RU2275972C1 - Device for double-sided cleaning of plates - Google Patents

Abstract

FIELD: electronics.

SUBSTANCE: device has discharging and charging cassettes mounted on the base, two mechanism for step moving of the cassettes, mechanism for vertical movement of plates from the discharging cassette, mechanism for horizontal movement of the plates provided with a grip, and unit for cleaning the plates. The grip of the mechanism of the horizontal movement is made of a holder provided with two rollers having round grooves with V-shaped entrance. The distance between the outer diameters of the rollers is greater than the width of the carriers. The stop is mounted below the line that passes through the axes of the rollers of the holder so that its axis of symmetry is in coincidence with the axis of symmetry of the vertical groove on the plate carriers, and the axes of symmetry of the roller grooves and the stop are in the same plane.

EFFECT: improved quality of cleaning.

15 dwg

Description

The invention relates to the manufacture of electronic products and can be used, for example, in operations of two-sided cleaning of plates using brushes and megasound.

Various devices for processing plates [1-3] are widely known, comprising a plate processing unit, loading and unloading devices, and a transporting mechanism. However, the known devices can transport the plate to the processing position in the horizontal plane and cannot be used for two-sided washing of the plates. Moreover, passives and vacuum grippers are used as transporting agents, which leads to fouling of the plates after their processing.

Of the known analogues, the closest in technical essence and the achieved result is a device for two-sided processing of substrates [5], containing a device for transporting them. The transporting device includes an unloading and loading (empty) cassette mounted on the bases of two mechanisms for moving them stepwise. The vertical movement mechanisms are equipped with a device for transporting plates to and from the cartridge, made in the form of a holder with a groove. The horizontal movement mechanism using a vacuum grip transfers the plate to the working position of the cleaning unit, and then to the loading position of the processed plate in the cassette.

A disadvantage of the known device is that it, like all known devices, does not provide high-quality cleaning due to the impurities introduced by vacuum capture. In the manufacture of structures with very small sizes (of the order of 0.3 microns), high demands are placed on the quality of cleaning.

The aim of the invention is to improve the quality of cleaning plates.

This goal is achieved in that a device for two-sided cleaning of plates containing the unloading and loading cassettes mounted on the base, two mechanisms for their step-by-step movement, a mechanism for vertical movement of the plates from the unloading cassette, a mechanism for vertical movement of the plates in the loading cassette, a mechanism for horizontal movement of the plates equipped with a grip , the plate cleaning unit, is additionally equipped with (n-1) cleaning units, where n is the number of technological baths of the cleaning units, determined by the technology a second process of horizontal movement equipped with a gripper, each vertical movement of the plates is provided with a plate carrier made in the form of a sector of a thin ring having a circular groove with a V-shaped inlet on the inner circular end of the sector and containing a vertical groove offset horizontally from the axis of symmetry of the sector, and the capture of each mechanism of horizontal movement is made in the form of a holder equipped with two rollers having circular grooves with a V-shape th lead part, the distance between the outer diameters of which is greater than the width of the carriers, as well as a stop having a groove of the same profile with a V-shaped lead part and located below the line drawn through the axes of the rollers and the holder so that its axis of symmetry coincides with the axis of symmetry vertical groove on the carrier plates, while the axis of symmetry of the grooves of the rollers and the stop lie in the same plane, in addition, each of the n-cleaning units is equipped with a mechanism for loading and unloading plates, made in the form of a movable rod with a rigid a plate carrier mounted on it, interacting with profiled rollers installed in the process baths, made similarly to the carrier of each mechanism for vertical movement of the plates and further provided with a through hole along the axis of symmetry of the carrier.

The introduction of additional n-1 cleaning units expands the technological capabilities of the device, as it allows several technological processes to be carried out, for example, brush cleaning of plates, as well as more effective megasonic cleaning with subsequent drying. And the implementation of autonomous for each technological bath mechanisms of loading and unloading plates and structurally the same media allows you to ensure the modularity of the manufacture of cleaning units and unify the process of manufacturing them.

