RU2735802C1 - Micro-diagnostic device manufacturing method - Google Patents

Abstract

FIELD: micro-diagnostic devices.

SUBSTANCE: invention can be used for making micro-diagnostic devices. Substance of invention consists in fact that method of micro-diagnostic device manufacturing consists in formation of each partitions at combination of plane of minimum cross-section of laser beam at energy level 1/e², section diameter of which 2ω₀ is determined from expression

where ω₀ is radius of minimum cross-section of laser beam by energy level 1/e², M is beam quality, λ is radiation wavelength, NA is a numerical aperture of the lens, and with a plane spaced from the rear surface of the plate by a distance not less than

in which, moving the plate relative to the region of minimum cross-section of laser beam 2ω₀ for entire length of micro-diagnostic device by one of X or Y coordinates, forming a first sealing line included in a plurality of sealing lines constituting the partition, and further, displacing plane with minimum cross-section of laser beam in direction towards upper surface of plate on coordinate Z at distance not less than

and not more than

and minimum laser beam cross-section area 2ω₀ is shifted, respectively, by one of the coordinates Y or X at a distance not less than 0.5⋅2ω₀ and not more than 1.0⋅2ω₀, and moving plate relative to region of minimum cross-section of laser beam 2ω₀ to entire length of micro-diagnostic device on same coordinate, on which formed sealing line, and then, multiple alternating shift of plane of minimum cross-section of laser beam 2ω₀ in direction to upper surface of plate in coordinate Z, and area of minimum cross-section of laser beam 2ω₀ by Y or X coordinate with plate displacement relative to region of minimum cross-section of laser beam 2ω₀ with movement for entire length of micro-diagnostic device, in compliance with limitations on formation of sealing lines, partition is formed. Last sealing line in the partition is formed in a plane spaced from the surface of the plate by a distance not less than

and not more than

and performed with laser radiation pulse duration of not more than 300 femtoseconds at pulse repetition frequency of not less than 500 kHz with energy density of not less than 8⋅10³ J/cm² and not more than 15⋅10³ J/cm² at plate displacement speed relative to focused laser beam of not less than 0.4 mm/s and not higher than 2.5 mm/s, wherein a porous silicate glass plate is used, an outer part of each of the partitions on each of the surfaces of which after completing the formation of all partitions of the, forming a sealing regions with a size, exceeding the size of the partition wall by not more than 1.2 times by moving the plate relative to the focused on its surface beam of continuous radiation of the CO₂-laser with power density of not less than 2.8⋅10⁴ W/cm² at scanning speed of not less than 0.1 mm/s and not more than 0.5 mm/s.

EFFECT: possibility of complete elimination of interaction of micro-diagnostic device matrix material with diagnosed substance while maintaining possibility of matrix multiple use, as well as elimination of both preliminary and subsequent stages of micro-diagnostic device matrix processing.

1 cl, 28 dwg

Description

The invention relates to a technology for the manufacture of microdiagnostic devices, widely used in the fields of chemistry and control of environmental parameters. A universal micromicrodiagnostic device, consisting of cells bounded by partitions, excluding the penetration of diagnosed substances of organic and inorganic origin in a liquid state through them, is extremely in demand in all of the above areas of application.

A known method of manufacturing hydrophobic partitions by local laser exposure in the volume of a matrix of paper, which consists in pre-impregnation of a matrix of paper with a photosensitive polymer, moving the matrix of paper relative to the minimum cross-section of the laser beam until the end of the structure recording and subsequent processing of the paper matrix in an isopropanol solution to wash out the unpolymerized photopolymer from the matrix, selected by the authors as an analogue of [Sones С.L. et al. Laser-induced photo-polymerisation for creation of paper-based fluidic devices // Lab on a Chip. - 2014. - T. 14. - No. 23. - C. 4567-4574.]. Moving the matrix relative to a focused laser beam with a radiation wavelength of 266 nm, with an energy density of not less than 4.6 J / cm ² and not more than 66 J / cm ^{2 is} carried out at a speed of not less than 0.05 mm / s, but not more than 0, 5 mm / s. The disadvantages of this method include the presence of additional operations, both prior to the manufacture of the partition (preliminary impregnation of the paper matrix with a photosensitive polymer), and its final processing in an isopropanol solution. In addition, paper is a material that is sensitive to changes in the environment, which limits the possibilities of using this method when creating various diagnostic devices. In addition, diagnostic devices based on a matrix of paper can operate only in a narrow temperature range, since at high temperatures the paper undergoes irreversible structural changes.

A known method of manufacturing hydrophobic photopolymer partitions by local laser action in the volume of a nitrocellulose matrix, which consists in pre-impregnation of a nitrocellulose matrix with a photosensitive polymer for 20 s, moving the nitrocellulose matrix relative to the minimum cross-section of the laser beam until the end of the structure recording and subsequent processing of the nitrocellulose matrix in a solution of non-toluene for leaching photopolymer from the matrix, which is closest to the claimed and therefore selected by the authors as a prototype [Not PJW et al. Laser-based patterning for fluidic devices in nitrocellulose // Biomicrofluidics. - 2015. - T. 9. - No. 2. - C. 026503.]. Moving the matrix relative to a focused laser beam with a radiation wavelength of 405 nm, with an energy density of not less than 0.375 J / cm ² and not more than 2500 J / cm ^{2 is} carried out at a speed of not less than 0.05 mm / s, but not more than 10 mm / s ... The disadvantages of this method include the presence of additional operations prior to the manufacture of the baffle (preliminary impregnation of the nitrocellulose matrix with a photosensitive polymer), and the subsequent processing of the microdiagnostic device in a toluene solution to remove unpolymerized material. In addition, a significant drawback is the impossibility of re-impregnation of the nitrocellulose matrix, leading to the impossibility of repeated use of a microdiagnostic device based on it. In addition, diagnostic devices based on nitrocellulose can operate only in a narrow temperature range, since at temperatures above 190 ° C nitrocellulose undergoes irreversible structural changes [Sovizi M.R., Hajimirsadeghi SS, Naderizadeh B. Effect of particle size on thermal decomposition of nitrocellulose // Journal of hazardous materials. - 2009. - T. 168. - No. 2. - C. 1134-1139.].

The objective of the present invention is to completely eliminate the interaction of the matrix material of the microdiagnostic device with the diagnosed substance while maintaining the possibility of multiple use of the matrix, as well as to eliminate both preliminary and subsequent stages of processing the matrix of the microdiagnostic device.

