RU2811824C2 - Highly reliable laser diode systems of high power and high brightness blue glow and methods of their manufacture - Google Patents

Abstract

FIELD: laser systems.

SUBSTANCE: group of inventions relates to the laser systems of high power and high brightness, providing a blue laser beam. The solid-state device and the optical module are located in the internal cavity of the casing. The laser beam has a wavelength of 410 to 500 nm and a power density of at least 0.5 MW/cm² at the propagation surface. Upon exiting the housing propagation surface, the beam has a power of at least 100 W and a beam parameter product (BPP) of less than 100 mm⋅mrad. The inner cavity of the housing contains oxygen and is free from sources of silicon-based contaminants, which prevents the formation and build-up of SiO₂, with a degradation rate of beam properties of 2.3% per 1000 hours or less.

EFFECT: invention ensures preservation of the initial properties of the beam, including the power level.

57 cl, 11 dwg, 3 tbl, 31 ex

Description

[0001] This application claims priority under 35 U.S. Code §119(e)(1) as of the filing date of U.S. Provisional Patent Application Serial No. 62/800474, filed February 2, 2019, the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

FIELD OF THE INVENTION

[0002] The present inventions relate to high power laser systems that provide shorter wavelengths of from about 10 nm to about 600 nm, and in embodiments typically from about 350 nm to about 500 nm, laser energy, and applications of these systems and laser beams, including additive and subtractive manufacturing, materials processing and laser welding applications. The present inventions further relate to such laser systems and applications thereof that provide laser beams having excellent beam quality and which, in embodiments, maintain high quality and high power laser beams over long periods of time.

[0003] Infrared-based additive manufacturing systems (e.g., having wavelengths greater than 700 nm, and in particular wavelengths greater than 1000 nm) suffer, among other things, from two disadvantages that limit both the deposition volume and deposition rate.

[0004] As used herein, the terms "UV", "ultraviolet", "UV spectrum", and "UV portion of the spectrum" and similar terms, unless expressly indicated otherwise, are to be given their broadest meaning and may include radiation at wavelengths from about 10 nm to about 400 nm and from 10 nm to 400 nm, as well as all wavelengths within these ranges.

[0005] As used herein, the terms "laser diode", "diode emitter", "laser diode array", "laser diode die" and "emitter" and similar terms, unless expressly stated otherwise, are to be given their broadest meaning. In general, laser diodes are a semiconductor device that emits a laser beam, and such devices are commonly called edge-emitting laser diodes because the laser light is emitted from the end of the substrate. Typically, diode lasers with a single emission region (emitter) are called laser diode chips, while a linear array of emitters is called a laser diode array. The area emitting the laser beam is called the "face".

[0006] As used herein, the terms “high power” lasers and laser beams and similar terms, unless expressly stated otherwise, mean and include laser beams and systems that provide or propagate laser beams that have a power of at least 100 watts ( W), as well as higher powers, for example, from 100 W to about 10 kilowatts (kW), from about 100 W to about 1 kW, from about 500 W to about 5 kW, from about 10 kW to about 40 kW, from about 5 kW to approximately 100 kW, and all powers in these ranges, as well as higher powers.

[0007] As used herein, the terms "blue laser beams", "blue lasers" and "blue light", unless expressly stated otherwise, are to be given their broadest meaning and refer generally to systems that provide laser beams, laser sources, for example, lasers and diode lasers, which provide, for example, propagate, a laser beam or radiation having a wavelength of from about 400 nm to about 495 nm, from 400 nm to 495 nm, and all wavelengths in these ranges. Typical blue lasers have wavelengths in the range of approximately 405-495 nm. Blue lasers include wavelengths of 450 nm, approximately 450 nm, 460 nm, approximately 470 nm. Blue lasers can have spectral bandwidths ranging from about 10 pm (picometers) to about 10 nm, about 5 nm, about 10 nm, and about 20 nm, as well as higher and lower values.

[0008] As used herein, the terms "green laser beams", "green lasers" and "green light", unless expressly stated otherwise, are to be given their broadest meaning and refer generally to systems that provide laser beams, laser sources, for example, lasers and diode lasers, which provide, for example, propagate, a laser beam or radiation having a wavelength of from about 500 nm to about 575 nm. Green lasers include wavelengths of 515 nm, about 515 nm, 532 nm, about 532 nm, 550 nm, and about 550 nm. Green lasers can have spectral bandwidths ranging from about 10 pm to about 10 nm, about 5 nm, about 10 nm, and about 20 nm, as well as higher and lower values.

[0009] As used herein, the terms “highly reliable”, “highly reliable lasers and laser systems” and similar terms, unless expressly stated otherwise, mean and include lasers that have a service life of at least 10,000 hours (h) or more, about 20,000 hours, about 50,000 hours, about 100,000 hours, from about 10 hours to about 100,000 hours, from 10,000 to 20,000 hours, from 10,000 hours to 50,000 hours, from 20,000 hours to about 40,000 hours, from about 30,000 hours to about 100,000 hours and all values in these ranges.

[0010] As used herein, the terms "life", "system life", and "extended life" and similar terms, unless expressly stated otherwise, are defined as the time during which the output power, other properties, or both, and other, lasers remain at or near some percentage of their rated value (“nominal value” is the greater of (i) the design power, other laser properties, or both, determined or calculated by the manufacturer, or (ii) the initial power, other properties, or both, of the laser after first use, after all calibrations and settings have been completed). Thus, for example, "80% laser life" is defined as the total service life when laser power, other properties, or both remain at 80% of the rated value. For example, “50% laser life” is defined as the total operating life when laser power, other properties, or both remain at 50% of the rated value. The term "life" as used herein, unless expressly stated otherwise or unless otherwise clear from the context, refers to "80% life."

[0011] In general, the term "about" and the symbol "~" used herein, unless otherwise noted, mean that they include a deviation or range of ±10%, experimental or instrumental error associated with obtaining the specified value, and preferably the greater value of them.

[0012] As used herein, terms such as “at least”, “greater than”, unless expressly stated otherwise, also mean “not less than”, i.e., such terms do not include lesser meanings unless explicitly stated not otherwise stated.

[0013] Room temperature used here, unless otherwise noted, is 25°C. Also, the standard temperature and pressure are 25°C and 1 atmosphere. Unless expressly stated otherwise, all tests, test results, physical properties, and values that are temperature dependent, pressure dependent, or both are provided at standard temperature and pressure.

[0014] Unless otherwise indicated, the enumeration of ranges of values used herein, range, values from about "x" to about "y", and similar terms and quantities serve only as shorthand for individual references to individual values within the range. Thus, they include every component, element, value, quantity or number in that range. Unless otherwise indicated, all individual range points used herein are included in this specification and form part of this specification as if they were listed separately herein.

[0015] This “Background of the Invention” section is intended to introduce various aspects of the art that may be associated with embodiments of the present inventions. Therefore, the above description in this section provides a basis for a better understanding of the present inventions and should not be construed as an admission of prior art.

SUMMARY OF THE INVENTION

[0016] There is a continuing and increasing need for more reliable high power solid state lasers and systems at wavelengths in the blue and other spectral ranges, including laser diode systems, for a variety of applications including welding, additive manufacturing and other materials processing , where infrared lasers have several disadvantages described in the art. This ongoing need for such lasers and laser systems is, in part, a need to improve and replace existing infrared laser systems and to provide new laser applications that were not possible or economically feasible for infrared laser systems. Additionally, there is a need for highly reliable, high-power blue and other wavelength lasers for use in industrial applications.

[0017] The present inventions, among other things, satisfy these needs by providing improvements, products, devices and processes described and disclosed herein.

[0018] Thus, a high power, high brightness solid state laser module is provided to provide a high quality laser beam for long periods of time without significant degradation of the properties of the laser beam, the module having: a casing defining an internal cavity; wherein the internal cavity is isolated from the environment, which is external to the casing; a solid-state device for propagating a laser beam from a propagation surface of the solid-state device along a path of the laser beam, and wherein the laser beam has a power density of at least about 0.5 MW/cm ² at the propagation surface; an optical module having optical communication with the solid-state device and located in the path of the laser beam; wherein the solid-state device and the optical module are located in the casing and in the internal cavity, whereby the solid-state device and the optical module are isolated from the external environment; wherein the housing comprises a housing propagation surface whereby the laser beam passes from the housing to the external environment along the path of the laser beam; the propagation surface of the casing has an optical connection with the optical module and is in the path of the laser beam; the laser beam, upon exiting the housing propagation surface, is characterized by beam properties, the beam properties comprising: (i) a power of at least 100 W; and (ii) beam parameter product (BPP) less than 100 mm·mrad; and wherein the internal cavity is free from sources of silicon-based contaminants, whereby the formation of SiO ₂ is prevented in the internal cavity during operation of the solid-state device; whereby the layering of SiO ₂ in the internal cavity is prevented; in this case, the rate of degradation of beam properties is 2.3% per 1000 hours or less.

[0019] A high power, high brightness solid state laser module is further provided to provide a high quality blue laser beam for long periods of time without significant degradation of the laser beam properties, the module having: a housing defining an internal cavity; wherein the internal cavity is isolated from the environment, which is external to the casing; a plurality of diode laser devices for propagating a plurality of laser beams from a plurality of faces along a plurality of diode laser beam paths, the laser beams having a wavelength in the range of 400 nm to 500 nm; and wherein each laser beam has a power density of at least about 0.5 MW/cm ² on each of the faces; an optical module having optical communication with each of the diode laser devices and located in the paths of the laser beams; wherein the optical module contains collimating optics, for example, a collimating lens, and beam combining optics; wherein the optical module combines said plurality of diode laser beams to provide a combined laser beam along the path of the combined laser beam; wherein said plurality of diode laser devices and the optical module are located in the housing 526 and in the internal cavity, whereby the said plurality of diode laser devices and the optical module are isolated from the external environment; wherein the housing comprises a housing propagation surface whereby the combined laser beam passes from the housing to the external environment along the path of the combined laser beam; the propagation surface of the casing has an optical connection with the optical module and is in the path of the combined laser beam; the combined laser beam, upon exiting the housing propagation surface, is characterized by beam properties, the beam properties comprising: (i) a power of at least 100 W; and (ii) BPP is less than 40 mm·mrad; and wherein the inner cavity is free from sources of silicon-based contaminants, whereby no SiO ₂ is generated in the inner cavity during operation of said plurality of diode laser devices; whereby the layering of SiO ₂ in the internal cavity is prevented; in this case, the rate of degradation of the properties of the combined beam is 2.3% in 1000 hours or less.

