RU2713527C2 - Device for manipulating micro- and nano-objects - Google Patents

Abstract

FIELD: physics; machine building.

SUBSTANCE: invention relates to a device for manipulating micro- and nano-objects and a method of making a micromechanical actuator and can be used in radio electronics, machine building, biotechnology, electronic microscopy, medicine. Proposed device comprises micromechanical actuator with heating system. Actuator comprises fixed and movable flat elements arranged along its axis. Both elements are connected to one end of the actuator, and on the other end there is a grip for holding micro- or nano-objects. Actuator has an extended through hole in layered composite material with reversible EPR obtained by external energy beams (laser radiation, ion radiation or electric spark discharge in liquid flow) on the surface of the strip from the alloy with epoxy-plastic and including crystalline and amorphous layers with their continuous continuous connection at the boundary between them and the same chemical composition on both sides of the boundary. Hole is made so that the fixed element is crystalline, and the movable heat-sensitive element is amorphous-crystalline with an amorphous layer on the outer side of the actuator. Crystal layer with shape memory is pseudoplastic deformed, and amorphous layer is elastic. At the same time both elements are made with the possibility of reduction of the grip gap till complete closing of elements at heating and increase of the grip gap to the maximum value at cooling. Heating system includes a connector, on which by one end a cantilever with contacts is fixed, and on its other end there is a Peltier element, on the opposite side of which there is a heat-conducting plate with thermistor and a micromechanical actuator fixed on it, and the controller through the contacts on the cantilevers is electrically connected to the Peltier element and a thermistor.

EFFECT: control of actuator (micro pincer) by means of temperature control module based on Peltier elements makes it possible to maintain preset temperature or to develop preset mode of heating and cooling in time with high accuracy and speed.

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Description

The invention relates to the field of mechanics, microsystemic engineering and nanomechanics, in particular to the technique of devices based on materials with shape memory effect (EPF), and can find application in the field of radio electronics, mechanical engineering, biotechnology, electron microscopy, medicine.

The invention is known "Composite functional material" (Patent RU No. 2381903, IPC BVB 15/01; C22F 1/00, published 02.20.2010 Bull. No. 5), which contains at least two layers, firmly connected to each other by planes, one of which is made of a material having a reversible deformation when the external field changes in the working range, and the second layer is made of an elastoplastic material having a yield strength that is in the range of deformations of the composite functional material arising in it when the external field changes in the working range. The temperature field, the magnetic field, or the field of mechanical compressive or tensile stresses are used as the external field, and the material of the layers depends on the external field used.

The disadvantage of this invention is the low reliability and fragility of the obtained composite functional material, due to the fact that due to the connection of dissimilar materials at the boundary of the material layer with the electron-phase transition and the elastic layer, significant mechanical stresses develop during large bending deformations, which lead to delamination and loss of operability of the device cause instability of the device to cyclic loads.

The invention is known "Actuator, actuator system and method of its manufacture" (Patent RU No. 2305874, IPC Н01Н 61/04, published September 10, 2007), including an elastic element, mainly of a two-dimensional configuration, and an element with an electronically coupled element, firmly mechanically connected to each other flat side, moreover, the element with the electron-phase transition has one-sided tensile or compression strain. The actuator system is made in the form of many actuators connected in parallel. A method of manufacturing an actuator includes operations of manufacturing an elastic element, an operation of manufacturing an element with an electron-phase transition, and an operation of mechanically firmly connecting the elements to each other with flat sides. Before the operation of mechanically strong connection of elements with flat sides, an element with a shape memory is trained for one-sided EPF until one-way tensile or compression deformation is achieved, and the operation of mechanically strong connection of elements is carried out at external parameters and an external field corresponding to the martensitic state of the element with shape memory.

The disadvantages of this invention are low speed, the complexity of the application for controlling a microdevice, low reliability and fragility of the obtained composite functional material due to the connection of dissimilar materials.

