RO73290A2 - Procedeu de depunere a filmelor din siliciu bioxid de siliciu si nitrura de siliciu pe siliciu - Google Patents

Procedeu de depunere a filmelor din siliciu bioxid de siliciu si nitrura de siliciu pe siliciu

Info

Publication number
RO73290A2
RO73290A2 RO7893635A RO9363578A RO73290A2 RO 73290 A2 RO73290 A2 RO 73290A2 RO 7893635 A RO7893635 A RO 7893635A RO 9363578 A RO9363578 A RO 9363578A RO 73290 A2 RO73290 A2 RO 73290A2
Authority
RO
Romania
Prior art keywords
silicon
nitrured
films
bioxide
depositing
Prior art date
Application number
RO7893635A
Other languages
English (en)
French (fr)
Inventor
Constantin E Morosanu
Eugen Segal
Original Assignee
Institutul De Cercetari Pentru Componente Electronice,Ro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institutul De Cercetari Pentru Componente Electronice,Ro filed Critical Institutul De Cercetari Pentru Componente Electronice,Ro
Priority to RO7893635A priority Critical patent/RO73290A2/ro
Publication of RO73290A2 publication Critical patent/RO73290A2/ro

Links

RO7893635A 1978-03-28 1978-03-28 Procedeu de depunere a filmelor din siliciu bioxid de siliciu si nitrura de siliciu pe siliciu RO73290A2 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RO7893635A RO73290A2 (ro) 1978-03-28 1978-03-28 Procedeu de depunere a filmelor din siliciu bioxid de siliciu si nitrura de siliciu pe siliciu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RO7893635A RO73290A2 (ro) 1978-03-28 1978-03-28 Procedeu de depunere a filmelor din siliciu bioxid de siliciu si nitrura de siliciu pe siliciu

Publications (1)

Publication Number Publication Date
RO73290A2 true RO73290A2 (ro) 1982-12-06

Family

ID=20100269

Family Applications (1)

Application Number Title Priority Date Filing Date
RO7893635A RO73290A2 (ro) 1978-03-28 1978-03-28 Procedeu de depunere a filmelor din siliciu bioxid de siliciu si nitrura de siliciu pe siliciu

Country Status (1)

Country Link
RO (1) RO73290A2 (ro)

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