RU2012130704A - DEVICE FOR APPLYING PHOTO RESIST BY CENTRIFUGING METHOD - Google Patents
DEVICE FOR APPLYING PHOTO RESIST BY CENTRIFUGING METHOD Download PDFInfo
- Publication number
- RU2012130704A RU2012130704A RU2012130704/07A RU2012130704A RU2012130704A RU 2012130704 A RU2012130704 A RU 2012130704A RU 2012130704/07 A RU2012130704/07 A RU 2012130704/07A RU 2012130704 A RU2012130704 A RU 2012130704A RU 2012130704 A RU2012130704 A RU 2012130704A
- Authority
- RU
- Russia
- Prior art keywords
- substrate holder
- applying
- centrifuge
- photoresist
- shaft
- Prior art date
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- Centrifugal Separators (AREA)
Abstract
1. Устройство для нанесения фоторезиста методом центрифугирования, содержащее закрепленный на валу центрифуги держатель подложек, отличающееся тем, что держатель подложек выполнен в виде основания и крышки, на внутренних поверхностях которых выполнены сквозные пазы со ступенчатой боковой поверхностью для установки подложек, при этом на периферийных частях держателя подложек установлены ограничительные штифты, а в крышке держателя подложек выполнены заливочные отверстия.2. Устройство для нанесения фоторезиста методом центрифугирования по п.1, отличающееся тем, что держатель подложек установлен в дополнительный защитный корпус с крышкой, который закреплен на валу центрифуги.1. A device for applying a photoresist by centrifugation, comprising a substrate holder fixed to the centrifuge shaft, characterized in that the substrate holder is made in the form of a base and a cover, on the inner surfaces of which are made through grooves with a stepped side surface for mounting the substrates, while on the peripheral parts restriction pins are installed on the substrate holder, and filling holes are made in the substrate holder lid. 2. The device for applying photoresist by centrifugation according to claim 1, characterized in that the substrate holder is installed in an additional protective housing with a lid that is mounted on the shaft of the centrifuge.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2012130704/07A RU2509390C1 (en) | 2012-07-18 | 2012-07-18 | Device for photoresist coating by centrifuging |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2012130704/07A RU2509390C1 (en) | 2012-07-18 | 2012-07-18 | Device for photoresist coating by centrifuging |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2012130704A true RU2012130704A (en) | 2014-01-27 |
RU2509390C1 RU2509390C1 (en) | 2014-03-10 |
Family
ID=49956859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2012130704/07A RU2509390C1 (en) | 2012-07-18 | 2012-07-18 | Device for photoresist coating by centrifuging |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2509390C1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2761134C2 (en) * | 2020-05-26 | 2021-12-06 | Открытое акционерное общество "Научно-исследовательский институт полупроводникового машиностроения" (ОАО "НИИПМ") | Device for applying photoresist to semiconductor wafers |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57130570A (en) * | 1981-02-04 | 1982-08-13 | Hitachi Ltd | Spinner coating method and apparatus |
SU1035844A1 (en) * | 1981-11-27 | 1983-08-15 | Предприятие П/Я А-1067 | Apparatus for applying photoresist on substrates |
JPS63301520A (en) * | 1987-05-30 | 1988-12-08 | Nec Corp | Photoresist coating device |
SU1674644A1 (en) * | 1988-09-30 | 1995-10-27 | А.И. Чиркунов | Device for application of film coat on substrate |
RU2012093C1 (en) * | 1992-03-26 | 1994-04-30 | Воронежский опытный завод микроэлектроники "РИФ" | Device for application of photoresist by rotation |
JPH1025536A (en) * | 1996-07-11 | 1998-01-27 | Sumitomo Metal Ind Ltd | Steel material excellent in toughness in heat affected zone, and its production |
RU21481U1 (en) * | 2001-10-03 | 2002-01-20 | Открытое акционерное общество Арзамасское научно-производственное предприятие "Темп-Авиа" | DEVICE FOR APPLYING A PHOTO RESIST ON A PLATE |
RU2278443C2 (en) * | 2004-07-14 | 2006-06-20 | Государственное образовательное учреждение высшего профессионального образования "Воронежская государственная технологическая академия" | Device for wafer coating by centrifuging |
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2012
- 2012-07-18 RU RU2012130704/07A patent/RU2509390C1/en active
Also Published As
Publication number | Publication date |
---|---|
RU2509390C1 (en) | 2014-03-10 |
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