The design of the carrier, made in the form of a sector of a thin ring with a circular groove and a V-shaped lead-in and interacting with a grip and a stop having a groove of the same profile and a V-shaped lead, provides reliable grip of the plate, eliminating its vibrations, and minimal contact of the plate and transporting device. This affects the quality of the processing plates.

In addition, the use of an additional mechanism of horizontal movement with a gripper (holder) eliminates contamination of a clean plate during its further transportation.

Thus, the proposed combination of features is new, provides a positive effect specified in the purpose of the invention, and does not follow in an obvious manner from the prior art.

Therefore, it meets the criteria of "inventive step" and "novelty."

The invention is illustrated by drawings, which depict:

figure 1 - General view of the device;

figure 2 is a top view;

figure 3-4 - the mechanism of vertical movement, its interaction with the cartridge and with the mechanism of horizontal movement;

figure 5 - holder of the horizontal movement mechanism;

Fig.6-7 - plate processing unit with brushes and the interaction of the carrier of the processing unit with the holder of the horizontal movement mechanism;

on Fig - processing unit using megasound;

Fig.9-10 - the carrier of the second processing unit and its interaction with the holder of the horizontal movement mechanism;

figure 11 is a cross section of the roller holder;

on Fig - cross section of the holder;

on Fig.13-14 - the carrier of the vertical movement mechanism;

on Fig - orienting mechanism.

The proposed device contains two cassettes 1 with plates 2 mounted on the bases 3 of the mechanisms of step movement 4, a vertical movement mechanism 5 with a carrier 6 for unloading the plates 2 from the cartridge and transferring the plate to the holder 7 of the horizontal movement mechanism 8 (FIGS. 1, 2). The carrier 6 (figure 3) is made in the form of a sector of a thin ring with parallel sides and a circular groove with a V-shaped lead-in.

Figure 3 shows the three positions of the carrier 6: I - the carrier in its original position (bottom); II - the carrier captured the plate when moving up; III - the carrier lifted the plate 2 from the cartridge 1 and the holder 7 with the rollers 9 and the stop 10 came under the plate. The rollers 9 of the holder 7 are shown in Fig. 11, and the stop 10 - in Fig. 12. The rollers have a circular groove with the same profile as the carrier 6. The stop 10 has the same groove profile. Moreover, the centers of symmetry of the grooves of the rollers and the stop are at a distance L from the end face of the holder (Figs. 5, 11, 12). The distance D between the outer diameters of the rollers 9 is greater than the width of the carrier D ′ (FIG. 3). The center of symmetry of the stop 10 is offset relative to the axis of symmetry of the location of the rollers 9 of the holder 7 by a distance d (Fig.3, 5). In addition, the stop is located below the line drawn through the axis of the rollers, which allows the plate to enter the stop groove and not touch the base of the stop groove. Between the end face of the plate and the base of the stop groove, a distance δ has been selected (Fig. 10), and thus the plate, resting only on the rollers 9, is held by the stop 10, which acts as a holding fork. In this case, the axis of symmetry of the grooves of the rollers and the stop are located on the same vertical plane.

The mechanism of loading and unloading 11 of the plates serves to move the rod 12 and the carrier 13 in the plate processing unit 2 by brushes 14. The brushes 14 are able to rotate from the drive 15 and be pulled apart by a mechanism (drive) 16. The brushes are processed in a bath 17 provided with rollers 18 (Fig.6, 13), which are driven into rotation by the drive 19 (Fig.2). The carrier 13, as the carrier 6, is made in the form of a sector of a thin ring with a circular groove with a V-shaped lead-in at the inner circular end. The media 6, 13 are equipped with a vertical groove 20, offset horizontally from the center of symmetry of the sector at a distance d (Fig.3, 6). In contrast to the carrier 6, the carrier 13, mounted on a movable rod 12 directed upward, is provided with a through hole 21 for removing residual solution from the carrier after processing. The second mechanism of loading and unloading 22 (Fig. 1) of the plates serves to move the rod 23 and the carrier 24 in the megasonic processing unit. Processing is carried out by a megasonic head (nozzle) 25, which performs during the processing, when the plate 2 is rotated, reciprocating movement from the drive 26 (Fig. 2).

