RU2261393C2 - Microprocessed elastomeric valve and pump systems - Google Patents

Abstract

FIELD: microprocessed structures and methods for their manufacture.

SUBSTANCE: a method for manufacture of elastomeric structure is found, it includes formation of the first elastomeric layer from above the first microprocessed structure. The first microprocessed structure has the first shoulder, which forms the first recess stretching along the lower surface of the first elastomeric layer. Formation of the second elastomeric layer is accomplished from above the second microprocessed structure. The second microprocessed structure has the second shoulder, which forms the second recess stretching along the lower surface of the second elastomeric layer. The lower surface of the second elastomeric layer is connected to the upper surface of the first elastomeric layer so as to form a control channel in the second recess between the first and second elastomeric layers, and position the first elastomeric layer from above the planar base so as to form a channel in the first recess between the first elastomeric layer and the planar base. The methods of manufacture of the microprocessed structure are described.

EFFECT: enhanced reliability of the microprocessed structure.

36 cl, 49 dwg

Description

Link to applications related to the invention

This application claims priority over the following previously filed provisional patent applications: provisional application for US patent No. 60/141503 of June 28, 1999, provisional application for US patent No. 60/147199 of August 3, 1999 and provisional application for US patent No. 60/186856 dated March 3, 2000. The text of these previous provisional patent applications is incorporated herein by reference.

Rights to inventions created as a result of research projects funded from federal sources

The US government is licensed for this invention and has the right, in limited cases, to require the patent holder to license others on acceptable terms provided by Grant No. HG-01642-02 awarded by the National Institutes of Health.

Field of Invention

The present invention relates to microprocessor structures and methods for manufacturing microprocessor structures, as well as microprocessor systems for controlling fluid flow.

State of the art

Currently, the development of micro-jet pumps and valves uses various approaches. Unfortunately, each of these approaches has its drawbacks.

The two most common methods for manufacturing microelectromechanical structures (MEMS), such as pumps and valves, are volumetric mechanical microprocessing of a monolithic silicon-containing substrate (which is a subtractive manufacturing method, whereby a lithographic pattern is applied to monocrystalline silicon and then etched to form three-dimensional structures), and surface mechanical microprocessing (which is an additive method, where the layers of semiconductor type materials are like polycrystalline silicon, silicon nitride, silicon dioxide and various metals, are applied sequentially and form a pattern to create a three-dimensional structure).

A limitation of the first approach for mechanical microprocessing of a silicon-containing substrate is that the stiffness of the semiconductor materials used requires high impact forces, which in turn lead to large and complex structures. In fact, the methods of volumetric and surface mechanical microprocessing are limited by the rigidity of the materials used. In addition, adhesion between the different layers of the fabricated device is also a problem. For example, in volumetric mechanical microprocessing, it is necessary to use the methods of joining semiconductor wafers to create multilayer structures. On the other hand, in surface mechanical microprocessing, thermal stresses between different layers of the device limit the overall thickness of the device, often to about 20 microns. When using any of the above methods, clean production facilities and careful quality control are required.

SUMMARY OF THE INVENTION

The present invention relates to systems for the manufacture and operation of micro-machined structures, such as on-off valves, switch valves and pumps, for example, made from various layers of elastomer bonded together. The present structures and methods are ideally suited for controlling and channeling a fluid stream, but are not limited thereto.

According to a preferred aspect, the present invention uses a multi-layer soft lithography process for the manufacture of integral (i.e., monolithic) microprocessed elastomeric structures.

An advantage of manufacturing the structures presented by joining together layers of soft elastomeric materials is the fact that the resulting devices are more than two orders of magnitude smaller in size on the basis of silicon-based devices. In addition, other advantages are achieved, such as the rapid manufacture of the prototype, ease of manufacture and biocompatibility.

In preferred aspects of the invention, individual elastomeric layers are made on top of the microprocessed molds so that depressions are formed in each of the various elastomeric layers. When these different elastomeric layers are joined together, recesses extending along the various elastomeric layers form channels and control lines through the resulting monolithic, integral elastomeric structure. In various aspects of the invention, these channels and control lines formed in an elastomeric structure can be actuated to function as micropumps and micro valves (as will be explained below).

In other further aspects of the present invention, a monolithic elastomeric structure is applied as a sealing layer to a planar substrate, wherein channels are formed between the surface of the planar substrate and recesses that extend along the bottom surface of the elastomeric structure.

In one preferred aspect of the invention, the present monolithic elastomeric structures are created by joining together two separate layers of elastomer, wherein each layer is first separately cast from the microprocessed mold. Preferably, the elastomer used is a bicomponent curing material in which the lower part of the elastomeric layer has an excess of one component, while the upper part of the elastomeric layer has an excess of the other component. In an exemplary embodiment, silicone rubber is used as an elastomer. Two layers of elastomer are vulcanized separately. Each layer is separately vulcanized before placing the upper layer on the lower layer. Then two layers are attached together. Each layer preferably has an excess of one of the two components, so that the chemically reactive molecules remain at the interface between the layers. The upper layer is applied on top of the lower layer and heated. Two layers are finally attached so that the joint strength is approximately or equal to the strength of the bulk elastomer. As a result, a monolithic three-dimensional structure with a profile is formed, consisting of two layers joined together by an elastomer. Additional layers can be applied by simply repeating the process in which new layers, each of which has a layer of opposite "polarity", are cured and thus bonded together.

In a second preferred aspect, the first photoresist layer is applied on top of the first elastomeric layer. A pattern is then applied to the first layer of the photoresist in order to leave a line or pattern of lines of the photoresist on the upper surface of the first elastomeric layer. Then another layer of elastomer is applied and vulcanized, sealing the line or pattern of the lines of the photoresist. After that, a second layer of photoresist is applied and a pattern is formed, and another layer of elastomer is applied and vulcanized, leaving a line and a set of lines of photoresist sealed in a monolithic elastomeric structure. This process can be repeated with the addition of sealed patterns and elastomeric layers. After that, the photoresist is removed, leaving the channel (s) and control line (s) in the gaps that were occupied by the photoresist. This process can be repeated to create elastomeric structures having multiple layers.

The advantage of forming a pattern with medium-sized elements (≥10 microns) when using the photolithography method is that a high-resolution transparent film can be used as a contact mask. This allows one researcher to develop, perform lithography, form a mold, and create a new set of cast elastomeric devices, usually within 24 hours.

Another advantage of the above-described embodiment of the present invention is that due to its monolithic or integral nature (that is, all layers are made of the same material), violations of interlayer adhesion and problems associated with thermal stresses can be completely avoided.

Other advantages of the preferred use, according to the present invention, of silicone rubber or an elastomer, such as RTV (cold cooling glue) 615, manufactured by General Electric, are transparent to visible light and make it possible to use multilayer optical systems, thus allowing optical interrogation of various channels or compartments in a micro-jet device. Since elastomer layers having an appropriate shape can serve as lenses and optical elements, the connection of the layers allows the creation of multilayer optical systems. In addition, the GE RTV 615 elastomer is biocompatible. Being soft, closed valves provide good sealing, even if small particles are in the channel. Silicone rubber is also biocompatible and inexpensive, especially when compared to monocrystalline silicon.

Monolithic elastomeric valves and pumps also lack a number of practical problems affecting flow systems based on electroosmotic flow. Electroosmotic flow systems usually suffer from the formation of bubbles around the electrodes, and the flow is highly dependent on the composition of the flow medium. The formation of bubbles severely limits the use of electroosmotic flow in micro-jet devices, which makes it difficult to create functioning integrated devices. The magnitude of the flow and even its direction usually depends in a complicated way on the quantity and type of ions, the presence of surface-active substances and the charge on the channel walls. In addition, since electrolysis occurs continuously; it is also possible to ensure that the final buffer capacity prevents pH changes. In addition, electroosmotic flow always occurs when competing with electrophoresis. Since different molecules may have different electrophoretic mobility, undesired electrophoretic separation may occur in the electroosmotic flow. Finally, the electroosmotic flow cannot be used without difficulty to stop the flow, stop diffusion, or balance the pressure difference.

Another advantage of the presented monolithic elastomeric valve and pump structures is that they can operate with very high speed. For example, the valve response time was obtained using an aqueous solution of the order of one millisecond, that is, the valve opens and closes at a frequency of approximately 100 Hz. In particular, a non-exclusive list of ranges of cyclic speed of opening and closing of the valve structure includes values in the range of about 0.001 and 10,000 ms, in the range of about 0.01 and 1000 ms, in the range of about 0.1 and 100 ms, and in the range of about 1 and 10 ms Cyclic performance depends on the composition and structure of the valve used for the specific application and excitation method, and thus, cyclic performance values outside the above ranges are also within the scope of the present invention.

Other advantages of the pumps and valves presented are that their small size makes them quick-acting and their flexibility durable. In addition, since they close linearly when the pressure drops, this linear connection allows the flow rate to be measured and the valve to close despite high back pressure.

In various aspects of the invention, a plurality of channels pass through an elastomeric structure with a second channel extending across and above the first channel. In this aspect of the invention, a thin elastomer membrane separates the first and second channels. As will be shown below, the downward movement of this membrane (due to the fact that the second channel is under pressure, or, on the other hand, the membrane is activated) will cut off the flow passing through the lower channel.

In further preferred aspects of the present systems, a plurality of individually addressable valves are formed joined together in an elastomeric structure and then activated in such a sequence as to achieve peristaltic pumping. In addition, more complex systems are described, including network or multiplexed control systems, selectively addressable valves located in the form of a valve array, network or multiplexed reaction chamber systems, and systems for synthesizing biopolymers.

One embodiment of a microprocessed elastomeric structure according to the present invention comprises an elastomeric block formed by first and second microprocessed recesses located therein, wherein a portion of the elastomeric block is deflected when this portion is actuated.

One embodiment of a method of microprocessing an elastomeric structure comprises the steps of microprocessing a first elastomeric layer, microprocessing a second elastomeric layer, placing the second elastomeric layer on top of the first elastomeric layer, and attaching the lower surface of the second elastomeric layer to the upper surface of the first elastomeric layer.

A first alternative embodiment of a method of microprocessing an elastomeric structure comprises the steps of forming a first elastomeric layer on top of a first microprocessed mold, the first microprocessed mold having at least one first protrusion that forms at least one first channel on the lower surface of the first elastomeric layer. A second elastomeric layer is formed on top of the second microprocessed mold, wherein the second microprocessed mold has at least one second protrusion that forms at least one second channel in the lower surface of the second elastomeric layer. The lower surface of the second elastomeric layer is attached to the upper surface of the first elastomeric layer so that at least one second channel is located between the first and second elastomeric layers.

A second alternative embodiment of the method of microprocessing an elastomeric structure according to the present invention comprises the steps of forming a first elastomeric layer on top of the substrate, curing the first elastomeric layer, and depositing the first protective layer on the upper surface of the first elastomeric layer. Part of the first protective layer is removed so that the first pattern of the protective material remains on the upper surface of the first elastomeric layer. A second elastomeric layer is formed above the first elastomeric layer, thereby sealing the first pattern of protective material between the first and second elastomeric layers. The second elastomeric layer is vulcanized and then the protective material is removed, thus forming at least one first recess between the first and second layers of the elastomer.

An embodiment of a method for activating an elastomeric structure according to the present invention comprises the steps of executing an elastomeric block formed with first and second micro-machined recesses therein, the first and second micro-machined recesses being separated by a part of the structure that deflects into the first or second recesses when the part is actuated . Overpressure is created in one of the recesses so that a part of the elastomeric structure separating the second recess from the first recess deviates into the other of the two recesses.

In other further preferred aspects, magnetic or conductive materials can be applied to create elastomeric layers with magnetic or electrical conductivity, thereby allowing the creation of various elastomeric electromagnetic devices.

Brief Description of the Drawings

Part I - Fig.1-7A depict the sequential steps of the first manufacturing method of the present invention:

Figure 1 depicts a first elastomeric layer formed on top of a microprocessed mold.

Figure 2 depicts a second elastomeric layer formed on top of a microprocessed mold.

Figure 3 depicts the elastomeric layer (Figure 2), removed from the micro-machined form and placed above the upper part of the elastomeric layer (Figure 1).

Figure 4 is a view corresponding to Figure 3, but showing a second elastomeric layer mounted on top of the first elastomeric layer.

Figure 5 is a view corresponding to Figure 4, but showing the first and second elastomeric layers joined together.

FIG. 6 is a view corresponding to FIG. 5, but showing a first micro-machined mold removed in its place and a planar substrate mounted in its place.

7A is a view corresponding to FIG. 6 but showing an elastomeric structure located on a planar substrate.

Figv depicts a frontal section corresponding to Figa and showing the open channel.

7C-7G are views showing the steps of a method for forming an elastomeric structure having a membrane formed from a separate elastomeric layer.

Part II - Fig.7H depicts the closure of the first channel by increasing the pressure in the second channel:

Fig. 7H corresponds to Fig. 7A, but depicts a first channel closed by increasing pressure in the second channel.

Part III - Figs. 18-18 depict sequential steps of a second manufacturing method of the present invention:

Fig. 8 shows a first elastomeric layer deposited on a planar substrate.

Fig.9 is a view showing the first layer of photoresist deposited on top of the first elastomeric layer (Fig.8).

Fig. 10 is a view showing the system of Fig. 9, but with a portion of the first photoresist layer, after removal of which only the first photoresist line remains.

11 is a view showing a second elastomeric layer deposited on top of the first elastomeric layer above the first line of the photoresist (FIG. 10), thereby completely covering the photoresist between the first and second elastomeric layers.

Fig. 12 corresponds to Fig. 11, but depicts a monolithic structure made in one piece obtained after the first and second elastomeric layers joined together.

Fig. 13 is a view showing a second photoresist layer deposited on top of an integral elastomeric structure (Fig. 12).

Fig. 14 is a view showing a system (Fig. 13), but with a part of the second layer of the photoresist, after removal of which only the second line of the photoresist remains.

Fig. 15 is a view showing a third elastomeric layer deposited on top of the second elastomeric layer and above the second photoresist line (Fig. 14), thereby completely covering the second photoresist line between the elastomeric structure (Fig. 12) and the third elastomeric layer.

Fig. 16 corresponds to Fig. 15, but depicts a third elastomeric layer that is vulcanized to adhere to a monolithic structure consisting of the first and second elastomeric layers previously joined.

Fig. 17 corresponds to Fig. 16, but depicts the first and second lines of the photoresist, removed in order to provide two perpendicular crosshairs, but without crossing the channels passing through the integral elastomeric structure.

Fig. 18 is a view showing the system of Fig. 17, but with the planar substrate removed beneath it.

Part IV - Fig.19 and 20 depict additional details of various cross-sections of channels:

Fig.19 depicts a rectangular cross section of the first channel.

Fig.20 depicts a cross section of a channel having a curved upper surface.

Part V - Fig.21-24 depict experimental results obtained using the preferred embodiments of the presented microprocessed valve:

21 shows a valve opening upon application of pressure to various channels.

Fig. 22 shows a temporal response of an RTV microvalve with a size of 100 μm × 100 μm × 10 μm.

Part VI - FIGS. 23A-33 depict various micro-machined structures networked in accordance with aspects of the present invention:

Figa schematically depicts a top view of a two-position valve.

Figv depicts an enlarged view of a section along the line 23B-23B in Fig.23A.

Figa schematically depicts a top view of the peristaltic pump system.

Figv depicts an enlarged view of a section along the line 24B-24B in Fig.24A.

FIG. 25 is a graph showing experimentally achieved pumping speeds versus frequency for the embodiment of the peristaltic pumping system of FIG. 24.

26A schematically depicts a top view of one control line driving simultaneously multiple flow lines.

Fig. 26B is an enlarged sectional view taken along line 26B-26B of Fig. 26A.

Fig. 27 is a schematic view of a multiplexed system adapted to allow flow through various channels.

Figa depicts a horizontal projection of the flow layer with the structure of the activated reaction chamber.

Figv depicts a bottom view of the layer of the control channel with the structure of the activated reaction chamber.

Fig. 28C is an exploded perspective view of the structure of an activated reaction chamber formed by connecting a layer of a control channel (Fig. 28B) to the upper part of the flow layer (Fig. 28A).

