RU28552U1 - X-ray measuring and testing complex - Google Patents

Description

X-ray measuring and testing complex

The utility model relates to techniques for the study and testing of substances, materials or devices using x-ray radiation.

There are known complexes for carrying out these studies and testing simultaneously on several analytical facilities (see: Synchrotron radiation. Edited by K. Kunts. Moscow, Mir Publishing House, 1981, p. 80 - 89 1). In such complexes, a radiation source common to all analytical facilities is used. The latter is a synchrotron or, in more modern complexes, the storage ring. The synchrotron radiation output from the synchrotron or the storage ring is transported to analytical facilities (workstations). From a very broadband synchrotron radiation, the spectral band necessary for carrying out specific studies or tests is distinguished (in the case to which the proposed utility model relates, the band in the X-ray range). The composition of the equipment of each analytical setup is determined by its specialization in one form or another of research or testing.

It is known, however, that synchrotron radiation sources, including storage rings, are the most complex capital structures, the cost of which reaches hundreds of millions of dollars. So, storage rings, the emission spectrum of which includes the X-ray range, have a diameter of at least 50 m (1, p. 80).

During their operation, taking into account the gigantic dimensions, the most difficult problem is maintaining an acceptable degree of vacuum, including in the channels for transporting synchrotron radiation to analytical facilities that are tens of meters away from the periphery of the ring and the experimental volume of each analytical facility. Vacuum breaking in

MPK7SOSH23 / 20 BUT and 35/00

any of the analytical facilities can disable the devices not only in the drive itself, but also in all devices connected with it (1, p. 80).

The extraction of x-rays and the formation of several beams by the number of analytical installations from a narrow beam leaving the synchrotron or storage ring, which should be carried out in vacuum, is a serious problem solved by a system of sliding incidence mirrors and crystals. With the channels of the mentioned length, special measures must be taken to control and maintain the position of each of the formed beams, the width of which in the vertical plane is units of milliradians. So, a beam shift at a distance of 40 m by only 10 mm means a loss of one or two orders of intensity, depending on the aperture of the analytical setup (1, p. 85).

For synchrotrons and storage rings of the indicated sizes, the task of protecting against radiation both the personnel operating the synchrotron or the drive itself and the research personnel of the analytical facilities is also very difficult.

Finally, complexes based on synchrotrons or storage rings are so expensive that not every state can finance their construction. Therefore, their number is calculated in units, and in recent decades, states have to unite in order to build such complexes. An example is the European Center for Synchrotron Radiation (Grenoble, France).

Despite the noted drawbacks, synchrotron radiation sources are currently almost the only type of sources that allows obtaining, for research and testing, the spectral density of narrowly directed radiation in the required operating range simultaneously for several analytical facilities.

Therefore, it is very important to create a complex that is easily accessible to scientists and engineers, in which a high brightness of radiation in the input aperture of analytical facilities could be obtained using cheap sources.

The task of creating a complex that is free from these shortcomings (gigantic size and extremely high cost, problems of maintaining a vacuum and ensuring radiation safety, the formation of several beams and controlling them when transporting radiation to analytical facilities) is solved by the proposed utility model.

The proposed measuring and testing complex for research in the x-ray range of radiation simultaneously on several analytical facilities, as well as the known one, contains a radiation source, channels for transporting radiation to analytical facilities and equipment of analytical facilities.

Unlike the known one, the proposed complex as an radiation source contains an x-ray tube, each channel for transporting radiation to analytical facilities contains an x-ray lens in the form of a set of curved channels using multiple total external reflection of x-ray radiation from their walls, installed with the possibility of capturing part of the diverging x-ray radiation tube and made with the possibility of converting it into quasi-parallel.

Thus, the obtaining of the mentioned types of technical result is ensured by the proposed utility model due to the rejection of the use of a synchrotron or storage ring as a radiation source and the use of a standard X-ray tube as such a source, and X-ray lenses for selecting radiation and forming narrowly directed quasi-parallel beams transporting X-ray radiation to analytical installations.

