RU2009124512A - METHOD FOR CONTROLLING A DEPOSITION SPEED AND ANALYSIS OF THE COMPOSITION OF DEPOSITED ALLOYS IN VACUUM BY EMISSION SPECTROSCOPY AT EXCITATION BY ELECTRONIC SHOCK IN TEST (HIGH FREQUENCY CAPACITIVE DISCHARGE) - Google Patents
METHOD FOR CONTROLLING A DEPOSITION SPEED AND ANALYSIS OF THE COMPOSITION OF DEPOSITED ALLOYS IN VACUUM BY EMISSION SPECTROSCOPY AT EXCITATION BY ELECTRONIC SHOCK IN TEST (HIGH FREQUENCY CAPACITIVE DISCHARGE) Download PDFInfo
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- RU2009124512A RU2009124512A RU2009124512/02A RU2009124512A RU2009124512A RU 2009124512 A RU2009124512 A RU 2009124512A RU 2009124512/02 A RU2009124512/02 A RU 2009124512/02A RU 2009124512 A RU2009124512 A RU 2009124512A RU 2009124512 A RU2009124512 A RU 2009124512A
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- excitation
- composition
- controlling
- emission spectroscopy
- capacitive discharge
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1. Способ контроля скорости осаждения и анализа состава осажденных сплавов методом эмиссионной спектроскопии при возбуждении электронным ударом атомов сплава в паровой фазе, отличающийся тем, что возбуждение атомов парового потока выполняют электронным ударом в высокочастотном емкостном разряде. ! 2. Способ контроля по п.1, отличающийся тем, что систему возбуждения выполняют в виде двух плоскопараллельных металлических пластин, расположенных против друг друга, параллельно пути следования паров испаряемого сплава, и подключаемых к выводам высокочастотного генератора. ! 3. Способ контроля по п.1, отличающийся тем, что внутренняя сторона каждого высокочастотного электрода экранирована диэлектрической обкладкой. 1. A method of controlling the deposition rate and analyzing the composition of the deposited alloys by emission spectroscopy when electronically excited alloy atoms in the vapor phase, characterized in that the excitation of the vapor stream atoms is performed by electron impact in a high-frequency capacitive discharge. ! 2. The control method according to claim 1, characterized in that the excitation system is made in the form of two plane-parallel metal plates located opposite each other, parallel to the path of the vapor of the evaporated alloy, and connected to the terminals of the high-frequency generator. ! 3. The control method according to claim 1, characterized in that the inner side of each high-frequency electrode is shielded by a dielectric plate.
Claims (3)
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RU2009124512/02A RU2427667C2 (en) | 2009-06-26 | 2009-06-26 | Procedure for determination of rate of thermal vacuum sedimentation of alloys by method of emission spectroscopy |
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RU2009124512/02A RU2427667C2 (en) | 2009-06-26 | 2009-06-26 | Procedure for determination of rate of thermal vacuum sedimentation of alloys by method of emission spectroscopy |
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RU2009124512A true RU2009124512A (en) | 2011-01-10 |
RU2427667C2 RU2427667C2 (en) | 2011-08-27 |
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RU2009124512/02A RU2427667C2 (en) | 2009-06-26 | 2009-06-26 | Procedure for determination of rate of thermal vacuum sedimentation of alloys by method of emission spectroscopy |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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RU2658776C2 (en) * | 2016-11-08 | 2018-06-22 | Акционерное общество "Уральский научно-исследовательский институт композиционных материалов" (АО "УНИИКМ") | Method for determining speed of condensate formation from metal vapors on hot surface of dense material and device for its implementation |
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RU2427667C2 (en) | 2011-08-27 |
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Effective date: 20150627 |