RU2002115672A - Тензопреобразователь давления - Google Patents
Тензопреобразователь давленияInfo
- Publication number
- RU2002115672A RU2002115672A RU2002115672/28A RU2002115672A RU2002115672A RU 2002115672 A RU2002115672 A RU 2002115672A RU 2002115672/28 A RU2002115672/28 A RU 2002115672/28A RU 2002115672 A RU2002115672 A RU 2002115672A RU 2002115672 A RU2002115672 A RU 2002115672A
- Authority
- RU
- Russia
- Prior art keywords
- pressure transducer
- dielectric
- strain gauges
- rectangular
- created
- Prior art date
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Claims (1)
- Тензопреобразователь давления, содержащий выполненную из монокристаллического кремния прямоугольную мембрану с диэлектриком и тензорезисторами на наружной поверхности и опорным основанием, отличающийся тем, что на поверхности диэлектрика сформированы прямоугольные островки из нелегированного полупроводникового материала, в которых созданы тензорезисторы.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2002115672/28A RU2243517C2 (ru) | 2002-06-11 | 2002-06-11 | Тензопреобразователь давления |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2002115672/28A RU2243517C2 (ru) | 2002-06-11 | 2002-06-11 | Тензопреобразователь давления |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2002115672A true RU2002115672A (ru) | 2004-03-10 |
RU2243517C2 RU2243517C2 (ru) | 2004-12-27 |
Family
ID=34387079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2002115672/28A RU2243517C2 (ru) | 2002-06-11 | 2002-06-11 | Тензопреобразователь давления |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2243517C2 (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102636298A (zh) * | 2012-03-16 | 2012-08-15 | 西安交通大学 | 一种梁膜四岛结构微压高过载传感器芯片 |
-
2002
- 2002-06-11 RU RU2002115672/28A patent/RU2243517C2/ru not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102636298A (zh) * | 2012-03-16 | 2012-08-15 | 西安交通大学 | 一种梁膜四岛结构微压高过载传感器芯片 |
Also Published As
Publication number | Publication date |
---|---|
RU2243517C2 (ru) | 2004-12-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20070612 |