In addition, the complex may additionally contain an x-ray lens in the form of a set of curved channels using multiple total external reflection of x-ray radiation from their walls, mounted to capture part of the diverging radiation of the x-ray tube and made with the possibility of focusing, as well as an analytical setup made with the possibility placement of the object of study with the combination of the required part with the focus area of x-ray radiation.

rotating, complex, tungsten. The use of an x-ray tube in which the anode is microfocus or shot, it is advisable to obtain radiation diverging in a large solid angle; tubes with a complex anode - to provide the possibility of obtaining various spectral lines of radiation according to the chemical elements that make up the anode; tubes with a rotating anode - to provide the possibility of obtaining high power due to improved heat dissipation; tubes with a tungsten anode - to obtain broadband x-ray radiation.

In cases where the proposed complex contains an x-ray tube with a rotating or complex or tungsten anode, it may additionally contain at least one monochromator mounted on the path of the quasi-parallel beam formed by the x-ray lens, with the possibility of separation and reflection of part of this beam in the direction of the analytical installation. In these cases, a quasi-parallel beam formed by one x-ray lens is used to provide at least two analytical facilities with x-ray radiation.

In the case when the analytical facility, which is part of the proposed complex, is intended for spectrometric studies, it contains means for placing the test sample, a detector excited in the radiation sample, a spectrometric path connected to the detector output and information processing and display means connected to the output of the latter. Such an analytical setup is placed on the side of the output focal region of the x-ray lens complex, which is installed with the ability to capture part of the diverging radiation of the x-ray tube and made with the possibility of focusing. This analytical setup should be able to combine the required part of the test sample with the focal region of the specified lens.

In analytical installations, to which a quasi-parallel radiation beam is transported, there are, in particular, the following possibilities.

If such an analytical setup is intended for spectrometric studies, it contains an x-ray lens in the form of a set of bent channels using multiple total external reflection of x-ray radiation from their walls, mounted and configured to focus a quasi-parallel radiation beam, and means for placing the test sample with the desired combination its parts with the focus area of x-ray radiation. In addition, this analytical setup contains a detector of radiation excited in the sample under study, a spectrometric path connected to the detector output, and information processing and display means connected to the output of the latter.

If the analytical setup as part of the proposed complex, to which the quasi-parallel radiation beam is transported, is intended for diffractometric studies, it contains a means for placing the test sample and its orientation relative to the beam propagation direction, a radiation detector diffracted on the test sample, and a tool for mutual positioning of the detector and the test sample, as well as processing and display means connected to the output of the detector, and formation.

If the analytical setup as part of the proposed complex, to which the quasi-parallel radiation beam is transported, is designed to obtain an image of the internal structure of objects, it contains means for positioning the object and a detector of radiation transmitted through the object with image visualization and registration tools.

If the analytical setup as part of the proposed complex, to which the quasi-parallel radiation beam is transported, is intended for X-ray lithography, it contains means for placing the mask and means installed behind it for placing the substrate with a resist layer deposited on its surface.

The proposed utility model is illustrated by drawings, which show:

FIG. 1 - the composition and relative position of the main parts of the proposed complex;

FIG. 3 is a schematic illustration of an x-ray lens for focusing diverging radiation (“full lens”);

FIG. 4 is a schematic illustration of an x-ray lens for converting diverging radiation into quasi-parallel (“half lenses”);

FIG. 5 - the composition and relative position of the equipment of the analytical setup intended for spectrometric studies, in the case when the radiation of the source is transported to this setup by a “full x-ray lens focusing the divergent radiation of the source;

FIG. 6 - the same in the case when the quasi-parallel radiation generated by the “half-lens” is transported to the analytical setup;

FIG. 7 - the composition and relative position of the equipment of the analytical setup, to which quasi-parallel radiation is transported, intended for diffractometric studies;

FIG. 8 - the composition and relative position of the equipment of the analytical setup, to which quasi-parallel radiation is transported, intended to obtain an image of the internal structure of the object;

FIG. 9 - the composition and relative position of the equipment of the analytical setup, to which quasi-parallel radiation is transported, designed for x-ray lithography;

FIG. 10 is a variant of the "geometry of the arrangement of the constituent parts of the proposed complex when using monochromators for" splitting the quasiparallel beam into parts transported to several analytical plants.

