RU2219529C1 - Device testing orientation of shear plane of monocrystalline wafer - Google Patents
Device testing orientation of shear plane of monocrystalline wafer Download PDFInfo
- Publication number
- RU2219529C1 RU2219529C1 RU2002109718A RU2002109718A RU2219529C1 RU 2219529 C1 RU2219529 C1 RU 2219529C1 RU 2002109718 A RU2002109718 A RU 2002109718A RU 2002109718 A RU2002109718 A RU 2002109718A RU 2219529 C1 RU2219529 C1 RU 2219529C1
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- RU
- Russia
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- holder
- monocrystalline wafer
- ray tube
- monocrystalline
- tested
- Prior art date
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
FIELD: manufacture of active solid substrates and piezoelectric resonators. SUBSTANCE: device intended for control over orientation of shear plane of monocrystalline wafers while manufacturing active solid substrates and piezoelectric resonators has X-ray tube, focusing X-ray lens, holder of tested monocrystalline wafer, position-sensitive detector and means to process and to analyze output signals of detector. The latter is mounted for recording of radiation diffracted on tested monocrystalline wafer. Lens is set between output window of X-ray tube and holder so that its output focus is located on surface of shear of tested monocrystalline wafer or under this surface. EFFECT: raised precision. 1 cl, 6 dwg
Description
Текст описания в факсимильном виде (см. графическую часть)е Description text in facsimile form (see graphic part) e
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2002109718A RU2219529C1 (en) | 2002-04-15 | 2002-04-15 | Device testing orientation of shear plane of monocrystalline wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2002109718A RU2219529C1 (en) | 2002-04-15 | 2002-04-15 | Device testing orientation of shear plane of monocrystalline wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2219529C1 true RU2219529C1 (en) | 2003-12-20 |
RU2002109718A RU2002109718A (en) | 2004-04-20 |
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ID=32066282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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RU2002109718A RU2219529C1 (en) | 2002-04-15 | 2002-04-15 | Device testing orientation of shear plane of monocrystalline wafer |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2219529C1 (en) |
-
2002
- 2002-04-15 RU RU2002109718A patent/RU2219529C1/en not_active IP Right Cessation
Non-Patent Citations (1)
Title |
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СТАСЕВИЧ В.Н. Технология монокристаллов. - М.: Радио и связь, 1990, с.174-177. * |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC4A | Invention patent assignment |
Effective date: 20090812 |
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MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20140416 |