Fig. 28D is an enlarged view corresponding to Fig. 28C, a section along the line 28D-28D (Fig. 28C).

29 schematically depicts a system adapted to selectively direct fluid flow into any of the reaction well matrix.

30 schematically depicts a system adapted for selective side flow between parallel channels.

Fig. 31A is a bottom view of a first layer (i.e., a flow layer) of an elastomer of a switchable flow matrix.

Figv depicts a bottom view of the layer of the control channel switchable flow matrix.

Fig. 31C depicts the alignment of the first elastomer layer (Fig. 31A) with one set of control channels in the second elastomer layer (Fig. 31B).

Fig.31D also depicts the alignment of the first layer of elastomer (Fig.31A) with another set of control channels in the second layer of elastomer (Fig.31B).

32 schematically depicts an integrated system for the synthesis of biopolymers.

33 schematically depicts another integrated system for the synthesis of biopolymers.

Fig. 34 is an optical micrograph of a portion of a control structure having seven elastomer layers joined together.

35A-35D show the steps of one embodiment of a method for manufacturing an elastomer layer having a vertical through hole formed therein.

Fig. 36 depicts one embodiment of a sorting device according to the present invention.

Fig. 37 shows an embodiment of a device for pumping process gases over a semiconductor wafer according to the present invention.

Fig. 38 is an exploded view of one embodiment of a micro-mirror array structure according to the present invention.

Fig. 39 is an isometric view of a first embodiment of a refractive device according to the present invention.

40 is an isometric view of a second embodiment of a refractive device according to the present invention.

Fig. 41 is an isometric view of a third embodiment of a refractive device according to the present invention.

42A-42J show views of one embodiment of a normally closed valve structure according to the present invention.

Fig. 43 shows a top view of one embodiment of a device for performing separation according to the present invention.

FIGS. 44A-44D show plan views illustrating the operation of one embodiment of a pen structure of a cell according to the present invention.

45A-45B show plan views illustrating the operation of one embodiment of a cell chamber structure according to the present invention.

46A-46B show cross-sectional views illustrating the operation of one embodiment of a cell crusher structure according to the present invention.

Fig. 47 is a plan view of one embodiment of a pressure generator structure according to the present invention.

48A and 48B show a plan view illustrating the operation of one embodiment of a lateral excitation valve structure according to the present invention.

Fig. 49 is a graph of Young's modulus versus dilution as a percentage of the GB RTV 615 elastomer with GE SF96-50 silicone fluid.

Detailed description of the present invention

The present invention contains a number of microprocessed elastomeric structures that can be used as pumps or valves. In addition, methods are described for manufacturing preferred elastomeric structures.

Methods of manufacturing the present invention

Two exemplary manufacturing methods of the present invention are presented below. It should be understood that the present invention is not limited to manufacturing using one or the other of these methods. On the contrary, other suitable methods of manufacturing the presented microstructures are considered, including modifications of the presented methods.

Figure 1-7B shows the sequential steps of the first preferred method of manufacturing the presented microstructure (which can be used as a pump or valve). On Fig-18 depicts the sequential steps of the second preferred method of manufacturing the presented microstructure (which can also be used as a pump or valve).

As will be shown below, the preferred method of FIGS. 1-7B involves the use of pre-vulcanized layers of elastomer that are assembled and joined. In contrast, the preferred method of FIGS. 8-18 involves "in-situ" vulcanization of each elastomer layer. In the following description, “channel” refers to a recess in an elastomeric structure that may contain a fluid or gas stream.

The first method taken as an example

1 shows a first microprocessed mold 10. A microprocessed mold 10 can be manufactured using a number of known methods for processing silicon, including (but not limited to) photolithography, ion etching, and electron beam lithography.

As shown in FIG. 1, the microprocessed mold 10 has a protruding line or protrusion 11 extending along it. The first elastomeric layer 20 is cast on top of the mold 10 so that the first recess 21 is formed on the bottom surface of the elastomeric layer 20 (the recess 21, as shown, corresponds to the size of the protrusion 11).

2, a second microprocessed mold 12 is made having a protrusion 13 extending along it. As shown in the drawing, the second elastomeric layer 22 is cast on top of the mold 12 so that a recess 23 is formed on its lower surface corresponding to the dimensions of the protrusion 13.

As shown in the successive steps shown in FIGS. 3 and 4, the second elastomeric layer 22 is then removed from the mold 12 and placed on top of the first elastomeric layer 20. As you can see, a recess 23 extending along the lower surface of the second elastomeric layer 22 forms a channel 32 .

As shown in FIG. 5, the individual first and second elastomeric layers 20 and 22 (FIG. 4) are then joined together to form an integral (i.e., monolithic) elastomeric structure 24.

As can be seen in the next step in FIGS. 6 and 7A, the elastomeric structure 24 is then removed from the mold 10 and mounted on top of the planar substrate 14. As can be seen in FIGS. 7A and 7B, when the elastomeric structure 24 is sealed on its lower surface with the planar substrate 14, the recess 21 forms a channel 30.

The presented elastomeric structures form a reversible tight connection with almost any smooth planar substrate. The advantage of forming an airtight joint in this way is that the elastomeric structures can be removed, washed and reused. In preferred aspects, the planar substrate 14 is glass. Another advantage of using glass is that the glass is transparent, while allowing optical interrogation of elastomeric channels and reservoirs. Alternatively, the elastomeric structure can be attached to the flat layer of the elastomer in the same manner as described above to form a stable and high strength joint. This is especially beneficial when using increased back pressure.

As can be seen in FIGS. 7A and 7B, the channels 30 and 32 are preferably arranged at an angle to each other with a small membrane 25 (membrane part) at the substrate 24 separating the upper part of the channel 30 from the lower part of the channel 32.

In preferred aspects, the planar substrate 14 is glass. The advantage of using glass is that the presented elastomeric structures can be removed, washed and reused. Another advantage of using glass is that optical perception can be used. On the other hand, the planar substrate 14 can be, in fact, an elastomer, which shows its advantages when using increased back pressure.

The manufacturing method just described can be modified in order to form a structure having a membrane consisting of an elastomeric material different from that which forms the channel walls of the device. This modified manufacturing method is depicted in FIGS. 7C-7G.

FIG. 7C shows a first micro-machined mold 10. The micro-machined mold 10 has a protruding line or protrusion 11 extending along it. In Fig. 7D, the first elastomeric layer 20 is cast on top of the first micro-machined mold 10 so that the upper part of the first elastomeric layer 20 is flush with the upper part of the protruding line or protrusion 11. This can be done by carefully controlling the volume of the elastomeric material formed on the mold 10 relative to the known the height of the protruding line 11. Alternatively, the desired shape can be formed by injection molding.

FIG. 7E shows a view of a second microprocessed mold 12 with a protrusion 13 extending along it. As shown in the drawing, the second elastomeric layer 22 is cast on top of the second mold 12 so that a recess 23 is formed on its lower surface corresponding to the dimensions of the protrusion 13.

7F, the second elastomeric layer 22 is removed from the mold 12 and placed on top of the third elastomeric layer 222. The second elastomeric layer 22 is attached to the third elastomeric layer 20 to form an integral elastomeric block 224 using the methods described in detail below. At this stage of the process, the recess 23, previously occupied by the protruding line 13, forms a channel 23.

In FIG. 7G, an elastomeric block 224 is placed on top of the first micro-machined mold 10 and the first elastomeric layer 20. The elastomeric block and the first elastomeric layer 20 are then joined together to form an integral (i.e., monolithic) elastomeric structure 24 having a membrane consisting of a separate elastomeric layer 222.

After the structure 24 is sealed on its lower surface with a planar substrate in the manner described above (Fig. 7A), the recess previously occupied by the protruding line 11 forms a channel 30.

The various manufacturing methods depicted above in FIGS. 7C-7G have the advantage that the membrane part may consist of a material that is different from the elastomeric material with the previous structure. This is important because the thickness and elastic properties of the membrane play a decisive role in the operation of the device. In addition, this method makes it easy to condition a separate layer of elastomer before incorporation into the structure of the elastomer. As discussed in detail below, examples of potential conditioning include introducing magnetically or electrically conductive particles to activate the membrane and / or introducing impurities into the membrane in order to change its elasticity.

Although the aforementioned method is depicted in conjunction with the formation of various profiled elastomeric layers formed by repeating the form on top of the microprocessed form, the present invention is not limited to this method. Other methods can be used to form individual layers of profiled elastomeric material, which must then be joined together. For example, a profiled layer of elastomeric material can be formed by laser cutting or injection molding or by methods using chemical etching and / or protective materials, as discussed below in the second example method.

The second method taken as an example

A second example method for manufacturing an elastomeric structure that can be used as a pump or valve is described in stages with reference to FIGS. 8-18.

In this aspect of the invention, the control channels and channels are determined using the first photoresist to form a pattern on the surface of the elastomeric layer (or on another substrate, which may include glass), leaving a protruding line of the photoresist where the channel should be. Then a second layer of elastomer is applied from above, and a second photoresist is applied with a pattern to the second layer of elastomer, leaving the protruding line of the photoresist where the channel should be. A third layer of elastomer is applied on top. Finally, the photoresist is removed from the elastomer by dissolving it with an appropriate solvent, and the voids formed after removal of the photoresist become channels passing through the substrate.

FIG. 8 shows a planar substrate 40. Then, a first elastomeric layer 42 is applied thereon and cured on top of the planar substrate 40. As shown in FIG. 9, a first photoresist layer 44A is then applied to the top of the elastomeric layer 42. As shown in FIG. 10 , part of the photoresist layer 44A is removed so that only the first line of the photoresist 44B remains. As shown in FIG. 11, the second elastomeric layer 46 is then applied on top of the top of the first elastomeric layer 42 and on top of the first line of the photoresist 44B, thereby completely covering the first line of the photoresist 44B between the first elastomeric layer 42 and the second elastomeric layer 46. As shown in FIG. .12, the elastomeric layers 46 are then vulcanized on the layer 42 in order to attach the layers together to form a monolithic elastomeric substrate 45.

As shown in FIG. 13, the second photoresist layer 48A is then applied on top of the elastomeric structure 45. As shown in FIG. 14, part of the second photoresist layer 48A is removed, leaving only the second photoresist line 48B on the top of the elastomeric structure 45. As shown in FIG. 15, the third elastomeric layer 50 is then applied on top of the upper part of the elastomeric structure 45 (consisting of the second elastomeric layer 42 and the first line of the photoresist 44B) and the second line of the photoresist 48B, thereby completely covering the second line of the photoresist 48B between the elastomeric structure 45 and a third elastomeric layer 50.

As shown in FIG. 16, the third elastomeric layer 50 and the elastomeric structure 45 (containing the first elastomeric layer 42 and the second elastomeric layer 46 connected together) are then joined together to form a monolithic elastomeric structure 47 having photoresist lines 44B and 48B passing through it . As shown in FIG. 17, the photoresist lines 44B, 48B are then removed (for example, using a solvent) so that the first channel 60 and the second channel 62 are formed in their places passing through the elastomeric structure 47. Finally, as shown in FIG. .18, planar substrate 40 can be removed from the bottom of the integral monolithic structure.

The method of FIGS. 8-18 allows to fabricate an elastomeric structure with a pattern using the manifestation of a photoresist enclosed within an elastomeric material. However, the methods of the present invention are not limited to the use of photoresist. Other materials, such as metals, can also serve as protective materials that will subsequently be removed and which are selective for the surrounding elastomeric material, and the method will be within the protection scope of the present invention. For example, as described in detail below with reference to FIGS. 35A-35D, gold can be pickled selectively for RTV 615 elastomer using an appropriate chemical mixture.

Preferred layer and channel dimensions

The microprocessed structure is determined by the characteristic size of the elastomeric structure made according to an embodiment of the present invention. In general, the change in at least one size of the microprocessed structures is controlled at the micron level, with at least one size being microscopic (i.e., less than 1000 microns). Microprocessing typically includes semiconductor fabrication methods or MEMS, such as photolithography and centrifugation, which are designed to obtain characteristic sizes at the microscopic level, with at least some sizes of the microprocessed structure requiring a microscope for acceptable resolution / image of the structure.

In preferred aspects, the channels 30, 32, 60, and 62 preferably have a width to depth ratio of about 10: 1. A non-exclusive list of other width to depth ratios according to embodiments of the present invention is 0.1: 1-100: 1, more preferably 1: 1-50: 1, more preferably 2: 1-20: 1 and most preferably 3: 1-15: 1. In an exemplary aspect, channels 30, 32, 60, and 62 have a width of about 1-1000 microns. A non-exclusive list of other channel width ranges according to embodiments of the present invention is 0.01-1000 microns, more preferably 0.05-1000 microns, more preferably 0.2-500 microns, more preferably 1-250 microns and most preferably 10- 200 microns. Exemplary channel widths include 0.1 μm, 1 μm, 2 μm, 5 μm, 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, 60 μm, 70 μm, 80 μm, 90 μm, 100 μm, 110 μm, 120 μm, 130 μm, 140 μm, 150 μm, 160 μm, 170 μm, 180 μm, 190 μm, 200 μm, 210 μm, 220 μm, 230 μm, 240 μm and 250 μm.

Channels 30, 32, 60, and 62 have a depth of about 1-100 microns. A non-exclusive list of other channel depth ranges according to embodiments of the present invention is 0.01-1000 microns, more preferably 0.05-500 microns, more preferably 0.2-250 microns, more preferably 1-100 microns, more preferably 2- 20 microns and most preferably 5-10 microns. The channel depths taken as an example include 0.01 μm, 0.02 μm, 0.05 μm, 0.1 μm, 0.2 μm, 0.5 μm, 1 μm, 2 μm, 3 μm, 4 μm, 5 μm, 7.5 μm, 10 μm, 12.5 μm, 15 μm, 17.5 μm, 20 μm, 22.5 μm, 25 μm, 30 μm, 40 μm, 50 μm, 75 μm, 100 μm, 150 μm, 200 μm and 250 μm.

The channels are not limited to these specific size ranges and examples presented above, and may vary in width, affecting the amount of force required to deflect the membrane, as discussed in detail below with reference to FIG. For example, extremely narrow channels having a width of the order of 0.01 μm can find application in optical and other applications, as will be discussed in detail below. The present invention also contemplates elastomeric structures that include parts having channels even wider than described above, and examples of applications of such wider channels include fluid reservoirs and mixing channel structures.

The elastomeric layer 22 can be molded thick to provide mechanical stability. In an exemplary embodiment, layer 22 is from 50 microns to several centimeters in thickness, and more preferably about 4 mm in thickness. A non-exclusive list of elastomer layer thickness ranges according to other embodiments of the present invention is in the range of about 0.1 microns to 10 cm, 1 microns to 5 cm, 10 microns to 2 cm and 100 microns to 10 mm.

Accordingly, the membrane 25 in FIG. 7B separating the channels 30 and 32 has a typical thickness in the range of about 0.01 and 1000 microns, more preferably 0.05-500 microns, more preferably 0.2-250, more preferably 1-100 microns, more preferably 2 to 50 microns, and most preferably 5-40 microns. As such, the thickness of the elastomeric layer 22 is approximately 100 times greater than the thickness of the elastomeric layer 20. The membrane thicknesses taken as an example include 0.01 μm, 0.02 μm, 0.03 μm, 0.05 μm, 0.1 μm, 0.2 μm, 0.3 μm, 0.5 μm, 1 μm, 2 μm, 3 μm, 5 μm, 7.5 μm, 10 μm, 12.5 μm, 15 μm, 17.5 μm, 20 μm , 22.5 microns, 25 microns, 30 microns, 40 microns, 50 microns, 75 microns, 100 microns, 150 microns, 200 microns, 250 microns, 300 microns, 400 microns, 500 microns, 750 microns and 1000 microns.

Similarly, the first elastomeric layer 42 may have a preferred thickness approximately equal to the thickness of the elastomeric layer 20 or 22, the second elastomeric layer 46 may have a preferred thickness approximately equal to the thickness of the elastomeric layer 20, and the third elastomeric layer 50 may have a preferred thickness approximately equal to the thickness of the elastomeric layer 22.