The proposed complex (Fig. 1) contains an x-ray tube 1, which is a common source of x-ray radiation for analytical facilities (workstations) 5, each of which has a composition of equipment that corresponds to the specialization of the analytical setup for a particular type of research, measurement or test. In the solid angle corresponding to the radiation generated by the x-ray tube 1, several (by the number of analytical units 5) x-ray lenses 2 are placed, each of which captures part of the radiation of the x-ray tube 1 in solid angle 3 and converts the divergent radiation that it perceives into a quasiparallel beam 4. The focal areas of the x-ray lenses 2 from the side of their input ends, if possible, are aligned with each other and with the center of the output aperture of the x-ray tube 1.

The output beam 4 of each of the lenses 2 is directed to the input aperture of the corresponding analytical unit 5. The analytical units 5 are located from the x-ray lens 2 at a distance chosen for reasons of placement convenience (so that the distance between the beams in the area where the analytical units are located is sufficient to accommodate the equipment and personnel) .

X-ray lenses 2, made with the possibility of converting diverging x-ray radiation into quasi-parallel, together with the quasi-parallel beams 4 formed by them form channels for transporting x-ray radiation from the x-ray tube 1 to analytical facilities (workstations) 5.

In a particular case, the complex may also contain one or several x-ray lenses 6 focusing the divergent radiation of the x-ray tube perceived by them in a small area located in a predetermined place at the entrance of a specialized analytical setup 8, requiring exactly this type of x-ray radiation affecting the object under study. The focused x-ray output beam of the lens 6 in FIG. 1 corresponds to a solid angle of 7. If necessary, in a complex that does not have focusing lenses 6 directly in the radiation zone of the x-ray tube, an equivalent effect can be obtained by including in the analytical setup 5 a lens similar to one of lenses 2, but oriented opposite to it. Such a lens converts a quasi-parallel X-ray beam 4 into a focused beam.

The personnel of the analytical facilities from direct x-ray radiation of the tube 1 are protected by a screen 9 having openings in the size of the beam section 4, 7. The protective screen 9 can be located near the analytical facilities 5, 8 (this case is shown in Fig. 1), and near the weekend the ends of the x-ray lenses 2, 6. Since the length of the beams 4 can be several meters or more, in the first case, the dimensions of the screen 9 are much larger than in the second. However, in the second case, one should expect a greater influence of inaccuracies in the manufacture of a backscreens, the final screen on the probability of exposure to personnel of direct radiation of the x-ray tube 1.

The most important elements of the proposed complex, through the use of which it is possible to achieve a technical result, constitute; of which were listed above when disclosing a utility model, are x-ray lenses.

The first lenses for controlling x-ray radiation (focusing divergent radiation, forming a parallel stream from diverging radiation, focusing parallel radiation, etc.) were a set of radiation transportation channels 10 (Fig. 2) bent as required, in which the radiation experiences multiple full external reflection from the walls 11. The process of multiple total external reflection of an individual quantum of x-ray radiation during propagation through one of the channels 10 x-ray The lenses shown in FIG. 2 with a broken line 12. Such lenses were made in the form of many capillaries or polycapillaries, passing through the holes or cells of supporting structures installed at a certain distance along the length of the lens (see: V.A. Arkadiev, A.I. Kolomiytsev, M. A. Kumakhov et al. Broadband X-ray optics with a large angular aperture. Uspekhi Fizicheskikh Nauk, 1989, Volume 157, Issue 3, pp. 529-537, US Patent No. 5,192,869 (publ. 09.03.93) 3). The lens as a whole has the shape of a barrel (i.e., tapers toward both ends) if it is designed to focus the diverging radiation, or half-barrel (i.e., tapers toward only one of the ends) if it is designed to convert the diverging radiation to quasi-parallel or to focus such radiation.

In the future, to designate the lenses of the two named types, including those having a different design than the one described above, the terms “full lens and” half lens, respectively, became widespread. The corresponding terminology is used below in the description of the proposed utility model.

A lens is also known in which the walls of adjacent radiation transport channels are in contact with each other along the entire length, and the channels themselves have a cross section of variable length, changing according to the same law as the full cross section of the lens (VMAndreevsky, MVGubarev, PIZhidkin , MAKumakhov, AVNoskin, I.Yu. Ponomarev, Kh.Z.Ustok. X-ray waveguide system with a variable cross-section of the sections. The IV-th All-Union Conference on Interaction of Radiation with Solids. Book of Abstracts (May 15-19, 1990, Elbrus settlement, Kabardino-Balkarian ASSR, USSR, pp. 177-178) U.S. Patent No. 5,570,408 (publ. 10/29/96) 5). The "full lens and" half lens with such channels are shown schematically in FIG. 3 and FIG. 4 respectively.