Plate 2 during processing in the bath 27 (Fig. 8) is mounted on rollers 28 having circular grooves with a V-shaped lead-in. The rollers 28 are mounted on a rotor 29 having a rotation drive 30 through a belt drive.

The mechanism 22 has a horizontal displacement drive 31 so that the rod and carrier 24 can be withdrawn from the bath 27 after the plate 2 is mounted on the rollers 28 of the rotor 29. The output is used to protect the carrier 24 from contamination during the processing of the plate 2. The washing liquid is supplied from both sides of the plate nozzle 25 and nozzle 32. The carrier 24 of the megasonic processing unit is made similar to the carrier 13 of the brush processing unit.

The loading of the plates 2 onto the rotor 29 of the centrifuge of the megasonic processing unit is carried out only at the time when the rotor 29 is oriented using the drive 33, the roller 34, the disk 35 (Fig. 15).

The plate 2 on the rotor 29 is fixed from falling out during rotation by a latch 36, which is moved by means of actuators 37 and 38 (Fig. 1). The damper 39 closes the window 40 of the bath 27 during processing of the plate.

The mechanism 41 with the holder 42 serves to move the plates 2 from the megasonic processing unit to the receiving cassette 1. An empty receiving cassette, similarly to the unloading cassette, is installed on the base 3 and is moved one step by the mechanism 4. The second mechanism for the vertical movement of 5 plates into the cassette after performing technological operations is also equipped with a carrier 5, made similarly to the carrier of the mechanism for the vertical movement of the plates from the cartridge, which puts the processed plate in the cartridge.

The operation of the device is as follows.

The cassette 1 with the plates 2 is mounted on a movable base 3 in the form of a rectangular frame. The base 3 has the ability to move with the help of the mechanism 4 (figure 1, 2). The receiving cassette 1 without plates is mounted on the second base 3, which has the ability to move stepwise using the second mechanism 4. The first plate in the cassette 1 stops above the carrier 6 of the vertical movement mechanism 5. And the first cell of the empty receiving cartridge stops above the carrier 5 of the vertical movement mechanism 5 plates in the cartridge (figure 1). The mechanism of vertical movement of 5 plates from the cartridge moves the carrier 6 up and the carrier 6 captures the first plate of the cartridge, raises it up. Figure 3 shows three positions of the carrier 5: I position - the initial position (bottom), II position - the moment of capture of the plate in the cassette, III position - the upper position of the carrier 5 with the plate.

The first mechanism for horizontal movement of the plates 8 moves its holder 7 in the direction of the carrier 5 with the plate. In this case, the holder 7 with its rollers 9 and the stop 10 goes under the plate 2 in such a way that the axis 11 (Fig. 3) of the grooves on the rollers 9 of the holder and the grooves on the stop 10 coincides with the axis of symmetry 13 of the carrier groove 5, in which the plate 3 is placed (figure 3). In this case, the stop 10 of the holder 8 enters the vertical groove of the carrier 6. Then, the mechanism 5 lowers the carrier 6 down to the initial position I (Fig. 3), and the plate 2 remains on the rollers 9, preventing vibration from the groove on the stop 10. Thus, during the transport contact of the transporting device with the plate is minimal.

The mechanism 8 transfers the holder 7 with the plate 2 to the right and stops above the first block of 2-sided cleaning of the plate with brushes. The loading and unloading mechanism 11 of the plates of the first processing unit in the initial position (Fig. 1) is located below, while its rod 12, on which the carrier 13 is mounted (Fig. 6, 7), is located in the bath 17. The brushes 14 are moved apart with using the mechanism 16.

