RO91138B1 - Procedeu de depunere a sursei locale pentru doparea cu fosfor a plachetelor de siliciu - Google Patents

Procedeu de depunere a sursei locale pentru doparea cu fosfor a plachetelor de siliciu

Info

Publication number
RO91138B1
RO91138B1 RO118155A RO11815585A RO91138B1 RO 91138 B1 RO91138 B1 RO 91138B1 RO 118155 A RO118155 A RO 118155A RO 11815585 A RO11815585 A RO 11815585A RO 91138 B1 RO91138 B1 RO 91138B1
Authority
RO
Romania
Prior art keywords
doping
phosphorus
deposition
forming
silicon wafers
Prior art date
Application number
RO118155A
Other languages
English (en)
Other versions
RO91138A2 (ro
Inventor
Ion Burlacel
Constantin Postolache
Bernard Andrei Alamariu
Victor Paun
Original Assignee
Centrul De Cercetare Stiintifica Si Inginerie Tehnologica Pentru Semiconductoare
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centrul De Cercetare Stiintifica Si Inginerie Tehnologica Pentru Semiconductoare filed Critical Centrul De Cercetare Stiintifica Si Inginerie Tehnologica Pentru Semiconductoare
Priority to RO118155A priority Critical patent/RO91138B1/ro
Publication of RO91138A2 publication Critical patent/RO91138A2/ro
Publication of RO91138B1 publication Critical patent/RO91138B1/ro

Links

RO118155A 1985-03-28 1985-03-28 Procedeu de depunere a sursei locale pentru doparea cu fosfor a plachetelor de siliciu RO91138B1 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RO118155A RO91138B1 (ro) 1985-03-28 1985-03-28 Procedeu de depunere a sursei locale pentru doparea cu fosfor a plachetelor de siliciu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RO118155A RO91138B1 (ro) 1985-03-28 1985-03-28 Procedeu de depunere a sursei locale pentru doparea cu fosfor a plachetelor de siliciu

Publications (2)

Publication Number Publication Date
RO91138A2 RO91138A2 (ro) 1987-02-27
RO91138B1 true RO91138B1 (ro) 1987-03-02

Family

ID=20116853

Family Applications (1)

Application Number Title Priority Date Filing Date
RO118155A RO91138B1 (ro) 1985-03-28 1985-03-28 Procedeu de depunere a sursei locale pentru doparea cu fosfor a plachetelor de siliciu

Country Status (1)

Country Link
RO (1) RO91138B1 (ro)

Also Published As

Publication number Publication date
RO91138A2 (ro) 1987-02-27

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