“A full lens (Fig. 3) has channels bent in such a way that their extensions to the left and to the right of the corresponding ends converge in the left 13 and right 14 focal areas, the size of which is on the order of the diameter of an individual channel. The curvature of the channels located closer to the periphery of the full lens is greater than the channels closer to its optical axis 15, which coincides with the longitudinal axis of symmetry. To ensure focusing of the diverging x-ray radiation, the quasi-point source must be in one of the focal regions, then focusing occurs in the other focal region.

“The half lens shown in FIG. 4, when diverging radiation is supplied to the left, it is converted into quasi-parallel radiation emerging from the right end. The bending of the channels, different at different distances from the optical axis 15 "of the half-lens, ensures the intersection of the extensions of their left ends in the focal region 16" of the half-lens, which should coincide with the location of the quasi-point source of diverging x-ray radiation; at the output end (right in Fig. 4), the channels of the half-lens are parallel. When applying quasi-parallel x-ray radiation to the right one in FIG. 4 end “of the half lens, it focuses in the focal region 16 located at the left end.

Due to the use of an x-ray tube as the source of radiation, which generates directly x-ray radiation, no means are required for extracting the x-ray range radiation from the source radiation in the described complex. The selection of radiation and its distribution along the transportation channels to analytical facilities also does not require the use of any special means or technical methods: it is enough to place lenses 2, 6 in the zone of radiation exit from tube 1 at a distance that ensures that the focal regions of the lenses are close to the effective geometric center of radiation of tube 1 .

No special tools are also required to maintain the required trajectory of the formed rays (X-ray beams 4, 7) on the way to analytical facilities 5, 8: it is sufficient to ensure mutual mechanical immobility of the X-ray tube 1 and lenses 2, 6. Properties of the X-ray tube 1 and X-ray lenses 2 , 6 are stable and can do without any adjustments after the correct initial installation.

Since the beam length of the transported quasi-parallel radiation, i.e. the distance between the output ends of the x-ray lenses and the analytical facilities does not exceed several meters (this distance is sufficient for convenient placement of the equipment of the analytical facilities and personnel), the attenuation and scattering of the x-ray radiation is small. Therefore, the transportation of radiation is possible directly in the air, without taking any measures for evacuation, due to which there are no problems associated with maintaining the vacuum in the proposed complex.

Radiation protection implemented using the screen 9, is structurally very simple and with a small power of the x-ray tube 1 (which, as will be shown below, may be quite acceptable) can be provided even by conventional building structures.

Unlike a synchrotron, which has a pulsed nature of the radiation, the parameters of which cannot be changed by the personnel of the analytical facilities, the radiation of the x-ray tube can be either continuous or pulsed with the desired parameters of the latter. Due to the possibility of working with continuous radiation in the proposed complex, studies can be carried out for which pulsed radiation is unacceptable (for example, due to the fact that, with the average intensity of pulsed radiation being the same as continuous radiation, nonlinear effects in the medium can be caused by a very high pulse intensity )

Analytical installations as part of the proposed complex can be designed to solve a large number of very diverse fundamental and applied problems. These are diffractometry and topography of simple, complex and also protein crystals; this is x-ray fluorescence analysis using focused x-ray beams; this is an image of the internal structure of various objects, including biological ones, including for medical purposes; this is an analysis of new materials and medicines, analysis of “chips, properties and quality of surfaces, etc.