After stopping the mechanism 8 with the holder 7 and the plate 2 above the block for 2-sided cleaning of the plate with brushes, the mechanism 11 lifts the rod 12 with the carrier 13 from the bath 17, the carrier 13 reaches the plate 2 located on the rollers 9 and the stop 10 of the holder 7, the plate 2 gets into the carrier groove and it lifts the plate 2 above the rollers 9 and the stop 10. In this case, the stop 10 of the holder 7 extends in the vertical groove 20 of the carrier 13. The mechanism 8 retracts the holder 7 with the rollers 9 and the stop 10 to the right. And the plate 2 remains on the carrier 13.

The mechanism 11 (Figs. 1, 6) lowers the rod 12, the carrier 13 with the plate 2 into the bath 17 through the window of the bath 43, placing the plate 2 on the rollers 18. Using the mechanism 16, the brushes 14 are pressed against the plate 2 and begin to rotate from the drive 15. At the same time, the rollers 18 from the drive 19 begin to rotate, causing the plate 2 to rotate. During the rotation of the brushes 14 and the plate 2, the corresponding solutions are supplied to both sides of the plate 2. Thus, two sides of the plate 2 are washed simultaneously with brushes. During washing with brushes, the carrier 13 is in the bath 17, located below the level of the plate and not preventing it from rotating (Fig.6).

After the process of washing the plate with brushes, the brushes 14 stop and move apart to the side using the mechanism 16. The rollers 18 also stop and the flow of solutions stops. To remove the spent solutions in the bath 17, a drain hole 44 is provided. The mechanism 11 (Fig. 1) raises the bar 12, the carrier up, the carrier 13 removes the plate 2 from the rollers 18 and, continuing to rise, reaches the extreme upper position 5 (Fig. 6) . The mechanism 7 leads to the right under the plate 2, the holder 7 with the rollers 9 and the emphasis 10. The carrier 13 is lowered, leaving the plate 2 on the rollers 9 and the emphasis 10 of the holder 8 (figure 10). During the lifting of the plate 2 from the bath 17, the remnants of the washing solution from the plate are removed through the hole 21 in the carrier 13. After transferring the plate from the carrier 13 to the holder 7, after washing the plate with brushes, the mechanism 8 transfers the plate to the right and stops it above the next n- a processing unit, for example, a megasonic processing unit.

In this case, the rod 23 of the loading and unloading mechanism 22 of the plates of the next processing unit (FIGS. 1, 9) is in the lower position in the bath 27 and in the right position due to the mechanism 31.

After stopping the plate 2, located on the holder 8 of the mechanism 7 above the megasonic processing unit, the mechanism 22 raises the rod 23, the carrier 24 from the bath 27 up. In this case, the rotor 29 of the centrifuge with rollers 28 is in an oriented position (Fig. 8), and the shutter 39 is in the retracted state. The latch 36 of the rotor 29 is in the extreme right position 36.

During the lifting of the rod 23, the carrier 24 removes the plate 2 from the rollers 9 and the stop 10 of the holder 7, i.e. lifts plate 2 up. The holder 7 leaves to the right from under the plate 2 remaining on the carrier 24 (Fig. 8).

The rod 23 with the carrier 24 and the plate 2 is lowered into the bath 27 through the window 40. The plate 2 is placed on the rollers 28 of the rotor 29. The carrier goes below the level of the plate, then moves to the left a certain distance and is led up from the bath. The holder 8 with the rollers 9 and the emphasis 10 moves to the left to transport subsequent plates.

The latch 36 extends through the actuator 37 and closes the plate on the rotor 29 of the centrifuge. The flap 39 closes the window 40 of the bath 27. The roller 34 of the orienting actuator 33 is pulled up (to the side) to position IV, releasing the disk 35 fixed to the shaft 45 of the rotor 29. Thus, the rotor 29 with the plate 2 is free and starts to rotate from the actuator 30 (FIG. .one). Simultaneously with the rotation of the rotor 29 with the plate 2, deionized water is supplied to the megasonic nozzle 25 and to the nozzle 32 through the shaft 45 of the rotor 29 through the tube 46. The nozzle 25 scans from the center of the plate 2 to the periphery from the drive 26 during rotation of the plate and supply of deionized water.

After cleaning with megasound, the plate is washed on both sides with deionized water, then it is dried at high speeds.