Methods and materials for multilayer elastic lithographic structure

Soft lithographic compound

Preferably, the elastomeric layers 20 and 22 (or the elastomeric layers 42, 46 and 50) are joined together chemically using the chemical composition inherent in polymers containing elastomeric layers with a pattern. The compound most preferably comprises a bicomponent compound with “post vulcanization”.

In a preferred aspect, the various layers of the elastomer are joined together as a heterogeneous compound in which the layers have different chemical compositions. Alternatively, a homogeneous compound can be used in which all layers will have the same chemical composition. In a third aspect, the corresponding elastomeric layers can be further bonded together with glue. In a fourth aspect, the elastomeric layers may be thermosetting elastomers that are joined together by heating.

In one aspect of the homogeneous bonding, the elastomeric layers are composed of the same elastomer material, wherein the same chemical entity in one layer reacts with the same chemical entity in another layer to bond the layers together. In one embodiment of the invention, the bond between the polymer chains of such elastomer layers may result from the activation of the crosslinked agent by illumination, heating or chemical reaction with individual chemical particles.

On the other hand, in a heterogeneous aspect, the elastomeric layers are composed of various elastomeric materials, wherein the first chemical object in one layer reacts with the second chemical object in another layer. In one exemplary heterogeneous aspect, the bonding process used to bond the corresponding elastomeric layers together may comprise bonding two layers of silicon RTV 615 together. Silicon RTV 615 is a two-part bonded vulcanization silicone rubber. Part A contains vinyl groups and a catalyst; Part B contains silicon hydride groups (Si-H). The standard proportion for the RTV 615 is 10A: 1V. For attachment, one layer can be made with a proportion of 30A: 1B (i.e., with an excess of vinyl groups), and the other with 3A: 1B (i.e., with an excess of Si-H groups). Each layer is vulcanized separately. When two layers come into contact and heat at an elevated temperature, they join irreversibly to form a monolithic elastomeric substrate.

In an exemplary aspect of the present invention, elastomeric structures are formed using Sylgard 182, 184 or 186, or aliphatic urethane diacrylates, such as (but not limited to) Ebecryl 270 or Irr 245, supplied by UCB Chemical.

In one embodiment of the invention, according to the present invention, the bilayer elastomeric structures were made of pure acrylic urethane Urethane Ebe 270. A thin lower layer was applied by centrifugation at a speed of 8000 rpm for 15 seconds at a temperature of 170 ° C. The upper and lower layers were initially cured by exposure to ultraviolet light for 10 minutes in a nitrogen atmosphere using the Model ELC 500 device manufactured by Electrolite Corporation. The collected layers were then further vulcanized for 30 minutes. The reaction was catalyzed using a mixture of 0.5% by volume of Irgacure 500 produced by Ciba-Geigy Chemicals. The resulting elastomeric material had moderate elasticity and adhesion to glass.

In another embodiment, according to the present invention, the bilayer elastomeric structures were made from a compound of 25% Ebe 270/50% Irr 245/25% isopropyl alcohol for a thin lower layer and pure acrylate urethane Urethane Ebe 270 for the upper layer. The thin lower layer was initially vulcanized for 5 minutes, and the upper layer was initially vulcanized for 10 minutes under the influence of ultraviolet light in a nitrogen atmosphere, using an Electrolite Model ELC 500 device. The collected layers were then further vulcanized for 30 minutes. The reaction was catalyzed using a mixture of 0.5% by volume of Irgacure 500 produced by Ciba-Geigy Chemicals. The resulting elastomeric material had moderate elasticity and adhesion to glass.

Alternatively, other attachment methods may be used, including activating the elastomeric surface, for example, by plasma exposure, so that the elastomeric layers / substrate are joined upon contact. For example, one possible approach for joining together elastomer layers that are made of the same material is described in Duffy et al., “Fast Production of a Prototype Microjet Systems in Polycrystalline Silicon (Dimethylsiloxane),” Analytical Chemistry (1998), 70, 4974- 4984 (Duffy et al, Rapid Prototyping Mkrluidic Systems in Poly (dimethylsiloxane), Analytical Chemistry (1998), 70, 4974-4984), which is incorporated herein by reference. This article shows that the action of oxygen plasma on polydimethylsiloxane (PDMS) layers leads to surface oxidation, and irreversible addition occurs when two oxidized layers come into contact.

In another connection approach, instead of successive layers of elastomer, the adhesive properties of the unvulcanized elastomer are used. In particular, a thin layer of an unvulcanized elastomer, such as RTV 615, is applied on top of the first vulcanized elastomeric layer. Then, the second vulcanized elastomeric layer is placed on top of the unvulcanized elastomeric layer. The thin middle layer of the unvulcanized elastomer is then vulcanized in order to obtain a monolithic elastomeric structure. Alternatively, an unvulcanized elastomer may be applied to the bottom of the first vulcanized elastomer layer, with the first vulcanized elastomer layer being placed on top of the second vulcanized elastomer layer. Vulcanization of the middle thin layer of elastomer again leads to the formation of a monolithic elastomeric structure.

Where sealing of the protective layers is used to make the elastomer structure described above in Figs. The connection between the elastomer layers occurs due to the mutual penetration and reaction of the polymer chains of the unvulcanized elastomer layer with the polymer chains of the vulcanized elastomer layer. Subsequent vulcanization of the elastomeric layer will lead to the formation of bonds between the elastomeric layers and the formation of a monolithic elastomeric structure.

As shown in the first method of FIGS. 1-7B, the first elastomeric layer 20 can be created by centrifuging the RTV mixture on microprocessed mold 12 at a speed of 2000 rpm for 30 seconds, resulting in a thickness of approximately 40 microns. The second elastomeric layer 22 can be created by centrifuging the RTV mixture on microprocessed mold 11. Both layers 20 and 22 can be individually cured or vulcanized at a temperature of approximately 80 ° C for 1.5 hours. The second elastomeric layer 22 can be connected to the first elastomeric layer 20 at a temperature of about 80 ° C for about 1.5 hours.

Microprocessing forms 10 and 12 may be a structured photoresist deposited on silicon semiconductor wafers. In an exemplary aspect, a shipley SJR 5740 photoresist pattern, centrifuged at 2,000 rpm, was formed using a high-resolution transparent film as a mask and then developed, resulting in a return channel of approximately 10 height micron. When vulcanized at a temperature of approximately 200 ° C for approximately 30 minutes, the photoresist melts and the return channels become rounded. In preferred aspects, the molds can be treated with trimethylchlorosilane steam (TMXC) for about a minute before each use in order to prevent silicone rubber from sticking.

Using various methods of soft lithography to obtain the multilayer structures and materials presented here, networks of channels containing up to seven separate elastomeric layers were experimentally obtained, with each layer having an approximate thickness of 40 μm. It is contemplated that devices can be developed containing more than seven separate elastomeric layers bonded together.

Suitable elastomeric materials

In Alcock and others, Modern Polymer Chemistry, 2nd Edition (Allcock et al. Contemporary Polymer Chemistry 2 ^nd Ed.), Elastomers are generally described as polymers that exist at temperatures within their glass transition temperature and liquefaction temperature. Elastomeric materials exhibit elastic properties, as polymer chains can be easily subjected to a torsional movement, which allows unwinding the main chains of macromolecules as a result of applying force, and in the absence of force, the main chains of macromolecules are wound up, taking their previous shape. In general, elastomers deform upon application of force and then assume their original shape upon release of force. The elasticity exhibited by elastomeric materials can be characterized by Young's modulus. According to the present invention, elastomeric materials are used having a Young's modulus in the range of about 1 Pa-1 GPa, more preferably in the range of about 10 Pa-100 GPa, more preferably in the range of about 20 Pa-1 GPa, more preferably in the range of about 50 Pa-10 MPa and more preferably within about 100 Pa-1 MPa, although elastomeric materials having Young's modulus values outside these ranges can also be used depending on the needs of the particular application.

The systems of the present invention can be made from a wide variety of elastomers. In an exemplary aspect, the elastomeric layers 20, 22, 42, 46 and 50 can preferably be made of silicone rubber. However, other suitable elastomers may also be used.

In an exemplary aspect of the present invention, the present systems are made of an elastomeric polymer such as an organosilicon elastomer (family) with vinylsilane crosslinking (type) GE RTV 615 (composition). However, the systems presented are not limited to this single composition, type, or even this family of polymers; rather, on the contrary, almost any elastomeric polymer is suitable. An important requirement for a preferred method of manufacturing the present microvalves is the ability to join multiple layers of elastomers together. In the case of multilayer soft lithography, the elastomer layers are vulcanized separately and then joined together. This scheme requires that the vulcanized layers have sufficient reactivity to bond together. Any of the layers can be of the same type and has the ability to connect to each other, or they can be two different types and has the ability to connect to each other. Other options include the use of adhesive between the layers and the use of thermosetting elastomers.

Given the enormous variety of chemical compositions of polymers, precursors, synthesis methods, reaction conditions and possible additives, there are a huge number of possible elastomeric systems that could be used for the manufacture of monolithic elastomeric microvalves and pumps. Changes in the materials used will probably be made depending on the specific properties of the material, i.e. solvent resistance, structure stability, gas impermeability and temperature stability.

There are many types of elastomeric polymers. A brief description of the most common classes of elastomers is presented here with the intention of showing that even when using relatively “standard” polymers, there are many possible attachment methods. Widely used elastomeric polymers include polyisoprene, polybutadiene, polychloroprene, polyisobutylene, poly (styrene-butadiene-styrene), polyurethanes and silicones.

Polyisoprene, Polybutadiene, Polychloroprene

Polyisoprene, polybutadiene, and polychloroprene all of the diene monomers polymerize and, therefore, have one double bond per monomer after polymerization. This double bond allows polymers to be converted to elastomers by vulcanization (essentially, sulfur is used to form cross bonds between double bonds when heated). This allows you to easily connect the layers by the method of homogeneous multilayer soft lithography with incomplete vulcanization, and the photoresist can be sealed using a similar mechanism.

Polyisobutylene

Pure polyisobutylene does not have double bonds, but has a transverse bond, which allows it to be used as an elastomer by adding a small amount (~ 1%) of isoprene during polymerization.

Isoprene monomers give vertical double bonds on a polyisobutylene base, which can then be vulcanized, as described above.

Poly (styrene-butadiene-styrene)

Poly (styrene-butadiene-styrene) are produced by living anionic polymerization (ie, during the reaction, there is no natural step to complete the chain), so the ends of the living polymer can exist in the vulcanized polymer. This makes it a natural candidate for the presented photoresist sealing system (where there will be an excess of unreacted monomer in the liquid layer poured on top of the vulcanized layer). Incomplete curing makes possible a homogeneous multilayer soft lithography (bond AA). The chemical composition also facilitates the creation of one layer with an excess of butadiene ("A") and a bonding agent and another layer ("B") with a deficiency of butadiene (for heterogeneous multilayer soft lithography). SBS is a "thermoset elastomer" that melts above a certain temperature and becomes plastic (rather than elastic), and when the temperature decreases, it again becomes an elastomer. Thus, the layers can be joined together by heating.

Polyurethanes

Polyurethanes are made from diisocyanates (A-A) and dialcohol or diamines (B-B), because There is a wide variety of diisocyanates and dialkols / diamines, the number of different types of polyurethane is huge. However, the properties of A polymers compared to B polymers make them useful for heterogeneous multilayer soft lithography, for example, as RTV 615, when used with excess AA in one layer and with excess BB in another layer.

Silicones

Organosilicon polymers probably have the greatest structural diversity and therefore have the largest number of commercially available formulations. The presence of vinyl (Si-H) crosslinking, as in RTV 615 (which makes possible heterogeneous multilayer soft lithography as well as photoresist sealing), has already been discussed above, but this is only one of several ways to create a crosslink used in chemistry organosilicon polymers.

Cross-linking Agents

In addition to the simple “pure” polymers discussed above, crosslinking agents can be added. Some agents (like monomers bearing vertical double bonds for vulcanization) are suitable for providing homogeneous (AA) multilayer soft lithography or sealing photoresist, and with this approach, the same agent is included in both elastomeric layers. Complementary agents (i.e., one monomer bearing a vertical double bond and the other bearing a vertical Si-H group) are suitable for heterogeneous (AB) multilayer soft lithography. In this approach, complementary agents are added to adjacent layers.

Other materials

In addition, you can also use polymers that include materials such as chlorosilanes or methyl, ethyl and phenylsilanes, and polydimethylsiloxane (PDMS), such as Sylgard (Sylgard) 182, 184 or 186 of Dow Chemical Corp. .), or aliphatic urethane diacrylates, such as (but not limited to) Ebecryl 270 or Irr 245, supplied by UCB Chemical.

The following is a non-exclusive list of elastomeric materials that can be used in conjunction with the present invention: polyisoprene, polybutadiene, polychloroprene, polyisobutylene, poly (styrene-butadiene-styrene), polyurethanes and organosilicon polymers; or poly (bi (fluoroalkox) phosphazene) (PNF, Eypel-F), poly (carboran-siloxanes) (Dexsil), poly (acrylonitrile-butadiene) (nitrile rubber), poly (1-butene), copolymers ( Kel-F) poly (chlorotrifluoroethylene vinylidene fluoride), poly (ethyl vinyl ether), poly (vinylidene fluoride), copolymer (Viton) poly (vinylidene fluoride hexafluoro-propylene), elastomeric compositions of polyvinyl chloride (PVC), polysulfone, polycarbonate, polymethyl ) and polytetrafluoroethylene (PTFE).

Supplementation and Dilution

Elastomers can also be "doped" (to introduce additives) using polymer chains without crosslinking of the same class. For example, RTV 615 can be diluted with GE SF96-50 organosilicon fluid. It serves to reduce the viscosity of the unvulcanized elastomer and reduces the Young's modulus of the vulcanized elastomer. Essentially, cross-linkable polymer chains extend far apart when “inert” polymer chains are added, and therefore this process is called “dilution”. RTV 615 hardens upon dilution to 90% with a significant reduction in Young's modulus.

On Fig presents a graph of the dependence of Young's modulus on dilution in percentage terms using a diluent GE SF96-50 elastomer GE RTV 615, having a ratio of 30: 1 A: B. On Fig shows that the flexibility of the material of the elastomer and, therefore, the speed of response of the valve membrane to the applied excitation force can be controlled during the manufacturing process of the device.

Other examples of alloying an elastomer material may include the introduction of electrically conductive or magnetic particles, as described in detail below in conjunction with alternative methods of activating the membrane of the device. Doping with finely divided inclusions of a material having a different refractive index than that of an elastomeric material (i.e., quartz, diamond, sapphire) can also be considered as a means for changing the refractive index of the material. Strongly absorbing or opaque particles can be added in order to make the elastomer colored or opaque to the incident radiation. Perhaps this will be useful in an optically addressable system.

And finally, when alloying an elastomer with specific chemical isotopes, these alloying chemical particles can be present on the surface of the elastomer, thus acting as a seed or starting points for further chemical derivation (“branches”).

Surface pretreatment and coating

After the elastomeric material has been molded or pickled to the appropriate shape, it is imperative to pre-process the material in order to facilitate operation in a particular application.

For example, one possible application for an elastomeric device according to the present invention is the sorting of biological objects such as cells or DNA. In such an application, the hydrophobic nature of the biological object may cause it to adhere to the hydrophobic elastomer of the channel walls. Therefore, pre-treatment of the elastomeric structure should be carried out to give the channel walls a hydrophilic character. In an embodiment of the present invention using a General Electric RTV 615 elastomer, this operation can be performed by boiling the formed elastomer in acid (for example, in a 0.01% HCl solution in water at pH = 2.7 and a temperature of 60 ° C. within 40 minutes).

Other types of pretreatment of the elastomeric material are also contemplated by the present invention. For example, some parts of the elastomer can be pretreated to seed for surface chemical reactions (for example, in the formation of peptide chains), or binding sites for antibodies, which is advantageous in this application. Other examples of pretreatment of the elastomeric material may include introducing reflective material on the surface of the elastomer, as described in detail below for an application associated with a micromirror lattice.

The working methods of the present invention

On figv and 7H shows the closure of the first channel by increasing the pressure in the second channel, while on figv (frontal section through the channel 32 corresponding to Figa) shows the open first channel 30, and Fig.7H shows the first channel 30 closed by increasing the pressure in the second channel 32.

