.В. Слепцов
С.В. Степанчиков
Filing date
Publication date
Application filed by А.Г. Вологиров, Е.Н. Ивашов, С.М. Оринчев, В.В. Слепцов, С.В. Степанчиков filed Critical А.Г. Вологиров
Priority to RU93053795A priority Critical patent/RU2089662C1/en
Priority claimed from RU93053795A external-priority patent/RU2089662C1/en
Publication of RU93053795A publication Critical patent/RU93053795A/en
Application granted granted Critical
Publication of RU2089662C1 publication Critical patent/RU2089662C1/en

Links

Claims (1)

Изобретение относится к технологической обработке подложек в вакууме, а более конкретно к устройствам для охлаждения подложек в вакууме. Цель изобретения - повысить эффективность охлаждения подложек в вакууме. Система охлаждения расположена внутри теплопроводящего вещества и выполнена в виде трубчатой рубашки охлаждения с возможностью автоматической подачи хладагента от холодильной установки.The invention relates to the processing of substrates in vacuum, and more specifically to devices for cooling substrates in vacuum. The purpose of the invention is to improve the cooling efficiency of the substrate in a vacuum. The cooling system is located inside the heat-conducting substance and is made in the form of a tubular cooling jacket with the possibility of automatic supply of refrigerant from the refrigeration unit.
RU93053795A 1993-11-29 1993-11-29 Cooling system of substrates in vacuum RU2089662C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU93053795A RU2089662C1 (en) 1993-11-29 1993-11-29 Cooling system of substrates in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU93053795A RU2089662C1 (en) 1993-11-29 1993-11-29 Cooling system of substrates in vacuum

Publications (2)

Publication Number Publication Date
RU93053795A true RU93053795A (en) 1996-07-20
RU2089662C1 RU2089662C1 (en) 1997-09-10

Family

ID=20149824

Family Applications (1)

Application Number Title Priority Date Filing Date
RU93053795A RU2089662C1 (en) 1993-11-29 1993-11-29 Cooling system of substrates in vacuum

Country Status (1)

Country Link
RU (1) RU2089662C1 (en)

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