RU2013100294A - METHOD FOR GROWING PLANAR FILTER CRYSTALS OF SEMICONDUCTORS - Google Patents
METHOD FOR GROWING PLANAR FILTER CRYSTALS OF SEMICONDUCTORS Download PDFInfo
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- RU2013100294A RU2013100294A RU2013100294/05A RU2013100294A RU2013100294A RU 2013100294 A RU2013100294 A RU 2013100294A RU 2013100294/05 A RU2013100294/05 A RU 2013100294/05A RU 2013100294 A RU2013100294 A RU 2013100294A RU 2013100294 A RU2013100294 A RU 2013100294A
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Abstract
Способ выращивания планарных нитевидных кристаллов полупроводников, включающий подготовку полупроводниковой пластины путем нанесения на ее поверхность частиц катализатора с последующим помещением подготовленной пластины в ростовую печь, нагревом и созданием в пластине продольного температурного градиента 10-100°C/см, отличающийся тем, что дополнительно осуществляют осаждение кристаллизуемого вещества из паровой фазы по схеме пар→капельная жидкость→кристалл, молярное соотношение компонентов газовой фазы к водороду устанавливают в интервале 0,005-0,015, а отношение температурного градиента к диаметру капли катализатора обеспечивают в диапазоне 0,15-0,4°C.A method of growing planar whiskers of semiconductors, comprising preparing a semiconductor wafer by depositing catalyst particles on its surface, followed by placing the prepared wafer in a growth furnace, heating and creating a longitudinal temperature gradient of 10-100 ° C / cm in the wafer, characterized in that it further precipitates crystallizable substance from the vapor phase according to the scheme steam → droplet liquid → crystal, the molar ratio of the components of the gas phase to hydrogen is set to the range of 0.005-0.015, and the ratio of the temperature gradient to the diameter of the droplet of the catalyst provide in the range of 0.15-0.4 ° C.
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RU2013100294/05A RU2536985C2 (en) | 2013-01-09 | 2013-01-09 | Method of growing planar threadlike crystals of semiconductors |
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RU2013100294/05A RU2536985C2 (en) | 2013-01-09 | 2013-01-09 | Method of growing planar threadlike crystals of semiconductors |
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RU2013100294A true RU2013100294A (en) | 2014-07-20 |
RU2536985C2 RU2536985C2 (en) | 2014-12-27 |
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RU2013100294/05A RU2536985C2 (en) | 2013-01-09 | 2013-01-09 | Method of growing planar threadlike crystals of semiconductors |
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Publication number | Priority date | Publication date | Assignee | Title |
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RU2099808C1 (en) * | 1996-04-01 | 1997-12-20 | Евгений Инвиевич Гиваргизов | Process of growing of oriented systems of whiskers and gear for its implementation ( versions ) |
RU2010139462A (en) * | 2010-09-24 | 2012-03-27 | Государственное образовательное учреждение высшего профессионального образования "Воронежский государственный технический универси | METHOD FOR PRODUCING "NEGATIVE" SILICON CRYSTALS |
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Effective date: 20150110 |