7B shows the first channel 30 and the second channel 32. The membrane 25 separates the channels, forming the upper part of the first channel 30 and the lower part of the second channel 32. It is seen that channel 30 remains "open".

As shown in FIG. 7H, an increase in pressure in the channel 32 (due to the introduction of gas or fluid into it) causes the membrane 25 to deflect downward, thereby pinching the flow F passing through the channel 30. Accordingly, when the pressure in the channel 32 changes, the valve the linearly adjustable system is such that the channel 30 can be opened or closed, if necessary, by moving the membrane 25. (The channel 30 in Fig. 7C is shown in the "partially closed" position, and not in the "fully closed" position only for illustrations).

It should be understood that exactly the same methods of opening and closing the valve can be used for channels 60 and 62. Since such valves are actuated by moving the "roof" of the channels themselves (ie moving the membrane 25), valves and pumps made by this by the method have substantially zero unused volume, and the switching valves made by this method have an unused volume approximately equal to the active volume of the valve, for example approximately 100 × 100 × 10 μm = 100 · 10 ^-12 L (100 pL). Such unused volumes and zones, which are spent on moving the membrane, are approximately two orders of magnitude smaller than conventional standard microvalves. Small and large valves and switch valves are contemplated by the present invention, and a non-exclusive list of ranges of unused volume includes 1 · 10 ^-8 -1 · 10 ^-6 L (1 aL - 1 uL), 100 · 10 ^-8 -100 · 10 ^-9 L (100 aL - 100 nL), 1 · 10 ^-15 -10 · 10 ^-9 L (1 fL - 10 nL), 100 · 10 ^-15 -1 · 10 ^-9 L (100 fL - 1 nL) and 1 10 ¹² -100 10 ^-12 l (1 pL - 100 pL).

According to the present invention, pumps and valves capable of delivering extremely small volumes have a significant advantage. In particular, the smallest known volumes of fluid that can be measured manually are approximately 0.1 · 10 ^-6 L. The smallest known volumes that can be measured using automatic systems are approximately ten times larger (1 · 10 ^-6 L). When using the pumps and valves of the present invention, fluids of 10 · 10 ^-9 L or less can simply be measured and dosed. Accurate measurement of extremely small volumes of fluid makes the present invention extremely valuable for a large number of biological applications, including diagnostic tests and quantitative analysis.

Equation 1 represents a highly simplified mathematical model of the deviation of a rectangular, linear, elastic, isotropic plate uniform in thickness under the action of the applied pressure:

(1) w = (BPb ⁴ / (Eh ³ ), where:

w = plate deflection

B = shape factor (which depends on the length and width and support of the ribs of the plate),

P = applied pressure

b = plate width

E = Young's modulus, and

h = plate thickness.

Thus, even in this greatly simplified expression, the deviation of the elastomeric membrane in response to the applied pressure will depend on the length, width and thickness of the membrane, the flexibility of the membrane (Young's modulus) and the applied actuation force. Since, according to the present invention, each of these parameters will largely depend on the actual size and physical composition of a particular elastomeric device, the present invention addresses a wide range of thicknesses and elasticities, channel widths and membrane actuation forces.

It should be understood that the above formula is only an approximation, because in the General case, the membrane does not have the same thickness, the thickness of the membrane is not necessarily small compared to the length and width, and the deviation is not necessarily small compared to the length, width or thickness of the membrane. Nevertheless, the equation plays a useful role in adjusting the variable parameters and achieving the desired deflection effect depending on the applied force.

Figa and 21b illustrate the opening of the valve depending on the applied pressure for the first channel 30 with a width of 100 μm and the second channel 32 with a width of 50 μm. The membrane of this device, formed using a layer of General Electric Silicons RTV 615, has a thickness of approximately 30 μm and a Young's modulus of approximately 750 kPa. Figures 21a and 21b show the degree of opening of a valve that is substantially linear over the entire applied pressure range. However, the present invention does not require such a linear response behavior.

Air pressure was supplied to actuate the membrane of the device through a section of a plastic tube 10 cm long having an external diameter of 0.064 cm (0.025 ") and connected to a section of a stainless steel hypodermic tube 25 mm long with an external diameter of 0.064 cm (0.025") and an internal diameter of 0.033 cm (0.013 "). This tube was placed in contact with the control channel by inserting it into the elastomeric block in a direction perpendicular to the control channel. Air pressure was supplied to the hypodermic tube from an external miniature electromagnetic cl LHDA Apana manufactured by Lee Co.

The connection of known micro-jet devices to an external gaseous stream has a number of disadvantages that can be eliminated with the external configuration just described. One of these drawbacks is the fragility of these connections to external devices. In particular, well-known micro-inkjet devices consist of solid, inflexible materials (such as silicon), to which a pipe or tubes must be connected that provide connection to external elements. The rigidity of the known material leads to significant mechanical stress at the points of contact with small and brittle outer tubes, which makes known micro-inkjet devices prone to rupture and leak at these points of contact.

In contrast, the elastomer according to the present invention is flexible and easy to fit when externally connected to an outer pipe made of a solid material. For example, in an elastomeric structure made using the method shown in FIGS. 1-7B, a hole extending from the outer surface of the structure into the control channel can be made by penetrating the elastomer with a metal hypodermic tube after removing the upper part of the elastomer from the mold (as shown figure 3) and before attaching this part to the bottom of the elastomer (as shown in figure 4). Between these steps, the coating (“roof”) of the control channel is in the user's field of view and is accessible for insertion and proper positioning of the hole. After the manufacture of the device is completed, a metal hypodermic tube is inserted into the hole to complete the fluid connection.

In addition, the elastomer of the present invention will bend when mechanical stresses occur at the contact point with external connection, which makes the external mechanical connection more stable. This flexibility significantly reduces the likelihood of leakage or rupture of the present device.

Another disadvantage of the known microjet devices is associated with the difficulty of establishing effective sealing between the device and external connections. Due to the extremely narrow channel diameters of these devices, even at moderate gaseous flow rates, extremely high pressure values may be required. This can lead to unwanted leakage at the point of attachment of the device to external connecting elements. However, the flexibility of the elastomer of the present device also helps to avoid leakage with increasing pressure. In particular, the flexible elastomeric material bends, fits snugly against the inserted tube and forms a seal that is resistant to high pressure.

Although controlling the flow of material through the device has been described above using the pressure of the feed gas, other liquid or gaseous media can be used. For example, the air is compressed and thus experiences some finite delay between the time the pressure was applied by means of an external electromagnetic valve and the time during which the membrane experiences this pressure. In an alternative embodiment of the present invention, pressure can be supplied from an external source with an incompressible fluid, such as water or hydraulic oil, resulting in an almost instantaneous transfer of the applied pressure to the membrane. However, if the displaced volume of the valve is large, or the control channel is narrow, the increased viscosity of the control fluid may contribute to the response delay. Therefore, the optimal pressure transmission medium will depend on the particular application and device configuration, and both gaseous and liquid media can be considered for use in the present invention.

Although the external supply pressure, as described above, was supplied via a pump / cylinder system through a pressure regulator and an external miniature valve, other methods of supplying external pressure are also described in the present invention, including gas cylinders, compressors, piston systems and a liquid column. In addition, the use of natural pressure sources that can, for example, be found inside living organisms, such as blood pressure, gastric pressure, pressure present in the cerebrospinal fluid, pressure present in the intraocular space, and pressure caused by muscles during normal flexion, is considered . In addition, other methods of controlling external pressure are considered, such as miniature valves, pumps, macroscopic peristaltic pumps, pinch valves and other types of equipment for regulating the flow of gaseous and liquid media known in the art.

As you can see, the characteristics of the valves, according to the variants of implementation of the present invention, obtained experimentally, remain almost linear in the whole large part of the range of the stroke with minimal hysteresis. Accordingly, the presented valves are ideally suited for micro-jet measurements and control of a liquid or gaseous medium. The linearity of the valve characteristic shows that individual valves are well modeled by springs operating according to Hooke's law. In addition, high channel pressures (i.e. back pressure) can be resisted simply by increasing the set pressure. Experimentally, valve closure was achieved at inverse pressure values of 70 kPa, but higher pressure values were also considered. The following is a non-exclusive list of pressure ranges summarized by the present invention: 10 Pa-25 MPa; 100 Pa-10 MPa, 1 kPa-1 MPa, 1 kPa-300 kPa, 5 kPa-200 kPa and 15 kPa-100 kPa.

Although a linear response characteristic for valves and pumps is not required for opening and closing, a linear response makes it easy to use valves as measuring devices. In one embodiment of the invention, valve opening is used to control the flow rate by partially actuating to a known degree of closure. Linear valve actuation makes it easier to determine the amount of actuation force required to close the valve to the desired degree of closure. Another advantage of linear actuation is that the force required to actuate the valve can be easily determined by the pressure in the channel. If the actuation is linear, then increased pressure in the channel can counteract by adding the same pressure (force per unit area) to the moving part of the valve.

The linearity of the valve depends on the structure, composition and method of operation of the valve structure. In addition, whether or not linearity is a desirable characteristic for a valve depends on the area of use. Therefore, the present invention contemplates valves with linear and non-linear response characteristics, and the pressure ranges over which the valve will have a linear response characteristic will vary depending on the particular embodiment.

FIG. 22 shows a time response (i.e., closing a valve versus time in response to a change in supply pressure) of an RTV microvalve of size 100 μm × 100 μm × 10 μm and a length of pneumatic conduit of 10 cm connected from the crystal to the pneumatic valve, as described above.

Two periods of the digital control signal, the actual air pressure at the end of the tube and the opening of the valve are shown in FIG. The pressure supplied to the control line is 100 kPa, which is significantly higher than the pressure value of ~ 40 kPa, which is necessary to close the valve. Thus, during closing, a pressure of 60 kPa is applied to the valve, which exceeds the required level. However, when opened, the valve is returned to its previous position only due to its own spring action (≤40 kPa). Thus, it is assumed that the _closing τ will be less than the _opening τ. There is also a delay between the control signal and the response to the control pressure due to the limitations of the miniature valve used to control the pressure. Such delays are indicated by time t and time constant τ in terms of 1 / e, which take the values: _opening τ = 3.63 ms, _opening τ = 1.88 ms, _closing τ = 2.15 ms, _closing τ = 0.51 ms . If opening and closing occurs every 3τ, a valve filled with an aqueous solution normally operates at a frequency of 75 Hz.

If another actuation method was used, which would not have delayed opening and closing, then this valve would operate with a frequency of ~ 375 Hz. It should also be noted that the stiffness of the spring can be adjusted by changing the thickness of the membrane, which allows optimizing quick opening or quick closing. The stiffness of the spring can also be adjusted by changing the elasticity (Young's modulus) of the membrane, for example, by introducing impurities into the membrane or using another elastomeric material that can serve as a membrane (as described above with reference to Figs. 7C-7H.)

On Fig and 22 shows the results of experimental studies of the properties of the valve, during which the opening of the valve was measured using fluorescence. In these experiments, the channel was filled with a solution of fluorescent isothiocyanate (FITC) in a buffer solution (pH≥8), and fluorescence in the square area, which occupies ~ 1/3 of the channel in the center, was monitored on an epifluorescence microscope with a photomultiplier tube having a bandwidth of 10 kHz. The pressure was controlled using a pressure sensor based on the Wheatstone bridge (SenSym SCC15GD2), which was simultaneously under pressure using a control line through almost identical pneumatic connections.

Channel cross section

The channels of the present invention can optionally be made with different sizes and cross-sectional shapes, providing various advantages depending on their particular application. For example, the cross-sectional shape of the lower channel may have a curved upper surface along its entire length or in a region located under the upper cross channel. Such a curved upper surface facilitates (as shown below) the sealing of the valve.

Fig. 19 shows a cross-sectional view (as in Fig. 7B) of the through channels 30 and 32. It can be seen that the channel 30 has a rectangular cross-sectional shape. In an alternative preferred aspect of the invention (FIG. 20), the cross section of the channel 30 has an upper curved surface.

As shown in FIG. 19, when the channel 32 is under pressure, the membrane portion 25 of the elastomeric block 24 separating the channels 30 and 32 will move downward to the successive positions shown by dashed lines 25A, 25B, 25C, 25D and 25E. It is seen that incomplete sealing may appear at the edges of the channel 30 located next to the planar substrate 14.

In an alternative preferred embodiment of the invention (FIG. 20), the channel 30a has a curved upper wall 25A. When channel 32 is under pressure, the membrane portion 25 will move downward to successive positions shown by dashed lines 25A2, 25A3, 25A4 and 25A5, with the edge portions of the membrane moving first into the channel following the upper portions of the membrane. The advantage of such a curved upper surface of the membrane 25A is that it provides a more complete seal when the channel 32 is under pressure. In particular, the upper wall of the channel 30 will provide a continuously contacting edge adjacent to the planar substrate 14, thereby avoiding the “contact” region that is visible between the wall 25 and the lower part of the channel 30 in FIG. 19.

Another advantage of the curved upper surface of the channel at the membrane 25A is that the membrane can easily take the shape and size of the channel after being triggered. In particular, where a rectangular channel is used, the entire perimeter (2 × channel height plus channel width) should be involved in the channel. However, where a curved channel is used, a smaller part of the perimeter of the material (only a semicircular curved part) should be involved in the channel. Thus, for the membrane to operate, a smaller perimeter change is required and, therefore, a greater sensitivity to the applied actuation force to block the channel.

In an alternative aspect (not shown), the lower portion of the channel 30 is rounded so that its curved surface aligns with the curved upper wall 25A, as shown in FIG. 20, described above.

As a result, the actual conformational change tested by the membrane for response will depend on the configuration of the particular elastomeric structure. In particular, the conformational change will depend on the length, width and thickness profile of the membrane, its attachment to the remaining part of the structure, and the height, width and shape of the flow and control channels and the properties of the elastomer material used. The conformational change may also depend on the method of activation, since the response of the membrane in response to the applied pressure will be slightly different from the response in response to the strength of the magnetic or electrostatic field.

In addition, the desired conformational change in the membrane will also vary depending on the particular application of the elastomeric structure. In the simplest embodiments of the invention described above, the valve may be opened or closed by measurement to control the degree of valve closure. However, in other embodiments, it is possible to change the shape of the membrane and / or channel as necessary in order to achieve more complex flow control. For example, the channel can be made with a protrusion at the bottom of the membrane part so that after actuation the membrane closes only part of the flow flowing through the channel, while part of the blocked flow is not sensitive to the applied actuation force.

The present invention contemplates numerous membrane thickness profiles and channel cross-sections, including rectangular, trapezoidal, round, elliptical, parabolic, hyperbolic and polygonal, as well as various sections of the above shapes. More complex cross-sectional shapes, such as in the embodiment with protrusions discussed just above, or in the embodiment with concavities in the channel, are also included in the protection scope of the present invention.

Alternative Valve Activation Methods

In addition to the pressure-based systems described above, non-standard electrostatic and magnetic excitation systems are discussed below.

Electrostatic excitation can be performed by forming oppositely charged electrodes (which will be attracted to each other when voltage of different polarity is applied to them) directly in a monolithic elastomeric structure. For example, as shown in FIG. 7B, an optional first electrode 70 (shown by a dashed line) can be installed on (or in) the membrane 25, and an optional second electrode 72 (also shown by a dashed line) can be installed on (or in) a planar substrate 14. When charges of opposite polarity appear on the electrodes 70 and 72, the attractive force arising between the two electrodes causes the membrane 25 to deviate downward, thereby closing the “valve” (i.e., blocking the channel 30).

As for the membrane electrode, which must have a conductivity sufficient to maintain electrostatic excitation, and be mechanically rigid, so as not to impede the movement of the valve, it is necessary to make a sufficiently flexible electrode in or above the membrane 25. Such an electrode can be performed using a thin layer of metallization, doping the polymer with a conductive material or creating a surface layer outside the conductive material.

In an exemplary aspect of the invention, the electrode on the deflection membrane can be made using a thin layer of metallization, which can be applied, for example, by spraying a thin layer of metal, such as gold, 20 nm thick. In addition to forming a metallized membrane by sputtering, other metallization methods can be used, such as chemical epitaxy, evaporation, electroplating and chemical reduction coating. In addition, you can use the physical transfer of the metal layer to the surface of the elastomer, for example, by spraying the metal on a planar substrate with which it has poor adhesion, and then placing the elastomer on the metal and removing the metal from the substrate.