[0020] In addition, a high power, high brightness solid state laser module 600 is provided to provide a high quality blue laser beam along a laser beam path for long periods of time without significant degradation of the laser beam properties, the module having: a housing defining an internal cavity; wherein the internal cavity forms an isolated environment; a plurality of optically active surfaces, wherein the blue laser beam propagates from, passes into, or is reflected by the optically active surfaces; said plurality of optically active surfaces is located in an isolated environment of the inner cavity of the casing; wherein at least one of the optically active surfaces is located on the solid-state laser device; wherein the laser beam has a power density of at least about 0.5 MW/cm ² on one or more optically active surfaces, and wherein the internal cavity is free from sources of silicon-based contaminants, whereby the internal cavity is prevented from formation of SiO ₂ ; wherein the inner cavity contains a gas containing oxygen; whereby, during operation of the solid-state laser device, CO ₂ from carbon-based pollutants is generated in the internal cavity; whereby layering of carbon and SiO ₂ is prevented on said plurality of optically active surfaces; in this case, the rate of degradation of the blue laser beam power is 2.3% in 1000 hours or less.

[0021] Additionally provided is a housing containing high power, high brightness solid state laser devices for integration into laser systems that provide a high quality blue laser beam for long periods of time without significant degradation of the laser beam properties, the housing having: a housing defining an internal cavity; wherein the internal cavity is isolated from the environment, which is external to the casing; wherein the casing has a window, the window forming part of the internal cavity; a solid-state device for propagating a laser beam from a propagation surface of the solid-state device along the path of the laser beam, the laser beam having a wavelength in the range of 410 nm to 500 nm; and wherein the laser beam has a power density of at least about 0.5 MW/cm ² at the propagation surface; the window has an optical connection with the solid-state device and is located in the path of the laser beam; wherein the solid-state device is located in the casing and in the internal cavity, and wherein the inner surface of the window is not exposed to the external environment, whereby the solid-state device and the inner surface of the window are isolated from the external environment; whereby the laser beam passes from the housing through the window into the external environment along the path of the laser beam; wherein the internal cavity is free from sources of silicon-based contaminants, whereby the formation of SiO ₂ is prevented in the internal cavity during operation of the solid-state device; whereby the layering of SiO ₂ in the internal cavity is prevented; in this case, the degradation rate of the beam properties is 2.3% per 1000 hours or less; and wherein the inner cavity contains a gas that is at least 1% oxygen; whereby during operation of said plurality of diode laser devices, CO ₂ from carbon-based contaminants is generated in the internal cavity, whereby the propagation surface and the internal surface of the window remain free of carbon deposits.

[0022] In addition, these systems and methods are provided having one or more of the following features: no SiO ₂ is generated in the internal cavity during operation of the solid-state device; During operation of a solid-state laser, practically no SiO ₂ is formed, so that the internal cavity is free of SiO ₂ ; during operation, the internal cavity remains free of SiO ₂ ; the internal cavity is free of SiO ₂ ; during operation of a solid-state device, carbon deposits do not form in the internal cavity; During operation of a solid-state laser, carbon deposits are practically not formed, so that the internal cavity is free of carbon deposits; during operation, the internal cavity remains free of carbon deposits; the internal cavity is free of carbon deposits; the system has tens, hundreds or thousands of laser diodes, and these systems have laser diodes emitting laser beams at wavelengths in the blue region of the spectrum; these systems have laser diodes that emit laser beams at wavelengths of about 500 nm or less; these systems have laser diodes emitting laser beams at wavelengths from about 500 to about 10 nm; The BPP of the laser beam is less than approximately 100 mm·mrad; The BPP of the laser beam is less than approximately 50 mm mrad; The BPP of the laser beam is less than about 40 mm mrad; The BPP of the laser beam is less than approximately 20 mm mrad; The BPP of the laser beam is less than about 15 mm mrad; these systems have laser diodes that emit laser beams at wavelengths from 500 to 10 nm; laser beams have a spectral bandwidth of about 20 nm or less, about 5 nm or less, about 1 nm or less, and about 0.5 nm or less, a spectral bandwidth of about 20 nm to about 0.5 nm, and all spectral widths bands in this range; laser systems have focusing optics; the laser system has collimating optics; laser systems have scanners; and the laser system has diffraction gratings; the laser system has reflective optics; laser system has volume Bragg gratings (VBG), Bragg gratings, etalons, prisms, variable attenuators, shutters, optical fibers, graded index lenses, lenses, cylindrical lenses, wave plates, polarization combining cube, monolithic optical combining modules, Raman crystals , frequency doubling crystals, dielectric mirror modules, beam measurement modules, power control modules; the internal cavity has a gas that has at least 10% oxygen, and during operation of the solid-state device, CO ₂ is created from carbon-based pollutants in the internal cavity; Carbon layering is prevented on the distribution surface of the solid-state device and optical module; and the inner cavity has a gas that has at least 1% oxygen, whereby during operation of the solid-state device, CO ₂ from carbon-based pollutants is generated in the inner cavity; Carbon layering is prevented on the distribution surface of the solid-state device and optical module.

[0023] Further provided are these systems and methods having one or more of the following features: Additionally, a high power, high brightness solid state laser device package is provided for integration into laser systems that provide a high quality blue laser beam for long periods of time without significant degradation of the properties of the laser beam, and the housing has: a casing forming an internal cavity; wherein the internal cavity is isolated from the environment, which is external to the casing; wherein the casing has a window, the window forming part of the internal cavity; a solid-state device for propagating a laser beam from a propagation surface of the solid-state device along the path of the laser beam, the laser beam having a wavelength in the range of 410 nm to 500 nm; and wherein the laser beam has a power density of at least about 0.5 MW/cm ² at the propagation surface; the window has an optical connection with the solid-state device and is located in the path of the laser beam; wherein the solid-state device is located in the casing and in the internal cavity, and wherein the inner surface of the window is not exposed to the external environment, whereby the solid-state device and the inner surface of the window are isolated from the external environment; whereby the laser beam passes from the housing through the window into the external environment along the path of the laser beam; wherein the internal cavity is free from sources of silicon-based contaminants, whereby the formation of SiO ₂ is prevented in the internal cavity during operation of the solid-state device; whereby the layering of SiO ₂ in the internal cavity is prevented; whereby the beam property degradation rate is 2.3% in 1000 hours or less; and wherein the inner cavity has a gas that is at least 1% oxygen; whereby during operation of said plurality of diode laser devices, CO ₂ from carbon-based contaminants is generated in the internal cavity, whereby the propagation surface and the internal surface of the window remain free of carbon deposits.

BRIEF DESCRIPTION OF THE DRAWINGS

[0024] FIG. 1 is a graph of output power versus time providing a degradation curve showing the rate of degradation for a high power blue laser system without using the assembly, cleaning, and housing embodiments of the present inventions. The system of Fig. 1 contains sources of silicon-based contaminants and is thus not free from sources of silicon-based contaminants.

[0025] FIG. 2 is a graph of embodiments of improved output power versus time, providing a degradation curve showing the degradation rate for 5 different high power blue laser systems in accordance with the present inventions.

[0026] FIG. 3 is a schematic diagram of a laser system according to the present inventions.

[0027] FIG. 4 is a schematic diagram of a laser system according to the present inventions.

[0028] FIG. 5 is a schematic diagram of a laser system according to the present inventions.

[0029] FIG. 6 is a schematic diagram of a laser system according to the present inventions.

[0030] FIG. 7 is a graph of laser power (in percent) versus service life (in hours) of an embodiment of a laser system according to the present inventions.

[0031] FIG. 8 is a graph of laser power (in watts) versus service life (in hours) of an embodiment of a laser system in accordance with the present inventions.

[0032] FIG. 9 is a schematic diagram of a diode laser showing typical areas where contaminant deposits may occur but are prevented by embodiments of the present inventions in accordance with the present inventions.

[0033] FIG. 10 is a schematic illustration of a diode laser in an extended life package in accordance with the present inventions.

[0034] FIG. 11 is a schematic illustration of a line of laser diodes in an extended life package in accordance with the present inventions.

DESCRIPTION OF PREFERRED IMPLEMENTATION OPTIONS

[0035] The present inventions generally relate to lasers that produce laser beams of high quality and reliability in the blue wavelength ranges. In embodiments, generally, laser systems and housing are provided with solid-state lasers for such systems in the wavelength range from about 400 nm to about 500 nm.

[0036] Although this disclosure focuses primarily on the 500 nm wavelength, it is merely illustrative and it should be understood that the provided packaging, assembly, and cleaning technologies are applicable to laser systems at wavelengths in the blue-green, green , shorter wavelength ranges of the spectrum, and potentially at other wavelengths, and in particular to high power and high brightness systems.

[0037] Typically, the output power of blue laser diode emitters is generally about 5 W per diode, and typically less than 10 W per diode, although higher powers are possible. High-power blue laser systems are produced by combining beams from multiple emitters, such as diodes. The combination of these blue laser beams can be made from individual emitters, lines of emitters, or their combinations and variants. Laser beams from these emitters are combined using, for example, combinations of spatial, spectral, coherent and polarization techniques. Examples of these beam combining systems are described and disclosed in US Patent Publications No. 2016/0322777, 2018/0375296, 2016/0067827 and 2019/0273365, and US Patent Application Nos. 16/695,090 and 16/558,140, the entire contents of which are incorporated herein. link.