где ω₀ - радиус минимального сечения лазерного пучка по уровню энергии 1/е², М - качество пучка, λ - длина волны излучения, NA - числовая апертура объектива, и, с плоскостью, отстоящей от тыльной поверхности пластины на расстояние не меньшее чем

в которой перемещая пластину относительно области минимального сечения лазерного пучка 2ω₀ на всю длину микродиагностического устройства по координате X формируют первую линию уплотнения, входящую в совокупность линий уплотнения, составляющих перегородку, после чего смещают плоскость с минимальным сечением лазерного пучка в направлении к верхней поверхности пластины по координате Z на расстояние не меньшее, чем

и не большее, чем

, а область минимального сечения лазерного пучка 2ω₀ смещают по координате Y на расстояние не меньшее, чем 0.5⋅2ω₀ и не большее, чем 1.0⋅2ω₀, и перемещая пластину относительно области минимального сечения лазерного пучка 2ω₀ на всю длину микродиагностического устройства по координате X формируют вторую линию уплотнения и далее многократно чередуя смещение плоскости минимального сечения лазерного пучка 2ω₀ в направлении к верхней поверхности пластины по координате Z, а области минимального сечения лазерного пучка 2ω₀ по координате Y с перемещением пластины относительно области минимального сечения лазерного пучка 2ω₀ с перемещением на всю длину микродиагностического устройства в соответствии с ограничениями на формирование линий уплотнения формируют перегородку, при этом последнюю линию уплотнения в перегородке формируют в плоскости, отстоящей от поверхности пластины на расстояние не меньшее, чем

и не большее, чем

после чего чередуют смещение по координате Y на расстояние, равное ширине ячейки микромикродиагностического устройства, с формированием перегородок по координате Y, которые формируют в соответствии с ограничениями на формирование линий уплотнения, составляющих перегородки, до момента завершения формирования всех перегородок по координате Y, далее отступив от края пластины по координате X на расстояние, превышающее ширину ячейки микродиагностического устройства не менее чем в 2.5 раза, формируют первую перегородку из линий уплотнения в соответствии с последовательностью действий и ограничений на них по формированию линии уплотнения, введенных ранее, до момента завершения формирования перегородки, после чего многократно чередуют смещение по координате X на расстояние, равное ширине ячейки микромикродиагностического устройства, с формированием перегородок по координате X, которые формируют в соответствии с последовательностью действий и ограничений на них по формированию линий уплотнения, введенных ранее, до момента завершения формирования всех перегородок по координате X, длительность импульса лазерного излучения выбирают не более 300 фемтосекунд при частоте следования импульсов не менее 500 кГц с плотностью энергии не менее 8⋅10³ Дж/см² и не более 15⋅10³ Дж/см² при скорости перемещения пластины относительно сфокусированного лазерного пучка не ниже 0.4 мм/с и не выше 2.5 мм/с, при этом используют пластину из пористого силикатного стекла, внешнюю часть каждой из перегородок на каждой из поверхностей которой после завершения формирования всех перегородок микродиагностического устройства создают области уплотнения с размером, превышающим размер перегородки не более чем в 1.2 раза путем перемещения пластины относительно сфокусированного на ее поверхность пучка непрерывного излучения CO₂-лазера с плотностью мощности не ниже 2.8⋅10⁴ Вт/см² при скорости сканирования не менее 0.1 мм/с и не более 0.5 мм/с.A method of manufacturing a microdiagnostic device, which consists in the fact that, stepping back from the edge of the plate along the Y coordinate, the plate is moved relative to the region of the minimum cross section of the laser beam along the X coordinate along the entire length of the microdiagnostic device until the formation of the first partition is completed, then the plate is shifted relative to the region of the minimum cross section of the laser beam along coordinate Y, and alternating the movement of the plate relative to the area of the minimum cross-section of the laser beam along the X coordinate along the entire length of the microdiagnostic device until the completion of the formation of the partition with an offset along the Y coordinate, complete the formation of all partitions along the Y coordinate, after which, departing from the edge of the plate along the X coordinate, move the plate relative to the area of the minimum cross-section of the laser beam along the Y coordinate for the entire length of the microdiagnostic device until the completion of the formation of the first partition, then the plate is displaced relative to the area of minimum cross-section of the laser beam along the X coordinate, and alternating the movement of the plate relative to the area of the minimum cross-section of the laser beam along the Y coordinate along the entire length of the microdiagnostic device with an offset along the X coordinate, complete the formation of all partitions along the X coordinate, differs in that, having retreated from the edge of the plate along the Y coordinate at a distance exceeding the cell width of the microdiagnostic device by at least 2.5 times, the formation of the first partition begins with the alignment of the plane of the minimum section of the laser beam at the energy level 1 / e ² , the section diameter of which 2ω ₀ is determined from the expression

where ω ₀ is the radius of the minimum section of the laser beam at the energy level 1 / e ² , M is the beam quality, λ is the radiation wavelength, NA is the numerical aperture of the objective, and, with a plane spaced from the rear surface of the plate at a distance not less than

in which by moving the plate relative to the region of the minimum cross-section of the laser beam 2ω ₀ for the entire length of the microdiagnostic device along the X coordinate, the first seal line is formed, which is included in the set of seal lines that make up the partition, after which the plane with the minimum cross-section of the laser beam is shifted towards the upper surface of the plate along coordinate Z at a distance not less than

and no more than

, and the region of the minimum cross-section of the laser beam 2ω _{0 is} displaced along the Y coordinate by a distance not less than 0.5⋅2ω ₀ and not more than 1.0⋅2ω ₀ , and moving the plate relative to the region of the minimum cross-section of the laser beam 2ω ₀ over the entire length of the microdiagnostic device along in the X coordinate, a second compaction line is formed and then, repeatedly alternating, the displacement of the plane of the minimum section of the laser beam 2ω ₀ towards the upper surface of the plate along the Z coordinate, and the region of the minimum section of the laser beam 2ω ₀ along the Y coordinate with the plate displacement relative to the area of the minimum section of the laser beam 2ω ₀ with displacement along the entire length of the microdiagnostic device in accordance with the restrictions on the formation of sealing lines, a partition is formed, while the last sealing line in the partition is formed in a plane spaced from the surface of the plate at a distance not less than

and no more than

after that, the displacement along the Y coordinate is alternated by a distance equal to the width of the cell of the micromicrodiagnostic device, with the formation of partitions along the Y coordinate, which are formed in accordance with the restrictions on the formation of the seal lines that make up the partitions, until the completion of the formation of all partitions along the Y coordinate, then departing from the edges of the plate along the X coordinate at a distance exceeding the cell width of the microdiagnostic device by at least 2.5 times, form the first septum from the seal lines in accordance with the sequence of actions and restrictions on them on the formation of the seal line, introduced earlier, until the completion of the formation of the septum, after which repeatedly alternate the displacement along the X coordinate by a distance equal to the cell width of the micromicrodiagnostic device, with the formation of partitions along the X coordinate, which are formed in accordance with the sequence of actions and restrictions on them for the formation of compaction lines, introduced earlier, until the completion of the formation of all partitions along the X coordinate, the laser pulse duration is chosen no more than 300 femtoseconds at a pulse repetition rate of at least 500 kHz with an energy density of at least 8⋅10 ³ J / cm ² and no more than 15⋅10 ³ J / cm ² at a speed of movement of the plate relative to the focused laser beam not lower than 0.4 mm / s and not higher than 2.5 mm / s, while using a plate of porous silicate glass, the outer part of each of the partitions on each of the surfaces of which after the completion of the formation of all partitions microdiagnostic devices create areas of compaction with a size that exceeds the size of the partition by no more than 1.2 times by moving the plate relative to the beam of continuous CO ₂ laser radiation focused on its surface with a power density of at least 2.8⋅10 ⁴ W / cm ² at a scanning speed of at least 0.1 mm / s and no more than 0.5 mm / s.