If the analytical setup, which is part of the proposed complex, is intended for spectrometric studies, it contains (Fig. 5) means 17 for placing the test sample 18, a detector 19 of the radiation excited in the sample, connected to the output of the detector 19 spectrometric path 20 and connected to the output of the latter means 21 for processing and displaying information. Such an analytical setup 8 is placed on the side of the output focal region 22 ″ of the full x-ray lens 6, which is part of the complex (see also Fig. 1), which is mounted to capture part of the diverging radiation of the x-ray tube 1 and made with the possibility of focusing. The means 17 for placing the test sample should provide the opportunity to combine the required part of the test sample 18 with the output focal region 22 (right in Fig. 1, Fig. 5) of the “full lens 6. Information about the elements of the spectrometric path 20 (amplifiers, overlay cutter, multi-channel amplitude analyzer and others), as well as about the means 21 for processing and displaying information are given, in particular in the book: R. Woldset. Applied X-ray spectrometry. Moscow, Atomizdat, 1977 6, chapter 2. The main field of application of spectrometric studies is the determination of the elemental composition of a sample with an estimate of the quantitative content of various chemical elements in it.

A similar analytical setup can also use quasi-parallel x-ray radiation, the beam of which is formed by one of the "half lenses 2 (Fig. 1). For this, it is sufficient to supplement the installation 8 shown in FIG. 5, “half lens 23 (see FIG. 6, which shows the resulting

add-on installation 5). The role of the output focal region "full lens performs the focal region 24" of the half lens 23.

If the analytical setup 5 as part of the proposed complex, to which the quasi-parallel radiation beam is transported, is intended for diffractometric studies, it contains (Fig. 7) means 17 for placing the test sample 18 and orienting it relative to the beam propagation direction 4, detector 19 radiation diffracted on the test sample, and means 25 for the relative positioning of the detector 19 and the test sample 18, as well as means 26 of the image connected to the output of the detector 19 bots and display information. The means 25 for the mutual positioning of the detector and the test sample and the means 17 for placing the test sample and its orientation relative to the beam propagation direction are required to ensure high angular accuracy, and they are implemented in the form of goniometric mechanisms. The main field of application of such an analytical setup is the study of crystalline samples.

If the analytical installation 5 as part of the proposed complex, to which the quasi-parallel radiation beam is transported, is designed to image the internal structure of objects, it contains (Fig. 8) means 17 for placing object 18 and a detector 27 of radiation that has passed through the object. In the simplest case, a conventional X-ray film is used as such a detector in a package that protects it from exposure to light. Such a film at the same time performs the function of an image registration means, and after development, also the function of its visualization means. Other image acquisition schemes applicable in the analytical facilities of the proposed complex are described, for example, in European application N ° EP O 742 150 (publ. 31.07.96) 7.

If the analytical setup 5 as part of the proposed complex, to which the quasi-parallel radiation beam is transported, is intended for X-ray lithography, it contains (Fig. 9) means 28 for accommodating the mask 29 and installed behind it means 30 for placing the substrate 31 with the applied on its surface with a resist layer 32. For more complex schemes, see, for example, in US patent No. 5,175,755 (publ. 29.12.92) 8. In the analytical

installation (workstation) can be implemented processes not only contact, but also projection lithography, as well as LIGA - technology.

A number of other examples of the structure of analytical facilities, including the use of X-ray “full lenses” and “half-lenses” in their composition, are described, for example, in US Pat. No. 5,497,008 (publ. 05.03.96) 9 and European Patent No. EP O 555 376 (publ. 03/18/98) 10.

If tungsten is used as the material of the tube anode, then with the help of monochromators, it is possible to select a variety of wavelengths, since tungsten radiation is very broadband and intense.

If a complex target made of several chemical elements is used as an anode, then monochromators will selectively select particular wavelengths of characteristic radiation from the complex anode.

Depending on the type of x-ray tube, various “geometry of the location of the tube anode, x-ray lens and analytical setup can be used.

The “geometry shown above in FIG. 1, when each analytical setup has its own x-ray lens, which forms a beam of radiation only for this analytical setup, is one of the possible ones. In this "geometry, it is advisable to use, for example, tubes with a shooting or microfocus anode. Such tubes emit practically into half-space; therefore, a large number of “half-lenses” and “full lenses” can be arranged in the solid angle of their radiation.

