RU2011152062A - SENSITIVE ELEMENT OF A MICROMECHANICAL ACCELEROMETER - Google Patents
SENSITIVE ELEMENT OF A MICROMECHANICAL ACCELEROMETER Download PDFInfo
- Publication number
- RU2011152062A RU2011152062A RU2011152062/28A RU2011152062A RU2011152062A RU 2011152062 A RU2011152062 A RU 2011152062A RU 2011152062/28 A RU2011152062/28 A RU 2011152062/28A RU 2011152062 A RU2011152062 A RU 2011152062A RU 2011152062 A RU2011152062 A RU 2011152062A
- Authority
- RU
- Russia
- Prior art keywords
- pendulum
- glass substrate
- elastic elements
- torsion
- bending
- Prior art date
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- Pressure Sensors (AREA)
- Micromachines (AREA)
Abstract
Чувствительный элемент микромеханического акселерометра, содержащий маятник из монокристаллического кремния, стеклянную подложку и внешнюю рамку с площадками крепления к стеклянной подложке, крестообразные торсионы, отличающийся тем, что дополнительно введена центральная площадка крепления к стеклянной подложке, расположенная в центре симметрии маятника, соединенная через изгибные упругие элементы с маятником таким образом, что ось изгиба упругих элементов совпадает с осью крутильных крестообразных торсионов, и между местом крепления конца торсиона в маятнике и изгибными упругими элементами, вдоль маятника, расположена сквозная щель, с обеих сторон относительно центральной площадки крепления.A sensitive element of a micromechanical accelerometer containing a single-crystal silicon pendulum, a glass substrate and an external frame with attachment areas to the glass substrate, cross-shaped torsion bars, characterized in that a central attachment area to the glass substrate is located at the center of symmetry of the pendulum, connected through bending elastic elements with the pendulum in such a way that the axis of bending of the elastic elements coincides with the axis of the torsion cruciform torsion bars, and between the At the end of the torsion bar in the pendulum and bending elastic elements along the pendulum, there is a through gap, on both sides relative to the central mounting platform.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2011152062/28A RU2492490C1 (en) | 2011-12-21 | 2011-12-21 | Sensing element of micromechanical accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2011152062/28A RU2492490C1 (en) | 2011-12-21 | 2011-12-21 | Sensing element of micromechanical accelerometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2011152062A true RU2011152062A (en) | 2013-06-27 |
| RU2492490C1 RU2492490C1 (en) | 2013-09-10 |
Family
ID=48701088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2011152062/28A RU2492490C1 (en) | 2011-12-21 | 2011-12-21 | Sensing element of micromechanical accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| RU (1) | RU2492490C1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2753475C1 (en) * | 2020-09-15 | 2021-08-17 | Акционерное общество "Инерциальные технологии "Технокомплекса" (АО "ИТТ") | Micromechanical accelerometer |
| RU2746763C1 (en) * | 2020-09-15 | 2021-04-20 | Акционерное общество "Инерциальные технологии "Технокомплекса" (АО "ИТТ") | Micromechanical accelerometer |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3885568T2 (en) * | 1987-10-02 | 1994-03-17 | Sextant Avionique | Flat pendulum accelerometer. |
| US5126812A (en) * | 1990-02-14 | 1992-06-30 | The Charles Stark Draper Laboratory, Inc. | Monolithic micromechanical accelerometer |
| RU2231795C1 (en) * | 2002-12-10 | 2004-06-27 | Открытое акционерное общество Арзамасское научно-производственное предприятие "Темп-Авиа" | Sensitive element of integrated accelerometer |
| RU2251702C1 (en) * | 2004-07-02 | 2005-05-10 | Государственное образовательное учреждение высшего профессионального образования "Московский государственный институт электронной техники (технический университет)" (МИЭТ) | Micromechanical accelerometer |
| RU2379693C1 (en) * | 2008-10-16 | 2010-01-20 | Московский государственный институт электронной техники (технический университет) | Sensitive element of integral accelerometre |
| RU2379694C1 (en) * | 2008-10-16 | 2010-01-20 | Московский государственный институт электронной техники (технический университет) | Micromechanical linear accelerometre |
-
2011
- 2011-12-21 RU RU2011152062/28A patent/RU2492490C1/en active IP Right Revival
Also Published As
| Publication number | Publication date |
|---|---|
| RU2492490C1 (en) | 2013-09-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20131222 |
|
| NF4A | Reinstatement of patent |
Effective date: 20150427 |
|
| PD4A | Correction of name of patent owner |