RU2012132613A - ADAPTIVE SENSOR BASED ON FIELD SENSITIVITY - Google Patents
ADAPTIVE SENSOR BASED ON FIELD SENSITIVITY Download PDFInfo
- Publication number
- RU2012132613A RU2012132613A RU2012132613/28A RU2012132613A RU2012132613A RU 2012132613 A RU2012132613 A RU 2012132613A RU 2012132613/28 A RU2012132613/28 A RU 2012132613/28A RU 2012132613 A RU2012132613 A RU 2012132613A RU 2012132613 A RU2012132613 A RU 2012132613A
- Authority
- RU
- Russia
- Prior art keywords
- sensor based
- adaptive sensor
- substrate
- electrode
- field sensitivity
- Prior art date
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Abstract
Адаптивный датчик на основе чувствительного полевого прибора, содержащий структуру «металл-диэлектрик-полупроводник» с полупроводниковой подложкой и подвижным проводящим электродом на консоли, включающей слои с различными коэффициентами термического расширения, отличающийся тем, что на подложке на расстоянии не более ширины области пространственного заряда от края электрода расположен затвор и р-n переход для ввода электрического сигнала.An adaptive sensor based on a sensitive field device containing a metal-dielectric-semiconductor structure with a semiconductor substrate and a movable conductive electrode on the console, including layers with different coefficients of thermal expansion, characterized in that on the substrate at a distance of no more than the width of the space charge region from The edge of the electrode is a shutter and pn junction to enter an electrical signal.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2012132613/28A RU2511203C2 (en) | 2012-07-31 | 2012-07-31 | Adaptive sensor based on sensitive field device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2012132613/28A RU2511203C2 (en) | 2012-07-31 | 2012-07-31 | Adaptive sensor based on sensitive field device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2012132613A true RU2012132613A (en) | 2014-02-10 |
| RU2511203C2 RU2511203C2 (en) | 2014-04-10 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2012132613/28A RU2511203C2 (en) | 2012-07-31 | 2012-07-31 | Adaptive sensor based on sensitive field device |
Country Status (1)
| Country | Link |
|---|---|
| RU (1) | RU2511203C2 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5818093A (en) * | 1996-01-25 | 1998-10-06 | Motorola, Inc. | Semiconductor device having a movable gate |
| FR2875339B1 (en) * | 2004-09-16 | 2006-12-08 | St Microelectronics Sa | MOS TRANSISTOR WITH DEFORMABLE GRID |
| JP2010080466A (en) * | 2008-09-24 | 2010-04-08 | Fuji Electric Holdings Co Ltd | Acceleration and angular acceleration sensor |
| RU2399064C1 (en) * | 2009-04-24 | 2010-09-10 | Общество с ограниченной ответственностью "ЭЛЕМ ИНФО" | Heat-sensitive field device |
| RU2457577C1 (en) * | 2011-03-24 | 2012-07-27 | Открытое акционерное общество "Научно-исследовательский институт физических измерений" | Multifunctional measurement module |
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2012
- 2012-07-31 RU RU2012132613/28A patent/RU2511203C2/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| RU2511203C2 (en) | 2014-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20190801 |