RU84542U1 - MICROMECHANICAL GYROSCOPE-ACCELEROMETER - Google Patents

Abstract

1. Micromechanical gyroscope-accelerometer, comprising a housing in which a micromechanical sensitive element of angular velocity, a micromechanical sensitive element of linear acceleration, a circuit board and an electronic unit, characterized in that the electronic unit is made in the form of a unified ultra-large integrated open-frame circuit and is installed in the recess of the housing at its lower level. ! 2. The device according to claim 1, characterized in that the housing is made of ceramic, equipped with a lid and evacuated. ! 3. The device according to claim 1, characterized in that the circuit board is installed in the housing above the electronic unit, is fixed on the periphery and has slots located above the contacts of the integrated circuit. ! 4. The device according to claim 1, characterized in that the micromechanical sensing element of the angular velocity and the micromechanical sensing element of linear acceleration are placed on the circuit board and are sealed in the form of capsules.

Description

The invention relates to measuring equipment, in particular, to the field of instrumentation, and may find application in inertial systems of moving objects, in autopilots of aircraft and ship models, in vehicle safety systems.

A feature of micromechanical gyroscopes is the predominant manufacture of the sensitive elements of these devices from silicon-based materials using silicon technology, which determines the small size and weight of the gyroscope, the possibility of using group manufacturing technology, low cost of production in mass production, and high reliability in operation.

Known micromechanical gyroscope-accelerometer, structurally made in the form of external and internal flat elements that are connected to each other and to the base by means of mutually perpendicular torsions. In the center of the inner element is an inertial mass with a displaced center of mass relative to the geometric center of the inner element [RF patent No. 2064682, MKI G01P 15/08, 1993].

The disadvantage of this device is a significant dispersion in the space of oscillating elements, which leads to the appearance of large damping forces when working in a normal gas environment. In addition, the proposed device does not include an electronics unit and is not an independent mounting element.

A technical solution is known in which micromechanical vibration gyroscopes-accelerometers are used as inertial sensors - gyroscopes and accelerometers, containing sensitive elements, electrodes for exciting vibration of sensitive elements and electrodes for acquiring information, while the base of the block is made in the form of a parallelepiped with base planes along its faces and internal cavity, the electrodes for the excitation of vibrations of the sensitive elements and the electrodes of information retrieval are made directly based on and a base fixed on the substrate comprising micro-service electronics (RF patent №2058534, MKI G01S 21/00, 1993 YG).

The disadvantage of this device is the large size and complexity of the design.

The closest analogue of the proposed device is an inertial measuring unit containing a protective case with two-sided wiring of the terminals of the service electronics microassemblies in a plane parallel to the plane of the larger end face of the base with micromechanical gyroscopes and accelerometers located on its other faces, and a dielectric board is placed on the case, on which the specified base and the scheme for processing measuring information from sensitive elements are fixed (RF patent No. 2162203, MKI G01C 21/00, 20 00 g.).

The disadvantage of this device is the design complexity, low accuracy and lack of reliability, as well as large dimensions and weight.

The objective of the present invention is to improve the accuracy and reliability of the device, as well as reducing its weight and size parameters.

The technical result is obtained due to the fact that in a micromechanical gyroscope-accelerometer containing a housing in which a micromechanical sensing element of angular velocity, a micromechanical element of linear acceleration, a switching board and an electronic unit are located, the electronic unit can be made in the form of a unified ultra-large integrated open-frame circuit and installed in the recess of the housing at its lower level. The case can be made of ceramic, equipped with a lid and evacuated. The circuit board can be installed in the housing above the electronic unit, fixed on the periphery and may have slots located above the contacts of the integrated circuit.

The micromechanical sensing element of angular velocity and the micromechanical sensitive element of linear acceleration can be placed on the circuit board and are sealed in the form of capsules.

