RU2012132602A - PHOTO RECEIVING DEVICE FOR MEASURING POWER OPTIONS OF VACUUM UV RADIATION - Google Patents

PHOTO RECEIVING DEVICE FOR MEASURING POWER OPTIONS OF VACUUM UV RADIATION Download PDF

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Publication number
RU2012132602A
RU2012132602A RU2012132602/28A RU2012132602A RU2012132602A RU 2012132602 A RU2012132602 A RU 2012132602A RU 2012132602/28 A RU2012132602/28 A RU 2012132602/28A RU 2012132602 A RU2012132602 A RU 2012132602A RU 2012132602 A RU2012132602 A RU 2012132602A
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Russia
Prior art keywords
radiation
vacuum
photodetector
receiving device
evacuated volume
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RU2012132602/28A
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Russian (ru)
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RU2519519C2 (en
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Геннадий Николаевич Герасимов
Генрих Израйлевич Каданер
Борис Евгеньевич Крылов
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Открытое акционерное общество "Государственный оптический институт имени С.И.Вавилова"
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Priority to RU2012132602/28A priority Critical patent/RU2519519C2/en
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Abstract

Фотоприемное устройство для измерения энергетических параметров вакуумного ультрафиолетового излучения, включающее фотометрический блок, размещенный в вакуумированном объеме, блок регистрирующей системы, размещенный вне вакуумированного объема, и вакуумный токоввод, предназначенный для электрического соединения блоков фотоприемного устройства, отличающееся тем, что чувствительный элемент фотометрического блока выполнен в виде полостного калориметрического приемника излучения, поглощающей нагрузкой которого служит замкнутая полость с отверстием для ввода излучения, изготовленная из металла с высокой теплопроводностью.A photodetector for measuring the energy parameters of vacuum ultraviolet radiation, including a photometric unit placed in an evacuated volume, a recording system unit located outside the evacuated volume, and a vacuum current lead for electrically connecting the blocks of the photodetector, characterized in that the sensitive element of the photometric unit is made in as a cavity calorimetric radiation receiver, the absorbing load of which is a closed lethargy with a hole for entry of the radiation, made of a metal with high thermal conductivity.

Claims (1)

Фотоприемное устройство для измерения энергетических параметров вакуумного ультрафиолетового излучения, включающее фотометрический блок, размещенный в вакуумированном объеме, блок регистрирующей системы, размещенный вне вакуумированного объема, и вакуумный токоввод, предназначенный для электрического соединения блоков фотоприемного устройства, отличающееся тем, что чувствительный элемент фотометрического блока выполнен в виде полостного калориметрического приемника излучения, поглощающей нагрузкой которого служит замкнутая полость с отверстием для ввода излучения, изготовленная из металла с высокой теплопроводностью. A photodetector for measuring the energy parameters of vacuum ultraviolet radiation, including a photometric unit placed in an evacuated volume, a recording system unit located outside the evacuated volume, and a vacuum current lead for electrically connecting the blocks of the photodetector, characterized in that the sensitive element of the photometric unit is made in as a cavity calorimetric radiation receiver, the absorbing load of which is a closed lethargy with a hole for entry of the radiation, made of a metal with high thermal conductivity.
RU2012132602/28A 2012-07-30 2012-07-30 Photodetector for measuring energy parameters of vacuum ultraviolet radiation RU2519519C2 (en)

Priority Applications (1)

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RU2012132602/28A RU2519519C2 (en) 2012-07-30 2012-07-30 Photodetector for measuring energy parameters of vacuum ultraviolet radiation

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Application Number Priority Date Filing Date Title
RU2012132602/28A RU2519519C2 (en) 2012-07-30 2012-07-30 Photodetector for measuring energy parameters of vacuum ultraviolet radiation

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RU2012132602A true RU2012132602A (en) 2014-02-10
RU2519519C2 RU2519519C2 (en) 2014-06-10

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU181370U1 (en) * 2017-11-07 2018-07-11 федеральное государственное бюджетное образовательное учреждение высшего образования "Омский государственный университет им. Ф.М. Достоевского" Microcalorimeter with evacuated measuring cell

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU642614A1 (en) * 1977-06-24 1979-01-15 Предприятие П/Я Р-6681 Gas caloritmeter
JP2003028710A (en) * 2001-07-10 2003-01-29 Canon Inc Integrating sphere, spectrometric instrument using the same, exposure device, and spectrometry
JP4262032B2 (en) * 2003-08-25 2009-05-13 キヤノン株式会社 EUV light source spectrum measurement device

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Effective date: 20180731