The invention is known "Thermoelectromechanical converter for a micromanipulator (options)" (Patent RU No. 2259914, IPC 7 B25J 7/00, published September 10, 2005), in which the converter based on a deformable rod contains a spiral electric heater and a bending spring located at the ends of the rod which made fixtures for linking the links of the micromanipulator, as well as the lower and upper rows of thermoelectric modules based on the Peltier effect (Peltier elements), mounted on opposite surfaces styah deformable rod rotatably. The deformable core is made of a material with EPF. With the exception of the spiral electric heater, the deformable rod is made of an electrically conductive material with an electron-phase converter.

The disadvantages of the invention are the implementation of its design is cumbersome, difficult to control, having low speed, which makes it impossible to use it to control a microdevice.

Closest to the claimed technical solution, i.e. the prototype is the invention "a micromechanical device, a method for its manufacture and a system for manipulating micro- and nano-objects" (Patent RU No. 2458002, IPC B81B 3/00; F03G 7/06, published 10.08.2012), in which the micromechanical device contains two flat elements at least one of which is made thermosensitive and consisting of two layers firmly interconnected, of which one is made of an alloy with EPF with pseudoplastic tensile deformation, and the other is made of an elastic material. Flat elements are connected at one end, and a gripper is formed at the other end to hold the manipulated object. In the manufacture of the device, the alloy layer with EPF is preliminarily fabricated and pseudoplastic tensile deformation is introduced into it, and then it is connected to the elastic layer, and the layers are joined at a temperature below the martensitic transformation temperature in the alloy with EPF. The micro-object manipulation system consists of a micromechanical device mounted on the microwire end of the nanopositioner, a working field with a manipulated object, and a heating source in the form of a semiconductor laser, the radiation of which is focused on the working field of the manipulation system, including the end of the microwire with micro tweezers. The disadvantages of this invention is:

- low reliability and fragility of the micromechanical device, due to the fact that due to the mechanical connection of dissimilar materials at the boundary of the material layer with the EPF and the elastic layer during the cyclic operation of the micromechanical device with large bending deformations, significant mechanical stresses develop, which lead to delamination of the layered composite and loss of device performance;

- low performance of the device due to the fact that the cooling of the micromechanical device (after being triggered by heating) occurs naturally, which takes considerable time under normal conditions at room temperature, and in high vacuum, for example, in the chamber of an electron or ion microscope during manipulation micro- and nano-objects, this time can increase several times, which leads to a significant decrease in the speed of the device and the limitation of its functionality.

The technical result consists in increasing the speed, reliability and service life of the device for manipulating micro- and nano-objects.

The technical result is achieved by the creation of a device for manipulating micro- and nano-objects, including a micromechanical actuator with a heating system, and the actuator contains a fixed and movable flat elements located along its axis, the movable element is made of heat-sensitive, consisting of two layers, and one of the layers is made of alloy with a shape memory effect, and the other from an elastic material, with both elements connected to one end of the actuator, and a grip is formed at the other end to hold m micro- or nano-objects, micromechanical is made by manufacturing an extended through hole in a layered composite material with a reversible shape memory effect, including crystalline and amorphous layers with their continuous inextricable connection on the border between them and the same chemical composition on both sides of the border, so that the fixed element is crystalline, and the movable heat-sensitive element is amorphous-crystalline with an amorphous layer on the outside of the actuator, and the crystalline the shape memory layer is pseudo-plastic deformed, and the amorphous layer is elastic, both elements are made with the possibility of reducing the capture gap to complete closure of the elements with increasing temperature in the range of martensitic transformation in the crystalline layer and increasing the capture gap to a maximum value with decreasing temperature in the range martensitic transformation in the crystalline layer; the heating system is a temperature control module, including a controller, a console with contacts, at least one Peltier element, a thermistor, a heat-conducting plate, a connector configured to install the device on a micro or nanomanipulator, a console with contacts is fixed at one end of the connector, and at its other end there is a Peltier element, on the opposite side of which there is a heat-conducting plate with a thermistor and a micromechanical actuator fixed to it, and the controller p through the contacts on the console is electrically connected to the Peltier element and the thermistor.

In the particular case, the temperature control module is configured to bi-directional proportional-integral-differential control.

