RU2012132602A - PHOTO RECEIVING DEVICE FOR MEASURING POWER OPTIONS OF VACUUM UV RADIATION - Google Patents
PHOTO RECEIVING DEVICE FOR MEASURING POWER OPTIONS OF VACUUM UV RADIATION Download PDFInfo
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- RU2012132602A RU2012132602A RU2012132602/28A RU2012132602A RU2012132602A RU 2012132602 A RU2012132602 A RU 2012132602A RU 2012132602/28 A RU2012132602/28 A RU 2012132602/28A RU 2012132602 A RU2012132602 A RU 2012132602A RU 2012132602 A RU2012132602 A RU 2012132602A
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- radiation
- vacuum
- photodetector
- receiving device
- evacuated volume
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Фотоприемное устройство для измерения энергетических параметров вакуумного ультрафиолетового излучения, включающее фотометрический блок, размещенный в вакуумированном объеме, блок регистрирующей системы, размещенный вне вакуумированного объема, и вакуумный токоввод, предназначенный для электрического соединения блоков фотоприемного устройства, отличающееся тем, что чувствительный элемент фотометрического блока выполнен в виде полостного калориметрического приемника излучения, поглощающей нагрузкой которого служит замкнутая полость с отверстием для ввода излучения, изготовленная из металла с высокой теплопроводностью.A photodetector for measuring the energy parameters of vacuum ultraviolet radiation, including a photometric unit placed in an evacuated volume, a recording system unit located outside the evacuated volume, and a vacuum current lead for electrically connecting the blocks of the photodetector, characterized in that the sensitive element of the photometric unit is made in as a cavity calorimetric radiation receiver, the absorbing load of which is a closed lethargy with a hole for entry of the radiation, made of a metal with high thermal conductivity.
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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RU2012132602/28A RU2519519C2 (en) | 2012-07-30 | 2012-07-30 | Photodetector for measuring energy parameters of vacuum ultraviolet radiation |
Applications Claiming Priority (1)
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RU2012132602/28A RU2519519C2 (en) | 2012-07-30 | 2012-07-30 | Photodetector for measuring energy parameters of vacuum ultraviolet radiation |
Publications (2)
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RU2012132602A true RU2012132602A (en) | 2014-02-10 |
RU2519519C2 RU2519519C2 (en) | 2014-06-10 |
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RU2012132602/28A RU2519519C2 (en) | 2012-07-30 | 2012-07-30 | Photodetector for measuring energy parameters of vacuum ultraviolet radiation |
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RU (1) | RU2519519C2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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RU181370U1 (en) * | 2017-11-07 | 2018-07-11 | федеральное государственное бюджетное образовательное учреждение высшего образования "Омский государственный университет им. Ф.М. Достоевского" | Microcalorimeter with evacuated measuring cell |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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SU642614A1 (en) * | 1977-06-24 | 1979-01-15 | Предприятие П/Я Р-6681 | Gas caloritmeter |
JP2003028710A (en) * | 2001-07-10 | 2003-01-29 | Canon Inc | Integrating sphere, spectrometric instrument using the same, exposure device, and spectrometry |
JP4262032B2 (en) * | 2003-08-25 | 2009-05-13 | キヤノン株式会社 | EUV light source spectrum measurement device |
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2012
- 2012-07-30 RU RU2012132602/28A patent/RU2519519C2/en not_active IP Right Cessation
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RU2519519C2 (en) | 2014-06-10 |
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Date | Code | Title | Description |
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MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20180731 |