In FIG. 10 shows a different "geometry, which is more characteristic of an x-ray source in the form of a tube (conventionally shown at 1) with a rotating anode. To enable the operation of a large number of analytical facilities, several (5-10) monochromators 33 are located at different angles along the path of the quasi-parallel beam 4 formed by the x-ray half-lens 2, which “intercept various parts 34 of the cross section of the original beam 4 emerging from the“ half-lens 2, and direct the reflected parts 35 of the initial beam 4 to the analytical units 5. For example, crystals with cut planes not parallel to the crystal can be used as monochromators 33 deciduous planes, and layered structures. The type of monochromator and the angle of its orientation with respect to the direction of the x-ray beam emerging from the half-lens determine the required degree of collimation of the part of the beam diffracted on it.

Thus, when using an x-ray tube as a source of diverging radiation, the radiation transport channels to analytical facilities can be divided into the following parts:

in the geometry shown in FIG. 1:

-the interval of the x-ray tube 1 (more precisely, its anode) -the input end of the x-ray lens 2 or 7 (within the solid angle 3);

- channels of an x-ray lens 2 or 7;

-the interval is the output end of the x-ray lens 2 or 7 — analytical setup 5 or 8 (within the cross section of the output beam 4 of the lens 2 or solid angle 7 corresponding to the output beam of the lens 6);

in the “geometry shown in FIG. 10:

-the gap of the x-ray tube 1 (more precisely, its anode); -the input end of the x-ray lens 2 (within the solid angle 3);

-channels of an x-ray lens 2;

- interval the output end of the x-ray lens 2 is a monochromator 33 (within the cross section of part 34 of the output beam 4 of the lens 2);

- interval monochromator 33 — analytical setup 5 (within the cross section of the beam 35 reflected by the monochromator).

Let us compare the radiation parameters of modern synchrotrons and an X-ray tube in the complex of the proposed design.

In book 1 in Fig. Fig. 15 (p. 20) shows the radiation brightness curve of the English Doris synchrotron (E 2 GeV, current 300 mA). As can be seen from this figure, in

In the vicinity of 10 keB, this synchrotron emits 10 photons / SeV- (mrad), i.e. in a narrow solid angle of 1 mrad and a narrow spectral range of 1 eV, “Doris emits about 10 ° photons within a second. An X-ray tube with a power of 1 W during the same time emits approximately 3-10 photons isotropically. These are quasimonochromatic photons in the spectral range with a width of about 10 eV. Accordingly, a 10-kW tube emits 3-U photons in 1 second.

I l “l

With the help of an X-ray “half-lens, converting diverging radiation into quasiparallel, used in the proposed complex, one can obtain the following number of photons transported quasi-parallel with an angular divergence of about 3 mrad:

N 3-10-a-l- (des) / 471 ph / s- (3 mrad) -10 eV,

where A03 is the aperture of the capture of radiation of the x-ray tube "half lens,

and - transmission coefficient "half lens.

Assuming that A03 is 0.1 rad, and 0.3, we get

N 2.5-10 foto / CEB. (Mrad)

those. in the proposed complex, an x-ray tube with an average power of 10 kW, coupled with optics, gives in the same spectral and angular range 25 times higher intensity than the Doris synchrotron. This shows that the radiation density identical to the Doris synchrotron in the vicinity of 10 keV can be obtained in the proposed complex with a tube power of only 400 watts. Such and even more powerful tubes are widely used in scientific research, for example, in diffractometry. So, Philips uses a 2.5 kW tube for diffractometry.

Currently, tubes with a rotating anode with a capacity of 30 to 100 kW are manufactured and freely sold. The cost of these tubes together with the generator is about 100 thousand dollars, which is about 3 orders of magnitude lower than the cost of a synchrotron.

From the above calculations and examples, the effectiveness and feasibility of using the proposed solution are visible.

The proposed complex, due to its relative simplicity and cheapness compared to traditional tools, is available for a wide circle of specialists and allows us to significantly expand the scope of X-ray research, testing, and measurement, providing an acceptable radiation brightness in the input aperture of analytical plants. It can be assumed that in the future it will be able to find wide application in large and medium physical laboratories.

Sources of information

1. Synchrotron radiation. Ed. K. Kuntsa. Moscow, Mir Publishing House, 1981.

2. V.A. Arkadiev, A. I. Kolomiytsev, M. A. Kumakhov and others. Broadband X-ray optics with a large angular aperture. Uspekhi Fizicheskikh Nauk, 1989, Volume 157, Issue 3, p. 529-537.