The conductive electrode 70 can also be formed by depositing carbon black (i.e. Cabot Vulcan XC72R) on the surface of the elastomer by rubbing the powder or immersing the elastomer in a suspension of carbon black in a solvent that causes the elastomer to swell (such as chlorinated solvent in the case of PDMS). Alternatively, electrode 70 can be formed by constructing the entire layer 20 of an elastomer doped with a conductive material (i.e., carbon black or finely dispersed metal particles). In addition, alternatively, the electrode can be formed by electrostatic precipitation or a chemical reaction that leads to the formation of carbon. In the conducted experiments, the conductivity increased with increasing concentration of carbon black from 5.6 × 10 ^-16 to about 5 × 10 ^-3 (Ohm · cm) ^-1 . The bottom electrode 72, which does not need to be moved, can be a flexible electrode, as described above, or a known electrode, such as a gold-plated electrode, a metallized or alloyed semiconductor electrode.

Alternatively, magnetic actuation of the channels can be achieved by fabricating the channel separating membrane from a magnetically polarizable material, such as iron, or a permanently magnetized material, such as polarized NdFeB. In the experiments performed, magnetic silicone was obtained by adding iron powder (with a particle size of approximately 1 μm) to 20% iron by weight.

In the case when the membrane is manufactured with the addition of magnetically polarizable material, the membrane can operate due to magnetic attraction after applying a magnetic field. Where the membrane is manufactured using a material that allows constant magnetization to be maintained, the material can first be magnetized by a sufficiently high magnetic field and then activated by attraction or repulsion, depending on the polarity of the applied inhomogeneous magnetic field.

The magnetic field that triggers the membrane can be obtained in a number of ways. In one embodiment of the invention, a magnetic field is generated using an extremely small inductor made in or adjacent to the elastomeric membrane. The actuation force of such a magnetic coil will be localized, which will ensure the actuation of individual pump and / or valve structures. Alternatively, a magnetic field can be generated using a larger, more powerful source, in the case of which the response will be global and simultaneously trigger multiple pump and / or valve structures.

In addition, forced actuation can be made combined using electrostatic or magnetic excitation. In particular, bellows structures that are in fluid communication with the recess can be electrostatically or magnetically actuated by varying the pressure in the recess and thereby actuating the membrane structure adjacent to the recess.

In addition to the electrical or magnetic excitation described above, the present invention also contemplates additional electrolytic and electrokinetic excitation systems. For example, membrane triggering due to increased pressure may result from an electrolytic reaction in a recess above the membrane. In this embodiment, voltage is applied to the electrodes present in the recess through an electrolyte located in the recess. This potential difference will cause an electrochemical reaction at the electrodes and lead to the formation of gas particles that increase the pressure drop in the recess.

Alternatively, triggering pressure on the membrane may result from electrokinetic hydraulic flow in the control channel. In this embodiment, the potential difference is supplied to the electrodes present at opposite ends of the control channel through an electrolyte located in the control channel. The migration of charged particles in the electrolyte to the respective electrodes can cause a pressure drop.

Finally, the device can also be actuated by generating a hydraulic flow in the control channel based on the supply of thermal energy, thermal expansion, or gas generation from the fluid. Similarly, chemical reactions during which gaseous products are formed can lead to an increase in pressure sufficient to trigger the membrane.

Network systems

On figa and 23B shows the views of a single on-off valve, identical to the systems described above (for example in figa). On Figa and 24B shows a peristaltic pump system, consisting of many single addressable on-off valves (Fig.23), but connected together in a network. Fig. 25 is a graph showing experimentally achieved pumping speeds as a function of frequency for a peristaltic pump system (Fig. 24). 26A and 26B show a schematic view of a plurality of channels that are controlled by a single control line. This system also consists of a plurality of single addressable on / off valves (FIG. 23) multiplexed together but arranged differently than in FIG. 23. On Fig presents a schematic illustration of a multiplexing system adapted to create a hydraulic flow through selected channels, consisting of many single on-off valves (Fig), connected together or networked.

On figa and 23B schematically shows the location of the channels 30 and 32. Through the channel 30, preferably, the flow F of the fluid (or gas). Channel 32 (which crosses above channel 30, as already explained here) is under pressure, so that the membrane 25 separating the channels can be lowered into the channel of channel 30, thereby blocking the passage of flow F, as shown below. The “channel” 32, as such, can also be called a “control line” that drives a single valve in the channel 30. In FIGS. 23-26, a plurality of such addressable valves are connected together or networked in various locations to provide pumps enabling perform peristaltic pumping and other functions of inkjet logic circuits.

As shown in Fig.24A and 24B, the system for peristaltic pumping is performed as follows. Channel 30 typically has multiple parallel channels (i.e., control lines) 32A, 32B, and 32C extending above it. When pressure is applied to control line 32A, flow F is blocked through channel 30 below membrane 25A at the intersection of control line 32A and channel 30. Similarly (not shown) when pressure is applied to control line 32B, flow F is blocked through channel 30 below the membrane 25B at the intersection of control line 32B and channel 30, and so on.

Each control line 32A, 32B, and 32C is individually addressable. Therefore, peristalsis can be activated as follows: first, lines 32A and 32C are triggered simultaneously, then line 32A, simultaneously lines 32A and 32B, then line 32B, simultaneously lines 32B and C, and so on. This corresponds to a sequential combination of the characters “101, 100, 110, 010, 011, 001”, where “0” indicates “open valve” and “1” indicates “closed valve”. This peristaltic combination is also known as the 120 ° combination (which shows the angle of the actuation phase between the three valves). Other peristaltic combinations are equally possible, including 60 ° and 90 ° combinations.

In the experiments, the pumping rate of 2.35 hL / s was measured by measuring the distance that the column of water travels in a thin (with an inner diameter of 0.5 mm) tube with valves 100 × 100 × 10 μm in size with a response pressure of 40 kPa. The pumping speed increased with an increase in the response frequency to approximately 75 Hz and then remained almost constant to more than 200 Hz. The valves and pumps also worked quite reliably, and there was never a failure in the operation of the elastomeric membrane, control channels or connections. In the experiments performed, none of the valves in the peristaltic pump described here showed any signs of wear or fatigue after tripping more than 4 million times. Besides their longevity, they also remain soft. A solution of E. Coli, pumped through the channel and tested for stability under operating conditions, showed a performance factor of 94%.

Fig. 25 is a graph showing experimentally achieved pumping speeds as a function of frequency for a peristaltic pump system (Fig. 24).

26A and 26B depict another method of assembling a plurality of addressable valves (FIG. 21). In particular, a plurality of parallel channels 30A, 30B, and 30C are made. A channel (i.e., control line) 32 extends from above across the channels 30A, 30B, and 30C. The increase in pressure in the control line 32 simultaneously closes the flows F1, F2 and F3 by lowering the membranes 25A, 25B and 25C located at the intersections of the control line 32 and channels 30A, 30B and 30C.

Fig. 27 is a schematic illustration of a multiplexing system adapted to allow fluid to selectively flow through selected channels as follows. The downward deviation of the membranes separating the respective channels from the control line passing above them (for example, membranes 25A, 25B and 25C in FIGS. 26A and 26B) is highly dependent on the size of the membrane. Accordingly, when changing the width of the channel control line 32 (Figs. 26A and 26B), it is possible to have a control line channel extending over multiple channels that only drives (i.e. closes) the desired channels. On Fig presents a schematic representation of such a system, the description of which is given below.

A plurality of parallel channels 30A, 30B, 30C, 30D, 30E and 30F are located under the plurality of parallel lines 32A, 32B, 32C, 32D, 32E and 32F. The control channels 32A, 32B, 32C, 32D, 32E, 32F and 32F are adapted to close the fluid flows F1, F2, F3, F4, F5 and F6 passing through the parallel channels 30A, 30B, 30C, 30D, 30E and 30F, using any of the systems described above with the following modification.

Each of the control lines 32A, 32B, 32C, 32D, 32E, and 32F has a wide and narrow part. For example, control line 32A is wide at locations located above channels 30A, 30C, and 30E. Similarly, the control line 32B is wide in places located above the channels 30B, 30D and 30F, and the control line 32C is wide in places located above the channels 30A, 30B, 30E and 30F.

In areas where the corresponding control line is wide, increasing the pressure in it will cause a significant lowering in the channel of the membrane (25) separating the channel and the control line, thus blocking the passage for the flow passing through it. Conversely, in places where the corresponding control line is narrow, the membrane (25) will also be narrow. Accordingly, the same degree of pressure increase will not lead to the lowering of the membrane (25) in the channel (30). Therefore, the passage for the fluid below it will not be blocked.

For example, when applying pressure to the control line 32A, flows F1, F3 and F5 in the channels 30A, 30C and 30E will be blocked. Similarly, when pressure is applied to the 32C control line, flows F1, F2, F5 and F6 in channels 30A, 30B, 30E and 30F will overlap. It can be appreciated that more than one control line can be activated at the same time. For example, pressure can be applied simultaneously to control lines 32A and 32C in order to shut off the entire fluid flow with the exception of F4 (using lines 32A, F1, F3 and F5 are closed, and 32C is blocked by F1, F2, F5 and F6).

By selectively applying pressure to the various control lines (32) together and in different sequences, a large degree of control of the fluid flow can be achieved. In addition, by expanding the present system to more than six parallel channels (30) and more than four parallel control lines (32), and changing the location of the wide and narrow areas of the control lines, it is possible to manufacture very complex fluid flow control systems. A characteristic feature of such systems is the ability to turn on any one channel of n channels using only 2 (log ₂ n) control lines.

It was possible to produce micro-jet structures with a density of 30 devices / mm ² , but a higher density can also be achieved.

Selectively addressable reaction chambers along flow lines

In another embodiment of the invention shown in FIGS. 28A, 28B, 28C, and 28D, a system is provided for selectively directing fluid flow to yet another of a plurality of reaction chambers along a channel line.

FIG. 28A is a plan view of a channel 30 having a plurality of reaction chambers 80A and 80B located along it. The channel 30 and reaction chambers 80A and 80B are preferably formed together in the form of recesses on the lower surface of the first elastomer layer 100.

FIG. 28B is a bottom view of another elastomeric layer 110 with two control lines 32A and 32B, each of which is usually narrow but has wide extending portions 33A and 33 formed therein as a recess.

As shown disassembled in Fig. 28C and assembled in Fig. 28D, the elastomeric layer 110 is placed on top of the elastomeric layer 100. The layers 100 and 110 are then joined together and the integrated system operates so that the fluid flow F (through channel 30) selectively sent to one or both of the reaction chambers 80A and 80B as follows. When pressure is applied to the control line 32A, the membrane 25 (i.e., a thin portion of the elastomeric layer 100 located below the extending portion 33A and above the regions 82A of the reaction chamber 80A) will lower, thereby closing the passage for the fluid flow in regions 82A, effectively isolating reaction chamber 80 from channel 30. You can also notice that the extending portion 33A is wider than the remaining portion of the control line 32A. The increase in pressure in the control line 32A itself will not isolate the control line 32A from the channel 30.

It can be appreciated that one or both of the control lines 32A and 32B may operate immediately. When pressure is simultaneously applied to control lines 32A and 32B, a selective flow in channel 30 will not be introduced into any of the reaction chambers 80A or 80B.

The concept of selectively controlling fluid injection into various addressable reaction chambers along a flow line (FIG. 28) can be combined with the concept of selectively controlling fluid flow through one or more of a plurality of parallel flow lines (FIG. 27) in order to obtain a system in which a sample or fluid samples can be sent to any particular reaction chamber located in the matrix of reaction chambers. An example of such a system is shown in FIG. 29, in which parallel control channels 32A, 32B and 32C with extending portions 34 (all shown by dashed lines) selectively direct fluid flows F1 and F2 to any matrix of reaction compartments 80A, 80B, 80C or 80D, as explained above, although the pressure supply in the control lines 32C and 32D selectively closes the flows F2 and F1, respectively.

In yet another new embodiment of the invention, a passage for fluid between parallel channels is possible. As shown in FIG. 30, pressure can be reduced in one or both of the control lines 32A or 32D, allowing fluid to flow through the side passage 35 (between parallel channels 30A and 30B). In this aspect of the invention, applying pressure to the control lines 32C and 32D will close the channel 30A between 35A and 35B, as well as close the side passages 35B. As such, a stream that is introduced as stream F1 will sequentially pass through channels 30A, 35A and exit through channel 30B as stream F4.

Switched Flow Matrices

In yet another new embodiment of the invention, the passage of the fluid can be selectively directed so that the fluid flows in either of two perpendicular directions. An example of such a "switched flow matrix" system is shown in Figs. 31A-31D. On Figa shows a bottom view of the first layer of elastomer 90 (or any other suitable substrate (bottom layer)) having a lower surface with a set of recesses forming a network of channels defined by a matrix of solid supports 92, each of which has channels passing around them.

In preferred aspects of the invention, an additional elastomer layer is bonded to the upper surface of the layer 90 so that the fluid flow can selectively move in the F1 direction or in the perpendicular F2 direction. Fig.31 depicts a bottom view of the lower surface of the second layer of elastomer 95, showing the recesses formed in the form of alternating "vertical" control lines 96 and "horizontal" control lines 94. The "vertical" control lines 96 have the same width along the entire length, while the "horizontal" control lines 94 have alternating wide and narrow parts, as shown in the drawing.

The elastomeric layer 95 is located above the upper part of the elastomeric layer 90 so that the "vertical" control lines 96 are located above the supports 92 (Fig.31C), and the "horizontal" control lines 94 are located in their wide parts between the supports 92 (Fig.31D).

As shown in FIG. 31C, when pressure is applied to the “vertical” control lines 96, an integral structure membrane formed by an elastomeric layer originally located between layers 90 and 95 in regions 98 will deflect downward above the channel grating, so that the input stream can only go in the direction F2 of the stream (i.e. vertically), as shown in the drawing.

As shown in FIG. 31D, when pressure is applied to the “horizontal” control lines 94, the membrane of the integral structure formed by the elastomeric layer initially located between layers 90 and 95 in regions 99 will deviate downward above the channel grating (but only in the widest areas), so that the input stream can pass only in the direction of flow F1 (i.e. horizontally), as shown in the drawing.

The design shown in FIG. 31 allows a switchable flow matrix to be made of only two elastomeric layers without vertical through holes extending between control lines in various desired elastomeric layers. If you connect all the vertical lines 94, then they can increase the pressure from one inlet. This is true for all horizontal control lines 96.

Synthesis of Biopolymers

The presented elastomeric valve structures can also be used in the synthesis of biopolymers, for example, in the synthesis of oligonucleotides, proteins, peptides, DNA, and so on. In a preferred aspect of the invention, such biopolymer synthesis systems may include an integrated system comprising a reservoir matrix, inkjet logic (according to the present invention) for selecting a stream from a particular reservoir, a channel or reservoir matrix in which the synthesis is performed, and inkjet logic (also according to the present invention ) to determine which channels the selected reagent will flow through. An example of such a system 200 is depicted in FIG. 32.

Four tanks 150A, 150B, 150C and 150D have bases A, C, T and G, respectively, arranged as shown in the drawing. Four channels 30A, 30B, 30C and 30D are connected to tanks 150A, 150B, 150C and 150D. Four control lines 32A, 32B, 32C and 32D (shown by dashed lines) are located across control lines 32A, allowing flow to flow only through channel 30A (i.e., closing channels 30B, 30C and 30D) when control line 32A is under pressure. Similarly, control line 32B only allows flow through channel 30B when it is under pressure. In addition, the selective supply of pressure in the control lines 32A, 32B, 32C, and 32D sequentially selects the desired base A, C, T, and G from the desired reservoir 150A, 150B, 150C, or 150D. The fluid then passes through a channel 120 to a channel multiplexing controller 125 (including, for example, any system (FIGS. 26A-31D), which in turn directs a fluid stream to one or more of a plurality of synthesis channels or chambers 122A , 122B, 122C, 122D or 122E, in which solid phase synthesis can be performed.