Since porous silicate glass (PSS) is an inorganic material, its interaction with objects that can potentially be impregnated into it, such as organic dyes, is impossible [O.V. Mazurin, G.P. Roskova, V.I. Averyanov, T.V. Antropova - Two-phase glasses: structure, properties, application. - L .: Nauka, 1991. - 276 p.]. Compared with the nitrocellulose matrix used in the implementation of the method selected as a prototype, PSS is characterized by a rigid frame structure that provides strength and invariability of its shape under conditions of long-term storage and operation of the microdiagnostic device. The use of the PSS microdiagnostic device as a matrix makes it possible to exclude additional processing operations of the matrix material, such as its preliminary impregnation with photosensitive reagents or subsequent processing in organic solutions. The partitions created by the claimed method are characterized by long-term stability, as evidenced by experimental studies of the permeability of randomly selected unit cells when they are filled with an aqueous solution of rhodamine 6G, an organic dye, which lasted for six months. The results of experimental studies irrefutably prove the impermeability of the septa for rhodamine molecules in arbitrarily chosen unit cells.

An important advantage of the microdiagnostic device manufactured in accordance with the claimed method is the ability to completely remove the diagnosed substance from the unit cells, which is realized by heat treatment of the PSS plate with a microdiagnostic device created on it at a temperature of 600 ° C for 3 hours. Such heat treatment, aimed at removing almost any of the diagnosed substances, makes it possible to reuse the PSS plate with a microdiagnostic device.

The possibility of using a microdiagnostic device in the temperature range from room temperature to a temperature of about 750 ° C, at which significant changes in the PSS structure begin, manifested in a decrease in the size of the PSS plate in the scientific literature known as shrinkage, and, consequently, in the size of unit cells, is another an important advantage of a microdiagnostic device manufactured in accordance with the claimed method. Since the width of the baffle depends only on the number of seal lines that make up the baffle, with a typical PSS plate thickness of 1 mm, the baffle consists of twenty seal lines 3-4 µm wide, and thus the total width of the baffle does not exceed 100 µm. The unit cell size is determined by the amount of the diagnosed substance required for diagnosis, and, as a rule, is in the range of 200-400 microns.

Failure to comply with the restrictions on the distance along the Y or X coordinates from the edge of the PSS plate, at which the formation of the first partition consisting of compaction lines can be started, as was revealed in the course of experimental studies, leads to distortions of the shape of the partition.

Distortions of the shape of the first partition at a distance less than 2.5 times the width of the cell of the microdiagnostic device from the edge of the plate are caused by the conditions for the formation of so-called edge effects, which are manifested in the inhomogeneity of the structure and arising in the PSS plates during their creation by through processing of two-phase glass plates in a 3M solution. HCl (or HNO ₃ ) at a temperature of 100 ° C. This is the reason for the formation of the first septum, at a distance from the edge that exceeds the cell width by 2.5 times.

The limitation on the distance of the plane of the minimum section of the laser beam 2ω ₀ from the rear surface of the plate, as well as the limitation on the distance of the plane of the minimum cross section of the laser beam 2ω ₀ from the upper surface of the plate, at which there are no distortions of the surfaces of the plate, were determined in the course of experiments.

The restrictions on the displacement of the plane of the minimum cross-section of the laser beam 2ω ₀ along the Z coordinate and the region with the minimum cross-section of the laser beam 2ω ₀ along the coordinate of the formation of the corresponding compaction line (Y or X), which subsequently ensure the impermeability of the unit cell partitions were also determined experimentally.

All restrictions on the parameters of laser radiation that form the compaction lines that make up the partition without breaks and distortions were determined in the course of experiments. Continuous emission CO ₂ laser parameters used to create the sealing regions at the outer portions of each of the partitions on each of the surfaces MSS plate above the partition size to more than 1.2 times, were determined experimentally.

The essence of the invention is illustrated by the figures, where

in fig. 1 shows a diagram of a device for implementing a method for manufacturing partitions in a PSS plate.

FIG. 2 shows a diagram of a device for completing the implementation of a method for manufacturing partitions by creating seals on the surface of partitions of a microdiagnostic device.

in fig. 3 shows a schematic representation of the partition, explaining the process of its manufacture (view from the end of the PSS plate), where (a) are sequentially displaced along the Z and Y coordinates of the seal lines forming the partition, and (b) and (c) are the zones of surface thermal sealing of the partition.

in fig. 4 shows a computer printout of a photograph taken in reflected light of several elementary cells 5 × 5 mm in size with a partition width of 100 μm of a model microdiagnostic device, on which experimental studies of the permeability of partitions were carried out.

in fig. 5 shows a computer printout of a photograph of one of the compaction lines formed at a distance from the edge of the PSS plate equal to 0.4 mm, less than the distance specified in the claims, which for the smallest of the values of the cell width equal to 0.2 mm is 0.5 mm. The compaction line was formed by moving the PSS plate over its entire length relative to the laser beam focused to a depth of 250 μm from the plate surface at a speed of 2.4 mm / s. The laser radiation parameters at which the densification line was formed were as follows: the power density in the focused laser beam was 10 ¹⁴ W / cm ² , the pulse duration was 200 fs at a pulse repetition rate of 550 kHz. In a photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X when the microscope objective was pointed at a depth of 250 μm, defects are noticeable surrounding the compaction line along its entire length.

и при ω₀=3.5 мкм и λ=515⋅10^-9 м равное 149,4 мкм нарушается. Формирование линии происходило путем перемещения пластины ПСС на всю ее длину относительно лазерного пучка с минимальным сечением 2ω₀ на глубину 880 мкм от поверхности пластины, со скоростью 2.4 мм/с. Параметры лазерного излучения, при которых формировалась линия уплотнения, были следующие: плотность мощности в лазерном пучке с минимальным сечением 2ω₀ составляла 10¹⁴ Вт/см², длительность импульса 220 фс при частоте следования импульсов 550 кГц. На фотографии, выполненной на микроскопе Zeiss Axio Imager A1.m в проходящем свете с увеличением 100 при наведении объектива микроскопа на линию уплотнения, сформированную на глубине 880 мкм от поверхности пластины ПСС видно, что линию уплотнения окружают дефекты на краях линии по всей ее длине.FIG. 6 shows a computer printout of one of the compaction lines formed at a depth of 880 μm from the surface of a plate with a thickness of 1 mm (1000 μm), i.e. at a distance of 120 μm from the rear surface of the plate, at which the limitation on the distance from the rear surface of the plate is defined as

and at ω ₀ = 3.5 µm and λ = 515 -10 ^-9 m equal to 149.4 µm is violated. The line was formed by moving the PSS plate along its entire length relative to the laser beam with a minimum cross section of 2ω ₀ to a depth of 880 μm from the plate surface at a speed of 2.4 mm / s. The laser radiation parameters at which the densification line was formed were as follows: the power density in the laser beam with a minimum cross section 2ω ₀ was 10 ¹⁴ W / cm ² , the pulse duration was 220 fs at a pulse repetition rate of 550 kHz. In a photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 when aiming the microscope objective at the compaction line formed at a depth of 880 μm from the surface of the PSS plate, it can be seen that the compaction line is surrounded by defects at the edges of the line along its entire length.

