RU2007144635A - ACOUSTONE SAW SENSOR - Google Patents

ACOUSTONE SAW SENSOR Download PDF

Info

Publication number
RU2007144635A
RU2007144635A RU2007144635/09A RU2007144635A RU2007144635A RU 2007144635 A RU2007144635 A RU 2007144635A RU 2007144635/09 A RU2007144635/09 A RU 2007144635/09A RU 2007144635 A RU2007144635 A RU 2007144635A RU 2007144635 A RU2007144635 A RU 2007144635A
Authority
RU
Russia
Prior art keywords
saw sensor
wavelength
piezoelectric plates
acoustone
vacuum gap
Prior art date
Application number
RU2007144635/09A
Other languages
Russian (ru)
Other versions
RU2371841C2 (en
Inventor
Михаил Юрьевич Двоешерстов (RU)
Михаил Юрьевич Двоешерстов
Original Assignee
Оао "Нпо "Эркон" (Ru)
Оао "Нпо "Эркон"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Оао "Нпо "Эркон" (Ru), Оао "Нпо "Эркон" filed Critical Оао "Нпо "Эркон" (Ru)
Priority to RU2007144635/09A priority Critical patent/RU2371841C2/en
Publication of RU2007144635A publication Critical patent/RU2007144635A/en
Application granted granted Critical
Publication of RU2371841C2 publication Critical patent/RU2371841C2/en

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

Акустоэлектронный ПАВ-сенсор, содержащий разделенные вакуумным зазором две монокристаллические пьезопластины, на поверхности которых расположены два идентичных входной передающий и выходной приемный встречно-штыревые преобразователи (ВШП), отличающийся тем, что толщины пьезопластин H1, Н2 ≤ длины волны λ, а ширина вакуумного зазора (Н) меньше, или сравнима с длиной волны λ.Acoustoelectronic SAW sensor containing two single-crystal piezoelectric plates separated by a vacuum gap, on the surface of which there are two identical input transmitting and output receiving interdigital transducers (IDT), characterized in that the thickness of the piezoelectric plates is H1, H2 ≤ wavelength λ, and the width of the vacuum gap (H) is shorter or comparable to wavelength λ.

Claims (1)

Акустоэлектронный ПАВ-сенсор, содержащий разделенные вакуумным зазором две монокристаллические пьезопластины, на поверхности которых расположены два идентичных входной передающий и выходной приемный встречно-штыревые преобразователи (ВШП), отличающийся тем, что толщины пьезопластин H1, Н2 ≤ длины волны λ, а ширина вакуумного зазора (Н) меньше, или сравнима с длиной волны λ.Acoustoelectronic SAW sensor containing two single-crystal piezoelectric plates separated by a vacuum gap, on the surface of which there are two identical input transmitting and output receiving interdigital transducers (IDT), characterized in that the thickness of the piezoelectric plates is H 1 , H 2 ≤ wavelength λ, and the width the vacuum gap (H) is less, or comparable with the wavelength λ.
RU2007144635/09A 2007-11-30 2007-11-30 Acoustoelectric surface acoustic wave sensor RU2371841C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2007144635/09A RU2371841C2 (en) 2007-11-30 2007-11-30 Acoustoelectric surface acoustic wave sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2007144635/09A RU2371841C2 (en) 2007-11-30 2007-11-30 Acoustoelectric surface acoustic wave sensor

Publications (2)

Publication Number Publication Date
RU2007144635A true RU2007144635A (en) 2009-06-10
RU2371841C2 RU2371841C2 (en) 2009-10-27

Family

ID=41024206

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2007144635/09A RU2371841C2 (en) 2007-11-30 2007-11-30 Acoustoelectric surface acoustic wave sensor

Country Status (1)

Country Link
RU (1) RU2371841C2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103336051B (en) * 2013-07-10 2015-06-10 中国电子科技集团公司第二十六研究所 Surface acoustic wave sensitive device for gas sensor
RU2548404C1 (en) * 2013-10-25 2015-04-20 Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Санкт-Петербургский государственный университет аэрокосмического приборостроения" Method to measure difference of pressures by sensor with frequency modulated output signal and sensor for realisation of method
RU2548582C1 (en) * 2013-10-25 2015-04-20 Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Санкт-Петербургский государственный университет аэрокосмического приборостроения" Measuring method of pressure difference with sensor with frequency-modulated output signal and sensor for method's implementation

Also Published As

Publication number Publication date
RU2371841C2 (en) 2009-10-27

Similar Documents

Publication Publication Date Title
EP1717953A3 (en) Surface accoustic wave filter and duplexer using the same
EP2043260A3 (en) Elastic wave filter
TW200703897A (en) Surface acoustic wave apparatus
FI20106063A (en) Acoustically coupled wide-band thin film BAW filter
EP2679993A3 (en) SAW array sensor
EP1411635A3 (en) Multi-mode surface acoustic wave filter device and duplexer
ATE543254T1 (en) DUPLEXER
KR101913933B1 (en) Acoustic wave device
EP2447713A3 (en) Single-input multi-output surface acoustic wave device
WO2009060594A1 (en) Elastic wave resonator, elastic wave filter, and antenna sharing device using the same
WO2020021029A3 (en) Resonant cavity surface acoustic wave (saw) filters
WO2010027615A3 (en) Asymmetric composite acoustic wave sensor
RU2007144635A (en) ACOUSTONE SAW SENSOR
EP1670138A4 (en) Surface acoustic wave filter and communication unit
SE1750678A1 (en) A surface acoustic wave resonant sensor
GB2596956A8 (en) High-order mode surface acoustic wave device
EP2068442A4 (en) Boundary acoustic wave device
EP2262109A3 (en) Surface acoustic wave device
RU2008100808A (en) HYDROPHONE ON SURFACE ACOUSTIC WAVES
RU2012145915A (en) MULTI-CHANNEL REFLECT LINE OF DELAY ON SURFACE ACOUSTIC WAVES
WO2008114715A1 (en) Lamb elastic wave element
RU2006140507A (en) MOVEMENT SENSOR ON SURFACE ACOUSTIC WAVES WITH TEMPERATURE COMPENSATION
GB2596444A (en) Acoustofluidic device
RU2006145130A (en) SURFACE ACOUSTIC WAVE FILTER
ATE531461T1 (en) UNDERWATER ANTENNA HAVING A TRANSDUCER ARRANGEMENT CONSISTING OF A PLURALITY OF ELECTROACOUSTIC TRANSDUCERS

Legal Events

Date Code Title Description
QB4A Licence on use of patent

Free format text: PLEDGE

Effective date: 20170919

PD4A Correction of name of patent owner
MM4A The patent is invalid due to non-payment of fees

Effective date: 20201201