RU2015152126A - VIBRATION MICROMECHANICAL ACCELEROMETER - Google Patents
VIBRATION MICROMECHANICAL ACCELEROMETER Download PDFInfo
- Publication number
- RU2015152126A RU2015152126A RU2015152126A RU2015152126A RU2015152126A RU 2015152126 A RU2015152126 A RU 2015152126A RU 2015152126 A RU2015152126 A RU 2015152126A RU 2015152126 A RU2015152126 A RU 2015152126A RU 2015152126 A RU2015152126 A RU 2015152126A
- Authority
- RU
- Russia
- Prior art keywords
- pair
- resonators
- micromechanical accelerometer
- pairs
- internal
- Prior art date
Links
Landscapes
- Micromachines (AREA)
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2015152126A RU2015152126A (en) | 2015-12-04 | 2015-12-04 | VIBRATION MICROMECHANICAL ACCELEROMETER |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2015152126A RU2015152126A (en) | 2015-12-04 | 2015-12-04 | VIBRATION MICROMECHANICAL ACCELEROMETER |
Publications (1)
Publication Number | Publication Date |
---|---|
RU2015152126A true RU2015152126A (en) | 2017-06-08 |
Family
ID=59031546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2015152126A RU2015152126A (en) | 2015-12-04 | 2015-12-04 | VIBRATION MICROMECHANICAL ACCELEROMETER |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2015152126A (en) |
-
2015
- 2015-12-04 RU RU2015152126A patent/RU2015152126A/en unknown
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