которое при ω₀=3.5 мкм и λ=515⋅10^-9 м составляло 149.4 мкм. Формирование каждой из линий уплотнения, совокупность которых составляет перегородку, происходило путем перемещения пластины ПСС относительно минимального сечения лазерного пучка 2ω₀ с плотностью мощности 10¹⁴ Вт/см², длительности импульса 220 фс при частоте следования импульсов 550 кГц на всю длину микродиагностического устройства. На фотографии, выполненной на микроскопе Zeiss Axio Imager A1.m в проходящем свете с увеличением 100^Х при наведении объектива микроскопа на линию уплотнения, сформированную при смещении плоскости минимального сечения лазерного пучка 2ω₀ по координате Z относительно первой линии уплотнения на расстояние 100 мкм заметны дефекты на краях линии уплотнения по всей длине.FIG. 7 shows a computer printout of a photograph of a partition consisting of compaction lines, one of which is the second, was formed when a laser beam with a minimum cross section of 2ω ₀ was displaced along the Z coordinate relative to the first compaction line by a distance of 100 μm, less than

which at ω ₀ = 3.5 µm and λ = 515⋅10 ^-9 m was 149.4 µm. The formation of each of the compaction lines, the totality of which constitutes a partition, was carried out by moving the PSS plate relative to the minimum cross section of the laser beam 2ω ₀ with a power density of 10 ¹⁴ W / cm ² , a pulse duration of 220 fs at a pulse repetition rate of 550 kHz over the entire length of the microdiagnostic device. In a photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X while aiming the microscope objective at the compaction line formed when the plane of the minimum section of the laser beam 2ω _{0 is} displaced along the Z coordinate relative to the first compaction line at a distance of 100 μm, defects are noticeable at the edges of the seal line along the entire length.

которое при ω₀=3.5 мкм и λ=0.515 мкм составляло 112 мкм. Формирование каждой из линий уплотнения, совокупность которых составляет перегородку, происходило путем перемещения пластины ПСС относительно лазерного пучка с минимальным сечением 2ω₀ с плотностью мощности 10¹⁴ Вт/см², длительности импульса 220 фс при частоте следования импульсов 550 кГц на всю длину микродиагностического устройства. Фотография фрагмента перегородки, выполненная с торца пластины ПСС показывает, что при формировании второй линии уплотнения перегородки смещение по координате Z относительно первой линии уплотнения на расстояние 170 мкм, большее чем

которое при ω₀=3.5 мкм и λ=0.515 мкм составляло 149.4 мкм. Непрерывной перегородки не образуется. Фотография выполнена на микроскопе Zeiss Axio Imager A1.m в проходящем свете с увеличением 100^X.FIG. 8 shows a computer printout of a photograph of a partition consisting of compaction lines, one of which is the second, was formed when a laser beam with a minimum cross section of 2ω ₀ was displaced along the Z coordinate relative to the first compaction line by a distance of 170 μm greater than

which at ω ₀ = 3.5 μm and λ = 0.515 μm was 112 μm. The formation of each of the compaction lines, the aggregate of which constitutes a partition, was carried out by moving the PSS plate relative to the laser beam with a minimum cross section of 2ω ₀ with a power density of 10 ¹⁴ W / cm ² , a pulse duration of 220 fs at a pulse repetition rate of 550 kHz over the entire length of the microdiagnostic device. A photograph of a fragment of the baffle taken from the end face of the PSS plate shows that when the second seal line of the baffle is formed, the displacement in the Z coordinate relative to the first seal line is at a distance of 170 μm, greater than

which at ω ₀ = 3.5 μm and λ = 0.515 μm was 149.4 μm. A continuous septum is not formed. The photograph was taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X.

FIG. 9 is a computer printout of a photograph of a partition created according to the parameters described in the description of FIG. 8 taken 10 days after the creation of the septum. The photograph shows that the septum is permeable for the rhodamine molecules contained in the aqueous solution, as evidenced by the PSS staining around the septum being diagnosed.

FIG. 10 shows a computer printout of a photograph of a fragment of a partition consisting of compaction lines, one of which is the penultimate one, was formed when the area with a minimum cross-section of the laser beam 2ω ₀ along the X coordinate relative to the previous compaction line was displaced by a distance of 2.5 μm, less than 0.5⋅2w ₀ = 3.5 μm. The formation of each of the compaction lines, the totality of which constitutes a partition, was carried out by moving the PSS plate relative to the minimum cross section of the laser beam 2ω ₀ with a power density of 10 ¹⁴ W / cm ² , a pulse duration of 220 fs at a pulse repetition rate of 550 kHz over the entire length of the microdiagnostic device. In a photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X when aiming the microscope objective at the compaction line formed when the region of the minimum cross-section of the laser beam 2ω ₀ along the X axis by a distance of 2.5 μm relative to the previous compaction line, defects are noticeable at the edges of the seal line along the entire length.

FIG. 11 shows a computer printout of a photograph of a partition consisting of compaction lines, one of which is the penultimate one, was formed when the region with a minimum cross-section of the laser beam 2ω _{0 of} radiation was displaced along the X coordinate relative to the previous compaction line by a distance of 8.5 μm, greater than 1.0⋅2ω ₀ = 7 microns. The formation of each of the compaction lines, the aggregate of which constitutes a partition, was carried out by moving the PSS plate relative to the laser beam with a minimum cross section of 2ω _{0 with} a power density of 10 ¹⁴ W / cm ² , a pulse duration of 220 fs at a pulse repetition rate of 550 kHz over the entire length of the microdiagnostic device. In the photograph taken 14 days after the creation of the septum, the PSS staining behind the diagnosed septum is noticeable, arising from the permeability of the septum to rhodamine molecules.

равного приблизительно 75 мкм от верхней поверхности пластины. Формирование каждой из линий уплотнения, совокупность которых составляет перегородку, происходило путем перемещения пластины ПСС относительно лазерного пучка минимального сечения 2ω₀ с плотностью мощности 10¹⁴ Вт/см², длительности импульса 220 фс при частоте следования импульсов 550 кГц на всю длину микродиагностического устройства. На фотографии, выполненной на микроскопе Zeiss Axio Imager A1.m в проходящем свете с увеличением 100^X при наведении объектива микроскопа на последнюю линию уплотнения заметны дефекты на краях линии уплотнения по всей длине.FIG. 12 shows a computer printout of a photograph of a septum consisting of sealing lines, the last of which was formed at a distance of 65 μm, less

equal to approximately 75 μm from the top surface of the plate. The formation of each of the compaction lines, the totality of which makes up the partition, was carried out by moving the PSS plate relative to the laser beam with a minimum cross section of 2ω ₀ with a power density of 10 ¹⁴ W / cm ² , a pulse duration of 220 fs at a pulse repetition rate of 550 kHz over the entire length of the microdiagnostic device. In a photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X, when the microscope objective is aimed at the last compaction line, defects are noticeable at the edges of the compaction line along its entire length.