A method for manufacturing a micromechanical actuator is also proposed, in which a layered amorphous-crystalline composite with an unbroken solid boundary separating the surface of the alloy is obtained through the action of external energy beams, for example, laser radiation, ion irradiation, or an electric spark discharge in a liquid stream, on a surface of an alloy tape amorphous and crystalline states into layers, and with the same chemical composition on both sides of the boundary, in the crystalline layer of the composite material make an extended through hole along the tape parallel to the boundary between the layers and form the movable and fixed elements of the actuator in such a way that both elements are left connected at one end of the actuator and create a grip on the other end of the actuator to hold micro- or nano-objects by separating the elements with the hole at a distance which corresponds to the maximum size of the captured object, while the position and width of the hole is selected sufficient to obtain a fixed element crystalline, of the mobile element — an amorphous-crystalline thermosensitive one with a reversible shape memory effect, with the ability to reversibly change the capture gap when the temperature varies in the range of the martensitic transformation in the crystalline layer, and by varying the position and width of the slot, the ratio of the thicknesses of the amorphous and crystalline layers in the thermally sensitive movable an element that determines the minimum capture gap (up to the closure of the elements) when heating a heat-sensitive element The temperature is higher than the temperature of the end of the reverse martensitic transformation in the crystalline layer and, accordingly, the minimum size of the captured object.

In a particular case, alloys of the quasi-binary system TiNi-TiCu with a copper content of 17 to 34 at. %

In addition, the capture is carried out by selective ion etching.

The claimed invention is illustrated by the following cheotegami.

In FIG. 1 shows a device for manipulating micro- and nano-objects.

In FIG. 2 - micromechanical actuator for capturing micro- and nano-objects (micro-tweezers) in the initial (a, c) and heated (b, d) states.

In FIG. 3 is a schematic representation of the process of obtaining a layered structural composite with reversible EPF by the action of external energy beams (a) and the shape of the composite in the heating-cooling cycle (b).

In FIG. 4 is a diagram of an apparatus for the action of an electric spark discharge in a liquid stream on the surface of an alloy with an electron vapor phase.

In FIG. 5 - diffraction patterns of a tape of an alloy Ti ₅₀ Ni ₅₀ Cu ₂₅ after isothermal crystallization (a) and subsequent processing by the action of an electric spark discharge in a liquid stream (b) (exposure time -10 s).

In FIG. 6 is an example of a micromechanical device made at the end of a piece of tape made of an alloy with an EPF.

In FIG. 7 is an example of a micromechanical device mounted on a conically pointed end of a microwire.

The following is an example of a specific device implementation. A device for manipulating micro- and nano-objects (Fig. 1) contains a micromechanical actuator 1 and a heating system representing a temperature control module including a controller (not shown), at least one Peltier element 2, thermistor 3, console 4 with contacts 5, heat-conducting a plate 6, a connector 7, configured to install the device on a micro- or nanomanipulator using a protruding part 8, a console 4 with contacts 5 is fixed at the connector 7 at one end, and a Peltier element 2 is placed at its other end, on on the opposite side of which there is a heat-conducting plate 6 with a thermistor 3 and a micromechanical actuator 1 fixed on it, and the controller is electrically connected through the contacts 5 on the console 4 to the Peltier element 2 and the thermistor 3.

In the device for manipulating micro- and nano-objects (Fig. 1), the micromechanical actuator (micro forceps) 1 is mounted on a heat-conducting plate 6 made, for example, of silver. The heat-conducting plate 6 is located on the Peltier element 2, consisting of one or more pairs of miniature semiconductor parallelepipeds - one n-type and one p-type in a pair (for example, bismuth telluride Bi ₂ Te ₃ and silicon germanium), which are pairwise connected using metal jumpers, for example, TE-12-0.45-1.3, which heats or cools it. A thermistor 3, for example, NCP03XV103, measures the temperature on a heat-conducting plate 6. A Peltier element 2, a thermistor 3 and a heat-conducting plate 6 are located on a console 4 made of a dielectric material with high thermal conductivity, for example, aluminum nitride, with, for example, deposited on it by spraying, metal contacts 5. The console 4 is mounted on a connector 7 made with the possibility of connection with a 3D-movement manipulator (not shown) and serving as a heat conduit for heat removal / supply. The connector 7 is provided with a protruding part 8, for example, a cylindrical shape with a diameter of 0.5 mm and a length of 35-50 mm, for fixing the device to a micro- or nanomanipulator, for example, Omniprobe, Kleindiek or SmarAct MCS-3D. A device mounted on a micro- or nanomanipulator is capable of moving a captured object in space. The selected (predetermined) mode of heating and cooling of the device is carried out using the temperature control module.

