RU2002125411A - DEVICE FOR ANALYSIS OF PHYSICAL AND / OR CHEMICAL PROPERTIES OF A SURFACE LAYER OF A SOLID - Google Patents

DEVICE FOR ANALYSIS OF PHYSICAL AND / OR CHEMICAL PROPERTIES OF A SURFACE LAYER OF A SOLID

Info

Publication number
RU2002125411A
RU2002125411A RU2002125411/28A RU2002125411A RU2002125411A RU 2002125411 A RU2002125411 A RU 2002125411A RU 2002125411/28 A RU2002125411/28 A RU 2002125411/28A RU 2002125411 A RU2002125411 A RU 2002125411A RU 2002125411 A RU2002125411 A RU 2002125411A
Authority
RU
Russia
Prior art keywords
vacuum chamber
sample
surface layer
analyzing
vacuum
Prior art date
Application number
RU2002125411/28A
Other languages
Russian (ru)
Other versions
RU2212650C1 (en
Inventor
Алексей Александрович Калачев
Николай Михайлович Блашенков
Юрий Петрович Иванов
Владимир Антонович Ковальский
сников Александр Львович М
Александр Львович Мясников
сникова Любовь Петровна М
Любовь Петровна Мясникова
Original Assignee
Алексей Александрович Калачев
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Алексей Александрович Калачев filed Critical Алексей Александрович Калачев
Priority to RU2002125411/28A priority Critical patent/RU2212650C1/en
Priority to PCT/RU2003/000312 priority patent/WO2004025276A1/en
Priority to AU2003252631A priority patent/AU2003252631A1/en
Application granted granted Critical
Publication of RU2212650C1 publication Critical patent/RU2212650C1/en
Publication of RU2002125411A publication Critical patent/RU2002125411A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching

Claims (4)

1. Устройство для анализа физических и/или химических свойств поверхностного слоя твердого тела, включающее снабженную оптическим окном вакуумную камеру для размещения исследуемого образца твердого тела, внутри которой расположен держатель образца, выполненный в виде емкости, снабженной отверстием для подачи хладагента, внутри держателя образца размещен нагреватель, а на его наружной поверхности закреплен исследуемый образец и установлена термопара, генератор с электродом, датчик низкого вакуума, сообщающийся с вакуумной камерой, магистраль для создания вакуума в вакуумной камере, магистраль для подачи газов в вакуумную камеру, средство регистрации получаемой информации, при этом электроды генератора расположены в вакуумной камере, отличающееся тем, что дополнительно содержит блок формирования атомарного и/или молекулярного, и/или ионного, и/или электронного, и/или фотонного пучков, выходная магистраль которого выведена в вакуумную камеру, инициатор электрического разряда с электродом, выведенным в вакуумную камеру, и таймером, оптическое окно снабжено экраном для отсечения излучения из вакуумной камеры, а также датчик высокого вакуума, сообщающийся с вакуумной камерой, и дополнительную емкость для хладагента, которая установлена в вакуумной камере.1. A device for analyzing the physical and / or chemical properties of the surface layer of a solid body, including a vacuum chamber equipped with an optical window for accommodating a test sample of a solid body, inside of which there is a sample holder made in the form of a container equipped with a hole for supplying refrigerant, inside the sample holder is placed the heater, and on its outer surface the test sample is fixed and a thermocouple, a generator with an electrode, a low vacuum sensor in communication with the vacuum chamber are installed, a line for creating a vacuum in a vacuum chamber, a line for supplying gases to a vacuum chamber, means for recording received information, wherein the generator electrodes are located in a vacuum chamber, characterized in that it further comprises an atomic and / or molecular, and / or ion forming unit, and / or electron and / or photon beams, the output line of which is led out into the vacuum chamber, the initiator of the electric discharge with the electrode brought out into the vacuum chamber, and a timer, the optical window is provided with a screen for emission cut off from the vacuum chamber and the high vacuum sensor communicating with the vacuum chamber, and additional refrigerant container which is mounted in a vacuum chamber. 2. Устройство по п.1, отличающееся тем, что между средством регистрации получаемой информации и исследуемым образцом расположено средство анализа по длинам волн квантов света, излучаемых поверхностным слоем образца.2. The device according to claim 1, characterized in that between the means for recording the received information and the sample under study is a means for analyzing the wavelengths of light quanta emitted by the surface layer of the sample. 3. Устройство по п.2, отличающееся тем, что средство анализа по длинам волн квантов света, излучаемых поверхностным слоем образца, выполнено в виде монохроматора.3. The device according to claim 2, characterized in that the means of analyzing the wavelengths of light quanta emitted by the surface layer of the sample is made in the form of a monochromator. 4. Устройство по п.2, отличающееся тем, что средство анализа по длинам волн квантов света, излучаемых поверхностным слоем образца, выполнено в виде светофильтра.4. The device according to claim 2, characterized in that the means for analyzing the wavelengths of light quanta emitted by the surface layer of the sample is made in the form of a light filter.
RU2002125411/28A 2002-09-16 2002-09-16 Facility to analyze physical and/or chemical properties of surface layer of solid body RU2212650C1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
RU2002125411/28A RU2212650C1 (en) 2002-09-16 2002-09-16 Facility to analyze physical and/or chemical properties of surface layer of solid body
PCT/RU2003/000312 WO2004025276A1 (en) 2002-09-16 2003-07-15 Device for analysing physical and/or chemical properties of the surface layer of a solid body (variants)
AU2003252631A AU2003252631A1 (en) 2002-09-16 2003-07-15 Device for analysing physical and/or chemical properties of the surface layer of a solid body (variants)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2002125411/28A RU2212650C1 (en) 2002-09-16 2002-09-16 Facility to analyze physical and/or chemical properties of surface layer of solid body