равного 149,5 мкм от верхней поверхности пластины. Формирование каждой из линий уплотнения, совокупность которых составляет перегородку, происходило путем перемещения пластины ПСС относительно лазерного пучка минимального сечения 2ω₀ с плотностью мощности 10¹⁴ Вт/см², длительности импульса 220 фс при частоте следования импульсов 550 кГц на всю длину микродиагностического устройства. На фотографии, выполненной спустя 14 дней после создания перегородки, заметно окрашивание ПСС за диагностируемой перегородкой, возникающее из-за проницаемости перегородки для молекул родамина. Фотография выполнена на микроскопе Zeiss Axio Imager A1.m в проходящем свете с увеличением 100^X.FIG. 13 shows a computer printout of a photograph of a partition consisting of lines of compaction, the last of which was formed at a distance of 160 microns, greater than the distance

equal to 149.5 microns from the upper surface of the plate. The formation of each of the compaction lines, the totality of which makes up the partition, was carried out by moving the PSS plate relative to the laser beam with a minimum cross section of 2ω ₀ with a power density of 10 ¹⁴ W / cm ² , a pulse duration of 220 fs at a pulse repetition rate of 550 kHz over the entire length of the microdiagnostic device. In the photograph taken 14 days after the creation of the septum, the PSS staining behind the diagnosed septum is noticeable, arising from the permeability of the septum to rhodamine molecules. The photograph was taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X.

FIG. 14 shows a computer printout of a photograph of one of the densification lines formed at a depth of 250 μm from the surface of the PSS plate with a power density in a laser beam with a minimum cross section of 2ω ₀ 10 ¹⁴ W / cm ² , a pulse duration of 200 fs, and a pulse repetition rate of 550 kHz. The compaction line was formed by moving the PSS plate along its entire length relative to the laser beam with a minimum cross section of 2ω ₀ to a depth of 250 μm from the plate surface at a speed of 2.4 mm / s. From a photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X when aiming the microscope objective at a depth of 250 μm, it can be seen that the formation of a line with changed optical characteristics, indicating the compaction of the material, has occurred.

, в которой, перемещая пластину относительно области минимального сечения лазерного пучка 2ω₀ на всю длину микродиагностического устройства по координате X формируют первую линию уплотнения, входящую в совокупность линий уплотнения, составляющих перегородку, после чего смещают плоскость минимального сечения лазерного пучка 2ω₀ в направлении к верхней поверхности пластины по координате Z на расстояние, не меньшее, чем

и не большее, чем

а область минимального сечения лазерного пучка 2ω₀ смещают по координате Y путем перемещения пластины относительно области минимального сечения лазерного пучка 2ω₀ на расстояние не меньшее, чем 0,5⋅2ω₀ и не большее, чем 1,0⋅2ω₀ и, перемещая пластину относительно области минимального сечения лазерного пучка 2ω₀ на всю длину микродиагностического устройства по координате X формируют вторую линию уплотнения и далее, многократно чередуя смещение плоскости минимального сечения лазерного пучка 2ω₀ в направлении к верхней поверхности пластины по координате Z, а области минимального сечения лазерного пучка 2ω₀ по координате Y, путем перемещения пластины относительно области минимального сечения лазерного пучка 2ω₀ с перемещением на всю длину микродиагностического устройства по координате X в соответствии с ограничениями на формирование линий уплотнения, составляющих перегородку, формируют перегородку, при этом последнюю линию уплотнения перегородки формируют в плоскости, отстоящей от верхней поверхности пластины на расстоянии, не меньшем чем

и не большем чем

после чего чередуют смещение по координате Y на расстояние равное ширине ячейки микродиагностического устройства, с формированием перегородок по координате X, которые формируют в соответствии с последовательностью действий и ограничений на них по формированию линий уплотнения, составляющих перегородку, до момента завершения формирования всех перегородок по координате Y, далее, отступив от края пластины по координате X на расстояние, превышающее ширину ячейки не менее чем в 2.5 раза, формируют перегородку из линий уплотнения в соответствии с последовательностью действий и ограничений на них по формированию линий уплотнения, составляющих перегородку и введенных ранее, до момента завершения формирования перегородки, после чего, многократно чередуют смещение по координате X на расстояние равное ширине ячейки микродиагностического устройства, превышающее ширину перегородки, с формированием перегородок вдоль координаты Y, которые формируют в соответствии с последовательностью действий и ограничений на них по формированию линий уплотнения, составляющих перегородку, введенных ранее, до момента завершения формирования всех перегородок по координате X, а длительность импульса лазерного излучения выбирают не более 300 фс при частоте следования импульсов не менее 500 кГц с плотностью энергии не менее 8⋅10³ Дж/см² и не более 15⋅10³ Дж/см² при скорости перемещения пластины относительно лазерного пучка минимального сечения 2ω₀ не ниже 0.4 мм/с и не выше 2.5 мм/с, при этом используют пластину из ПСС, внешнюю часть каждой из перегородок на каждой из поверхностей которой после завершения формирования всех перегородок микродиагностического устройства уплотняют до размера, превышающего размер перегородок не более чем 1.2 раза путем перемещения пластины относительно сфокусированного на ее поверхность пучка непрерывного излучения CO₂-лазера с плотностью мощности не ниже 2.8⋅10⁴ Вт/см² при скорости перемещения не менее 0.1 мм/с и не более 0.5 мм/с.FIG. 15 shows a computer printout of a photograph of a fragment of four elementary cells of a microdiagnostic device made under a Zeiss Axio Imager A1.m microscope in linearly polarized light (with crossed polarizer and analyzer). The photo shows the absence of thermal stresses in the PSS around the partitions. The manufacture of this microdiagnostic device with a thickness of partitions of the order of 100 μm on a PSS plate 1 mm thick was started by stepping back from the edge of the plate along the Y coordinate by a distance exceeding the cell width by at least 2.5 times, with the alignment of the plane of the minimum section of the laser beam 2ω ₀ with the plane, spaced from the rear surface of the plate at a distance not less than