After drying the plate, the rotor 29 is oriented using the drive 33, the roller 34 and the disk 35. The plate lock 34 is pushed to the right by the drive 38. The mechanism 22 lowers the rod 23 with the carrier 24 down (Fig. 8) into the bath 27, and the mechanism 31 moves it to the right and brings the carrier under the plate 2 located on the rotor. Then the carrier 24 rises and captures the plate 2, removing it from the rotor 29 and moving up to position V.

The holder 42 (Fig. 8) of the second horizontal movement mechanism 41 is brought under the plate 2 located on the carrier 24. The use of the second horizontal movement mechanism 24 eliminates the contamination of the plate after megasonic cleaning, since the holder 8 services the plate cleaning unit with brushes, it remains contaminated . The holder 42 is made similarly to the holder 7 and the transfer of the plates after the last cleaning, for example, using megasound is carried out in the same way as after washing the plates with brushes. That is, the carrier 24 is lowered down, leaving the plate 2 on the rollers 9 and the stop 10 of the holder 42. Then, the mechanism 41 moves the holder 42 together with the plate to the second mechanism for the vertical movement of the plates 5 in the cassette, also mounted on the base 3 with the possibility of stepwise movement from the second drive four.

The holder 42 stops the plate 2 above the empty cell of the loading cassette 1. The mechanism 7 raises the carrier 5, which removes the plate 2 from the rollers 9 and the stop 10 of the holder 42. The holder 42 moves to the right by the mechanism 41, making room for lowering the carrier 5 with the plate 2 into the loading cassette . The carrier 5 falls down, the plate enters an empty cell of the cartridge, and the carrier, continuing to move down, falls below the level of the base. The second mechanism 4 of the step movement of the loading cassette moves it one step, substituting an empty cell for the next plate.

Thus, the proposed design provides minimal contact of the plate with the transport device, which eliminates contamination of the cleaned plate. This allows you to significantly improve the quality of the products after processing.

Information sources

1. Pat. US No. 4534695, CL B 65 G 25/00, publ. 1985 "Device for transporting products."

2. Pat. US No. 4558984, CL C 23 C 13/08, publ. 1985 "Device for transporting semiconductor wafers."

3. Pat. Japan No. 6069061, class H 01 L 21/68, publ. 1987. "Device for automatic high-speed transportation of flat products."

4. Pat. US No. 4449885, CL B 65 G 1/00, publ. 1984 "Device for transporting substrates" (prototype).

Claims (1)

A device for double-sided cleaning of plates containing the unloading and loading cassettes installed on the base, two mechanisms for their step-by-step movement, a mechanism for vertical movement of the plates from the unloading cassette, a mechanism for vertical movement of the plates in the loading cassette, a mechanism for horizontal movement of the plates provided with a grip, a plate cleaning unit, characterized the fact that it is additionally equipped with (n-1) cleaning units, where n is the number of technological baths of the cleaning units, determined by the technological process ss, a second horizontal movement mechanism provided with a gripper, each vertical plate movement mechanism provided with a plate carrier made in the form of a thin ring sector having a circular groove with a V-shaped lead-in on the inner circular end of the sector and containing a vertical horizontal groove from the axis of symmetry of the sector, and the capture of each horizontal movement mechanism is made in the form of a holder equipped with two rollers having circular grooves with a V-shaped set hour a view with a distance between the outer diameters of which is greater than the width of the carriers, as well as an abutment having a groove of the same profile with a V-shaped lead-in and located below the line drawn through the axis of the holder rollers in such a way that its axis of symmetry coincides with the axis of symmetry of the vertical groove on carrier plates, while the axis of symmetry of the grooves of the rollers and the stop lie in the same plane, in addition, each of the n cleaning units is equipped with a mechanism for loading and unloading plates, made in the form of a movable rod with a rigidly fixed n It carrier plate cooperating with profiled rollers, set in processing baths, each perform similar carrier mechanism for vertical movement of the plates, and further provided with a through-hole along the axis of symmetry of the carrier.

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