The temperature control module contains a controller, for example, a DX5100 controller, which is a precision programmable control device for thermoelectric modules (Peltier elements). The controller implements bidirectional (heating and cooling) PID (proportional-integral-differential) regulation. The controller allows you to maintain the set temperature of the module with high accuracy or to work out the set heating and cooling program in time at high speed. The controller introduced the diagnostic function of the control object, which includes measuring the resistance of the object on alternating current, thermoelectric figure of merit and time constant. The auto-tuning function of the PID controller parameters is implemented. The controller, which in turn gives the command to heat or cool the heat-conducting plate 6, is controlled by software, for example, the DX5100 Vision program.

The device operates as follows.

In the initial state below the temperature M _{k, the} micromechanical actuator 1 (micro forceps) is made with a gap H between the heat-sensitive movable element 10 and the stationary element 11, the value of which determines the maximum size of the captured object (Fig. 2a, c). When a control signal is supplied from the controller to the Peltier element 2 through contacts 5 on the console 4 (Fig. 1), which leads to heating above the temperature of the end of the reverse martensitic transformation A _{to the} heat-conducting plate 6 with the thermistor 3 and micromechanical actuator 1 attached to it, the movable element 10 (cantilever) is bent, reducing the capture gap to a minimum value until the elements 10, 11 are closed (Fig. 2b, d), which determines the minimum size of the captured object. In this case, the actuator 1 captures a micro- or nano-object located between the movable element 10 and the stationary element 11. Next, the temperature control module based on Peltier elements maintains, with an accuracy of ± 0.5 ° C, the set temperature of the actuator 1 above the temperature A _k , ensuring the retention of the captured object between the movable element 10 and the fixed element 11. When a control signal is supplied from the controller to the Peltier element 2, which leads to cooling of the heat-conducting plate 6 below the temperature of the end of the direct martensitic rashchenija _to M, the actuator 1 due to the implementation of reversible shape memory effect is returned to the initial state by increasing the gripping gap to a value of H (FIGS. 2a, c), and releases the previously trapped object. Thus, the device is capable of capturing small objects in which at least one of the sizes has a value close to the minimum possible for a physical object, for example, nano-objects (carbon nanotube, graphene sheet, whisker, etc.), but does not exceed the maximum value capture gap N, move captured objects in space when fixing the device to a micro- or nanomanipulator and release objects after they are delivered to the place of study or use. Thus, the device performs a complete technological cycle: the choice of a micro- or nano-object - capture using a micromechanical actuator (micro-forceps) - 3D-movement by a micromanipulator - release.

The following is an example of a specific implementation of a method for manufacturing a micromechanical actuator 1 (Fig. 2). The proposed method includes the production of a layered amorphous-crystalline composite material 14 with a reversible shape memory effect (Fig. 3) with an unbroken solid border separating amorphous 12 and crystalline 13 states on the layers, and the same chemical composition on both sides of the border through the action of external energy beams 17, for example, laser radiation, ion irradiation, or electric spark poison in a fluid stream onto the surface of an EPF alloy tape. For the manufacture of composite material 14 with reversible EPF, an alloy with EPF is first obtained, for example, an alloy of the quasi-binary intermetallic system TiNi-TiCu with a copper content of 17 to 34 at. %, in an amorphous state, for example, by the method of ultrafast quenching from the melt in the form of a tape 15 (Fig. 3a). Then, a piece of tape 15 is isothermally crystallized, for example, in a muffle furnace at a temperature of 500 ° C for 300 seconds, to give the shape a straightforward state 16. After that, the tape in a martensitic state is stretched along its length with pseudoplastic deformation, for example, with a degree deformations of 1-3%, are fixed in a deformed state and subjected to external energy 17, for example, laser radiation, ion irradiation or an electric spark discharge in a liquid stream of such intensity and duration, that in the surface layer of the tape there is a destruction (amorphization) of the crystalline structure and, as a consequence, destruction of the electron-phase transition. Thus, in the area of influence, a layered structural (amorphous-crystalline) composite 14 is created with an inextricable boundary separating the amorphous 12 and crystalline 13 states into layers.