, in which, by moving the plate relative to the region of the minimum section of the laser beam 2ω ₀ for the entire length of the microdiagnostic device along the X coordinate, the first seal line is formed, which is included in the set of seal lines that make up the partition, after which the plane of the minimum section of the laser beam 2ω _{0 is} shifted towards the upper the surface of the plate along the Z coordinate at a distance not less than

and no more than

and the area of the minimum cross-section of the laser beam 2ω _{0 is} shifted along the Y coordinate by moving the plate relative to the area of the minimum cross-section of the laser beam 2ω ₀ by a distance not less than 0.5⋅2ω ₀ and not more than 1.0⋅2ω ₀ and by moving the plate with respect to the area of the minimum cross-section of the laser beam 2ω ₀ for the entire length of the microdiagnostic device along the X coordinate, a second seal line is formed and then, repeatedly alternating the displacement of the plane of the minimum cross-section of the laser beam 2ω ₀ towards the upper surface of the plate along the Z coordinate, and the area of the minimum cross-section of the laser beam 2ω ₀ along the Y coordinate, by moving the plate relative to the area of the minimum cross-section of the laser beam 2ω ₀ with displacement along the entire length of the microdiagnostic device along the X coordinate in accordance with the constraints on the formation of the seal lines that make up the partition, a partition is formed, while the last sealing line of the partition is formed in the plane spaced from in the upper surface of the plate at a distance not less than

and no more than

after which the displacement along the Y coordinate is alternated by a distance equal to the width of the cell of the microdiagnostic device, with the formation of partitions along the X coordinate, which are formed in accordance with the sequence of actions and restrictions on them on the formation of seal lines that make up the partition, until the completion of the formation of all partitions along the Y coordinate , then, stepping back from the edge of the plate along the X coordinate by a distance exceeding the cell width by at least 2.5 times, form a partition from the seal lines in accordance with the sequence of actions and restrictions on them on the formation of the seal lines that make up the partition and introduced earlier, until the moment completion of the formation of the partition, after which, the displacement along the X coordinate is repeatedly alternated by a distance equal to the width of the cell of the microdiagnostic device, which exceeds the width of the partition, with the formation of partitions along the Y coordinate, which are formed in accordance with the sequence of actions and on them in the formation of the compaction lines that make up the partition, introduced earlier, until the completion of the formation of all partitions along the X coordinate, and the laser pulse duration is chosen no more than 300 fs at a pulse repetition rate of at least 500 kHz with an energy density of at least 8⋅10 ³ J / cm ² and not more than 15⋅10 ³ J / cm ² at the speed of movement of the plate relative to the laser beam of the minimum cross section 2ω ₀ not less than 0.4 mm / s and not higher than 2.5 mm / s, while using a plate made of PSS, the outer part each of the partitions on each of the surfaces of which, after the completion of the formation of all partitions of the microdiagnostic device, is compacted to a size that exceeds the size of the partitions by no more than 1.2 times by moving the plate relative to the beam of continuous CO ₂ laser radiation focused on its surface with a power density of at least 2.810 ⁴ W / cm ² at a movement speed of not less than 0.1 mm / s and not more than 0.5 mm / s.

FIG. 16 shows a computer printout of a photograph of one of the compaction lines, which was attempted to be formed at a depth of 250 μm from the surface of the PSS plate with a power density in a laser beam with a minimum cross section of 2ω ₀ 10 ¹⁴ W / cm ² with a pulse duration of 1 ps, a pulse repetition rate of 550 kHz. with the speed of movement of the PSS plate relative to the focused laser beam 2.4 mm / s. From a photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X while aiming the microscope objective at a depth of 250 μm, where they tried to form a compaction line, it can be seen that the formation of a compaction line with altered optical characteristics, indicating the compaction of the material, Did not happen.

FIG. 17 shows a computer printout of a photograph of one of the densification lines, which was attempted to be formed at a depth of 250 μm from the surface of the PSS plate with a power density in a laser beam with a minimum cross section of 2ω ₀ 10 ¹⁴ W / cm ² with a pulse duration of 200 fs, a pulse repetition rate of 200 kHz. with the speed of movement of the PSS plate relative to the focused laser beam 2.4 mm / s. As can be seen from a photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X when the microscope objective was aimed at a depth of 250 μm, at which the compaction line was formed, the formed line represents a number of regions of destruction of the PSS structure.

FIG. 18 shows a computer printout of a photograph of one of the densification lines, which was attempted to be formed at a depth of 250 μm from the surface of the PSS plate with a power density in a laser beam with a minimum cross section of 2ω ₀ 710 W / cm ² with a pulse duration of 200 fs, a pulse repetition rate of 550 kHz, with the velocity of movement of the PSS plate relative to the focused laser beam 2.4 mm / s A photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X shows that the formation of a compaction line with altered optical characteristics, indicating material compaction, did not occur.

FIG. 19 shows a computer printout of a photograph of one of the densification lines, which was attempted to be formed at a depth of 250 μm from the surface of the PSS plate with a power density in a laser beam with a minimum cross section of 2ω ₀ 1.6⋅10 ¹⁴ W / cm ² with a pulse duration of 200 fs, a pulse repetition rate of 550 kHz, with the speed of movement of the PSS plate relative to the focused laser beam 2.4 mm / s. A photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X shows that the compaction line, which appears as a result of exposure to laser radiation with the parameters given above, is a series of regions that appear dark, the appearance of which indicates this called material decompaction. Decompression of glass is understood as the formation in the area of action of air cavities surrounded by glass, in which deformation and breaking of SiO ₂ bonds have occurred, leading to compaction of the glass structure. A light halo surrounding the decompressed area indicates mechanical stresses caused by the compaction of the structure.

FIG. 20 shows a computer printout of a photograph of one of the compaction lines, which was attempted to be formed at a depth of 250 μm from the surface of the PSS plate with a power density in a laser beam with a minimum cross section of 2ω ₀ 10 ¹⁴ W / cm ² with a pulse duration of 200 fs, a pulse repetition rate of 550 kHz. with the speed of movement of the PSS plate relative to the focused laser beam 0.35 mm / s. A photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X shows that the compaction line resulting from exposure to laser radiation with the parameters given above consists of a number of regions of complex structure that appear dark, the appearance of which indicates about loosening the material. A light halo surrounding both areas of complex structure within the seal line and the seal line itself indicates mechanical stress.

FIG. 21 shows a computer printout of a photograph of one of the compaction lines, which was attempted to be formed at a depth of 250 μm from the surface of the PSS plate with a power density in a laser beam with a minimum cross section of 2ω ₀ 10 ¹⁴ W / cm ² with a pulse duration of 200 fs, a pulse repetition rate of 550 kHz. with a speed of movement of the PSS plate relative to the focused laser beam 2.8 mm / s A photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X shows that the change in the optical characteristics of the PSS material, indicating compaction was insignificant, and the formation of a line compaction did not occur completely.

FIG. 22 is a computer printout of a photograph of a partition, the internal structure of which was created in accordance with the parameters described in the description of FIG. 5, and which was subjected to surface treatment by scanning a focused cw laser beam from a CO ₂ laser with a power density of 0.9⋅10 ⁴ W / cm ² at a scanning speed of 0.4 mm / s to a size that exceeds the size of the partition by a factor of 1.1. In a photograph taken on a Zeiss Axio Imager A1.m microscope in transmitted light with a magnification of 100 ^X when aiming the microscope objective at the surface of the PSS plate, it is noticeable that the compaction of the surface area surrounding the septum did not occur completely, which could subsequently lead to the penetration of the studied diagnosed substance into adjacent cells.

FIG. 23 is a computer printout of a photograph of a partition, the internal structure of which was created in accordance with the parameters described in the description of FIG. 5, and which was subjected to surface treatment by scanning a focused cw CO ₂ laser beam with a power density of 2.9⋅10 ⁴ W / cm ² at a scanning speed of 0.08 mm / s to a size 1.1 times larger than the baffle size. A photograph of the plate surface, taken on a Zeiss Axio Imager A1.m microscope in crossed polarizers with a magnification of 100 ^X , shows the presence of mechanical stresses surrounding the partition, which can further lead to its destruction.

