RU2010138218A - LASER SOURCE OF IONS WITH ACTIVE INJECTION SYSTEM - Google Patents
LASER SOURCE OF IONS WITH ACTIVE INJECTION SYSTEM Download PDFInfo
- Publication number
- RU2010138218A RU2010138218A RU2010138218/07A RU2010138218A RU2010138218A RU 2010138218 A RU2010138218 A RU 2010138218A RU 2010138218/07 A RU2010138218/07 A RU 2010138218/07A RU 2010138218 A RU2010138218 A RU 2010138218A RU 2010138218 A RU2010138218 A RU 2010138218A
- Authority
- RU
- Russia
- Prior art keywords
- ion
- electrically connected
- optical system
- laser
- injection system
- Prior art date
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Abstract
Лазерный источник ионов с активной системой инжекции, состоящий из лазера, мишени, пролетного канала, системы инжекции с ионно-оптической системой, в которой ускоряющий электрод, установленный на выходе ионно-оптической системы, электрически соединен с источником постоянного электрического напряжения, отличающийся тем, что ускоряющий электрод, расположенный между пролетным каналом и ускоряющим электродом, установленным на выходе ионно-оптической системы, электрически соединен с источником электрического напряжения специальной формы, который электрически соединен с зондовым датчиком тока, установленным на выходе пролетного канала перед ускоряющими электродами ионно-оптической системы, и электрически соединен с лазером. A laser ion source with an active injection system, consisting of a laser, a target, a passage channel, an injection system with an ion-optical system, in which an accelerating electrode mounted at the output of the ion-optical system is electrically connected to a constant voltage source, characterized in that an accelerating electrode located between the passage channel and the accelerating electrode installed at the output of the ion-optical system is electrically connected to a special form of voltage source Which is electrically connected to the probe current sensor mounted at the outlet of the transit channel before acceleration electrodes of ion-optical system, and is electrically connected with the laser.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2010138218/07A RU2494491C2 (en) | 2010-09-15 | 2010-09-15 | Laser source of ions with active injection system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2010138218/07A RU2494491C2 (en) | 2010-09-15 | 2010-09-15 | Laser source of ions with active injection system |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2010138218A true RU2010138218A (en) | 2012-03-20 |
RU2494491C2 RU2494491C2 (en) | 2013-09-27 |
Family
ID=46029873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2010138218/07A RU2494491C2 (en) | 2010-09-15 | 2010-09-15 | Laser source of ions with active injection system |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2494491C2 (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4598234A (en) * | 1984-05-29 | 1986-07-01 | Tektronix, Inc. | Digital image correction circuit for cathode ray tube displays |
RU2340057C2 (en) * | 2001-08-29 | 2008-11-27 | Саймер, Инк. | Laser lithographic light source with beam transmission |
US8142607B2 (en) * | 2008-08-28 | 2012-03-27 | Varian Semiconductor Equipment Associates, Inc. | High density helicon plasma source for wide ribbon ion beam generation |
JP2010287415A (en) * | 2009-06-11 | 2010-12-24 | Nissin Ion Equipment Co Ltd | Filament and ion source equipped therewith |
-
2010
- 2010-09-15 RU RU2010138218/07A patent/RU2494491C2/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
RU2494491C2 (en) | 2013-09-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FA92 | Acknowledgement of application withdrawn (lack of supplementary materials submitted) |
Effective date: 20120626 |
|
FZ9A | Application not withdrawn (correction of the notice of withdrawal) |
Effective date: 20130319 |