RU2002127839A - DEVICE FOR MICROWAVE VACUUM-PLASMA WITH ELECTRON-CYCLOTRON SURFACE PROCESSING RESONANCE - Google Patents
DEVICE FOR MICROWAVE VACUUM-PLASMA WITH ELECTRON-CYCLOTRON SURFACE PROCESSING RESONANCEInfo
- Publication number
- RU2002127839A RU2002127839A RU2002127839/15A RU2002127839A RU2002127839A RU 2002127839 A RU2002127839 A RU 2002127839A RU 2002127839/15 A RU2002127839/15 A RU 2002127839/15A RU 2002127839 A RU2002127839 A RU 2002127839A RU 2002127839 A RU2002127839 A RU 2002127839A
- Authority
- RU
- Russia
- Prior art keywords
- plasma
- microwave
- magnetic
- electron
- resonator
- Prior art date
Links
- 210000002381 Plasma Anatomy 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005755 formation reaction Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Claims (2)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2002127839/15A RU2223570C1 (en) | 2002-10-18 | 2002-10-18 | Device for microwave vacuum-plasma surface treatment with electron cyclotron resonance |
PCT/RU2003/000425 WO2004039132A2 (en) | 2002-10-18 | 2003-10-01 | Method for surface processing by means of a microwave vacuum-plasma associated with electron-cyclotron resonance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2002127839/15A RU2223570C1 (en) | 2002-10-18 | 2002-10-18 | Device for microwave vacuum-plasma surface treatment with electron cyclotron resonance |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2223570C1 RU2223570C1 (en) | 2004-02-10 |
RU2002127839A true RU2002127839A (en) | 2004-04-20 |
Family
ID=32173370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2002127839/15A RU2223570C1 (en) | 2002-10-18 | 2002-10-18 | Device for microwave vacuum-plasma surface treatment with electron cyclotron resonance |
Country Status (2)
Country | Link |
---|---|
RU (1) | RU2223570C1 (en) |
WO (1) | WO2004039132A2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9136794B2 (en) | 2011-06-22 | 2015-09-15 | Research Triangle Institute, International | Bipolar microelectronic device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0216731A (en) * | 1988-07-05 | 1990-01-19 | Mitsubishi Electric Corp | Plasma reactor |
RU2106716C1 (en) * | 1992-04-27 | 1998-03-10 | Равиль Кяшшафович Яфаров | Plant for microwave vacuum-plasma treatment of condensed media |
JPH06224154A (en) * | 1993-01-25 | 1994-08-12 | Mitsubishi Electric Corp | Plasma processing apparatus |
RU2120681C1 (en) * | 1996-04-16 | 1998-10-20 | Равиль Кяшшафович Яфаров | Electron-cyclone resonance tuned device for microwave vacuum-plasma treatment of condensed media |
-
2002
- 2002-10-18 RU RU2002127839/15A patent/RU2223570C1/en not_active IP Right Cessation
-
2003
- 2003-10-01 WO PCT/RU2003/000425 patent/WO2004039132A2/en not_active Application Discontinuation
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