FIG. 24 is a computer printout of a photograph of a partition, the internal structure of which was created in accordance with the parameters described in the description of FIG. 5, and which was subjected to surface treatment by scanning a focused cw CO ₂ laser beam with a power density of 2.9⋅10 ⁴ W / cm ² at a scanning speed of 0.55 mm / s to a size 1.1 times larger than the baffle size. In the photograph of the plate surface made on a Zeiss Axio Imager A1.m microscope in crossed polarizers with a magnification of 100 ^X , it can be seen that in a number of areas of the surface surrounding the partition, complete compaction did not occur.

FIG. 25 shows a computer printout of a photograph of a partition, the internal structure of which was created in accordance with the parameters described in the description of FIG. 5, and which was subjected to surface treatment by scanning a focused cw laser beam from a CO ₂ laser with a power density of 2.9⋅10 ⁴ W / cm ² at a scanning speed of 0.4 mm / s to a size 1.3 times the size of the partition. A photograph of the plate surface, made on a Zeiss Axio Imager A1.m microscope in crossed polarizers with a magnification of 100 ^X , shows a slight difference in the optical characteristics of the compaction region surrounding the partition from the characteristics of the PSS plate, indicating that the surface compaction of the partition is incomplete.

FIG. 26 shows a computer printout of a photograph of a fragment of a model microdiagnostic device based on a PSS plate with four cells, one of the cells of which was impregnated with an aqueous solution of rhodamine 6G. The photograph shows that the penetration of rhodamine 6G molecules through the septum into adjacent cells did not occur. This indicates that the fabricated partitions are impermeable to rhodamine molecules. The photograph was taken 183 days after the impregnation.

1 - cell impregnated with an aqueous solution of rhodamine 6G;

2 - water that has penetrated into neighboring cells.

FIG. 27 is a graph showing the results of the study of the permeability of the partitions of a model microdiagnostic device, a photograph of which is shown in FIG. 26, one of the unit cells of which was impregnated with an aqueous solution of rhodamine 6G. The study of the permeability of the septum consisted of recording transmission spectra in the range of 400-900 nm within an arbitrarily selected cell impregnated with an aqueous solution of rhodamine 6G immediately after impregnation and six months later. It follows from the results obtained that the transmission spectra of PSS impregnated with an aqueous solution of rhodamine 6G behind the partition did not change within 183 days.

1 - transmission spectrum of rhodamine within a cell bounded by partitions (immediately after impregnation);

2 - transmission spectrum of rhodamine within the cell bounded by partitions (183 days after impregnation);

3 - spectrum of water transmission within the cell bounded by partitions (immediately after impregnation);

4 - spectrum of water transmission within the cell, limited by partitions (183 days after impregnation).

FIG. 28 shows a computer printout of a photograph of a fragment of four elementary cells of a model microdiagnostic device created in accordance with the description given in FIG. 15. The model microdiagnostic device was impregnated with an aqueous solution of rhodamine during the study of the permeability of the barriers and was stored for 183 days. After storage, to eliminate the diagnosed substance - an aqueous solution of rhodamine 6G, heat treatment of the model microdiagnostic device was carried out at a temperature of 600 ° С for 3 hours in a muffle furnace "PM-10" (stability of maintaining the temperature ± 2 ° С) to eliminate the diagnosed substance - aqueous rhodamine 6G solution. A photograph taken on a Zeiss Axio Imager A1.m microscope in linearly polarized light with crossed polarizers with a magnification of 100 ^X shows the invariability of the shape of the septa after heat treatment and the complete elimination of the diagnosed substance.

The device for implementing the proposed method (Fig. 1) contains: a pulsed ytterbium fiber laser 1 with a wavelength of 1.03 μm, a pulse duration varying from 200 to 300 fs, a pulse repetition rate above 500 kHz, a maximum pulse energy of 2.3 μJ, with a laser power supply 2, with a block of a device based on a KDP crystal 3 for converting laser radiation into the second harmonic with λ = 0.515 μm, plate 4 installed at an angle of 45 to the optical axis of the laser, a transmitting microlens 5 with a numerical aperture of 0.25 and a focal length of 15 mm, behind which perpendicular to the optical axis of the laser is a plate PSS 6, fixed on the coordinate table 7, made with the ability to move along the X and Y axes at a speed of 0.01-4.0 mm / s and along the Z axis, which coincides with the optical axis of the laser with a movement accuracy of ± 1 μm. A lens 8 is installed behind plate 6, which collects the radiation transmitted through the PSS plate 6 to an optical power meter (IOM) Solo 2M (with a pyroelectric with a pyroelectric power detector UP 19K - 110F - H9 with an accuracy of 1% of the measured value and a noise power equivalent of 1 mW) 9 with an energy detector connected to the synchronization unit 10, providing simultaneous on / off switching of the power supply unit 2 of the laser 1 with the beginning and the end of the movement of the coordinate table 7. The second Solo 2M 11 power meter is located behind the plate 4 and is also connected to the synchronization unit 10. As the synchronization unit 10 uses a personal computer (PC).

A 1 mm thick PSS plate, the surfaces of which were polished, was used as a sample for creating a microdiagnostic device. Average pore size 5 nm, total porosity 26%. The chemical composition is 0.30Na ₂ O-3.14B ₂ O ₃ -0.11Al ₂ O ₃ -96.45SiO ₂ with the expected Al ₂ O ₃ content <= 0.1 wt%.

The source of laser radiation was an ytterbium fiber laser with a wavelength of 515 nm at the second harmonic, a pulse duration of 200 fs, a maximum pulse energy of 2.3 mJ, and a pulse repetition rate of 500 kHz.

To move the sample, we used an XYZ coordinate table controlled from a computer, providing a movement accuracy of 0.5 μm.

The device works as follows. Laser radiation 1 passes through a device based on a KDP crystal 3 and plate 4, installed at an angle of 45 to the optical axis of laser 1, while up to 5% of the radiation energy is reflected from plate 4 and falls on IOM 11. The radiation transmitted through plate 4 is formed by an objective 5 into the plane of formation of the partition located at a given depth of the PSS plate 6. Simultaneously with switching on the laser 1, the coordinate table 7 begins to move along one of the X or Y coordinates satisfying the limitations of the claims. In this case, a part of the radiation transmitted through the formed partition is recorded by the IOM 9 located behind the lens 8 mounted behind the PSS plate 6. Part of the radiation reflected by the plate 4 installed at an angle of 45 to the laser optical axis is used to control the power that forms the radiation partition. The moment of the end of the formation of the partition is fixed by the IOM 9. The criterion for the completion of the formation of the partition was the termination of the increase in the power of the transmitted radiation on the IOM 9. At the moment of the termination of the increase in power, the laser power supply 1 is turned off and at the same time the movement of the coordinate table 7 stops through the synchronization unit 10.