FIG. 33 depicts another development of this system in which a plurality of tanks R1-R13 (which may contain bases A, T, C, and G, or any other reagents that are used in combination chemistry) are connected to the system 200 in the manner shown in FIG. 32. Systems 200 are connected to a channel multiplexing controller 125 (including, for example, any system shown in FIGS. 26A-31D), which, in turn, is connected to a switchable flow matrix (eg, as shown in FIG. 31). An advantage of this system is that both channel multiplexing controllers 125 and the fluid selection systems 200 can be controlled using the same pressure inputs 170 and 172, provided that “closed horizontal” and “closed vertical” lines 160 and 162 are also provided controls (which are shown by dashed lines).

In other alternative aspects of the invention, a plurality of channel controllers (such as 125) can be used with channel multiplexing, with each stream controller initially positioned layer by layer on top of another elastomeric layer, with vertical through holes or interconnections between the elastomeric layers (which can be done by drawing lithographically on the resist layer located on the elastomer layer, then etching the elastomer and finally removing the resist before applying the last layer of elastomer).

For example, a vertical through hole in the elastomer layer can be created by etching the hole on a protruding line located on the microprocessed mold, and attaching the next layer so that the channel passes over this hole. In this aspect of the invention, multiple synthesis with multiple channel multiplexing controllers 125 is possible.

The connection of successive layers of the formed elastomer to form a multilayer structure is depicted in Fig. 34, which is an optical micrograph of a portion of a control structure consisting of seven layers of elastomer. 34, the strip width is 200 μm.

One method for manufacturing an elastomer layer with a special vertical through hole used in a multilayer structure is depicted in FIGS. 35A-35D. Fig. 35A shows the formation of an elastomer layer 3500 over a microprocessed mold 3502 including a protruding line 3502a.

FIG. 35B depicts the formation of an etching layer 3504 of a metal located above the elastomer layer 3500, followed by applying a pattern to a photoresist mask 3506 located above the etching layer 3504 to cover masked areas 3508 and leave open areas 3510 without masks. Fig. 35C depicts the effect of a solvent that removes the etching protection layer 3504 in the maskless regions 3510.

Fig. 35D depicts the removal of a patterned photoresist after subsequent etching of an underlying elastomer 3500 in areas 3510 without a mask to form a vertical through hole 3512. After exposure to the solvent, the remainder of the layer 3504 is removed to protect against etching in masked areas 3508 selective to the surrounding elastomer 3500 and form 3502. This elastomer layer can then be incorporated into the elastomer structure using multi-layer soft lithography.

This series of steps can be repeated as necessary in order to form a multilayer structure having the required number and orientation of vertical through holes between the channels of successive layers of elastomer.

Through hole etching through GE RTV 615 layers was successfully performed using a solution of tetrabutylammonium fluoride in an organic solution. Gold serves as an etch protection material, with gold being selectively removed to GE RTV 615 using a KI / I ₂ / H ₂ O mixture.

Alternatively, vertical through holes between channels in successive layers of elastomer can be formed using the negative mask technique. In this approach, a pattern was applied to a negative metal foil mask and then the formation of a layer to protect against etching was stopped where the metal foil was present. After drawing the pattern on the etching blocking material, the negative mask from the metal foil was removed, allowing the elastomer to be selectively etched as described above.

In yet another approach, vertical through holes can be formed in the elastomer layer using ablation of the elastomeric material by irradiation with a laser beam.

Although the above approach has been described in connection with the synthesis of biopolymers, the invention is not limited to this application. The present invention may also function in a wide variety of Raman synthesis methods.

Other applications

Advantageous applications of the presented monolithic microprocessed elastomeric valves and pumps are numerous. Accordingly, the present invention is not limited to any particular application or use. Further in preferred aspects, the use and application of the present invention is discussed.

1. Cell / DNA sorting

Presented micro-jet pumps and valves can also be used in flow cytometers to sort cells and sort by DNA size. Sorting objects by size is very useful in many technical areas.

For example, when conducting numerous quantitative analyzes in biology, it is necessary to determine the size of objects with the size of molecules. Of particular importance is the measurement of the distribution of lengths of DNA molecules in a heterogeneous solution. This is usually done using gel electrophoresis, in which the molecules are separated depending on their different mobility in the gel matrix under the conditions of an applied electric field, and their positions, which are detected as a result of absorption or emission of radiation. The length of the DNA molecules is then judged by their mobility.

Despite its great advantages, electrophoretic methods also have disadvantages. For a medium with large DNA molecules, the resolution, that is, the minimum difference in lengths over which different lengths of the molecules may differ, is limited to approximately 10% of the total length. For very large DNA molecules, the known sorting procedure is not feasible. In addition, gel electrophoresis is a relatively lengthy procedure, and it may take about several hours or days to complete it.

Sorting objects with cell size is also an urgent task. Known flow cell sorting devices have a flow chamber with a nozzle and are based on the principle of hydrodynamic focusing using flow in the membrane. The best-known sorting devices combine piezoelectric droplet generation and electrostatic deflection technology to achieve droplet generation and high sorting speeds. However, this approach has some significant drawbacks. One disadvantage is that the complexity, size and high cost of the sorting device require that this device be reusable and therefore cost-effective. Repeated use can lead, in turn, to problems with residual materials that cause sample contamination and turbulence in the fluid flow.

Therefore, there is a need for technology for a simple, inexpensive and easily manufactured sorting device, which is based on mechanical control of the fluid flow, and not on the electrical interactions between the particle and the solute.

36 shows one embodiment of a sorting device according to the present invention. The sorting device 3600 consists of a switching valve structure formed of channels present in the elastomeric block. In particular, the channel 3602 has a T-shape with the barrel 3602a of the channel 3602, which is in fluid communication with the reservoir 3604 for samples containing sortable objects 3606 of various types, indicated by squares, circles, triangles, and so on. The left branch 3602b of the channel 3602 is in fluid communication with the waste tank 3608. The right branch 3602c of the channel 3602 is connected to the collection tank 3610.

The control channels 3612a, 3612b and 3612c extend above and are separated from the barrel 3602a of the channel 3602 by the elastomeric membrane parts 3614a, 3614b and 3614c, respectively. The trunk 3602a of the channel 3602 and the control channels 3612a, 3612b and 3612c together form a first peristaltic pumping structure 3616 similar to that described in detail above with reference to FIG. 24a.

The control channel 3612d extends above and is separated from the right branch 3602 from the channel 3602 of the elastomeric membrane portion 3614d. The right branch 3602c of the channel 3602 and the control channels 3612d together form the first valve structure 3618a. The control channel 3612e extends above and is separated from the left branch 3602c of the channel 3602 by the elastomeric membrane portion 3614e. The left branch 3602c of the channel 3602 and the control channel 3612e form together a second valve structure 3618b.

As shown in FIG. 36, the trunk 3602a of the channel 3602 narrows significantly when approaching the detection window 3620 located adjacent to the branching of the trunk 3602a, the right branch 3602b and the left branch 3602c. The detection window 3620 is wide enough to provide uniform illumination of this area. In one embodiment, the barrel width at the detection window narrows from 100 μm to 5 μm. The width of the barrel at the detection window can be precisely formed using fabrication methods based on soft lithography or photoresist coating, which are described in detail above, and it will depend on the nature and size of the sorted object.

The following is a description of the operation of the sorting device according to one embodiment of the present invention.

The sample is diluted to such a level that only one sortable object is presumably present in the detection window at any given time. The peristaltic pump 3616 is driven by the flow of fluid through the control channels 3612a-c, as described in detail above. In addition, the second valve structure 3618b closes when fluid flows through the control channel 3612e. As a result of the action of the peristaltic pump 3616 and the blocking action of the second valve 3618b, fluid flows from the sample reservoir 3604 through the detection window 3620 to the waste reservoir 3608. As a result of the narrowing of the barrel 3604, the sortable objects presented in the sample reservoir 3604 are transferred using this regular fluid flow, one at a time, through the detection window 3620.

Radiation 3640 from source 3642 is inputted to detection window 3620. This is possible due to the transparency of the elastomeric material. Absorption or emission of radiation 3640 by the sortable object 3606 is then detected using detector 3644.

If the sortable object 3606a inside the detection window 3620 needs to be separated and assembled using the sorting device 3600, the first valve 3618a is activated and the second valve 3618b stops working. This creates the effect of pulling the sortable object 3606a into the collection tank 3610, and at the same time moving the second sortable object 3606b into the detection window 3620. If the second sortable object 3602b is also identified for collection, the peristaltic pump 3616 continues to pump fluid through the right branch 3602 from the channel 3602 into the collection tank 3610. However, if the second object 3606b will not be assembled, the first valve 3618a opens and the second valve 3618b closes, and the first peristaltic pump 3616 continues to pump fluid through the left branch 3602b of the channel 3602 into the waste tank 3608.

Although one specific embodiment of the sorting device and the method of its operation are described with reference to FIG. 36, the present invention is not limited to this embodiment. For example, the fluid should not flow through the channels using a peristaltic pump structure, but instead, it can flow under pressure using elastomeric valves, controlling only the direction of flow. In yet another embodiment of the invention, a plurality of sorting structures can be arranged in a row in order to perform sequential sorting operations, wherein the waste tank (FIG. 36) is simply replaced by the barrel of the next sorting structure.

In addition, you can use a high-performance sorting method in which a continuous flow of fluid from the sample tank through the window and branching into the waste tank is maintained until the object to be collected is detected in the window. After detecting the object to be collected, the direction of the fluid flow using the pump structure is temporarily reversed in order to transport the desired particle back through a branch to the collection tank. Thus, the sorting device can be used at a higher flow rate, with the ability to return after detecting the desired object. Such an alternative high-performance sorting method can be used when the object that needs to be collected is rare and the need for return does not occur often.

Sorting according to the present invention eliminates the disadvantages of sorting using a known electrokinetic flow, such as the formation of bubbles, a strong dependence of the flow value and direction on the composition of the solution and surface chemical effects, different mobility of different chemical particles and reduced viability of living organisms in a mobile environment.

2. Semiconductor Processing

Systems for controlling the flow of semiconductor gas (especially for epitaxial applications where small amounts of gas need to be accurately measured) are also contemplated by the present invention. For example, during the manufacture of semiconductor devices, solid material is applied to a semiconductor substrate by chemical vapor deposition (CVD). This is accomplished by exposing the substrate to a mixture of the gaseous substances of the precursor so that these gases react and the resulting product crystallizes on the substrate.

During such CVD processes, it is necessary to carefully monitor the conditions of their flow in order to ensure uniform deposition of a substance free from defects that could lead to a deterioration in the operation of an electrical device. One possible source of heterogeneity is a change in the flow rate of the reactant gases in the region above the substrate. Inadequate control of the gas flow rate can also lead to a change in the layer thickness from product to product, which is another source of error. Unfortunately, there is another significant problem of controlling the amount of gas that is supplied to the process chamber and maintaining stable flow rates in known gas supply systems.

Accordingly, FIG. 37A depicts one embodiment of the present invention adapted to supply (with precisely controlled flow rate) process gas above the surface of a semiconductor wafer during a CVD process. In particular, the semiconductor wafer 3700 is placed based on the 3702 semiconductor wafer located inside the CVD camera. The elastomeric structure 3704, containing a large number of uniformly distributed holes 3706, is located above the surface of the semiconductor wafer 3700.

A number of process gases are supplied at carefully controlled speeds from reservoirs 3708a and 3708b through channels to the elastomeric block 3704 and from openings 3706. As a result of the precisely controlled flow of process gases, solid material 3710 having an extremely uniform structure is deposited over the semiconductor wafer 3700.

Accurate measurement of reagent gas flow rates using the valve and / or pump structures of the present invention is possible for several reasons. Firstly, gases can be passed through valves that operate linearly to the applied response pressure, as discussed above with reference to Figs. 21A and 21B. Alternatively or in addition to measuring gas flow using valves, the predicted behavior of the pump structures of the present invention can be used to accurately measure process gas flow.

In addition to the chemical vapor deposition processes described above, the present method is also useful for controlling gas flow in methods such as molecular beam epitaxy and reactive ion etching.

3. Micromirror gratings

Although the embodiments of the present invention described in this way mainly relate to the operation of a structure consisting entirely of elastomeric material, the present invention is not limited to this type of structure. In particular, within the scope of the present invention are structures that combine an elastomeric structure with a known silicon-based semiconductor structure.

For example, other uses of microprocessed pumps and valves may be optical displays in which a membrane in an elastomeric structure reflects light from a flat plenary or curved surface depending on the response of the membrane. The membrane as such acts as a switchable pixel. An array of such switchable pixels with an appropriate control circuit can be used as a digital or analog micromirror array.

Accordingly, FIG. 38 shows an exploded view of a portion of one embodiment of a micromirror array according to the present invention.

The micromirror grating 3800 includes a first elastomer layer 3802 lying above the main semiconductor structure 3804 and separated from it by a second elastomer layer 3806. The surface 3804a of the semiconductor structure 3804 carries a plurality of electrodes 3810. The electrodes 3810 are individually addressable through conducting lines of rows and columns, as is known to those skilled in the art.

The first elastomeric layer 3802 includes a plurality of intersecting channels 3822 that lie beneath the electrically conductive, reflective portion 3802a of the elastomeric membrane. The first elastomeric layer 3802 is aligned over the second elastomeric layer 3806 and the main semiconductor device 3804 so that the intersection points of the channels 3822 extend over the electrodes 3810.

In one embodiment of the manufacturing method according to the present invention, the first elastomeric layer 3822 can be formed by applying the elastomeric material by centrifugation on intersecting channel shapes, vulcanizing the elastomer, removing the shaped elastomer from the mold and introducing an electrically conductive impurity into the surface region of the shaped elastomer. Alternatively, as described above with reference to FIGS. 7C-7G, the first elastomeric layer 3822 can be formed from two layers of elastomer by inserting the elastomeric material into a mold containing intersecting channels so that the elastomeric material is flush with the height of the channel walls, and then attaching a separate a doped elastomeric layer to an existing elastomeric material to form a membrane on the upper surface.

Alternatively, the first elastomeric layer 3802 can be obtained from an electrically conductive elastomer, where the electrical conductivity is due to the doping or internal properties of the elastomer material.

During operation of the reflective structure 3800, electrical signals are transmitted along the selected row line and column line to the electrode 3810a. When voltage is applied to the electrode 3810a, an attractive force is generated between the electrode 3810a and the membrane 3802a lying on top. This attractive force drives part of the membrane 3802a, causing this membrane part to bend down into the cavity obtained by crossing channels 3822. As a result of the deviation of the membrane 3802a from a flat state into concave light, it is reflected differently at this point on the surface of the elastomeric structure 3802, than from the surrounding flat surface of the membrane. This creates a pixel image.

The appearance of this pixel image changes, and it can be controlled by changing the magnitude of the voltage supplied to the electrode. A higher voltage applied to the electrode will lead to an increase in the attractive force on the membrane part and additional deformation of its shape. A lower voltage applied to the electrode will lead to a decrease in the attractive force on the membrane and a deviation from the flat shape. Any of these changes will affect the appearance of the resulting pixel image.

The variable-reflection micromirror lattice structure, as described, can be used in various applications, including image display. Another application for a variable-reflection micromirror lattice structure according to an embodiment of the present invention will be a high-throughput switch for a fiber optic communication system, each pixel being able to influence the reflection and transmission of the component of the incident light signal.

5. Reflective structures

The just described structure of the micromirror lattice allows controlling the reflection coefficient of the incident light. However, the present invention is not limited to reflectance control. Another embodiment of the present invention allows precise control of the reflectance of incident light to be used in order to create lens and filter structures.

On Fig shows one embodiment of a reflective structure according to the present invention.

Reflective structure 3900 includes a first elastomeric layer 3902 and a second elastomeric layer 3904, consisting of an elastomeric material that allows incident light 3906 to be transmitted.

The first elastomeric layer 3902 has a convex portion 3902a, which can be created by curing an elastomeric material formed on a microprocessed mold having a concave portion. The second elastomeric layer 3904 has a channel 3905, and it can be obtained from a microprocessed form having a protruding line, as discussed in detail above.

