RU2002116176A - Pressure transducer - Google Patents

Pressure transducer

Info

Publication number
RU2002116176A
RU2002116176A RU2002116176/28A RU2002116176A RU2002116176A RU 2002116176 A RU2002116176 A RU 2002116176A RU 2002116176/28 A RU2002116176/28 A RU 2002116176/28A RU 2002116176 A RU2002116176 A RU 2002116176A RU 2002116176 A RU2002116176 A RU 2002116176A
Authority
RU
Russia
Prior art keywords
pressure transducer
thickness
strain gauges
edges
longitudinal
Prior art date
Application number
RU2002116176/28A
Other languages
Russian (ru)
Other versions
RU2237873C2 (en
Inventor
Виктор Алексеевич Гридчин
Владимир Викторович Грищенко
Владимир Михайлович Любимский
Алексей Владимирович Шапорин
Original Assignee
Новосибирский государственный технический университет
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Новосибирский государственный технический университет filed Critical Новосибирский государственный технический университет
Priority to RU2002116176A priority Critical patent/RU2237873C2/en
Publication of RU2002116176A publication Critical patent/RU2002116176A/en
Application granted granted Critical
Publication of RU2237873C2 publication Critical patent/RU2237873C2/en

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Claims (1)

Тензопреобразователь давления, содержащий выполненную из монокристаллического кремния плоскую мембрану, на которой расположены продольные и поперечные тензорезисторы, отличающийся тем, что мембрана имеет разную толщину, причем толщина у краев больше толщины ее средней части, а указанные тензорезисторы расположены на части с большей толщиной.A pressure transducer comprising a flat membrane made of monocrystalline silicon, on which longitudinal and transverse strain gauges are located, characterized in that the membrane has a different thickness, the thickness at the edges being greater than the thickness of its middle part, and said strain gauges are located on the part with a larger thickness.
RU2002116176A 2002-06-19 2002-06-19 Pressure strain gage transducer RU2237873C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2002116176A RU2237873C2 (en) 2002-06-19 2002-06-19 Pressure strain gage transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2002116176A RU2237873C2 (en) 2002-06-19 2002-06-19 Pressure strain gage transducer

Publications (2)

Publication Number Publication Date
RU2002116176A true RU2002116176A (en) 2004-03-10
RU2237873C2 RU2237873C2 (en) 2004-10-10

Family

ID=33537029

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2002116176A RU2237873C2 (en) 2002-06-19 2002-06-19 Pressure strain gage transducer

Country Status (1)

Country Link
RU (1) RU2237873C2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2631016C1 (en) * 2016-07-19 2017-09-15 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Образования "Новосибирский Государственный Технический Университет" Pressure strain-gauge sensor

Also Published As

Publication number Publication date
RU2237873C2 (en) 2004-10-10

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Legal Events

Date Code Title Description
MM4A The patent is invalid due to non-payment of fees

Effective date: 20070620