[0038] In general, combining these beams from multiple emitters involves the use of passive optical elements to collimate and combine the beams, such as lenses, mirrors, diffraction gratings, wave plates. Raman transformation can also be used to combine beams. High brightness sources are required for most industrial applications such as welding, soldering or additive manufacturing; they typically have a very short focal length lens placed in close proximity to the laser emitter within the same housing. Below, components in the housing refer to any element that forms the laser module; they are grouped into optically functional components (such as lenses, gratings, mirrors, waveplates, windows), mechanical components (such as housing housing, spacers, supports), and positioning components (such as adhesives, solders, mechanical fasteners).

[0039] Laser diode manufacturers have improved the design and manufacturing process of blue laser diodes to ensure high reliability of the emitters themselves. Likewise, reliable dielectric coatings are available that provide the required reflectance at blue wavelengths while being compatible with the typical intensities of blue laser diode sources. However, prior to the present inventions, high power blue laser diode systems did not have the level of reliability required for use in industrial applications and, in particular, for cost-effective use in industrial applications. This has been found to be a consequence of the presence of silicon and carbon based contaminant sources that are typically introduced into the system during system assembly; and which, as described below, have the potential to form deposits on the active optical surfaces of the system during laser operation.

[0040] It has been discovered that the limiting factor, and, in embodiments, the main limiting factors for the lifetime of high power blue laser diode systems, relates to the housing of the system and, in particular, the diode, the optical module, and both the diode and optical module. Contamination from volatile organic compounds, such as hydrocarbons or polysiloxanes, may result from outgassing of adhesives or other materials in the housing. Other common sources of contamination include airborne contaminants present in the environment during the assembly process, residues from any component storage containers, surface contaminants present on tools used in the process, and, in general, any surface that comes into contact with any materials used in the housing. In general, it is now believed that any organic compound that has a vapor pressure sufficient to generate trace amounts of gaseous contaminants in the temperature range associated with normal laser operation is potentially detrimental to the reliability of the laser system. It is theorized that the short wavelength of blue lasers and shorter wavelength lasers enables two-photon processes to efficiently generate reactive products such as atomic oxygen, hydroxyls, or ozone within the body. These reactive products then react in the gas phase with volatile organic contaminants, resulting in deposits or deposits of various solids on optical surfaces in the beam path, i.e., optically active surfaces, which increases optical loss, reduces system power output, and deteriorates the properties of the laser beam over time. There is a theory that these deposits and build-ups reduce, and greatly reduce, the service life of the system. There is also a theory that these deposits and build-ups are the main reason the system reaches the end of its life.

[0041] Thus, as described and shown in this specification, embodiments of the present inventions are in theory to minimize, reduce, and prevent these build-ups and provide blue and potentially green laser systems that have high reliability, low degradation rates and long service life.

[0042] Thus, with reference to FIG. 3 is a schematic block diagram of a high power, high brightness blue laser system 300. System 300 has a set of laser diodes, such as emitters 301. Laser diodes 301 have various mechanical components 320 for mounting, positioning, and holding the diodes. These mechanical components 320 are directly or indirectly physically coupled, such as bonded, connected, etc., to the base 321. The base 321 is mechanically coupled to a cover 322, which has an interior surface 323. The cover 322 is attached to the base 321 and is soldered to the base. to form a housing 326 that houses or contains an internal cavity 334 that is isolated from the external environment 335. There are optical components 302 that are directly or indirectly physically coupled to additional mechanical components 324 that are directly or indirectly physically coupled to the base 321. Laser diodes 301 and optical components 302, which are contained in the internal cavity 334, are isolated from the external environment 335 by a housing 326.

[0043] Each of the laser diodes has an edge, for example 304 (only one of which is shown for clarity), from which blue laser beams are emitted. Laser beam 350 propagates along laser beam path 350a (it will be understood that the laser beam follows the laser beam path and is thus the same as the laser beam path) to optics 302 and then to and through window 325 in housing 326. Thus, the laser beam propagates through the internal cavity 334 and from this cavity to the external environment 335.

[0044] The interior cavity of these embodiments, and thus the environment within the cavity, and preferably all surfaces within the cavity, are free from sources of silicon-based contaminants such as siloxanes, polymerized siloxanes, linear siloxanes, cyclic siloxanes, cyclomethicones, and polysiloxanes. Specifically, in one embodiment, the surfaces and connections within the housing that are heated during operation, that are exposed to the laser beam, and that are exposed to both are free from sources of silicon-based contaminants. The term "free from" means that the amount of contaminants present is so small that it produces a negligible, and preferably zero, amount of silicon (or the specified contaminant) released into the internal cavity during use. Thus, the theory is that the reactive oxygen produced during the propagation of a blue laser beam through the internal cavity will have little or no silicon available to react with it, and will thus be minimized formation of SiO ₂ , preferably SiO ₂ formation will be prevented, and more preferably SiO ₂ will not form, and in turn SiO ₂ deposits will be minimized, SiO ₂ deposits will be prevented, and more preferably SiO ₂ deposits will not form on optically active surfaces inside the cavity. The formation of silicon-based contaminants is prevented, and thus the amount of silicon-based contaminants is reduced to such a low level that any amount of silicon available to form SiO ₂ is negligible, negligible, or less than the level that would provide laser degradation rates, higher degradation rates in embodiments of the present systems. In general, an optically active surface is any surface that contacts the laser beam and is in the path of the laser beam, and may include edges, fiber ends, mirrors, lenses, windows, propagation surfaces, and transmission surfaces.

[0045] The interior cavity of these embodiments, and thus the environment within the cavity, however, may contain sources of carbon-based contaminants. Thus, it is not necessary to remove all or most of the carbon-based contaminant during assembly, such as enclosure, of the laser module or system. Such carbon-based contamination may include, for example, cleaners, solvents, lubricants, oils, human fingerprints and oils, and generally any other hydrocarbon source. The internal cavity contains oxygen gas, a source of oxygen gas during operation (eg, a port or flow line in the housing to supply oxygen to the system during operation), or both. Oxygen forms reactive atomic oxygen when exposed to a blue laser beam, and this reactive oxygen forms CO ₂ gas when reacted with carbon, which is released from carbon-based pollution sources, and is thus minimized, preferably eliminated, and more carbon is preferably prevented from depositing, settling, or layering on the optically active surfaces in the internal cavity.

[0046] The interior cavity of these various embodiments may have from 1% to 100% oxygen, from about 5% to about 80% oxygen, from about 10% to about 50% oxygen, from about 30% to about 80% oxygen, from about 5% to about 30% oxygen, and the amount of oxygen present in atmospheric air (for example, the internal cavity may contain clean, dry air). The other gas in the internal cavity may be, for example, nitrogen.

[0047] The internal cavity of these embodiments may have less than 0.01 ^ppm silicon, less than 0.001 ^ppm silicon, less than 0.0001 ^ppm silicon, and lesser amounts present or accessible in the internal cavity.

[0048] The combination of a blue laser beam with one and preferably both oxygen gases in the internal cavity and the absence of silicon-based contamination sources in the internal cavity of the laser module provides modules that can last a lifetime (and can also be accurately characterized, marketed, and marked as having such service lives) from about 5,000 hours to about 100,000 hours, from about 10,000 hours to about 90,000 hours, from about 5,000 hours to about 50,000 hours, from about 30,000 hours to about 70,000 hours, at least about 20,000 hours , at least about 30,000 hours, at least about 40,000 hours, at least about 50,000 hours and long service lives.

[0049] These various embodiments of laser systems or modules having this high reliability, i.e., these long lifetimes, can provide or propagate blue laser beams (e.g., wavelengths from about 410 nm to about 500 nm, 410 nm to 500 nm, about 405-495 nm, 450 nm, about 450 nm, 460 nm, and about 470 nm). These blue laser beams may have a spectral bandwidth of about 10 pm (picometers) to about 10 nm, about 5 nm, about 10 nm, about 20 nm, about 10 nm to about 30 nm, about 5 nm to about 40 nm, about 20 nm or less, about 30 nm or less, about 15 nm or less, about 10 nm or less, and higher and lower values. These blue laser beams can have powers from about 100 W (watts) to about 100,000 W, from about 100 W to about 40,000 W, from about 100 W to about 1000 W, about 200 W, about 250 W, about 500 W, about 1000 W, about 10,000 W, at least about 100 W, at least about 200 W, at least about 500 W, at least about 1000 W, and higher and lower powers. When housed in individual diodes, these laser beams can have powers ranging from about 1 W to about 10 W, about 3 W, about 5 W, about 6 W, and about 10 W or more. These blue laser beams may have a BPP from about 5 mm mrad to about 50 mm mrad, less than about 40 mm mrad, less than about 30 mm mrad, less than about 20 mm mrad, less than about 15 mm mrad, less approximately 10 mm mrad, 20 mm mrad or less, and 15 mm mrad or less, as well as greater or lesser values. In Raman laser systems, the BPP for these blue laser beams can be less than 5 mm mrad, less than 1 mm mrad, about 0.1 to about 1 mm mrad, about 0.1 to about 0.5 mm mrad, approximately 0.13 mm mrad, and approximately 0.15 mm mrad.

