RU1815790C - Piezoelectric oscillator - Google Patents

Abstract

Usage: pulse technique, devices for synchronizing piezoelectric scanning systems. SUMMARY OF THE INVENTION: A piezoelectric generator comprises a bimorph piezoelectric ceramic element 1, consisting of an input piezoceramic plate 2 and an output piezoceramic plate 3, the second solid. metal electrode 4, input solid electrode 5, output metal electrodes 6, amplifier 7, control bus 8 and allows to increase reliability by reducing interelectrode voltages by choosing different values of residual polarization in the sub-electrode regions. 1 ill.

Description

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The invention relates to pulsed technology and can be used to build reference generators, functional synchronization modules of piezoelectric scanning systems.

The purpose of the invention is to increase reliability and expand functionality.

In FIG. 1 shows a diagram of a multiphase piezoelectronic generator; figure 2 - timing diagrams of the operation of the device.

The multiphase generator contains a bimorph piezoceramic element 1 consisting of an input and an output 3 plates, a common electrode 4 connected to a bus of zero potential, an input continuous electrode 5 and output electrodes 6, an amplifier 7, one input of which is connected to the electrodes 6, the output plate 3, the other input has a bus 8 for controlling the inclusion of the generator, and the output is connected to the electrode 5, the output buses 9 are connected to the same electrodes 6 of the output plate.

The supply voltage of the generator circuit determines the amplitude of the excitation voltage and is selected from the condition. UB. "AUn (f), where AUn (0 is the amplitude of the voltage of the quantization step of the partial switching of the sub-electrode region.

The operation of the device is as follows. The directions and values of the residual polarizations of the sub-electrode regions of electrodes 5 and b have opposite and limiting values for the purpose of obtaining maximum output signals, for example P0 Pr for electrode 5 and Pe-Pr for electrode 6; (see Fig. 1), this corresponds to the conventionally accepted direction of the arrow relative to the bus of zero potential, and does not change during operation of the device. The values of the residual polarizations of the subelectrode regions 6 also do not change and due to partially switched states of polarization of the subelectrode regions, they have different fixed values from the range Pj (l) - Pr - + Pr (or Pj (l) + Pr - Pr). moreover, J-1, k is the number of partially switched states. Each 1st partially switched state is associated with a residual polarization vector Pj (l) of the sub-electrode region of one of the j-th electrodes of the output plate, which uniquely determines the amplitude Uj (t) and the phase p (I) of the output electrode signal.

The operation of the device starts from the moment the control level arrives at

alternator enable bus 8. In this case, oscillations are excited in the piezoelectric structure with a frequency equal to or close to the resonant frequency of the piezoelectric ceramic element fb fp, (see Fig. 2a). Due to the forward and reverse piezoelectric effects, as well as the property of the piezostructure to change the parameters of the signals of the electrodes of the output plate, depending on the directions of the vectors and

the degree of residual polarization of the piezoelectrode regions of plates 2 and 3, at the output electrodes, after a period of time to (the delay time to depends on the dynamic properties of the piezoelectric structure), piezoelectric signals Uj (t) kj (l) Ub (t) are established, where kj (i ) is the transmission coefficient of the amplitude-amplitude channel of the jth electrode with Pj (J) the state of the sub-electrode region, Ub (t) is the piezostructure excitation voltage, (see Fig. 2b, f). The change in the phase shift Uj (t) relative to the excitation signals generated by the dependent source Ade (I) deO) -y, where ~ O) is the phase of the output signal Uj (t) of the jth electrode with the PJ (|) state, and Pj (l) - Pr - + Pr with a fixed limiting value of Po + Pr - the phase of the excitation signal, occurs within the range of Ддо (/ 2 - + / 2, (see Fig. 2b).

The proposed device has an independent value as an element of pulsed technology, and it can also be used as a functional synchronization module in various piezoelectric semiconductor stabilization systems,

scanning microscope control systems. This allows you to increase the accuracy and stability of work, and also makes

device of increased serial capacity. In this case, the device has a hybrid integrated design, low levels (associated with the levels of integrated circuits) are used.

Claims (1)

The claims A piezoelectric generator containing a controlled amplifier, a bimorph piezoelectric element consisting of an output piezoceramic plate and an input piezoceramic plate, on the faces of which the first and second solid metal electrodes are located, while the second solid metal electrode is located between the input and output piezoceramic plates and connected to a common bus, K output metal electrodes are located on the other side of the output piezoceramic plate, one of which connected to the input of a controlled amplifier, characterized in that, in order to increase reliability by reducing interelectrode voltages, the output piezoceramic plate is made in the form of a 5 electrode. ./ / s / G -t. t / t V m told & ifi + (0 plates with different values of residual polarization in the sub-electrode regions, the output of the controlled amplifier is connected to the first solid metal / Ј --t 7 7 t pueZ