The first elastomer layer 3902 is connected to the second elastomeric layer 3904 so that the convex portion 3902a is located above the channel 3905. This structure can serve for various purposes.

For example, light incident on an elastomeric structure 3900 will focus on the main (“bottom”) channel, while allowing possible light transmission through the channel. Alternatively, in one embodiment of the elastomeric device according to the present invention, a fluorescent or phosphorescent fluid may flow through the channel, and the light arising from the fluid will be reflected from the curved surface, thereby forming an image.

40 shows another embodiment of a reflective structure according to the present invention. Reflective structure 4000 is a multilayer optical package based on the design of the Fresnel lens. In particular, the refractive structure 4000 consists of four successive elastomer layers 4002, 4004, 4006 and 4008 joined together. The upper surfaces of each of the first, second, and third elastomer layers 4002, 4004, and 4006 have the same teeth 4010 evenly spaced at a distance X, which is much longer than the wavelength of the incident light. The teeth 4010 serve to focus the incident light, and they can be formed using a microprocessed shape, as described in detail above. The first, second, and third elastomeric layers 4002, 4004, and 4006 function as Fresnel lenses, which will be apparent to those skilled in the art.

The fourth elastomeric layer 4008 carries the same teeth 4012, which are much smaller than the teeth of the elastomeric layers lying on top. The teeth 4012 are also located separately at a much smaller distance Y than the teeth of the elastomeric layers lying on top, while Y is of the order of the incident light wavelength, therefore, the elastomeric layer 4008 functions as a diffraction grating.

On Fig shows an embodiment of a reflective structure according to the present invention, which uses the difference in the refractive indices of materials mainly to perform diffraction. The refractory structure 4100 includes a lower elastomeric part 4102, covered by the upper elastomeric part 4104. The lower elastomeric part 4102 and the upper elastomeric part 4104 consists of a material that transmits incident light 4106. The lower elastomeric part 4102 includes many tortuous channels 4108, separated by elastomeric pads 4110. Channels 41010 include a fluid 4112 having a different refractive index than that of the elastomeric material that the pads 4110 are composed of. Fluid 4112 is pumped through tortuous channels 4108 during p bots pump structure 4114 consisting of parallel channels 4116a and 4116b controls lying above the channel inlet portion 4108a 4108 and 4118 separated by a movable membrane.

Light 4106 incident on the refractive structure 4100 encounters a series of equidistant fluid-filled channels 4108 separated by elastomeric pads 4110. As a result of differences in the optical properties of the material present in these fluid-elastomer regions, part of the incident light is reflected and interacts unevenly , which leads to the formation of an interference pattern. A set of refractive structures, like the ones just described, allows you to perform even more complex and specialized reflection of the incident light.

The elastomeric structures just described can be used for various purposes. For example, the elastomeric structure may act as a filter or an optical switch that does not transmit selected wavelengths of incident light. In addition, the refractive characteristics of the structure can be easily adjusted depending on the needs of a particular application.

For example, the composition (and therefore the refractive index) of a fluid flowing through channels can be varied so as to affect diffraction. On the other hand, or together with a change in the identity of the flowing fluid, the distance separating adjacent channels can be precisely controlled during the fabrication process in order to produce an optical interference pattern having the necessary characteristics.

6. Normally closed valve structure

FIGS. 7B and 7H above depict a valve structure in which an elastomeric membrane moves from a first relaxation position to a second excited position in which the channel is closed. However, the present invention is not limited to this specific valve configuration.

42A-42J show a series of views of a normally-closed valve structure in which the elastomeric membrane moves from the first relaxation position that overlaps the channel to the second excited position, in which the channel remains open under the influence of negative control pressure.

FIG. 42A is a plan view and FIG. 42B is a cross-sectional view taken along line 42B-42B ′ of a normally closed valve 4200 inoperative. The channel 4202 and the control channel 4204 are formed in an elastomeric block 4206 lying above the substrate 4205. The channel 4202 includes a first part 4202a and a second part 4202b separated by a separation part 4208. The control channel 4204 extends above the separation part 4208. As shown in FIG. 42B , in its relaxed, inactive position, the dividing part 4008 remains located between the portions 4202a and 4202b of the channel overlapping the channel 4202.

42C is a cross-sectional view of a valve 4200 in which the spacer portion 4208 is in the operating position. When the pressure inside the control channel 4204 drops below the pressure level in the channel (for example, using a vacuum pump), the separation portion 4208 experiences a response force that draws it into the control channel 4204. As a result of this actuation force, the membrane 4208 enters the control channel 4204, thereby removing the obstruction of material flow through the channel 4202 and creating a passage 4203. After increasing the pressure inside the control channel 4204, the separation part 4208 will assume its natural relaxation position and block the channel 4202.

The behavior of the membrane after the actuation force is applied can be changed by changing the width of the control channel passing from above. Accordingly, FIGS. 42D-42H show a top view and a cross-sectional view of an alternative embodiment of a normally closed valve 4201, in which the control channel 4207 is substantially wider than the separation portion 4208. As shown in cross-sections (Fig. 42E-F) along lines 42E-42E '(Fig. 420), because a large area of elastomeric material is required to move during actuation, the actuation force that must be applied is reduced.

Fig. 42G and H show cross sections along the line 40G-40G '(Fig. 40D). Compared to the non-actuated valve configuration shown in FIG. 42C, FIG. 42 shows that reduced pressure within the wider control channel 4207 may, under certain conditions, lead to the undesirable effect of pulling the underlying elastomer 4206 from the substrate 4205, thereby creating an unwanted cavity 4212 .

Accordingly, FIG. 42I is a top view, and in 42J, is a cross-sectional view along line 42J-42J ′ (FIG. 421), a valve structure 4220 in which this problem is solved by making control line 4204 with a minimum width except segment 4204a overlapping separate portion 4208. As shown in FIG. 42J, even under actuation conditions, a narrower cross-section of the control channel 4204 reduces the attractive force on the underlying elastomeric material 4206, thereby protecting this elastomeric material from being pulled out of the substrate 4205 and not forming desired cavity.

Although the structure of the normally closed valve actuated by the pressure supply is depicted in FIGS. 42A-42J, the normally closed valve according to the present invention is not limited to this configuration. For example, the separation part that impedes the channel can alternatively be controlled by electric or magnetic fields, as described in detail above.

7. Separation of materials

In another application of the present invention, an elastomeric structure can be used to perform material separation. FIG. 43 shows one embodiment of such a device.

The separation device 4300 comprises an elastomeric unit 4301 including a fluid reservoir 4302 that is connected to a channel 4304. Fluid is pumped from a fluid reservoir 4306 through a channel 4308 using a peristaltic pump structure 4310 formed by control channels 4312 extending above the channel 4304, as described in detail above. Alternatively, where the peristaltic pumping structure of the present invention does not provide sufficient back pressure, fluid can be pumped into the elastomeric device from a reservoir mounted outside the elastomeric structure using an external pump.

Channel 4304 is introduced into separation column 4314 as a channel packed by separation matrix 4316 behind porous frit 4318. As is well known in the art of chromatography, the composition of separation matrix 4316 depends on the nature of the materials to be separated and on the particular chromatography method used. The elastomeric separation structure is suitable for the use of a variety of chromatographic methods, including, but not limited to, gel exclusion, gel permeation, ion exchange, reverse phase, hydrophobic interaction, affinity chromatography, chromatography (CBC (FPLC)) of fast moving protein liquid and all chromatography formats high pressure fluid (HPLC). The high pressure used for HPLC may require the use of urethane, dicyclopentadiene or other elastomeric combinations.

Samples are introduced into the fluid stream in separation column 4314 using feed channel 4319. The fluid pumped from the sample tank 4320 enters the loading channel 4319 through the pump 4321. After opening the valve 4322 and the pump 4321 is started, the sample flows from the loading channel 4319 into the channel 4304. Then, the sample flows through the separation column 4314 due to the action of the pump structure 4312. As a result of the different mobility of the various components of the samples in the separation matrix 4316, these components of the samples begin to separate and elute (“squeeze out”) from column 4314 at different times.

After elution from separation column 4314, various sample components pass into the detection region 4324. As is well known in the chromatographic technique, the identity of materials eluted in the detection region 4324 can be determined using a number of methods including, but not limited to, fluorescence, UV / visible / IR spectroscopy, radioactive isotope labeling, amperometric detection, mass spectroscopy and nuclear magnetic resonance (NMR).

An advantage of the separation device according to the present invention is that it is extremely small in size, due to which only small volumes of fluid and sample are consumed during separation. In addition, an advantage of the device is increased sensitivity. In known separation devices, the size of the loop for the sample extends the injection of the sample into the column, due to which it is potentially possible that the eluted spikes can overlap in width. The extremely small size and throughput of the download channel in general avoids the problems associated with this behavior of peak diffusion.

The separation structure shown in FIG. 43 is only one embodiment of such a device, and other structures are contemplated by the present invention. For example, although the separation device (Fig. 43) consists of a channel, a loading loop and a separation column oriented in the same plane, this is not required in the present invention. One (or more) fluid reservoir, sample reservoir, channel, loading loop and separation column can be oriented perpendicular to each other and / or in the plane of the elastomeric material using through structures, the formation of which is described in detail above with reference to Fig. 35A- D.

8. Cell Box, Cell Chamber, and Cell Crusher

In yet another application of the present invention, the elastomeric structure can be used to manipulate organisms or other biological material. On Figa-44D shows a top view of one embodiment of a cell structure for cells according to the present invention.

The matrix of 4400 cells for cells is characterized by a lattice of orthogonally oriented channels 4402 with an expanded 4404 “cell” (“corral”) structure at the intersection of alternating channels. Valve 4406 is located at the inlet and outlet of each cell structure 4404. Peristaltic pump structures 4408 are located on each horizontal channel and on vertical channels, where there are no cell structures for cells.

An array of 4400 cells for cells (Fig. 44A) was loaded with cells A-H that were previously sorted, possibly using the sorting structure described above with reference to Fig. 36. On Figv-44C shows the organization of access and removal of individually sorted cells C by 1) opening valves 4406 on either side of adjacent cells 4404a and 4404b, 2) pumping the horizontal channel 4402a to rearrange cells C and G, and then 3) pumping the vertical channel 4402b to remove cell C. FIG. 44D shows that the second cell G moves back to its previous position in the matrix 4400 by changing the direction of fluid flow through the horizontal channel 4402a.

The matrix of 4404 cells for cells described above allows you to store materials inside a selected, addressable position for quick access. However, living organisms, such as cells, may require continuous consumption of food and the release of waste to sustain life. Accordingly, FIGS. 45A and 45B respectively show a top view and a cross section (along line 45B-45B ′) of one embodiment of a cell chamber structure according to the present invention.

The cell chamber 4500 is formed as an enlarged portion 4500a of the channel 4501 in an elastomeric block 4503 that is in contact with the substrate 4505. The cell chamber 4500 is similar to the separate cell cell described above in FIGS. 44A-44D, except that the ends 4500b and 4500 from the cell chamber 4500 do not completely surround the inner region 4500a. Moreover, chamber ends 4500a and 4500b (“cells”) 4500 are formed with a plurality of retractable columns 4502. Columns 4502 may be part of a normally closed valve structure membrane structure, as described in detail above with reference to Figures 42A-42J.

In particular, the control channel 4504 extends above the posts 4502. When the pressure in the control channel 4504 drops, the elastomeric posts 4502 extend up into the control channel 4504, thereby opening the end of the chamber 4500 for the cells 45 and allowing cell entry. After increasing the pressure in the control channel 4504, the columns 4502 are retracted downward from the substrate 4505, which prevents the cell from leaving the chamber 4500.

The size and number of elastomeric columns 4502 is sufficient to prevent the cell from moving from the chamber 4500, in addition, they also include gaps 4508 that allow the nutrient to pass into the interior of the chamber 4500a in order to support the cell (s) in it safety. Columns 4502 at the opposite end of 4500c have a similar configuration at the bottom of the second control channel 4506, which allows you to open the camera and remove cells from it if necessary.

Under certain conditions, it may be necessary to grind / destroy cells or other biological materials in order to provide access to the remaining parts.

Accordingly, FIGS. 46A and 46B respectively show a top view and a cross section (along line 46B-46B ′) of one embodiment of a cell crusher structure 4600 according to the present invention. The crusher 4600 cells includes a system of interdigital columns 4602 inside the channel 4604, which is blocked immediately after the actuation of the integral membrane 4606 using the channel 4608 passing above the control. With the simultaneous closure of the columns 4602 crush the material present between them.

Columns 4602 can be located at intervals corresponding to the destruction of objects (cells) with a given size. For destruction of the cellular material, placement of columns 4602 with an interval of approximately 2 μm is suitable. In an alternative embodiment of the cell fragmentation structure of the present invention, columns 4602 can be positioned completely on the membrane above or completely on the bottom of the control channel.

9. Pressure generator

In another application of the present invention, an elastomeric structure can be used to create a pressure generator structure similar to generator circuits that are often used in the field of electronics. On Fig shows a top view of one embodiment of such a structure of a pressure generator.

The pressure generator 4700 contains an elastomeric block 4702, a feature of which is the channel 4704 formed therein. The channel 4704 includes an initial part 4704a located adjacent to the pressure source 4706 and a tortuous part 4704b remote from the pressure source 4706. The initial portion 4704a is in contact with the through hole 4708, providing fluid communication with the control channel 4710 formed in the elastomeric unit 4702, which is located above the level of the channel 4704. At a location farther from the pressure source 4706 than the through hole 4708, control channel 4710 extends above channel 4704 and is separated by an elastomeric membrane, thereby forming valve 4712, which is described above.

The structure 4700 of the pressure generator operates as follows. Initially, the pressure source 4706 provides pressure along the channel 4704 and the control channel 4710 through the through hole 4708. Due to the tortuous shape of the channel 4704b, the pressure in the region 4704b will be lower than in the channel 4710. In valve 4712, the pressure difference between the tortuous channel part 4704b and the passage above the control channel 4710 ultimately causes the membrane of the valve 4712 to go down into the tortuous channel portion 4704b and close the valve 4712. However, due to the continuous operation of the pressure source 4706, the pressure begins to rise per hour the tortuous channel 4704b behind the closed valve 4712. The pressure between the control channel 4710 and the tortuous channel part 4704b ultimately equalizes and the valve 4712 opens.

This continuous operation of the pressure source with the pressure increase and decrease described above will continue indefinitely, resulting in regular pressure fluctuations. Such a pressure oscillation device allows you to perform any number of possible functions, including, but not limited to, synchronization.

10. Side Acting Valve

Although the above description has focused on microprocessed elastomeric valve structures in which the control channel is located above and is separated from the channel below by an intermediate elastomeric membrane, the present invention is not limited to this configuration. FIGS. 48A and 48B show top views of one embodiment of a lateral actuation valve structure according to one embodiment of the present invention.

On Figa shows the structure 4800 of the valve with lateral actuation in the idle position. A channel 4802 is formed in the elastomeric layer 4804. A control channel 4806 is also formed in the elastomeric layer 4804 adjacent to the channel 4802. The control channel 4806 is separated from the channel 4802 by means of a portion 4808 of the elastomeric membrane. A second elastomeric layer (not shown) is attached from above to the lower elastomeric layer 4804, closing channel 4802 and control channel 4806.

On Figv shows the structure 4800 of the valve with lateral actuation in the working position. As the pressure inside the control channel 4806 increases, the membrane 4808 deviates into the channel 4802, closing the channel 4802. After the pressure inside the control channel 4806 decreases, the membrane 4808 returns to its original position in the control channel 4806 and opens the channel 4802.

Although the structure of the lateral actuation valve, which is driven by pressure, is shown in Figs. 48A and 48B, the lateral actuation valve according to the present invention is not limited to this configuration. For example, a portion of an elastomeric membrane located between the channel and an adjacent control channel can alternatively be controlled by electric or magnetic fields, as described in detail above.

11. Additional applications

The following are aspects of the present invention:

these valves and pumps can be used for drug delivery (for example, in an implantable drug delivery device), and for sampling biological fluids (for example, when storing samples sequentially in a column with plugs from gaskets with fluid in between, where the samples can be moved to various storage containers or pass directly to the appropriate sensor (s)). Such a fluid sampling device can be implanted into a patient’s body.