[0050] These laser beams for these various embodiments of laser systems and modules may have degradation rates of beam properties (e.g., power, BPP, spectral bandwidth, or other beam properties, and combinations of one or more and all of these properties) of approximately 2. 5% per 1000 hours or less, about 2.3% per 1000 hours or less, about 2.1% per 1000 hours or less, about 2.0% per 1000 hours or less, about 1.8% per 1000 hours or less, from about 2.3% per 1000 hours to about 1.5% per 1000 hours, as well as higher and lower values. In preferred embodiments, these degradation rates are present starting at and based on "normal values" of properties for the laser over the life of the laser system, or both. In preferred embodiments, these degradation rates are present throughout the life of the system. In more preferred embodiments, laser systems will have some period of time in their service life where the degradation curve, i.e., the graph of degradation versus time, is straight, i.e., the degradation rate is zero. This zero degradation time period can be from 1 hour to 500 hours or more, can be for 10% of the service life, 20% of the service life, 30% of the service life or more.

[0051] It should be noted that these contaminants are generated when lasers are operated at low powers as well as high powers, throughout their operating range and at design powers. Thus, these degradation rates, unless explicitly stated otherwise, are for operating the laser at design powers, within the design operating ranges, or within the normal and established operating ranges for such lasers.

[0052] It is theorized that there are three main components that contribute to the build-up of deposits on optically active surfaces, thereby reducing the life of blue laser systems. These components are carbon and SiO ₂ . The conventional approach is to ensure that any such deposit-promoting components are reduced or eliminated during assembly and enclosure. However, the present inventions contradict this conventional approach due to the increased amount of oxygen that could potentially increase the amount of SiO ₂ deposits to control any residual hydrocarbon contamination. Thus, residual hydrocarbon contamination may be present, but the system prevents and preferably eliminates system hazards due to increased oxygen levels. The amount of siloxanes is minimized and preferably reduced to zero. Thus, one of the components necessary to minimize or eliminate SiO ₂ deposits or deposits is to allow oxygen to neutralize hydrocarbon deposits and deposits by producing CO ₂ instead of solid carbon deposits or deposits. In one embodiment, the amount of hydrocarbon contaminants is preferably minimized and can be reduced to substantially zero.

[0053] There are a large number of different known cleaning and assembly technologies and procedures, such as assembly and clean room protocols, solvent washing, extraction, plasma cleaning, etc., that can be used to remove and prevent the presence of any source of contamination silicon-based, any carbon-based contaminant source, or both. The present cleaning and assembly technologies are an example of many other such technologies and combinations of these technologies that are applicable to these laser systems; and will be applicable to blue laser systems, shorter wavelength systems, blue-green and green laser systems, and high power systems of the present embodiments. In embodiments of the assembly process of present solid-state lasers, optical modules, laser systems, and combinations and variations thereof, various cleaning and component assembly techniques may be used to minimize the harmful effects of various fouling phenomena that have been found in blue and green laser systems, as well as in systems with shorter wavelengths. In embodiments, methods for cleaning and assembling optical components for blue laser systems and systems having shorter and longer wavelengths are used to suppress, minimize, or eliminate materials that degrade laser performance over time. These assembly processes for such lasers, optical modules and systems eliminate and resolve the reliability issues of prior art systems. For example, in one embodiment, a cleaning method is used to remove sources of silicon-based contaminants, wherein the operating methods in the embodiments are configured to remove targeted contaminants at specific stages of the assembly process at specific locations on components and combinations and variations thereof. This purification method may provide an embodiment of a housing that houses a solid-state laser, an optical module, a laser system (eg, laser and optics), or combinations thereof, preferably having levels of silicon-based contaminants that are not detected by standard analytical technologies. Such packages, which include any of the present embodiments and Examples, may have amounts of silicon-based contaminants that are less than 0.01 g, less than 0.001 g, less than 0.0001 g, and less than 0.00001 g, and less 0.000001 g, in an isolated housing environment. Such housings, which include any of the present embodiments and Examples, may have amounts of silicon-based contaminants in the internal cavity (determined in ^ppm of silicon based on components of the internal cavity environment, such as gas contained in the internal environment ), which are less than 0.1 million ^-1 silicon, less than 0.01 million ^-1 silicon, less than 0.001 million ^-1 silicon, less than 0.0001 million ^-1 silicon, less than 0.00001 million ^-1 silicon, and even less. These systems and methods may have one or more of the following features: primarily remove volatile polysiloxane-based contaminants; provides the advantage of removing any residual volatile hydrocarbons; and other operating parameters are selected to remove other contaminants.

[0054] In one embodiment of the assembly process, plasma cleaning is used, and, in particular, plasma cleaning removes trace amounts of contaminants from the surfaces of components in the housing to remove contaminants or particles and, for example, large quantities of these contaminants or particles. In one embodiment, plasma cleaning is used with a pre-cleaning step that uses pre-cleaning of the surface with carefully selected solvents, both polar and non-polar. Preferably, the solvent is selected such that its polarity matches that of the target contaminant. Thus, it is contemplated that a variety of pretreatment, purification, and plasma purification steps can be performed, and that these steps can be tailored to specific contaminants.

[0055] In one embodiment of these assembly processes, system components are heated at reduced pressure for predetermined periods of time to remove residual traces of volatile contaminants to accelerate degassing of all volatile components. This preheating step can be and is preferably used with other assembly technologies disclosed in this specification. Operating conditions of temperature and pressure are selected such that the vapor pressure of the target contaminant is higher than the actual pressure in the furnace and is still safe for the component. This step also ensures that any residual solvents from the pre-cleaning steps are removed from the component.

[0056] One embodiment of the assembly process defines a pre-cleaning and cleaning sequence in which it is preferable to measure the polar and non-polar components of the surface free energy of the parts to be cleaned at different stages of the cleaning process. This provides useful information for selecting the appropriate combination of solvents and the best gas mixture for targeted removal of actual contaminants. In embodiments, the preferred sequences may be different for different module components due to the different manufacturing, storage, and handling histories of each part.

[0057] In one embodiment of the assembly process, these cleaning technologies are performed immediately prior to enclosure or during enclosure, as an additional or secondary or tertiary purification step, such as a final purification step. It should be understood that even if parts and fixtures are thoroughly cleaned before assembly, there is a possibility that some contamination will be introduced into the housing during assembly. This may occur, for example, due to airborne contaminants present in the assembly area; outgassing from adhesives during curing is another source of contamination. Thus, in one embodiment, final cleaning of the module occurs immediately prior to sealing the housing. For individual components, the same cleaning methods described above can be used.

[0058] In FIG. 9 shows a schematic representation of a laser diode 1000. This diode has a cross guide 1010, a leading edge 1011, a mode 1012, and vertical confinement layers 1013. Contaminants that are generated during operation typically layer along the vertical confinement layer 1013 of the laser diode, with the largest Contamination is deposited in the central region of the mode and typically decreases as the mode intensity decreases in the transverse direction. Embodiments of the present systems and methods provide systems that, in operation, eliminate, minimize, and preferably prevent the occurrence of this buildup, as well as other buildups and deposits.

[0059] To prevent the penetration of external contaminants, laser systems are high power and typically sealed with an inert or protective atmosphere, for example, an atmosphere with little and preferably zero oxygen. However, this technology has proven to be less effective for blue laser systems and ineffective in providing long service life for blue laser systems. It is theorized that the prior art use of an inert atmosphere is ineffective for blue laser systems and is also ineffective for green laser systems due to the contaminant dissociation effect described in this specification, and it is also theorized that perhaps There are other phenomena, both studied and not yet fully understood, whose effects on laser efficiency degradation can be seen during normal operation of these laser systems at wavelengths in the blue range of the spectrum, as well as in green laser systems. Additionally, during operation of these systems, the temperature inside the housing increases, which also leads to outgassing from any component in the module; Thus, these trace amounts of contaminants generated due to thermal degassing can have a detrimental effect on system reliability, and this effect can be very detrimental in some situations.

[0060] To overcome these problems in systems at blue wavelengths and, theoretically, green laser systems, as well as systems at shorter wavelengths, embodiments of the present inventions provide, among other things, examples of suitable methods for accurately cleaning, assembling, and both cleaning and assembling the system housing or casing, including the optical housing (as well as the components within that housing, including the solid-state laser) during the assembly process, and preventing these harmful processes and degradation of the laser system .

[0061] Another problem, in addition to the buildup of volatile organic contaminants on optical surfaces in the path of the laser beam, is the buildup of silicon dioxide (SiO ₂ ) on the laser diode facet surface or other optical components. This layering of silica causes the reflectance of the coating to change. In some cases, the layering of silica changes the optical properties of the surface. The individual blue laser diode before collimation has a very intense optical field on the surface of the laser diode itself. The power density at the edge can exceed a maximum of 20 MW/cm ² due to the formation of modal filaments in the resonator. It was discovered and theorized that this high power density is what triggers the two-photon reaction that dissociates the atmosphere in the housing. After dissociation, the free oxygen atoms quickly combine with any free silicon to form SiO ₂ on the face. SiO ₂ is deposited similar to carbon getteration. The process of formation and deposition of SiO ₂ can also occur throughout other optics, including collimating optics, but due to the significantly lower power densities on the collimating optics, which can be on the order of several kW/cm ² , this deposition rate is 1000 times lower than the rate of deposition. deposits on the edges, but should still be taken into account when placing in the housing, assembling and cleaning the system.

[0062] The optically active surface of the solid-state laser device of the present systems and modules from which the laser beam propagates, such as a fiber tip, window, or edge, may have a power density of at least about 0.5 MW/cm ² , at least about 1 MW/ ^cm2 , at least about 10 MW/ ^cm2 , at least about 20 MW/ ^cm2 , at least about 50 MW/ ^cm2 , at least about 100 MW/ ^cm2 , at least about 500 MW/ ^cm2 , about 1000 MW/ ^cm2 or less; from about 10 MW/cm ² to about 100 MW/cm ² , from about 5 MW/cm ² to about 20 MW/cm ² and from about 50 MW/cm ² to about 500 MW/cm ² .