The size of the partition is controlled by changing the size of the affected area, the energy density in the pulse, which is determined by the power of the radiation incident on the MSS 6, the pulse duration and the frequency of pulse repetition, as well as by changing the scanning speed.

An apparatus for the completion of the method for manufacturing partitions for creating a seal surface partitions mikrodiagnosticheskogo device comprises: a CO ₂ laser 12 with a wavelength of 10.6 microns, a variable radiation output to 7W, the divergence of the laser beam 4 mrad beam diameter of 3.5 mm, a power supply and laser control 13, directing mirror 14, focusing ZnSe lens 15, in the focal plane of which the PSS plate 16 is located, fixed on the coordinate table 17, made with the ability to move along the X and Y axes at a speed of 0.01-4.0 mm / s and along the Z axis, with an accuracy displacement ± 1 μm. The movement of the coordinate table 17 is synchronized with the power supply and control unit 13 of the CO ₂ laser 12 through the PC 18.

The device with CO ₂ laser 12 operates as follows. The laser radiation 12 falls on the mirror 14, which directs the beam to the focusing ZnSe lens 15. The radiation transmitted through the ZnSe lens 15 is focused on the center of the first partition along one of the X or Y coordinates of the upper surface of the PSS plate 16. Simultaneously with switching on the laser 12, the coordinate table 17 begins to move. along one of the X or Y coordinates, satisfying the limitations of the claims. At the moment of completion of the creation of the sealing area around the line, the laser power supply 13 is turned off and at the same time through the PC 18 the movement of the coordinate table 17 stops.

As the light source for the surface treatment of the plate was used Synrad _CO2 laser with a wavelength of 10.6 microns, working in a continuous mode with a beam quality of M ² <1.2.

The minimum width of the partition, consisting of seal lines with a width of 4 μm, which can be made according to the inventive method, is determined by the divergence of the radiation beam of the laser used 1 and the optical characteristics of the microlens 5, and on the equipment described in the description can be 100 μm.

The minimum width of the sealing areas on the surfaces of the partitions, exceeding the width of the partition by no more than 1.2 times, that is, not exceeding 120 μm, which can be produced by the claimed method, is determined by the divergence of the radiation beam of the CO ₂ laser 12 used and the optical characteristics of the ZnSe lens 15.

Thus, the claimed set of features makes it possible to form a microdiagnostic device on a PSS plate, the use of which as a matrix of a microdiagnostic device allows completely eliminating the interaction of matrix materials with a diagnosed substance, realizing the possibility of its repeated use, as well as eliminating the stages of preliminary and subsequent processing of the matrix.

Claims (1)

A method of manufacturing a microdiagnostic device, which consists in the fact that, stepping back from the edge of the plate along the Y coordinate, the plate is moved relative to the region of the minimum cross section of the laser beam along the X coordinate along the entire length of the microdiagnostic device until the formation of the first partition is completed, then the plate is shifted relative to the region of the minimum cross section of the laser beam along the Y coordinate and, alternating the movement of the plate relative to the region of the minimum cross-section of the laser beam along the X coordinate along the entire length of the microdiagnostic device until the completion of the formation of the partition with an offset along the Y coordinate, complete the formation of all partitions along the Y coordinate, after which, stepping back from the edge of the plate along coordinate X, move the plate relative to the area of the minimum cross-section of the laser beam along the Y coordinate for the entire length of the microdiagnostic device until the completion of the formation of the first partition, then shift the plate relative to the area of minimum the initial cross section of the laser beam along the X coordinate and, alternating the movement of the plate relative to the region of the minimum cross section of the laser beam along the Y coordinate along the entire length of the microdiagnostic device with an offset along the X coordinate, complete the formation of all partitions along the X coordinate, characterized in that, stepping back from the edge of the plate along in the Y coordinate at a distance exceeding the cell width of the microdiagnostic device by at least 2.5 times, the formation of the first partition begins with the alignment of the plane of the minimum section of the laser beam at the energy level 1 / e ² , the section diameter of which 2ω ₀ is determined from the expression

where ω ₀ is the radius of the minimum section of the laser beam at the energy level 1 / e ² , M is the beam quality, λ is the radiation wavelength, NA is the numerical aperture of the objective, and, with a plane spaced from the rear surface of the plate at a distance not less than

in which, by moving the plate relative to the region of the minimum cross-section of the laser beam 2ω ₀ for the entire length of the microdiagnostic device along the X coordinate, the first seal line is formed, which is included in the set of seal lines that make up the partition, and then the plane with the minimum cross-section of the laser beam is shifted towards the upper surface plates along the Z coordinate at a distance not less than

and no more than

and the region of the minimum cross-section of the laser beam 2ω _{0 is} displaced along the Y coordinate by a distance not less than 0.5⋅2ω ₀ and not more than 1.0⋅2ω ₀ , and by moving the plate relative to the region of the minimum cross-section of the laser beam 2ω ₀ over the entire length of the microdiagnostic device along the X coordinate, form a second line of compaction and then, repeatedly alternating the displacement of the plane of the minimum section of the laser beam 2ω ₀ towards the upper surface of the plate along the Z coordinate, and the area of the minimum section of the laser beam 2ω ₀ along the Y coordinate with displacement of the plate relative to the area of minimum section of the laser beam 2ω ₀ with displacement along the entire length of the microdiagnostic device, in accordance with the restrictions on the formation of sealing lines, a partition is formed, while the last sealing line in the partition is formed in a plane spaced from the surface of the plate at a distance not less than

and no more than

after which the displacement along the Y coordinate is alternated by a distance equal to the width of the cell of the micromicrodiagnostic device, with the formation of partitions along the Y coordinate, which are formed in accordance with the restrictions on the formation of the seal lines that make up the partitions, until the completion of the formation of all partitions along the Y coordinate, then, retreating from the edge of the plate along the X coordinate at a distance exceeding the cell width of the microdiagnostic device by at least 2.5 times, form the first partition from the seal lines in accordance with the sequence of actions and restrictions on them on the formation of the seal line, introduced earlier, until the completion of the formation partitions, after which the displacement along the X coordinate is repeatedly alternated by a distance equal to the width of the cell of the micromicrodiagnostic device, with the formation of partitions along the X coordinate, which are formed in accordance with the sequence of actions and restrictions on them for the formation of compaction lines introduced earlier, until the completion of the formation of all partitions along the X coordinate, the laser pulse duration is chosen no more than 300 femtoseconds at a pulse repetition rate of at least 500 kHz with an energy density of at least 8⋅10 ³ J / cm ² and no more than 15⋅10 ³ J / cm ² at a speed of movement of the plate relative to the focused laser beam not lower than 0.4 mm / s and not higher than 2.5 mm / s, while using a PSS plate, the outer part of each of the partitions, on each of the surfaces of which after completion of the formation of all partitions of the microdiagnostic device create areas of compaction with a size that exceeds the size of the partition by no more than 1.2 times, by moving the plate relative to the beam of continuous radiation from a CO ₂ laser focused on its surface with a power density of at least 2.8⋅10 ⁴ W / cm ² at a scanning speed of not less than 0.1 mm / s and not more than 0.5 mm / s.

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