The process of processing the material using the action of an electric spark discharge in a liquid stream by forming a periodic or quasiperiodic high-voltage discharge is (Fig. 4) that when voltage is applied to the gap between the sample 18 from the tape 15, which is given a shape memory for a rectilinear state 16 and which stretched along its length with pseudoplastic deformation, and a conductive hollow tip 19, from which liquid 20 is introduced into the gap, a point discharge arises along the jet surface. Under conditions of a fast-flowing electric discharge in the space between the electrodes (sample 18 and hollow tip 19), conditions arise with high electric and magnetic fields, as well as a powerful shock-wave action. In this case, the fluid flow 20 is cut off due to the action of shock waves arising from the discharge. In this method, the use of a liquid jet allows you to simultaneously implement the functions of the current-conducting electrode and the current commutator, and also helps to reduce the surface temperature of the electrode-tool.

The process of exposure to an electric spark discharge in a liquid stream on the surface of a rapidly hardened strip of TiNiCu alloys is carried out as follows (Fig. 4). The processed sample 18 is placed on the table 21, which can be moved both automatically using the controllers 22, and manually. Above the sample 18, a hollow metal tip 19 is connected to the liquid tank 20 by a dielectric conduit 23. A constant negative potential is supplied from the tip 19 from a power supply 24 with a constant voltage of several kilovolts. A sample 18 with a stage 21 is placed in a dielectric chamber 25. Excess liquid is drained through a drainage system 26. With a gap of 3-15 mm between the sample 18 and the tip 19, a periodic discharge a few tens of nanoseconds with a repetition rate of 50-300 Hz occurs, which is "point-like" affects the treated surface. In the process, the following parameters vary: the distance from the surface of the sample 18 to the cut of the nozzle tip 19, for example, within 3-5 mm, the exposure time, for example, from 1 to 10 s, the potential difference, for example, in the range from 3 to 7 kV. As the liquid 20 supplied to the working space, for example, ordinary water is used. To form a high-voltage discharge, a voltage source 24 with a falling current-voltage characteristic is used.

The microhardness on the surface of the tape was measured according to Vickers with a force of 0.05 N using a Micromet 5114 microhardness meter. Moreover, the microhardness of amorphous tape 15 is almost twice the microhardness of isothermally crystallized 16 (Table 1). Then, a series of samples from crystalline tape 16 was exposed to a high voltage discharge in a liquid stream. Measurement of the microhardness of the tape revealed a significant increase in its value in the treated area, which confirms the presence of changes in the structure of the treated layer 15.

X-ray phase analysis showed that the effect of a high-voltage discharge in a liquid stream leads to a decrease in the intensity of reflection peaks of the martensitic phase B19 (type AuCd), which indicates a decrease in the fraction of the crystalline phase due to amorphization of the surface layer of tape 16 (Fig. 5).

If the resulting layered composite material 14 is heated above the temperature of the beginning of the reverse martensitic transformation A _n , the crystalline layer 17 will tend to compress, which will lead to bending of the composite with a certain radius R _min like a bimetallic plate (Fig. 3b). When cooled below a temperature M _{k, the} tape partially straightens to a bending radius R _max due to the elasticity of the amorphous layer 12, acting as a restoring force. At the same time, such a thickness of the modified (amorphous) layer 12 is provided that when heated above the temperature A _n during the reverse martensitic transformation (manifestations of the electron-phase transition), the crystalline (not modified) layer 13 develops sufficient forces to deform the amorphous layer 12. At the same time, Due to the plasticity of the transformation, cooling during the direct martensitic transformation requires significantly less effort to deform the crystalline layer 13, and therefore, the thickness of the amorphous layer 12 can be much many times, or even one or two orders of magnitude) less than the thickness of the crystalline layer 13. Thus, the layered composite material 14 has a reversible bending shape memory due to thermoelastic martensitic transformations in the crystalline layer 13 and the counterforce from the elastic amorphous layer 12.