[0063] Any solid-state device for generating and propagating a laser beam can be used in the present systems and modules. Preferably, the solid-state device propagates a laser beam having a wavelength of wavelengths in the blue, blue-green and green spectral ranges. Such solid-state laser devices may be, for example, laser diodes, fiber lasers, Raman fiber lasers, and crystal-based Raman lasers (eg, diamond, KGW, YVO ₄ , Ba(NO ₃ ) ₂ , etc.), and combinations and variations of one or more of them. Present systems may have one, two, three, five, ten, tens, one hundred, hundreds, or thousands of these solid state devices whose beams must be combined to provide a high power, high brightness laser beam for industrial and other applications.

[0064] It should be understood that while this specification focuses on complete laser systems, for example, a solid-state laser device and an optical module that are combined or integrated into a single housing or enclosure, its teachings are equally applicable to a stand-alone laser device without any optics, a stand-alone optical module without any laser, and combinations and variants thereof. These modules may be optically combined, eg coupled, in the field or before delivery, eg by optical fibers with optical connectors.

[0065] Embodiments of the present laser devices and systems can be used for industrial applications, such as, for example, welding components, including components of electronic energy storage devices.

[0066] Since the process that creates deposits on the edge and other surfaces of the laser diode, as well as on other optically active surfaces, resulting in power loss, is triggered by a two-photon process, this process can occur regardless of whether the devices are pulsed or operate in continuous mode (CW). The difference between these two operating modes is the rate of deposition of SiO ₂ onto the edge of the laser diode. The deposition rate is directly proportional to the power density, the amount of deposition is the integral of this deposition rate over time. As a result, if deposition occurs at a rate of 10 µm per 1000 hours when operating in CW mode, then when operating at a 10% duty cycle, only 1 µm will deposition per 1000 hours elapsed. The deposition rate used here is merely an example and depends on a number of other factors, mainly the amount of polysiloxanes trapped in the housing.

[0067] The comparative example shown in FIG. 1 and 2, uses a 60 W class blue laser composed of 20 individual emitting diodes, each of which is collimated by a high velocity axis collimating lens to provide input to the delivery fiber. These lenses are secured with UV-curable optical epoxy resin after alignment with submicron precision. The body is made of gold plated copper parts using low temperature solders. These lenses are attached to glass supports to match the coefficients of thermal expansion. This fairly simple module uses 3 different types of optical adhesives, 2 different solders, 3 different types of glass, and 2 gold plated copper options. The assembly process involves many steps with different tools and containers for storing components, all of which provide the potential for surface contamination. As a result, the interaction of blue light emission with contamination leads to rapid degradation of the device's power output over time. This is shown in Fig. 1, which shows the performance of a typical device over a long-term test; The expected laser life is only approximately 200 hours (based on the time to reach 80% of rated power), which is clearly insufficient for industrial use. The curve in Fig. 1 shows a very typical degradation rate of -100%/1000h, the corresponding device life is less than 200h.

[0068] The devices in FIG. 1 and fig. 2 had the same amount of oxygen, 60%.

[0069] It has been discovered that there are at least two blue light emission interactions in the system that are detrimental to laser efficiency and, in particular, laser efficiency over time. First, scattered radiation, reflected radiation, and both in the system heat the surfaces of the system, increasing outgassing from those surfaces and increasing the amount of contaminants that escape, which in turn increases the amount of those contaminants that are deposited and degrade the efficiency of the laser system. Second, the laser beam photochemically dissociates oxygen through a two-photon process. The oxygen atoms then react with both the organics in the housing to form CO ₂ and the polysiloxanes to form SiO ₂ . In the case of organics, _CO2 is not deposited on any surfaces and thus their hydrocarbon source is not important, but polysiloxanes are very detrimental to reliability. Therefore, the housing environment (eg, the internal housing environment containing the solid-state laser device, beam path, and optics) is assembled and sealed to prevent the introduction of moisture and other contaminants to ensure reliable operation.

[0070] FIG. 2 shows a graph of the output power of 5 samples of high-power blue laser devices that were housed and assembled in such a way that they were free of siloxanes in the internal environment and had an oxygen atmosphere. Laser devices used for testing in FIG. 2 were purified using example purification sequences according to the present inventions. The average degradation rate of these devices, which were free of siloxanes, is -2.3% per 1000 hours, which provides a 43-fold increase in service life compared to the devices of Fig. 1.

[0071] The following examples are provided to illustrate various embodiments of the present assembly methods, laser systems and operations. These examples are provided for illustrative purposes, may be predictive, and should not be construed as the scope or limitation of the scope of the present inventions.

[0072] Example 1

[0073] Referring to FIG. 10, which shows a schematic representation of the laser diode of FIG. 9, which is assembled in a sealed housing that provides extended diode life. This housing can then be integrated into a laser system to provide extended system life. The diode 1000 is located within an encapsulated housing 1050, which forms a housing or enclosure for the laser diode and is a laser diode module. The housing 1050 contains an internal environment 1051 that is isolated from the external environment 1052. A diode 1000 propagates a laser beam along a laser beam path 1056 through a window 1055 to an external environment 1052. The inner surface 1080 of the window 1055 is exposed to and in contact with the internal environment 1051. All surfaces of the internal cavity are free of silicon-based contaminants. The laser beam is in the blue range of the spectrum and has a power of 3 W. The internal environment contains 60% oxygen, whereby during operation of the solid state device, CO ₂ is created in the internal cavity from any carbon-based contaminants that may be present after cleaning. The enclosed module has a power degradation rate of less than 2.0%, and the laser life is at least 30,000 hours.

[0074] Example 1A

[0075] In embodiments of Example 1, the internal environment may contain from 1% to 80% oxygen. The power of the laser beam can be from about 1 W to about 10 W. The power degradation rate can be less than 3%, less than 2.5%, less than 2% and less than 1.5%. This embodiment may provide a laser lifetime of at least 20,000 hours, at least 40,000 hours, at least 50,000 hours, and at least 100,000 hours. In particular, embodiments may provide these lifetimes and degradation rates when assembled into a laser system, for example, when placed in a housing along with optics.

[0076] Example 1B

[0077] The laser diode of Example 1 is a blue laser diode in a TO-9 package.

[0078] Example 1C

[0079] Referring to FIG. 11, which shows a schematic representation of 4 laser diodes that provide blue laser beams, which are assembled in a sealed housing that provides extended diode life. This housing can then be integrated into a laser system to provide extended system life. Four laser diodes 1100a, 1100b, 1100c, 1100d are housed, for example contained, in a housing 1150 that is sealed and thus has an internal environment 1151. The housing 1150 protects the internal environment 1151 and isolates it from the external environment 1152. The four laser diodes distribute blue laser beams having a power of approximately 5 W, which travel along beam paths 1156a, 1156b, 1156c, 1156d. The laser beams follow their respective beam paths and exit the housing 1150 through the window 1155, where they pass into the external environment 1152. The inner surface 1180 of the window 1155 is exposed to and in contact with the internal environment 1151. Four separate windows can also be used, one for each diode. All surfaces in the internal cavity are free of silicon-based contaminants. Each of the laser beams is in the blue wavelength range, and each has a power of approximately 5 watts. The internal environment contains 60% oxygen, whereby during operation of the solid state device, CO ₂ is created in the internal cavity from any carbon-based contaminants that remain after cleaning. The enclosed module has a power degradation rate of less than 2.0%, and the laser life is at least 30,000 hours.

[0080] Example 1D

[0081] In embodiments of Example 1C, the internal environment may contain from 1% to 80% oxygen. The power of the laser beam can be from about 1 W to about 10 W. The power degradation rate can be less than 3%, less than 2.5%, less than 2% and less than 1.5%. This embodiment may provide a laser lifetime of at least 20,000 hours, at least 40,000 hours, at least 50,000 hours, and at least 100,000 hours. In particular, embodiments may provide these lifetimes and degradation rates when assembled into a laser system, for example, when placed in a housing along with optics.

[0082] Example 1E

[0083] The laser diodes from Example 1C are blue laser diodes in TO-9 packages.

[0084] Example 2

[0085] Referring to FIG. 4, which shows a schematic representation of an embodiment of a high power, high brightness solid state laser module 400 or laser system for providing a high quality laser beam 450 for extended periods of time without significant degradation of the laser beam properties, the module having: a housing 426 defining an internal cavity 434; wherein the inner cavity is isolated from the environment 435, which is external to the casing; a solid-state device 401 for propagating a laser beam 450 from a solid-state device propagation surface 404 along a laser beam path 450a, and wherein the laser beam has a power density of at least about 0.5 MW/cm ² on the propagation surface 404; an optical module 402 in optical communication with the solid-state device 401 and located in the laser beam path 450a; wherein the solid-state device and the optical module are located in the housing 426 and in the internal cavity 434, whereby the solid-state device and the optical module are isolated from the external environment 435; wherein the housing includes a housing propagation surface 425, whereby the laser beam passes from the housing 426 to the external environment 435 along the laser beam path 450a; the housing propagation surface 425 is in optical communication with the optical module 402 and is in the laser beam path 450a; the laser beam, upon exiting the housing propagation surface, is characterized by beam properties, the beam properties comprising: (i) a power of at least 100 W; and (ii) BPP is less than 40 mm·mrad; and wherein the internal cavity is free from sources of silicon-based contaminants, whereby no SiO ₂ is generated in the internal cavity during operation of the solid-state device; whereby the internal cavity remains free of SiO ₂ deposits; in this case, the rate of degradation of beam properties is 2.3% per 1000 hours or less.

[0086] Example 3

[0087] In one embodiment, the laser module of Example 2 has a solid-state device that outputs a laser beam, the laser beam having a wavelength in the range of 410 nm to 500 nm.

[0088] Example 4

[0089] In one embodiment, the laser module of Example 2 has a solid-state device that outputs a laser beam, the laser beam having a wavelength in the range of 405 nm to 575 nm.

