RU2001132932A - METHOD FOR PRODUCING AN ELASTIC ELEMENT OF A MICROMECHANICAL DEVICE - Google Patents

METHOD FOR PRODUCING AN ELASTIC ELEMENT OF A MICROMECHANICAL DEVICE

Info

Publication number
RU2001132932A
RU2001132932A RU2001132932/28A RU2001132932A RU2001132932A RU 2001132932 A RU2001132932 A RU 2001132932A RU 2001132932/28 A RU2001132932/28 A RU 2001132932/28A RU 2001132932 A RU2001132932 A RU 2001132932A RU 2001132932 A RU2001132932 A RU 2001132932A
Authority
RU
Russia
Prior art keywords
elastic element
producing
micromechanical device
etching
micromechanical
Prior art date
Application number
RU2001132932/28A
Other languages
Russian (ru)
Other versions
RU2209487C2 (en
Inventor
Сергей Федорович Былинкин
Владимир Дмитриевич Вавилов
Сергей Геннадьевич Миронов
Original Assignee
Открытое акционерное общество Арзамасское научно-производственное предприятие "Темп-Авиа"
Filing date
Publication date
Application filed by Открытое акционерное общество Арзамасское научно-производственное предприятие "Темп-Авиа" filed Critical Открытое акционерное общество Арзамасское научно-производственное предприятие "Темп-Авиа"
Priority to RU2001132932/28A priority Critical patent/RU2209487C2/en
Priority claimed from RU2001132932/28A external-priority patent/RU2209487C2/en
Publication of RU2001132932A publication Critical patent/RU2001132932A/en
Application granted granted Critical
Publication of RU2209487C2 publication Critical patent/RU2209487C2/en

Links

Claims (1)

Способ изготовления упругого элемента микромеханического устройства, заключающийся в размерном анизотропном травлении исходного монокристалла кремния для образования геометрической формы элемента, отличающийся тем, что после травления заготовку элемента легируют германием.A method of manufacturing an elastic element of a micromechanical device, which consists in dimensional anisotropic etching of the initial silicon single crystal to form the geometric shape of the element, characterized in that after etching the element blank is alloyed with germanium.
RU2001132932/28A 2001-12-03 2001-12-03 Method for producing flexible member of micromechanical device RU2209487C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2001132932/28A RU2209487C2 (en) 2001-12-03 2001-12-03 Method for producing flexible member of micromechanical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2001132932/28A RU2209487C2 (en) 2001-12-03 2001-12-03 Method for producing flexible member of micromechanical device

Publications (2)

Publication Number Publication Date
RU2001132932A true RU2001132932A (en) 2002-08-27
RU2209487C2 RU2209487C2 (en) 2003-07-27

Family

ID=29211051

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2001132932/28A RU2209487C2 (en) 2001-12-03 2001-12-03 Method for producing flexible member of micromechanical device

Country Status (1)

Country Link
RU (1) RU2209487C2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2580910C1 (en) * 2014-12-15 2016-04-10 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт химии и механики" (ФГУП "ЦНИИХМ") Method of making elastic element of micromechanical device

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