To form a movable 10 and a fixed 11 elements of the actuator 1 (Fig. 2) in the crystalline layer 13 of the composite material 14 make an extended through hole 9 along the tape parallel to the boundary between the layers 12, 13 so that both elements 10 are left from one end of the actuator 1, 11 connected, and from the other end of the actuator 1 create a grip for holding micro- or nano-objects by separating the elements 10, 11 by the hole 9 at a distance H, which corresponds to the maximum size of the captured object. In this case, the position and width of the hole 9 is selected sufficient to obtain a crystalline fixed element 11, and the movable element 10 is an amorphous-crystalline heat-sensitive, having a reversible shape memory effect, with the ability to reversibly change the size of the capture gap with a change in temperature in the range of martensitic transformation in the crystalline layer 13 moreover, by varying the position and width of the slot 9 also change the ratio of the thicknesses of the amorphous and crystalline layers (d _am and d _cr , respectively) in thermo a sensitive movable element 10, which determines the minimum capture gap (up to the closure of the elements) when the heat-sensitive element 10 is heated above temperature A _to in the crystalline layer 13 and, accordingly, the minimum size of the captured object.

In FIG. 2c, d shows an example of a specific implementation of a micromechanical actuator 1 made by selective ion etching using focused ion beam technology (FIP) from a layered composite material 14 with a thickness of about 5 μm, in the initial “cold” (below temperature M _k ) state (FIG. 2c) and in the “hot” (above temperature A _k ) state after heating (Fig. 2d).

The thicknesses of amorphous d _am and crystalline d _cr layers in the movable heat-sensitive element (cantilever) 10, as well as their ratio, vary:

1) the choice of the composition of the composite material 14, the intensity and duration of the periodic high-voltage discharge, leading to amorphization of the surface layer of the tape 15;

2) the location and size of the hole 9 made in the material 14;

3) a decrease in the thickness of the amorphous 12 and crystalline 13 layers simultaneously or separately, for example, using chemical or electrochemical etching.

In this example, a specific implementation of the micromechanical actuator 1 (micro-forceps) of a layered composite material 14 with a reversible EPF made of a rapidly quenched alloy Ti ₅₀ Ni ₂₅ Cu _{25 by the} action of an electric spark discharge in a liquid stream, the characteristic dimensions of this device are shown (Fig. 2):

- the thickness of the amorphous layer in the cantilever 10: d _am = 0.4 μm;

- the thickness of the crystalline layer in the cantilever 10: d _cr = 1.2 μm;

- the total thickness of the cantilever 10: d = d _cr + d _am = 1.6 μm;

- cantilever length 10:

- hole width 9: b = 1.3 μm:

- total thickness of the actuator 1: D = 5 μm;

- the width of the actuator 1: a = 3-5 microns;

- the maximum gap width varies in the range H = 1-3 μm.

With this configuration, a device for manipulating micro- and nano-objects is able to capture and hold micro- and nano-objects with a size of units of nm to 1-3 microns, and when mounted on a micro- or nanomanipulator, move the captured object in space.

The response time (speed) of the device for manipulating micro- and nano-objects is determined by the speed of the micromechanical actuator (micro-tweezers) and the temperature modes set on the temperature control module depending on the specific application of the device. In an example of a specific embodiment of the device (Fig. 2c, d), the closing of micro forceps during heating and the increase in the capture gap to a value of H = 2.43 μm during cooling occurred in the same time 800 ms.

To simplify the process of fixing the micromechanical actuator 1 on the heat-conducting plate 6, the actuator 1 (micro-tweezers) is formed, for example, by selective ion etching using focused ion beam technology (FIP), at the end of a segment of an amorphous tape 15 made of a quickly quenched alloy with EPF (Fig. 6), In another particular case, for example, using the technology of chemical vapor deposition (CVD) in the FIP apparatus, the actuator 1 is fixed, for example, with tungsten or platinum 19, to the end of the micropropylene conically pointed, for example, up to 5 μm halves 20, for example, with a diameter of 500 μm, with high thermal conductivity, for example, of metal (copper or tungsten) or ceramic (Fig. 7).