[0090] Example 5

[0091] In one embodiment, the laser module of Example 2 has a solid-state device that outputs a laser beam, the laser beam having a wavelength in the range of 500 nm to 575 nm.

[0092] Example 6

[0093] In the laser module embodiments of Examples 2, 3, 4, and 5, the solid-state device is a fiber Raman laser, a crystal-based Raman laser, and combinations and variations of one or more of these. The optical module has optical elements including collimating optics, focusing optics, lenses, mirrors, beam combining optics, and combinations and variations of one or more of these. The beam properties additionally have a spectral bandwidth of approximately 20 nm or less. The casing's spreading surface is a window, a fiber end, and combinations and variations of one or more of these. BPP is less than about 15 mm mrad; and the power density at the propagation surface is from about 1 MW/cm ² to about 1000 MW/cm ² .

[0094] Example 7

[0095] In the laser module embodiments of Examples 2, 3, 4, 5, and 6, the laser beam power ranges from about 100 W to about 1000 W. The beam properties further include a spectral bandwidth of about 20 nm or less; The power density at the propagation surface ranges from about 0.5 MW/cm ² to about 1000 MW/cm ² ; and the degradation rate of beam properties is less than 2.0% per 1000 hours.

[0096] Example 8

[0097] In the laser module embodiments of Examples 2-7 and 13-26, the internal cavity contains a gas containing at least 1% oxygen; whereby, during operation of the solid-state device, CO ₂ from carbon-based pollutants is generated in the internal cavity; whereby the propagation surface of the solid-state device and the optical module remain free of carbon deposits.

[0098] Example 9

[0099] In the laser module embodiments of Examples 2-7 and 13-26, the internal cavity contains a gas containing at least 5% oxygen; whereby, during operation of the solid-state device, CO ₂ from carbon-based pollutants is generated in the internal cavity; whereby the propagation surface of the solid-state device and the optical module remain free of carbon deposits.

[00100] Example 10

[00101] In the laser module embodiments of Examples 2-7 and 13-26, the internal cavity contains a gas containing at least 10% oxygen; whereby, during operation of the solid-state device, CO ₂ from carbon-based pollutants is generated in the internal cavity; whereby the propagation surface of the solid-state device and the optical module remain free of carbon deposits.

[00102] Example 11

[00103] In the laser module embodiments of Examples 2-7 and 13-26, the internal cavity contains a gas containing at least 20% oxygen; whereby, during operation of the solid-state device, CO ₂ from carbon-based pollutants is generated in the internal cavity; whereby the propagation surface of the solid-state device and the optical module remain free of carbon deposits.

[00104] Example 12

[00105] In the laser module embodiments of Examples 2-7 and 13-26, the internal cavity contains a gas containing at least about 5% to about 50% oxygen; whereby, during operation of the solid-state device, CO ₂ from carbon-based pollutants is generated in the internal cavity; whereby the propagation surface of the solid-state device and the optical module remain free of carbon deposits.

[00106] Example 13

[00107] In the laser module embodiments of Examples 2-12 and 17-26, the beam degradation rate is 2.0% per 1000 hours or less.

[00108] Example 14

[00109] In the laser module embodiments of Examples 2-12 and 17-26, the beam degradation rate is 1.8% per 1000 hours or less.

[00110] Example 15

[00111] In the laser module embodiments of Examples 2-12 and 17-26, the module has and is characterized by having an extended service life of at least 10,000 hours.

[00112] Example 16

[00113] In the laser module embodiments of Examples 2-12 and 17-26, the module is characterized by having an extended service life of at least 5000 hours.

[00114] Example 17

[00115] Referring to FIG. 5, which provides a schematic illustration of a high power, high brightness solid state laser module 500 for providing a high quality blue laser beam 550 for extended periods of time without significant degradation of the beam properties, the module having: a housing 526 defining an internal cavity 534; wherein the inner cavity is isolated from the environment 535, which is external to the casing 526; a plurality of diode laser devices 501a, 501b, 501c, 501d, 501e for propagating a plurality of laser beams, such as beam 550, from a plurality of faces, such as face 504, along a plurality of diode laser beam paths, such as path 550a, wherein the laser beams have a length waves in the range from 400 nm to 500 nm; and wherein each laser beam has a power density of at least about 0.5 MW/cm ² on each of the faces; an optical module 502 in optical communication with each of the diode laser devices and located in the paths of the laser beams; wherein the optical module includes collimating optics, for example, collimating lens 560, and beam combining optics 565; wherein the optical module 502 combines a plurality of diode laser beams to provide a combined laser beam 552 along a combined laser beam path 552a; wherein the plurality of diode laser devices and the optical module are located in the housing 526 and in the internal cavity 534, whereby the plurality of diode laser devices and the optical module are isolated from the external environment 535; wherein the housing includes a housing propagation surface 525, whereby the combined laser beam passes from the housing 526 to the external environment 535 along the combined laser beam path 552a; the housing propagation surface 525 is in optical communication with the optical module 502 and is in the path 552a of the combined laser beam; the combined laser beam 552 upon exiting the housing propagation surface 525 is characterized by beam properties, the beam properties comprising: (i) a power of at least 100 W; and (ii) BPP is less than 40 mm·mrad; and wherein the inner cavity 534 is free from sources of silicon-based contaminants, whereby no SiO ₂ is generated in the inner cavity during operation of the plurality of diode laser devices; whereby the internal cavity remains free of SiO ₂ deposits; in this case, the rate of degradation of the properties of the combined beam is 2.3% in 1000 hours or less.

[00116] Example 18

[00117] In embodiments of the laser modules of Example 17 and other Examples, the beam properties further comprise a spectral bandwidth of about 15 nm or less; the casing propagation surface is selected from the group consisting of a window and a fiber end; BPP is less than about 15 mm mrad; and the power density at the propagation surface is from about 0.5 MW/cm ² to about 1000 MW/cm ² .

[00118] Example 19

[00119] In embodiments of the laser modules of Example 17 and other Examples, the beam properties further comprise a spectral bandwidth of about 15 nm or less; the power of the combined laser beam is at least about 500 W; the casing propagation surface is selected from the group consisting of a window and a fiber end; BPP is less than about 30 mm·mrad; and the power density at the propagation surface is from about 0.5 MW/cm ² to about 1000 MW/cm ² .

[00120] Example 20

[00121] Referring to FIG. 6, which provides a schematic representation of a high power, high brightness solid state laser module 600 for providing a high quality blue laser beam 650 along laser beam path 650a for extended periods of time without significant degradation of the laser beam properties, the module having: a housing 626 defining an internal cavity 634; wherein the inner cavity 634 forms an isolated environment; a plurality of optically active surfaces, for example, surface 604a, surface 604b, surface 604c, surface 604d, surface 604e, wherein the blue laser beam propagates from, passes into, or is reflected by the optically active surfaces; a plurality of optically active surfaces are located in an isolated environment of the inner housing cavity 634; wherein at least one of the optically active surfaces is located on the solid-state laser device 601; wherein the laser beam has a power density of at least about 0.5 MW/cm ² on one or more optically active surfaces, for example, surface 604a, surface 604b, surface 604c, surface 604d, surface 604e; and wherein the internal cavity 634 is free from sources of silicon-based contaminants, whereby no SiO ₂ is generated in the internal cavity during operation of the solid-state laser device; wherein the inner cavity 634 contains a gas containing oxygen; whereby, during operation of the solid-state laser device, CO ₂ from carbon-based pollutants is generated in the internal cavity; whereby a plurality of optically active surfaces remain free of carbon and SiO ₂ deposits; in this case, the rate of degradation of the blue laser beam power is 2.3% in 1000 hours or less.

[00122] The optically active surface 604e is a window allowing the laser beam 650 to pass from the housing to the external environment 635.

[00123] Example 21

[00124] Laser module 600 of FIG. 6 and laser module 500 of FIG. 5, wherein the solid-state laser produces a laser beam having a wavelength in the green wavelength range.

[00125] Example 21A

[00126] The green solid state laser of Example 22 is an infrared (IR) laser system whose emission frequency is doubled in a lithium niobite crystal. This system may have a laser diode, an external resonator, and a lithium niobite crystal at the focal point of the external resonator, all of which may be contained within a housing.

[00127] Example 22

[00128] The laser systems and modules of Examples 2-21, 21A, wherein the laser beams have a bandwidth of about 5 nm, about 10 nm, about 20 nm, about 10 nm to about 30 nm, about 5 nm to about 40 nm , about 20 nm or less, about 30 nm or less, about 15 nm or less, about 10 nm or less.

[00129] Example 23

[00130] The laser systems and modules of Examples 2-23, wherein the laser beam at or near the point where the beam exits the housing and propagates into the external environment has powers from about 100 W to about 100,000 W, from about 100 W to about 40,000 W, from about 100 W to about 1000 W, about 200 W, about 250 W, about 500 W, about 1000 W, about 10,000 W, at least about 100 W, at least about 200 W, at least about 500 W and at least about 1000 W.

[00131] Example 24

[00132] The laser systems and modules of Examples 2-23, wherein the laser beam has a BPP of about 10 mm mrad to about 50 mm mrad, less than about 40 mm mrad, less than about 30 mm mrad, less than about 20 mm mrad. mrad, less than about 15 mm·mrad, and less than about 10 mm·mrad.

[00133] Example 25

[00134] The laser systems and modules of Examples 2-23, wherein the sources of silicon-based contaminants are siloxanes, polymerized siloxanes, linear siloxanes, cyclic siloxanes, cyclomethicones, polysiloxanes, and variations of one or more of these.

[00135] Example 26

[00136] The laser systems and modules of Examples 2-25, wherein the sources of carbon-based contaminants include solvent residues, oils, fingerprints, other hydrocarbon sources, and combinations and variations of one or more of these.

