RO70017A2 - Procedeu de racire a reactoarelor pentru depuneri epitaxiale in faza gazoasa - Google Patents

Procedeu de racire a reactoarelor pentru depuneri epitaxiale in faza gazoasa

Info

Publication number
RO70017A2
RO70017A2 RO7686939A RO8693976A RO70017A2 RO 70017 A2 RO70017 A2 RO 70017A2 RO 7686939 A RO7686939 A RO 7686939A RO 8693976 A RO8693976 A RO 8693976A RO 70017 A2 RO70017 A2 RO 70017A2
Authority
RO
Romania
Prior art keywords
reactors
heating process
gas stage
epitaxial deposits
epitaxial
Prior art date
Application number
RO7686939A
Other languages
English (en)
French (fr)
Inventor
Constantin E Morosanu
Original Assignee
Institutul De Cercetari Pentru Componente Electronice,Ro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institutul De Cercetari Pentru Componente Electronice,Ro filed Critical Institutul De Cercetari Pentru Componente Electronice,Ro
Priority to RO7686939A priority Critical patent/RO70017A2/ro
Publication of RO70017A2 publication Critical patent/RO70017A2/ro

Links

RO7686939A 1976-07-12 1976-07-12 Procedeu de racire a reactoarelor pentru depuneri epitaxiale in faza gazoasa RO70017A2 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RO7686939A RO70017A2 (ro) 1976-07-12 1976-07-12 Procedeu de racire a reactoarelor pentru depuneri epitaxiale in faza gazoasa

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RO7686939A RO70017A2 (ro) 1976-07-12 1976-07-12 Procedeu de racire a reactoarelor pentru depuneri epitaxiale in faza gazoasa

Publications (1)

Publication Number Publication Date
RO70017A2 true RO70017A2 (ro) 1981-03-30

Family

ID=20096490

Family Applications (1)

Application Number Title Priority Date Filing Date
RO7686939A RO70017A2 (ro) 1976-07-12 1976-07-12 Procedeu de racire a reactoarelor pentru depuneri epitaxiale in faza gazoasa

Country Status (1)

Country Link
RO (1) RO70017A2 (ro)

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