When executing a micromechanical gyroscope-accelerometer in the form of a set of measuring channels, which allows using the spatial assembly of the integrated circuit and encapsulated sensitive elements in one sealed case, an increase in measurement accuracy is achieved. The proposed design provides:

- thermal isolation between the integrated circuit and capsules;

- the minimum values of the lengths of microwire leads that can withstand significant mechanical stress;

- low capacitive effect of the circuit board with installed capsules on the elements of the integrated circuit;

- small values of spurious leaks;

- compensation of the effect of linear acceleration on the measuring channel of the angular velocity;

- the reliability of encapsulated sensitive elements in terms of long-term preservation of the depth of vacuum;

- minimum weight and size characteristics. The overall dimensions of the device can be 16.5 × 16.5 mm in the installation plane and 4.8 mm in height.

Figure 1 shows the layout of the device in section.

Figure 2 presents the installation diagram of the sensitive elements on the patch board.

The micromechanical gyroscope-accelerometer contains a housing 1, in which a micromechanical sensitive element of angular velocity 2, a micromechanical sensitive element of linear acceleration 3, a switching board 4 with slots 5, and an electronic unit 6, made in the form of a unified ultra-large integrated open-frame circuit, are placed. The housing 1 is provided with a cover 7. The electronic unit 6 is installed in the recess of the housing 1 at its lower level. The patch board 4 is installed in the housing 1, fixed on the periphery and has slots 5 that provide access to the contacts 8 of the integrated circuit 6. The connections between the contacts 8 of the integrated circuit 6, the patch board 4 and the contacts 8 of the sensing elements 2 and 3 are carried out by microwire 9.

The proposed device operates as follows. Under the action of linear acceleration in the direction of the axis of sensitivity from the output of the encapsulated micromechanical sensitive element of linear acceleration 3, a signal is proportional to the effective acceleration. When the housing 1 rotates around the sensitivity axis of the encapsulated micromechanical sensitive element of the angular velocity 2 with the angular velocity Ω, a signal is output from its output, which is proportional to the magnitude of the angular velocity Ω. Both output signals are input to a specialized ultra-large integrated circuit type 6 system-on-chip, which provides analog-to-digital and logical processing of data arrays in real time. The presence in the integrated circuit of a programmable processor element, a memory array, digital and analog nodes connected by a single algorithm of processing with “hard” logic and circuitry allows you to give the microelectromechanical information and control system additional functionality, such as signal filtering, correction, fault detection, linearization of the transfer characteristics, reconfiguration of measuring channels and more. The integrated circuit 6 also provides for the possibility of simultaneous processing of information signals of the accelerometer and gyroscopic measuring channels, which allows you to compensate for the negative effect of acceleration on the gyroscopic sensitive element caused by imperfect shape (unbalance).

The integrated circuit 6 may include the following functional blocks:

- input amplifiers of signals of capacitive displacement sensors of micromechanical accelerometers and gyroscopes;

- analog-to-digital signal converters of micromechanical accelerometers and gyroscopes, as well as a temperature sensor;

- digital-to-analog converters controlling the inertial mass drive of a micromechanical gyroscope;

- digital signal processor;

- microcontroller;

- non-volatile memory;

- system of internal and external interfaces;

- voltage reference source;

- clock generator;

- supervisor.

Thus, the claimed micromechanical gyroscope-accelerometer can improve the accuracy and reliability of the device, as well as achieve minimum weight and size characteristics.

Claims (4)

1. Micromechanical gyroscope-accelerometer, comprising a housing in which a micromechanical sensing element of angular velocity, a micromechanical sensing element of linear acceleration, a circuit board and an electronic unit, characterized in that the electronic unit is made in the form of a unified ultra-large integrated open-frame circuit and is installed in the recess of the housing at its lower level. 2. The device according to claim 1, characterized in that the housing is made of ceramic, equipped with a lid and evacuated. 3. The device according to claim 1, characterized in that the circuit board is installed in the housing above the electronic unit, is fixed on the periphery and has slots located above the contacts of the integrated circuit. 4. The device according to claim 1, characterized in that the micromechanical sensitive element of the angular velocity and the micromechanical sensitive element of linear acceleration are placed on the switching board and are sealed in the form of capsules.