The presented systems can also be used for devices that reduce the excessive pressure in the body (in vivo} using a micro valve or pump. For example, an implantable biocompatible micro-valve can be used to reduce the excess pressure in the eye that occurs with glaucoma. Other considered use cases of the presented switched micro valves include implantation in the seminal canal or fallopian tube, while allowing reversible, long-term or short-term, to restrict birth nce without medication.

Other uses of the present invention include DNA sequencing, whereby the DNA to be sequenced is supplied with a polymerase and a primer, and then exposed to one type of DNA base (A, C, T or G) for a certain amount of time in order to quickly analyze the composition grounds. In such a system, substrates must flow into the system and excess substrates are quickly washed out. A pressure-controlled flow that is shut off by the elastomeric microvalves of the present invention will be ideally suited to such rapid flow and leaching of reagents.

Other contemplated applications of the present microvalve and micropump systems include the use of elementary DNA fragments. For example, a sample can be inserted into the loop channel and pumped around the loop due to peristaltic action so that the sample can repeatedly pass over samples of the DNA array. Such a device will produce a sample that will usually be discarded while being above non-complementary samples, instead of being able to bind to a complementary sample. The advantage of such a loop-flow system is that it allows to reduce the required volume of samples and, thus, increase the sensitivity of the analysis.

Other applications are related to high-throughput sampling, where they could be useful in dispensing small volumes of fluid or in layer analysis, in which supersensitive detection will significantly improve the sensitivity of the analysis.

Another application considered is the deposition of an array of various chemicals, especially oligonucleotides, which could or could not have been chemically produced in the previous operation of the device before deposition in the form of a pattern or matrix onto a substrate by contact printing through the exits of the ink channel located in the elastomeric device in close proximity to the desired substrate, or using a process similar to inkjet printing.

Presented microprocessed elastomeric valves and pumps can also be used to build a system for the distribution of mixing reagents and the implementation of the reaction for the synthesis of oligonucleotides, peptides or other biopolymers.

Other applications of the present invention include inkjet printer heads in which small holes are used to generate a pressure pulse sufficient to eject a droplet. A suitably actuated microvalve according to the present invention can generate such a pressure pulse. The presented microvalves and pumps can also be used for digital distribution of ink or pigment, not necessarily in such small quantities as single droplets. The droplet will come in contact with the medium on which they will print, and not shoot through the air gap.

Other applications of these systems are inkjet logic circuits, which have advantages where radiation resistance is required. Another advantage of such inkjet logic circuits is that, while not electronic, such inkjet logic circuits cannot be probed with electromagnetic sensors, thereby increasing safety.

Other applications of the present invention will have the advantage of easily detaching and reattaching a structure with an underlying substrate, such as glass, using a patterned glass substrate with a binder or other material. This allows you to have a separate design of the substrate with a printed pattern and an elastomeric structure. For example, on a glass substrate, a pattern can be applied using a DNA microarray, and the elastomeric valve and pump structure can be placed on top of the matrix in the next step.

11. Additional aspects of the invention

Other aspects of the present invention are presented below: using a deflectable membrane to control fluid flow in a microprocessed channel of an elastomeric structure, using elastomeric layers to make a microprocessed elastomeric device containing a microprocessed moving part, and using an elastomeric material to make a microprocessed valve or pump.

A microprocessed elastomeric structure, according to one embodiment of the present invention, comprises an elastomeric block formed therein by a microprocessed recess, wherein a portion of the elastomeric block is deflected when the portion is actuated. The recess comprises a first micro-machined channel and a first micro-machined cavity, and the part contains an elastomeric membrane that deflects into the first micro-machined channel when the membrane is actuated. The recesses have a width in the range of 10 μm to 200 μm, and the part has a thickness in the range of about 2 μm and 50 μm. The microprocessed elastomeric structure can be driven at a frequency of 100 Hz or more, and it does not contain a substantially unused volume when the part is driven.

A method for actuating an elastomeric structure comprises performing an elastomeric block formed therein by means of the first and second microprocessed recesses, wherein the first and second microprocessed recesses are separated by the membrane part of the elastomeric block, which deviates into one of the (first and second) recesses in response to the force actuation, and applying the actuation force to the membrane part so that the membrane part deviates into one of the (first and second) recesses.

A method of microprocessing an elastomeric structure, according to one embodiment of the present invention, comprises forming a first elastomeric layer on a substrate, curing the first elastomeric layer and applying a pattern to the first protective layer located above the first elastomeric layer. A second elastomeric layer is formed over the first elastomeric layer, thereby completely covering the first printed protective layer located between the first and second elastomeric layers, the second elastomeric layer being cured, and the first printed protective layer is selectively removed with respect to the first elastomeric layer and a second elastomeric layer, thereby forming at least one first recess between the first and second elastomer layers.

An alternative embodiment of the manufacturing method further comprises applying a pattern to a second protective layer located above the substrate before forming the first elastomeric layer, so that the second printed protective layer is removed during the removal of the first printed protective layer to form at least one recess along the bottom of the first elastomeric layer.

A microprocessed elastomeric structure, according to one embodiment of the present invention, comprises an elastomeric block, a first channel and a second channel separated by a spacer portion of the elastomeric structure, and a microprocessed recess in the elastomeric block is adjacent to the spacer portion so that the spacer portion can be actuated, deviating into a microprocessed groove. The deviation of the separation part opens the passage between the first and second channels.

A method for controlling a fluid or gas flow through an elastomeric structure comprises an elastomeric block, wherein the elastomeric block has a first, second and third microprocessed recesses, and the elastomeric block has a first microprocessed channel passing through it, the first, second and third microprocessed recesses separated from the first channel by the corresponding first, second and third membranes are deflected into the first channel, and the deviation of the first, second and third membranes into the first channel in ovtoryayuscheysya sequence for the peristaltic pumping of fluid medium stream through a first channel.

A method of microprocessing an elastomeric structure, comprising microprocessing a first elastomeric layer, microprocessing a second elastomeric layer, positioning a second elastomeric layer located on top of the first elastomeric layer, and attaching a lower surface of the second elastomeric layer to an upper surface of the first elastomeric layer.

Although the present invention has been described here with reference to specific embodiments thereof, various other modifications, changes and substitutions are implied in the foregoing disclosure, while in some examples some features of the invention will be used without the corresponding use of other features without departing from the scope of patent claims, as set forth . Therefore, numerous modifications can be made in order to adapt a specific situation or material for applying the invention without deviating essentially from the scope and essence of the present invention. It is intended that the invention is not limited to the particular embodiment disclosed as the best mode of operation considered to carry out the present invention, and that the invention will include all embodiments and equivalents within the scope of the claims.

The full contents of Appendix A are hereby incorporated by reference as part of the present description: Anger and others "Monolithic microprocessed valves and pumps made using multilayer soft lithography." Science, t. 288, p.113-116 (April 7, 2000), which must be considered as part of the description for all purposes.

Claims (36)

1. An elastomeric structure (24) containing an elastomeric block formed at least with a first and second microprocessed recesses (21, 23) in it, the first and second microprocessed recesses are separated by a membrane part (25) of the elastomeric block deviations when the membrane is triggered in the first or second microprocessed recesses. 2. The structure according to claim 1, in which the membrane part (25) is configured to respond, essentially according to a linear law, to the applied actuation force. 3. The structure according to claim 1, in which the first recess (21) contains the first microprocessed channel (30), and the second recess (23) contains the second microprocessed channel (32), while the membrane part (25) contains an elastomeric membrane made with the possibility of deviation into the first or second microprocessed channels when the membrane is triggered. 4. The structure according to claim 1, in which the first recess (21) contains the first microprocessed channel (30), and the membrane part (25) contains an elastomeric membrane configured to deflect into the first microprocessed channel when the membrane is activated. 5. The structure according to claim 4, in which the membrane is configured to deflect into the first channel when pressure is applied to the second microprocessed recess (23). 6. The structure according to claim 4, in which the second microprocessed recess (23) contains a second microprocessed channel (23). 7. The structure according to claim 3, containing the third and fourth channels (32B, 32C) located parallel to the second channel (32A), where the second, third and fourth channels are separated from the first channel using the first, second and third membranes (25), respectively rejected in the first channel (30). 8. The structure according to claim 1, which contains a material selected from polyisoprene, polybutadiene, polychloroprene, polyisobutylene, poly (styrene-butadiene-styrene), polyurethanes, silicones, aliphatic urethane diacrylates, poly (bis (fluoroalkoxyl) phosphazene) (PiEnEf, Eipel-Ef (PNF, Eypel-F)), poly (carboran-siloxanes) (Dexil (Dexsil)), poly (acrylonitrile-butadiene) (nitrile rubber), poly (1-butene), poly (chlorotrifluoroethylene-vinylidene) copolymers ) (Kel-F), poly (ethyl vinyl ether), poly (vinylidene fluoride), copolymer of poly (vinylidene-hexafluoro-propylene fluoride) ( Eaton (Viton)), elastomeric compositions of polyvinylchloride (PVC), polysulfone, polycarbonate, polymethylmethacrylate (PMMA) or polytetrafluoroethylene (Teflon). 9. The structure (24) according to claim 1, further comprising a planar substrate (14), for example glass, wherein the planar substrate forms the wall of the first or second microprocessed recess (21, 23). 10. A method of activating an elastomeric structure in which an elastomeric block is formed formed with the first and second microprocessed recesses (21, 23) in it, the first and second microprocessed recesses being separated by a membrane part (25) of the elastomeric block, which can be deflected into the first or the second recess when the actuation force is applied, and the actuation force is applied to the membrane part so that the membrane part deviates into the first or second recess. 11. The method according to claim 10, wherein the step of applying a response force comprises applying pressure to the second microprocessed recess (23) to deflect the membrane portion (25) into the first microprocessed recess (21). 12. A method of controlling the flow of a fluid or gas through an elastomeric structure in which an elastomeric block is provided having a first, second and third microprocessed recesses (32A, 32B, 32C) and having a first microprocessed channel (30) passing through it, the first , the second and third microprocessed recesses are separated from the first channel by the corresponding first, second and third membrane parts (25) deflected into the first channel, and the first, second and third membrane parts are rejected into the first channel in a repeating sequence atelnosti for peristaltic pumping process fluid through the first flow channel. 13. A method of microprocessing an elastomeric structure in which a first microprocessed elastomeric structure (20) having at least a first recess (21) is performed, a second microprocessed elastomeric structure (22) having at least a second recess (23) is performed and connect the surface of the first elastomeric structure with the surface of the second elastomeric structure. 14. The method according to item 13, in which the second elastomeric structure (22) is placed on top of the first elastomeric structure (20) so that the first recess (21) and the second recess (23) are separated by the membrane part (25) of the elastomeric structure and the membrane the part is deflected into the first depression or into the second depression, and the lower surface of the second elastomeric structure is connected to the upper surface of the first elastomeric structure. 15. The method according to 14, in which the first elastomeric structure (20) is made on the first micro-machined form (10) having at least one first protrusion (11), which forms at least the first recess (21) in the lower part of the first elastomeric structure and the second elastomeric structure (22) are made on a second microprocessed mold (12) having at least one protrusion (13) that forms at least a second recess (23) in the lower part of the first elastomeric structure. 16. A method of controlling fluid flow in a microfinished channel (30) of an elastomeric structure (24) in which a deflectable membrane is used. 17. The method according to clause 16, in which the control of the fluid flow in the microprocessed channel is carried out by applying a response force to the membrane part (25). 18. The method according to clause 16, which uses a monolithic microprocessed elastomeric structure (24). 19. The method according to clause 16, in which the control of the fluid flow in the microfinished channel (30) is carried out by applying pressure to the second microprocessed channel (32) of the elastomeric structure to deflect the membrane. 20. The method according to clause 16, in which the elastomeric structure is formed with at least the first and second micro-machined recesses (21, 23) in it, and one of the micro-machined recesses forms a micro-machined channel (30), while the deflectable membrane (25 ) separates the first and second microprocessed cavities and deviates into the first or second microprocessed cavities when it is triggered. 21. A method for manufacturing an elastomeric device, comprising the steps of: forming a first elastomeric layer on top of the first microprocessed mold, the first microprocessed mold having at least one first protrusion that forms at least one first recess extending along the lower surface of the first elastomeric layer, form a second elastomeric layer on top of the second microprocessed form, and the second microprocessed form has at least one second protrusion, which forms at least one second recess extending along the lower surface of the second elastomeric layer, attaches the lower surface of the second elastomeric layer to the upper surface of the first elastomeric layer to form a control channel in the second recess between the first and second elastomeric layers and places the first elastomeric layer on top of the planar substrates for forming at least one channel in the first recess between the first elastomeric layer and the planar substrate. 22. A method of creating a microprocessed fluid valve or microprocessed peristaltic pump using an elastomeric material, the method comprising forming an elastomeric block with at least first and second microprocessed cavities (21, 23) in it, the first and second microprocessed cavities separated by the membrane part (25) of the elastomeric block, configured to deflect upon actuation of the membrane in the first or second microprocessed recesses. 23. A microprocessed elastomeric structure containing an elastomeric block formed with microprocessed recesses having a width of less than 1000 μm, and a part of the elastomeric block is deflected into one of the recesses when it is triggered. 24. The structure according to item 23, in which the recesses contain the first microprocessed channel and the first microprocessed cavity, and the deflected part contains an elastomeric membrane deflected into the first microprocessed channel when the membrane is triggered. 25. The structure according to paragraph 24, in which the membrane deviates into the first channel when pressure is applied to the first microprocessed recess. 26. The structure according to paragraph 24, in which the membrane is deflected into the first channel when the membrane is activated by an electrostatic method. 27. The structure according to paragraph 24, in which the first microprocessed cavity contains a second microprocessed channel. 28. The structure according to item 27, in which the first and second micro-treated channels pass through an elastomeric structure. 29. The structure according to item 27, in which the second microprocessed channel passes through the elastomeric structure and the first microprocessed channel passes along the surface of the elastomeric structure. 30. The structure according to clause 29, additionally containing a planar substrate located next to the surface of the elastomeric structure along which the first microprocessed channel passes. 31. The structure according to item 27, in which the first microprocessed channel has a T-shape and includes a barrel that is in fluid communication with the first branch and the second branch, while the elastomeric membrane passes over the first branch and is deflected into it, the elastomeric structure further comprises a second recess extending over the second branch such that the second elastomeric membrane is deflected into the second branch upon actuation of the membrane, wherein the fluid flow in the barrel is directed to the first branch or second branch by Positioning the respectively second elastomeric diaphragm or first elastomeric membrane. 32. The structure of claim 27, further comprising a third and fourth channel parallel to the second channel, in which the second, third, and fourth channels are separated from the first channel, respectively, by the first, second, and third membranes deflected into the first channel. 33. The structure according to item 23, which contains a material selected from the group consisting of polyisoprene, polybutadiene, polychloroprene, polyisobutylene, poly (styrene-butadiene-styrene), polyurethanes, silicones, poly (bis (fluoroalkoxyl) phosphazene) (PiEnEf, Eipel-Ef (PNF, Eypel-F)), poly (carboran-siloxanes) (Dexil (Dexsil)), poly (acrylonitrile-butadiene) (nitrile rubber), poly (1-butene), poly (chlorotrifluoroethylene-vinylidene) copolymers ) (Kel-F), poly (ethyl vinyl ether), poly (vinylidene fluoride), copolymer of poly (vinylidene-hexafluoro-propylene fluoride) (Viton), elas tomer compositions of polyvinyl chloride (PVC), polysulfone, polycarbonate, polymethyl methacrylate (PMMK) or polytetrafluoroethylene (Teflon). 34. A microprocessed elastomeric structure comprising an elastomeric block, a first channel and a second channel separated by a spacer portion of an elastomeric structure, and a microprocessed recess in an elastomeric block located adjacent to the spacer portion so that the spacer portion can be deflected into the microprocessed recess. 35. The structure according to clause 34, in which the dividing part is configured to deflect into the micro-machined recess due to reduced pressure in the micro-machined recess. 36. The structure according to clause 34, in which the separation part is configured to be deflected into the micro-machined recess by actuating the separation part in an electrostatic manner. Priority on points: Priority according to claims 1-36 - 03.03.2000.

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