Publications (2)

Publication Number Publication Date
RU2212650C1 RU2212650C1 (en) 2003-09-20
RU2002125411A true RU2002125411A (en) 2004-03-27

Family

ID=29777893

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2002125411/28A RU2212650C1 (en) 2002-09-16 2002-09-16 Facility to analyze physical and/or chemical properties of surface layer of solid body

Country Status (3)

Country Link
AU (1) AU2003252631A1 (en)
RU (1) RU2212650C1 (en)
WO (1) WO2004025276A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2595829C2 (en) * 2011-08-27 2016-08-27 Инфикон Гмбх Device and method for determination of purity of checked coolant

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2509301C1 (en) * 2012-06-29 2014-03-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Рязанский государственный радиотехнический университет" Method for determining crystalline phase in amorphous films of nanodimensional thickness
RU2509299C1 (en) * 2012-06-29 2014-03-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Рязанский государственный радиотехнический университет" Method of determining charge state of atoms in subnanolayer films on surface of metals and semiconductors
RU2522667C2 (en) * 2012-07-30 2014-07-20 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Method of determining elemental composition and thickness of surface film of solid body with external action on surface
RU2533338C2 (en) * 2013-01-25 2014-11-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Омский государственный университет им. Ф.М. Достоевского" Method for heating and temperature determination of specimens
CN104596892A (en) * 2015-02-11 2015-05-06 中国工程物理研究院材料研究所 Gas-solid surface reaction device and measuring method adopting same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2086037C1 (en) * 1991-06-17 1997-07-27 Научно-исследовательский технологический институт Electrostatic charged-particle energy analyzer
US5705821A (en) * 1996-11-07 1998-01-06 Sandia Corporation Scanning fluorescent microthermal imaging apparatus and method
JPH11295247A (en) * 1998-04-14 1999-10-29 Toshiba Corp Method for analyzing sample surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2595829C2 (en) * 2011-08-27 2016-08-27 Инфикон Гмбх Device and method for determination of purity of checked coolant

Also Published As

Publication number Publication date
WO2004025276A1 (en) 2004-03-25
RU2212650C1 (en) 2003-09-20
AU2003252631A1 (en) 2004-04-30

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Legal Events

Date Code Title Description
RH4A Copy of patent granted that was duplicated for the russian federation

Effective date: 20060520

MM4A The patent is invalid due to non-payment of fees

Effective date: 20180917