[00137] Example 27

[00138] Embodiments of high-brightness blue solid-state lasers are shown in Table 1. This table shows the power, brightness, and efficiency that can be provided by 2.5-watt laser diodes in a two-dimensional spectrum-combined configuration. This table shows how the power and brightness of laser systems based on a 350-watt module, which is a standard building block, are scaled to multi-kilowatt power levels using in-fiber couplers for the process.

[00139] Table 1

Modules output power BPP (mm mrad) 1 350 5 2 700 13 3 1050 14 4 1400 15 5 1750 17 6 2100 19 7 2450 19 8 2800 21 9 3150 23 10 3500 24 eleven 3850 25 12 4200 27 13 4550 27 14 4900 28 15 5250 29 16 5600 thirty 17 5950 31 18 6300 32

[00140] Systems providing the beams of Table 1 have beam property degradation rates that range from about 5% to about 1.5% per 1000 hours or less, 2.5% per 1000 hours or less, 2.0% per 1000 hours or less, 1.8% for 1000 hours or less, 1.0% for 1000 hours or less and less. Systems providing the beams of Table 1 have service lives of at least about 5,000 hours to about 100,000 hours, at least about 5,000 hours, at least about 10,000 hours, at least about 20,000 hours, at least about 40,000 hours , from about 10,000 h to about 50,000 h and long service lives.

[00141] Example 28

[00142] The same modules from Example 27 can also be combined in free space, which preserves brightness but makes module replacement more difficult. The power and beam parameter products that can be provided are shown in Table 2.

[00143] Table 2

output power Process fiber (µm) BPP (mm mrad) 350 45 5 700 90 13 1050 97 14 1400 109 15 1750 122 17 2100 135 19 2450 135 19 2800 149 21 3150 163 23 3500 172 24 3850 181 25 4200 191 27 4550 195 27 4900 203 28 5250 208 29 5600 216 thirty 5950 219 31 6300 230 32

[00144] Systems providing the beams of Table 2 have beam property degradation rates that range from about 5% to about 1.5% per 1000 hours or less, 2.5% per 1000 hours or less, 2.0% per 1000 h or less, 1.8% for 1000 h or less, 1.0% for 1000 h or less and less. Systems providing the beams of Table 2 have service lives of at least about 5,000 hours to about 100,000 hours, at least about 5,000 hours, at least about 10,000 hours, at least about 20,000 hours, at least about 40,000 hours, from about 10,000 h to about 50,000 h and long service lives.

[00145] Example 29

[00146] High brightness blue solid state laser embodiments are shown in Table 3 for systems using a higher power blue laser diode in each device, which is approximately 6.5 Watts. The base module now has a power of approximately 900 W, and these modules are combined through fiber couplers to create the high power, high blue luminance laser diode systems shown in Table 3.

[00147] Table 3

Number of modules output power BPP (mm mrad) 1 882 5 2 1764 13 3 2646 14 4 3528 15 5 4410 17 6 5292 19 7 6174 19 8 7056 21 9 7938 23 10 8820 24 eleven 9702 25 12 10584 27 13 11466 27 14 12348 28 15 13230 29 16 14112 thirty 17 14994 31 18 15876 32

[00148] Systems providing beams of Table 3 have beam property degradation rates that range from about 5% to about 1.5% per 1000 hours or less, 2.5% per 1000 hours or less, 2.0% per 1000 h or less, 1.8% for 1000 h or less, 1.0% for 1000 h or less and less. Systems providing beams of Table 3 have service lives of at least about 5,000 hours to about 100,000 hours, at least about 5,000 hours, at least about 10,000 hours, at least about 20,000 hours, at least about 40,000 hours, from about 10,000 h to about 50,000 h and long service lives.

[00149] Example 30

[00150] Referring to FIG. 7, which is a graph of laser power versus service life. It can be seen that the blue laser diode module provides an operating profile where the degradation rate (drawn line) is low. The degradation rate has a straight line from about 200 hours to about 550 hours. After about 800 hours, the degradation rate is about 0.7% per 1000 hours. This degradation rate, shown for a service life of 800 to 1600 hours, will remain the same ( i.e., the slope of the drawn line will not change significantly) for the remainder of the system's life.

[00151] Example 31

[00152] Referring to FIG. 8, which is a graph of laser power versus service life. It can be seen that the blue laser diode module provides an operating profile where the degradation rate (drawn line) is low. The degradation rate has a straight line from about 150 hours to about 800 hours. After about 800 hours, the degradation rate is about 0.7% per 1000 hours. This degradation rate, shown for a service life of 800 to 1600 hours, will remain the same ( i.e., the slope of the drawn line will not change significantly) for the remainder of the system's life.

[00153] It should be noted that there is no requirement to provide or discuss the theory underlying new and breakthrough performance or other advantageous features and properties that are the subject of or associated with embodiments of the present inventions. However, various theories are provided in this specification for further improvement of the art and, in particular, in the important field of lasers, laser processing and laser applications. These theories are set forth in this specification and, unless expressly stated otherwise, do not in any way limit or narrow the scope of protection afforded to the claimed inventions. These theories may not be required or practiced to practice the present inventions. It should also be understood that the present inventions may lead to new and previously unknown theories to explain the operation, functions and features of embodiments of the methods, products, materials, devices and systems of the present inventions; and such later developed theories shall not limit the scope of protection granted to the present inventions.

[00154] Various embodiments of the lasers, diodes, arrays, modules, assemblies, activities and operations set forth in this specification may be used in the fields identified above and in various other fields. Additionally, these embodiments, for example, can be used with: existing lasers, additive manufacturing systems, operations and activities, as well as other existing equipment, future lasers, additive manufacturing systems, operations and activities; and such elements as may be modified in part based on the teachings of this specification. Additionally, the various embodiments set forth in this specification may be used with each other in different and varied combinations. Thus, for example, the configurations provided in various embodiments of this specification may be used with each other. For example, components of an embodiment having A, A' and B and components of an embodiment having A'', C and D can be used with each other in various combinations, for example, A, C, D, and A, A '' C and D, etc., according to the teachings of this specification. The scope of protection granted to the present inventions should not be limited to the particular embodiment, configuration or arrangement that is set forth in the particular embodiment, for example, in the embodiment in the particular figure.

[00155] The present invention may be embodied in forms other than those specifically disclosed herein without departing from its spirit or essential characteristics. The described embodiments are to be considered in all respects only as illustrative and not limiting.

Claims (91)