3. US patent No. 5,192,869 (publ. 09.03.93).

4.V.M. Andreevsky, M.V. Gubarev, P.I. Zhidkin, M.A. Kumakhov, A.V. Noskin, I.Yu. Ponomarev, JQi.Z.Ustok. X-ray waveguide system with a variable cross-section of the sections. The IV-th All-Union Conference on Interaction of Radiation with Solids. Book of Abstracts (May 15-19, 1990, Elbrus settlement, Kabardino-Balkarian ASSR, USSR, pp. 177-178).

5. U.S. Patent No. 5,570,408 (publ. 10/29/96).

6.P. Woldset. Applied X-ray spectrometry. Moscow, Atomizdat, 1977.

7. European application No. EP O 742 150 (published on July 31, 1996).

8. U.S. Patent No. 5,175,755 (publ. 29.12.92).

9. U.S. Patent No. 5,497,008 (publ. 03/05/96).

10.European patent No. EP O 555 376 (publ. 18.03.98).

Claims (13)

1. Measurement and testing complex for research in the x-ray range of radiation simultaneously on several analytical facilities, containing a radiation source, channels for transporting radiation to analytical facilities and equipment of analytical facilities, characterized in that as a radiation source it contains an x-ray tube, at least one channel for transporting radiation to analytical facilities contains an x-ray lens mounted and configured to capture part of the flow x-ray tube radiation and converting it into a quasi-parallel beam. 2. The complex according to claim 1, characterized in that at least one of the analytical facilities to which the quasi-parallel radiation beam is transported is designed for diffractometric studies and contains means for placing the sample under study and orienting it relative to the direction of propagation of the quasi-parallel beam, a detector of radiation diffracted on the test sample, and means for the mutual positioning of the detector and the test sample, as well as connected to the output of the detector GUSTs processing and displaying information. 3. The complex according to claim 1, characterized in that at least one of the analytical facilities to which the quasi-parallel radiation beam is transported is intended to obtain an image of the internal structure of the object and contains means for positioning the object and a detector of radiation transmitted through the object with means visualization and registration of the image. 4. The complex according to any one of claims 1 to 3, characterized in that at least one of the analytical facilities to which the quasi-parallel radiation beam is transported is intended for spectrometric studies and contains an x-ray lens mounted and configured to focus the quasiparallel radiation beam, means for positioning the test sample to combine the required part with the focus area of x-ray radiation, a detector of radiation excited in the test sample A spectrometric path connected to the detector output and a means for processing and displaying information connected to the output of the latter. 5. The complex according to claim 1, characterized in that at least one of the analytical facilities to which the quasi-parallel beam of radiation is transported is designed to perform X-ray lithography and comprises means for placing a mask and means for placing a substrate behind it applied on its surface with a resist layer. 6. The complex according to claim 1, characterized in that it further comprises an x-ray lens mounted and configured to capture part of the diverging radiation of the x-ray tube and focusing it, as well as an analytical setup placed on the side of the output focal region of this x-ray lens and made with the ability to position the object of study to combine the required part with the output focal region of this x-ray lens. 7. The complex according to claim 6, characterized in that the analytical setup, located on the output focal region of the specified x-ray lens, configured to capture part of the diverging radiation of the x-ray tube and focus it, is intended for spectrometric studies and contains a radiation detector excited in the studied sample, the spectrometric path connected to the detector output and the means for processing and displaying information connected to the output of the latter. 8. The complex according to any one of claims 1 to 7, characterized in that the x-ray tube is made with microfocus anode. 9. The complex according to any one of claims 1 to 7, characterized in that the x-ray tube is made with a shooting anode. 10. The complex according to any one of claims 1 to 7, characterized in that the x-ray tube is made with a rotating anode. 11. The complex according to any one of claims 1 to 7, characterized in that the x-ray tube is made with a complex anode. 12. The complex according to any one of claims 1 to 7, characterized in that the x-ray tube is made with a tungsten anode. 13. The complex according to any one of paragraphs.10-12, characterized in that it further comprises at least one monochromator installed with the possibility of separation and reflection in the direction of the analytical installation of a part of a quasi-parallel beam formed by an x-ray lens mounted and configured capture part of the diverging radiation of the x-ray tube and converting it into a quasi-parallel beam.