Thus, in comparison with the prototype, the proposed device for manipulating micro- and nano-objects and a method for manufacturing a micromechanical actuator significantly increase the reliability and service life of the product by performing a thermosensitive movable element of the actuator in the form of an amorphous-crystalline composite, which is a continuous material of the same chemical composition without mechanical connection layers. The device is capable of capturing small objects, for example, nano-objects (carbon nanotube, graphene sheet, whisker, etc.), and moving them in space when fixing the device to a micro- or nanomanipulator. Actuator control (micro-tweezers) by means of a temperature control module based on Peltier elements allows you to maintain a given temperature or to work out a given heating and cooling mode in time with high accuracy and speed. All of the above provides an increase in the service life, reliability and speed of the product compared to the prototype, which is crucial for such modern areas of technology as micro- and nanomechanics (MEMS and NEMS), robotics, energy, instrumentation, aviation and space technology, biomedicine and bioengineering .

Claims (5)

1. Device for manipulating micro- and nano-objects, containing a micromechanical actuator with a heating system, wherein the actuator contains a fixed and movable flat elements located along its axis, the movable element is thermally sensitive, consisting of two layers, and one of the layers is made of an alloy with the effect shape memory, and the other from elastic material, while both elements are connected at one end of the actuator, and a gripper is formed at the other end to hold micro- or nano-objects, characterized in that The icromechanical actuator is made with an extended through hole in the layered composite material with a reversible shape memory effect, including crystalline and amorphous layers with their continuous inextricable connection on the border between them and the same chemical composition on both sides of the border, while the fixed element is made crystalline, and the movable heat-sensitive the element is amorphous-crystalline with an amorphous layer on the outside of the actuator, and the crystalline layer with shape memory is pseudoplastic being deformed, and the amorphous layer is elastic, both elements are made with the possibility of reducing the capture gap to complete closure of the elements with increasing temperature in the range of martensitic transformation in the crystalline layer and increasing the capture gap to a maximum value with decreasing temperature in the interval of martensitic transformation in the crystalline layer wherein the heating system is a temperature control module comprising a controller, a console with contacts, at least one electronic Peltier element, thermistor, heat-conducting plate, connector, moreover, a console with contacts is fixed at one end of the connector, and a Peltier element is placed at its other end, on the opposite side of which there is a heat-conducting plate with a thermistor and a micromechanical actuator fixed to it, and the controller through the contacts to the console is electrically connected to the Peltier element and the thermistor. 2. The device according to p. 1, characterized in that the temperature control module is configured to bi-directional proportional-integral-differential regulation. 3. A method of manufacturing a micromechanical actuator of a device for manipulating micro- and nano-objects, including the action of external energy beams in the form of laser radiation, ion irradiation or an electric spark discharge in a liquid stream on the surface of an alloy tape with a shape memory effect to obtain a layered amorphous-crystalline composite with continuous continuous boundary separating the amorphous and crystalline states into layers, and the same chemical composition on both sides of the boundary, while in the crystal A lengthy through hole is made along the tape along the tape parallel to the boundary between the layers and the movable and fixed elements of the actuator are formed in such a way that both elements remain connected at one end of the actuator and create a grip on the other end of the actuator to hold micro- or nano-objects by separating the elements hole at a distance that corresponds to the maximum size of the captured object, while the position and width of the slot is selected sufficient to obtain a crystalline element, and a movable element, an amorphous-crystalline heat-sensitive element with a reversible shape memory effect with the ability to reversibly change the capture gap when the temperature varies in the range of martensitic transformation in the crystalline layer, and by varying the position and width of the hole, the thickness ratio of the amorphous and crystalline layers is changed in a heat-sensitive movable element, which determines the minimum capture gap until the elements close when heated The temperature-sensitive element is higher than the temperature of the end of the reverse martensitic transformation in the crystalline layer and, accordingly, the minimum size of the captured object. 4. The method according to p. 3, characterized in that the micromechanical actuator is made of alloys of the quasi-binary system TiNi-TiCu with a copper content of 17 to 34 at. % 5. The method according to p. 3, characterized in that the capture is carried out by selective ion etching.

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