1. Solid-state laser module for producing a blue laser beam, containing: a) a casing forming an internal cavity isolated from the external environment, b) a solid-state device for propagating a laser beam from a propagation surface along the path of the laser beam, wherein the laser beam has a wavelength in the range of 410 to 500 nm and a power density of at least 0.5 MW/cm ² at the propagation surface, c) an optical module having optical communication with the solid-state device and located in the path of the laser beam, in this case, the solid-state device and the optical module are located in the internal cavity of the casing, which isolates them from the external environment, the housing has a propagation surface that transmits the laser beam from the housing to the external environment along the path of the laser beam, has an optical connection with the optical module and is located in the path of the laser beam, wherein the laser beam, upon exiting the housing propagation surface, is characterized by beam properties including: (i) a power of at least 100 W and (ii) a beam parameter product (BPP) of less than 100 mm⋅mrad, and the inner cavity of the casing is free from sources of silicon-based contaminants, which prevents the formation and buildup of SiO ₂ , while the degradation rate of beam properties is 2.3% in 1000 hours or less. 2. The module of claim 1, wherein the solid-state device is selected from the group consisting of a fiber Raman laser, a diode laser and a crystal-based Raman laser, and the optical module contains optical elements selected from the group consisting of collimating optics, focusing optics, lenses, mirrors and beam combining optics, wherein the beam is further characterized by a spectral bandwidth of 20 nm or less, the casing's spreading surface is a window or fiber end, in this case, BPP is less than 40 mm⋅mrad, and the power density on the propagation surface ranges from 1 to 1000 MW/cm ² . 3. The module according to claim 1, wherein the solid-state device is selected from the group consisting of a fiber Raman laser, a diode laser and a crystal-based Raman laser, and the laser beam power is from 100 to 1000 W, wherein the beam is further characterized by a spectral bandwidth of 20 nm or less; The power density at the propagation surface ranges from 0.5 to 1000 MW/ ^cm2 , and the degradation rate of the beam properties is less than 2.0% per 1000 hours. 4. Module according to any one of paragraphs. 1-3, in which the internal cavity contains a gas containing at least 1% oxygen, ensuring, during operation of the solid-state device, the formation of CO ₂ from carbon-based pollutants in the internal cavity and preventing the deposition of carbon on the distribution surface of the solid-state device and the optical module. 5. Module according to any one of paragraphs. 1-3, in which the internal cavity contains a gas containing at least 10% oxygen, ensuring, during operation of the solid-state device, the formation of CO ₂ from carbon-based pollutants in the internal cavity and preventing the deposition of carbon on the distribution surface of the solid-state device and the optical module. 6. Module according to any one of paragraphs. 1-3, in which the internal cavity contains a gas containing at least 40% oxygen, ensuring, during operation of the solid-state device, the formation of CO ₂ from carbon-based pollutants in the internal cavity and preventing the deposition of carbon on the distribution surface of the solid-state device and the optical module. 7. Module according to any one of paragraphs. 1-3, in which the internal cavity contains a gas containing at least 60% oxygen, ensuring, during operation of the solid-state device, the formation of CO ₂ from carbon-based pollutants in the internal cavity and preventing the deposition of carbon on the distribution surface of the solid-state device and the optical module. 8. Module according to any one of paragraphs. 1-7, which provides a degradation rate of beam properties of 2.0% in 1000 hours or less. 9. Module according to any one of paragraphs. 1-7, which provides a degradation rate of beam properties of 1.8% in 1000 hours or less. 10. Module according to any one of paragraphs. 1-9, which provides a power density of at least 1 MW/cm ² at the propagation surface. 11. Module according to any one of paragraphs. 1-9, which provides a power density of at least 5 MW/cm ² at the propagation surface. 12. Module according to any one of paragraphs. 1-9, which provides a power density of at least 10 MW/cm ² at the propagation surface. 13. Module according to any one of paragraphs. 1-9, which provides a power density of at least 20 MW/cm ² at the propagation surface. 14. Module according to any one of paragraphs. 1-13, in which the amount of silicon-based contaminants in the internal cavity is less than 0.001 g. 15. Module according to any one of paragraphs. 1-13, in which the amount of silicon-based contaminants in the internal cavity is less than 0.0001 g. 16. Module according to any one of paragraphs. 1-13 in which the amount of silicon-based contaminants in the internal cavity is less than 0.00001 g. 17. Module according to any one of paragraphs. 1-13, in which the amount of silicon in the internal cavity is less than 0.01 ^ppm . 18. Module according to any one of paragraphs. 1-13, in which the amount of silicon in the internal cavity is less than 0.001 ^ppm . 19. Module according to any one of paragraphs. 1-13, in which the amount of silicon in the internal cavity is less than 0.0001 ^ppm . 20. Module according to any one of paragraphs. 1-19, in which the solid-state device contains a TO-9 type housing. 21. Solid-state laser module for producing a blue laser beam, containing: a) a casing forming an internal cavity isolated from the external environment, b) diode laser devices for propagating laser beams from diode faces along laser beam paths, wherein the laser beams have a wavelength in the range of 400 to 500 nm and each laser beam has a power density of at least 0.5 MW/cm ² at the diode faces ; c) an optical module in optical communication with the diode laser devices and located in the paths of the laser beams, the optical module comprising collimating optics and beam combining optics, wherein the optical module combines said diode laser beams to provide a combined laser beam, the mentioned diode laser devices and the optical module are located in the internal cavity of the casing, which isolates them from the external environment, and the housing has a propagation surface that transmits the combined laser beam from the housing to the external environment along the path of the combined laser beam, has an optical connection with the optical module and is located in the path of the combined laser beam, the combined laser beam, upon exiting the housing propagation surface, is characterized by beam properties including: (i) a power of at least 100 W and (ii) a BPP of less than 40 mm⋅mrad, wherein the internal cavity is free from sources of silicon-based contaminants, which prevents the formation and layering of SiO ₂ during operation of the said diode laser devices, while the degradation rate of the properties of the combined beam is 2.3% in 1000 hours or less. 22. The module according to claim 21, wherein the beam is further characterized by a spectral bandwidth of 15 nm or less, and the housing propagation surface is a window or fiber end, wherein the BPP is less than 15 mm⋅mrad and the power density at the propagation surface is from 0.5 to 1000 MW/cm ² . 23. The module according to claim 21, wherein the beam is further characterized by a spectral bandwidth of 15 nm or less, and the power of the combined laser beam is at least 500 W, wherein the distribution surface of the casing is a window or fiber end, in this case, BPP is less than 30 mm⋅mrad and the power density on the propagation surface ranges from 0.5 to 1000 MW/cm ² . 24. The module according to claim 21 or 22, wherein the power density at the propagation surface is at least 5 MW/cm ² . 25. The module according to claim 21 or 22, wherein the power density at the propagation surface is at least 10 MW/cm ² . 26. The module according to claim 21 or 22, wherein the power density at the propagation surface is at least 20 MW/cm ² . 27. Module according to any one of paragraphs. 21-26, which provides a degradation rate of beam properties of 2.0% in 1000 hours or less. 28. Module according to any one of paragraphs. 21-26, which provides a degradation rate of beam properties of 1.8% in 1000 hours or less. 29. Module according to any one of paragraphs. 21-28, in which the internal cavity contains a gas containing at least 1% oxygen, ensuring during operation of diode laser devices the creation of CO ₂ from carbon-based pollutants in the internal cavity and preventing the layering of carbon on the propagation surface of the edges of the diodes and the optical module . 30. Module according to any one of paragraphs. 21-28, in which the internal cavity contains a gas containing at least 10% oxygen, ensuring during operation of diode laser devices the creation of CO ₂ from carbon-based pollutants in the internal cavity and preventing the layering of carbon on the propagation surface of the edges of the diodes and the optical module . 31. Module according to any one of paragraphs. 21-28, wherein the internal cavity contains a gas containing at least 40% oxygen, which ensures that during operation of diode laser devices, the creation of CO ₂ from carbon-based pollutants in the internal cavity and the prevention of carbon deposition on the propagation surface of the edges of the diodes and the optical module. 32. Module according to any one of paragraphs. 21-28, in which the internal cavity contains a gas containing at least 60% oxygen, ensuring during operation of diode laser devices the creation of CO ₂ from carbon-based pollutants in the internal cavity and preventing the layering of carbon on the propagation surface of the edges of the diodes and the optical module . 33. Module according to any one of paragraphs. 21-28, in which the internal cavity contains a gas containing at least 20% oxygen, ensuring during operation of diode laser devices the creation of CO ₂ from carbon-based pollutants in the internal cavity and preventing the layering of carbon on the propagation surface of the edges of the diodes and the optical module . 34. Module according to any paragraph. 21-33, in which the amount of silicon-based contaminants in the internal cavity is less than 0.001 g. 35. Module according to any one of paragraphs. 21-33, in which the amount of silicon-based contaminants in the internal cavity is less than 0.0001 g. 36. Module according to any one of paragraphs. 21-33, in which the amount of silicon-based contaminants in the internal cavity is less than 0.00001 g. 37. Module according to any one of paragraphs. 21-33, in which the amount of silicon in the internal cavity is less than 0.01 ^ppm . 38. Module according to any one of paragraphs. 21-33, in which the amount of silicon in the internal cavity is less than 0.001 ^ppm . 39. Module according to any one of paragraphs. 21-33 in which the amount of silicon in the internal cavity is less than 0.0001 ^ppm . 40. Module according to any one of paragraphs. 21-39, in which the diode laser device contains a TO-9 type housing. 41. Solid-state laser module for providing a blue laser beam, containing: a) a casing forming an internal cavity isolated from the external environment, b) optically active surfaces, wherein the blue laser beam propagates from, passes into or is reflected by the optically active surfaces; said optically active surfaces are located in an isolated environment of the inner cavity of the casing, and at least one of the optically active surfaces is located on a solid-state laser device, wherein the laser beam has a power density of at least 0.5 MW/cm ² on one or more optically active surfaces, and the internal cavity is free from sources of silicon-based contaminants, which prevents the formation and layering of SiO ₂ during operation of the solid-state laser device, and contains a gas containing oxygen, which ensures the formation of CO ₂ in the internal cavity from contaminants based on carbon and preventing deposits of carbon and SiO ₂ on said optically active surfaces, wherein the blue laser beam power degradation rate is 2.3% in 1000 hours or less. 42. The module according to claim 41, wherein the degradation rate of the beam properties is 2.0% per 1000 hours or less. 43. The module according to claim 41, wherein the laser beam power degradation rate is 1.8% per 1000 hours or less. 44. Module according to any one of paragraphs. 41-43, in which the internal cavity contains at least 10% oxygen. 45. Module according to any one of paragraphs. 41-43, in which the internal cavity contains at least 20% oxygen. 46. Module according to any one of paragraphs. 41-43, in which the internal cavity contains at least 40% oxygen. 47. Module according to any one of paragraphs. 41-43, in which the internal cavity contains at least 60% oxygen. 48. Module according to any one of paragraphs. 41-47, in which the solid-state device contains a TO-9 type housing. 49. Housing with solid-state laser devices for integration into laser systems providing a blue laser beam, containing: a) a casing forming an internal cavity isolated from the external environment, containing a window forming part of the internal cavity; b) a solid-state device for propagating a laser beam from a propagation surface along the path of the laser beam, wherein the laser beam has a wavelength in the range of 410 to 500 nm and a power density of at least 0.5 MW/cm ² at the propagation surface, wherein the window has an optical connection with the solid-state device and is located in the path of the laser beam, the solid-state device is located in the inner cavity of the casing, and the inner surface of the window is not facing the external environment so that the solid-state device and the inner surface of the window are isolated from the external environment, while the laser beam passes from the casing through the window into the external environment along the path of the laser beam, and The inner cavity of the housing is free from sources of silicon-based contaminants, which prevents the formation and buildup of SiO ₂ during solid-state device operation, while the degradation rate of beam properties is 2.3% per 1000 hours or less, while the internal cavity contains a gas containing at least 1% oxygen, ensuring that during operation of the solid-state device, CO ₂ is formed from carbon-based pollutants in the internal cavity and prevents carbon from depositing on the distribution surface of the solid-state device and the internal surface of the window. 50. The housing of claim 49, wherein the solid-state device consists of one or more diode lasers. 51. The housing according to claim 50, in which each diode laser contains a TO-9 type housing. 52. Housing according to any one of paragraphs. 49-51, in which the power density of the laser beam is at least 10 MW/cm ² , the laser beam has a power of at least 2 W, and its degradation rate is 2.0% in 1000 hours or less. 53. Housing according to any one of paragraphs. 49-51, in which the power density of the laser beam is at least 5 MW/cm ² , the laser beam has a power of at least 1.5 W, and its degradation rate is 1.8% in 1000 hours or less. 54. Housing according to any one of paragraphs. 49-51, in which the power density of the laser beam is at least 15 MW/cm ² , the laser beam has a power of at least 5 W, and its degradation rate is 2.3% in 1000 hours or less. 55. Housing according to any one of paragraphs. 49-54, in which the internal cavity contains at least 10% oxygen. 56. Housing according to any one of paragraphs. 49-54, in which the internal cavity contains at least 40% oxygen. 57. Housing according to any one of paragraphs. 49-54, in which the internal cavity contains at least 60% oxygen.